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25 条记录 (耗时 0.023 秒)

    Magnetic-fluid momentum sphere
    1.
    发明授权
    Magnetic-fluid momentum sphere 有权

    公开(公告)号：US10597172B2

    公开(公告)日：2020-03-24

    申请号：US15760540

    申请日：2016-07-18

    申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

    发明人： Yu Zhu ,  Anlin Chen ,  Ming Zhang ,  Kaiming Yang ,  Rong Cheng

    IPC分类号： G01C19/30 ,  G01C19/46 ,  B64G1/28 ,  H02K16/04 ,  H02K41/03 ,  H02K16/00 ,  G01C19/24 ,  H02K5/128

    摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.

    Laser interference photolithography system
    2.
    发明授权
    Laser interference photolithography system 有权

    公开(公告)号：US12038690B2

    公开(公告)日：2024-07-16

    申请号：US17767424

    申请日：2020-10-23

    申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

    发明人： Leijie Wang ,  Yu Zhu ,  Ming Zhang ,  Jitao Xu ,  Xin Li ,  Rong Cheng ,  Kaiming Yang ,  Jinchun Hu

    IPC分类号： G03F7/20

    CPC分类号： G03F7/2053

    摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.

    Magnetic levitation reaction sphere
    5.
    发明授权
    Magnetic levitation reaction sphere 有权

    公开(公告)号：US10532832B2

    公开(公告)日：2020-01-14

    申请号：US15568581

    申请日：2016-03-15

    申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

    发明人： Ming Zhang ,  Yu Zhu ,  Anlin Chen ,  Kaiming Yang ,  Rong Cheng ,  Feng Liu ,  Jinchun Hu ,  Chuxiong Hu ,  Dengfeng Xu ,  Haihua Mu

    IPC分类号： G01C19/00 ,  B64G1/24 ,  H02N15/00 ,  H02K16/00 ,  G05D1/08

    摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.

    DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
    9.
    发明申请
    DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM 有权
    双频光栅干涉仪位移测量系统

    公开(公告)号：US20150268031A1

    公开(公告)日：2015-09-24

    申请号：US14441828

    申请日：2013-10-28

    申请人： TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Jinchun Hu ,  Longmin Chen ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Haihua Mu

    IPC分类号： G01B9/02 ,  G01B11/14

    CPC分类号： G01B9/02007 ,  G01B9/02049 ,  G01B11/14 ,  G01D5/266 ,  G01D5/38

    摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.

    摘要翻译： 双频光栅干涉仪位移测量系统，包括双频激光器，干涉仪，测量光栅和电子信号处理部件。 测量系统基于光栅衍射，光学多普勒效应和光拍频理论实现位移测量。 双频激光从双频激光器发射并通过偏振光谱仪分为参考光和测量光。 测量光入射到测量光栅以产生正负一阶衍射。 衍射光和参考光在光检测单元处形成包含关于两个方向的位移信息的拍频信号，并且在信号处理之后实现线性位移输出。 测量系统可以实现亚纳米级，甚至更高的分辨率和精度，同时可以测量长的水平位移和垂直位移。

    SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR AND MOTION CONTROL METHOD THEREOF
    10.
    发明申请
    SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR AND MOTION CONTROL METHOD THEREOF 有权
    线性电机自动振动隔离装置的单程度及其运动控制方法

    公开(公告)号：US20150077032A1

    公开(公告)日：2015-03-19

    申请号：US14395471

    申请日：2013-04-15

    申请人： TSINGHUA UNIVERSITY

    发明人： Kaiming Yang ,  Yu Zhu ,  Dongdong Yu ,  Rong Cheng ,  Ming Zhang ,  Xin Li ,  Haihua Mu ,  Jinchun Hu ,  Dengfeng Xu ,  Wensheng Yin ,  Guofeng Ji

    IPC分类号： G05B19/18

    CPC分类号： G05B19/18 ,  G05B2219/41117 ,  H02P25/06

    摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods; inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.

    摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法; 向控制单元输入第二光栅尺信号作为反馈以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。