公开(公告)号：US20240326088A1

公开(公告)日：2024-10-03

申请号：US18610530

申请日：2024-03-20

Applicant: TOTO LTD.

Inventor： Atsushi KINJO ,  Nobutomo OTSUKA ,  Fumito TODA

IPC: B05D1/02

CPC classification number: B05D1/02 ,  B05D2490/50

Abstract: A structural member 10 includes a base material 100 and a protective film 200 covering a surface 110 of the base material 100. When, in a cross-section of the protective film 200 cut perpendicularly to the surface 110, a proportion of pores per unit area is defined as porosity, the porosity in a first portion 201 that is a portion of the cross-section is lower than the porosity in a second portion 202 that is a portion of the cross-section closer to the base material 100 side thereof than the first portion 201.

公开(公告)号：US20250079131A1

公开(公告)日：2025-03-06

申请号：US18819886

申请日：2024-08-29

Applicant: TOTO LTD.

Inventor： Yasutaka NITTA ,  Ryoto TAKIZAWA ,  Susumu ADACHI ,  Atsushi KINJO ,  Tatsuya KOGA

IPC: H01J37/32

Abstract: A structural member 10 includes a base material 100 and a protective film 200 covering a surface 101 of the base material 100. At least a portion of the protective film 200 in the vicinity of a surface 201 thereof has a first layer 210 and a second layer 220 that contains all of elements contained in the first layer 210 and that is different from the first layer 210 in composition ratio of each element, wherein the first layer 210 and the second layer 220 are alternately aligned along a depth direction perpendicular to the surface 201 of the protective film 200.

公开(公告)号：US20190276368A1

公开(公告)日：2019-09-12

申请号：US16296934

申请日：2019-03-08

Applicant: TOTO LTD.

Inventor： Junichi IWASAWA ,  Hiroaki ASHIZAWA ,  Takuma WADA ,  Ryoto TAKIZAWA ,  Toshihiro AOSHIMA ,  Yuuki TAKAHASHI ,  Atsushi KINJO

IPC: C04B35/505 ,  H01L21/67 ,  C01F17/00 ,  C01B11/24 ,  C01F7/02 ,  C01G25/02 ,  C04B35/622 ,  H01J37/28

Abstract: Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.