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公开(公告)号：US09904183B2
公开(公告)日：2018-02-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu Zhu , Ming Zhang , Fan Zhi , Zhao Liu , Rong Cheng , Kaiming Yang , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US10532832B2
公开(公告)日：2020-01-14
申请号：US15568581
申请日：2016-03-15
发明人： Ming Zhang , Yu Zhu , Anlin Chen , Kaiming Yang , Rong Cheng , Feng Liu , Jinchun Hu , Chuxiong Hu , Dengfeng Xu , Haihua Mu
摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
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3.发明授权公开(公告)号：US09995569B2
公开(公告)日：2018-06-12
申请号：US15568118
申请日：2016-03-15
发明人： Yu Zhu , Ming Zhang , Anlin Chen , Rong Cheng , Kaiming Yang , Feng Liu , Yujing Song , Fan Zhi , Jinchun Hu , Dengfeng Xu , Haihua Mu , Chuxiong Hu
CPC分类号： G01B11/14 , G01B11/002 , G01B11/272 , G01D5/38 , G03F7/70758 , G03F7/70775 , G03F9/7046
摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
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4.发明申请公开(公告)号：US20180080757A1
公开(公告)日：2018-03-22
申请号：US15568118
申请日：2016-03-15
发明人： Yu Zhu , Ming Zhang , Anlin Chen , Rong Cheng , Kaiming Yang , Feng Liu , Yujing Song , Fan Zhi , Jinchun Hu , Dengfeng Xu , Haihua Mu , Chuxiong Hu
CPC分类号： G01B11/14 , G01B11/002 , G01B11/272 , G01D5/38 , G03F7/70758 , G03F7/70775 , G03F9/7046
摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
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5.发明授权公开(公告)号：US09791789B2
公开(公告)日：2017-10-17
申请号：US15307797
申请日：2015-04-17
发明人： Ming Zhang , Yu Zhu , Fan Zhi , Rong Cheng , Kaiming Yang , Zhao Liu , Li Zhang , Huichao Qin , Yanpo Zhao , Li Tian , Weinan Ye , Jin Zhang , Wensheng Yin , Haihua Mu , Jinchun Hu
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , G03F7/20 , G03F7/70716 , G03F7/70766 , G03F7/70775
摘要： A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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公开(公告)号：US09879979B2
公开(公告)日：2018-01-30
申请号：US14441821
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Ming Zhang , Yu Zhu , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B11/14 , G01B9/02002 , G01B9/02007 , G01B9/02011 , G01B2290/70 , G01D5/266 , G01D5/38
摘要： A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with an orthogonal polarization direction and an orthogonal propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
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公开(公告)号：US20150268031A1
公开(公告)日：2015-09-24
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.
摘要翻译： 双频光栅干涉仪位移测量系统，包括双频激光器，干涉仪，测量光栅和电子信号处理部件。 测量系统基于光栅衍射，光学多普勒效应和光拍频理论实现位移测量。 双频激光从双频激光器发射并通过偏振光谱仪分为参考光和测量光。 测量光入射到测量光栅以产生正负一阶衍射。 衍射光和参考光在光检测单元处形成包含关于两个方向的位移信息的拍频信号，并且在信号处理之后实现线性位移输出。 测量系统可以实现亚纳米级，甚至更高的分辨率和精度，同时可以测量长的水平位移和垂直位移。
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8.发明申请SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR AND MOTION CONTROL METHOD THEREOF 有权线性电机自动振动隔离装置的单程度及其运动控制方法公开(公告)号：US20150077032A1
公开(公告)日：2015-03-19
申请号：US14395471
申请日：2013-04-15
申请人： TSINGHUA UNIVERSITY
发明人： Kaiming Yang , Yu Zhu , Dongdong Yu , Rong Cheng , Ming Zhang , Xin Li , Haihua Mu , Jinchun Hu , Dengfeng Xu , Wensheng Yin , Guofeng Ji
IPC分类号： G05B19/18
CPC分类号： G05B19/18 , G05B2219/41117 , H02P25/06
摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods; inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.
摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法; 向控制单元输入第二光栅尺信号作为反馈以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。
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公开(公告)号：US09885556B2
公开(公告)日：2018-02-06
申请号：US14441828
申请日：2013-10-28
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Ming Zhang , Leijie Wang , Jinchun Hu , Longmin Chen , Kaiming Yang , Dengfeng Xu , Wensheng Yin , Haihua Mu
CPC分类号： G01B9/02007 , G01B9/02049 , G01B11/14 , G01D5/266 , G01D5/38
摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.
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公开(公告)号：US20150097508A1
公开(公告)日：2015-04-09
申请号：US14382221
申请日：2013-02-21
发明人： Yu Zhu , Jinchun Hu , Dengfeng Xu , Yuting Sun , Wensheng Yin , Ming Zhang , Kaiming Yang , Haihua Mu
摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value. B ksx B cx - B kcx B sx B M 2 ≥ Δ x ( I ) B ksy B cy - B kcy B sy B M 2 ≥ Δ y ( II )
摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksxB cx - B kcx B B sx B M 2≥＆Dgr; x（I）B yBsy sy y（II）
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