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公开(公告)号：US11307018B2
公开(公告)日：2022-04-19
申请号：US17257219
申请日：2019-06-26
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Fuzhong Yang , Rong Cheng , Xin Li , Weinan Ye , Jinchun Hu
IPC分类号： G01B9/02003 , G01B9/02015 , G01B11/06 , G01B9/02
摘要： A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.
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公开(公告)号：US10597172B2
公开(公告)日：2020-03-24
申请号：US15760540
申请日：2016-07-18
发明人： Yu Zhu , Anlin Chen , Ming Zhang , Kaiming Yang , Rong Cheng
IPC分类号： G01C19/30 , G01C19/46 , B64G1/28 , H02K16/04 , H02K41/03 , H02K16/00 , G01C19/24 , H02K5/128
摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.
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公开(公告)号：US12038690B2
公开(公告)日：2024-07-16
申请号：US17767424
申请日：2020-10-23
发明人： Leijie Wang , Yu Zhu , Ming Zhang , Jitao Xu , Xin Li , Rong Cheng , Kaiming Yang , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/2053
摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.
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公开(公告)号：US11940349B2
公开(公告)日：2024-03-26
申请号：US17610730
申请日：2020-05-13
发明人： Leijie Wang , Ming Zhang , Yu Zhu , Jiankun Hao , Xin Li , Rong Cheng , Kaiming Yang , Jinchun Hu
CPC分类号： G01M11/0214 , G01M11/04 , G02B5/1857 , G02B7/003 , G02B27/1006 , G02B27/283 , G02B27/30 , G02F1/11
摘要： Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame, first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, and the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.
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公开(公告)号：US09904183B2
公开(公告)日：2018-02-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu Zhu , Ming Zhang , Fan Zhi , Zhao Liu , Rong Cheng , Kaiming Yang , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US11703361B2
公开(公告)日：2023-07-18
申请号：US17257173
申请日：2019-06-26
发明人： Ming Zhang , Yu Zhu , Fuzhong Yang , Leijie Wang , Rong Cheng , Xin Li , Weinan Ye , Jinchun Hu
CPC分类号： G01D5/3537 , G01D5/344
摘要： A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine worktable for six-degree-of-freedom position and orientation measurement.
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公开(公告)号：US10532832B2
公开(公告)日：2020-01-14
申请号：US15568581
申请日：2016-03-15
发明人： Ming Zhang , Yu Zhu , Anlin Chen , Kaiming Yang , Rong Cheng , Feng Liu , Jinchun Hu , Chuxiong Hu , Dengfeng Xu , Haihua Mu
摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
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8.发明授权公开(公告)号：US09995569B2
公开(公告)日：2018-06-12
申请号：US15568118
申请日：2016-03-15
发明人： Yu Zhu , Ming Zhang , Anlin Chen , Rong Cheng , Kaiming Yang , Feng Liu , Yujing Song , Fan Zhi , Jinchun Hu , Dengfeng Xu , Haihua Mu , Chuxiong Hu
CPC分类号： G01B11/14 , G01B11/002 , G01B11/272 , G01D5/38 , G03F7/70758 , G03F7/70775 , G03F9/7046
摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
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9.发明申请公开(公告)号：US20180080757A1
公开(公告)日：2018-03-22
申请号：US15568118
申请日：2016-03-15
发明人： Yu Zhu , Ming Zhang , Anlin Chen , Rong Cheng , Kaiming Yang , Feng Liu , Yujing Song , Fan Zhi , Jinchun Hu , Dengfeng Xu , Haihua Mu , Chuxiong Hu
CPC分类号： G01B11/14 , G01B11/002 , G01B11/272 , G01D5/38 , G03F7/70758 , G03F7/70775 , G03F9/7046
摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
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10.发明授权公开(公告)号：US09791789B2
公开(公告)日：2017-10-17
申请号：US15307797
申请日：2015-04-17
发明人： Ming Zhang , Yu Zhu , Fan Zhi , Rong Cheng , Kaiming Yang , Zhao Liu , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , G03F7/20 , G03F7/70716 , G03F7/70766 , G03F7/70775
摘要： A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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