公开(公告)号：US20160274459A1

公开(公告)日：2016-09-22

申请号：US15066767

申请日：2016-03-10

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Eiichi SHIMURA ,  Shinji KUMADA ,  Aya MOMOZAWA

IPC分类号： G03F7/039 ,  G03F7/32 ,  G03F7/20

CPC分类号： G03F7/0392 ,  G03F7/0045 ,  G03F7/0397 ,  G03F7/09 ,  G03F7/168 ,  G03F7/40

摘要： A method of forming a photosensitive resin layer including laminating a photosensitive resin layer including a chemically amplified positive-type photosensitive resin composition which includes an acid generator which generates an acid upon light exposure and generates an acid by heating on a metal surface having catalytic activity, a resin whose solubility in alkali increases under the action of an acid, and an organic solvent, on an catalytic activity-containing metal surface of a substrate; and heating the photosensitive resin layer, so that the solubility in alkali of the photosensitive resin layer increases as the layer becomes closer to an interface with the substrate.

摘要翻译： 一种形成感光性树脂层的方法，包括层叠包含化学放大正型感光性树脂组合物的感光性树脂层，所述感光性树脂层包含在曝光后产生酸的酸发生剂，并且通过在具有催化活性的金属表面上加热而生成酸， 在碱的作用下在碱中的溶解度增加的树脂和有机溶剂在基材的含催化活性的金属表面上; 并且加热感光性树脂层，使得感光性树脂层的溶解度随着与基板的界面接近而增加。

公开(公告)号：US20190194512A1

公开(公告)日：2019-06-27

申请号：US16216261

申请日：2018-12-11

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Shinji KUMADA ,  Kenji SEKI ,  Takumi NAMIKI

IPC分类号： C09K3/18 ,  H01L21/306

CPC分类号： C09K3/18 ,  C07D233/58 ,  H01L21/306

摘要： A surface treatment liquid capable of hydrophobizing a surface of a treatment target without including a silylation agent, a surface treatment method using the liquid, and a method for suppressing pattern collapse, including surface treatment by the surface treatment method. The liquid contains a nitrogen-containing heterocyclic compound as a water-repelling agent. A compound including one or more hydrocarbon groups which may be substituted with a halogen atom in which a total number of carbon atoms of the one or more hydrocarbon group is three or more, is used as the nitrogen-containing heterocyclic compound. The liquid may include only a nitrogen-containing heterocyclic compound having the above-described predetermined structure, as a water-repelling agent.

公开(公告)号：US20240279569A1

公开(公告)日：2024-08-22

申请号：US18433986

申请日：2024-02-06

申请人： TOKYO OHKA KOGYO CO., LTD.

发明人： Takumi NAMIKI ,  Shinji KUMADA ,  Eita SUGA ,  Kenta KIMURA ,  Jun KONDO

IPC分类号： C11D3/28 ,  C11D1/66 ,  C11D3/00 ,  C11D3/04 ,  C11D3/20

CPC分类号： C11D3/28 ,  C11D1/66 ,  C11D3/0026 ,  C11D3/0073 ,  C11D3/042 ,  C11D3/2027 ,  C11D2111/22

摘要： An aqueous cleaning liquid containing hydrofluoric acid, at least one kind of triazole compound selected from the group consisting of triazole and a triazole derivative, and a nonionic surfactant.