HOLLOW MICROBALLOON
    2.
    发明公开
    HOLLOW MICROBALLOON 审中-公开

    公开(公告)号:US20240101751A1

    公开(公告)日:2024-03-28

    申请号:US18274188

    申请日:2022-01-27

    摘要: The hollow microballoon of the invention includes a resin produced by polymerizing a polymerizing composition that contains a cyclic molecule having at least three side chains with a polymerizable functional group introduced into the terminal thereof and a polymerizable monomer other than the cyclic molecule having at least three side chains with a polymerizable functional group introduced into the terminal thereof. According to the invention, there are provided hollow microballoon capable of imparting not only polishing characteristics but also excellent durability to a CMP polishing pad using the hollow microballoon.