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公开(公告)号：US4917136A
公开(公告)日：1990-04-17
申请号：US198079
申请日：1988-05-24
申请人： Tadahiro Ohmi , Kazuhiko Sugiyawa , Fumio Nakahara , Masaru Umeda
发明人： Tadahiro Ohmi , Kazuhiko Sugiyawa , Fumio Nakahara , Masaru Umeda
IPC分类号： F17D1/04 , B01J4/00 , B08B9/02 , B08B9/032 , C23C16/455 , F17D1/02 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/31
CPC分类号： B08B9/0325 , B08B9/0328 , C23C16/455 , C23C16/45561 , H01J37/3244 , Y10S134/902 , Y10T137/0419 , Y10T137/4259
摘要： This invention relates to the supply piping system of the process gas for various types of thin-film making and fine pattern dry etching process, and more particularly to the process gas supply system, which makes it possible to form high quality thin films and to perform high quality etching.Specifically, when there are a unit in operation with process gas supplied and a unit not in operation with no process gas supplied in a process gas supply piping system, supplying the process gas to two or more process units from a cylinder cabinet piping system, this invention provides a gas supply piping system, where the process gas supply piping line to the process unit not in operation can be purged with purge gas all the time and where gas flows all the time through all of gas supply piping lines to eliminate the stagnation of gas.
摘要翻译： 本发明涉及用于各种薄膜制造和精细图案干蚀刻工艺的工艺气体的供应管道系统，更具体地涉及工艺气体供应系统，这使得可以形成高质量的薄膜并执行 高品质蚀刻。 具体地说，当在处理气体供给管道系统中存在具有工业气体运转的单元和不进行工艺气体运转的单元时，将处理气体从筒柜配管系统供给到两个以上的处理单元时， 本发明提供了一种气体供应管道系统，其中不处于操作的处理单元的工艺气体供应管线可以一直被吹扫气体吹扫，并且其中气体始终流过所有气体供应管线，以消除停滞 加油站。
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公开(公告)号：US4869301A
公开(公告)日：1989-09-26
申请号：US194841
申请日：1988-05-17
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara , Masaru Umeda
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara , Masaru Umeda
IPC分类号： B01D46/42 , H01L21/00 , H01L21/302 , H01L21/304 , H01L21/3065 , B08B9/00
CPC分类号： H01L21/67069 , Y10T137/4259
摘要： The cylinder cabinet piping system of this invention has a system to supply a purge gas continuously to the main line, or to the main line and the branch line, thereby to prevent stagnation of gas in the purge gas line and to supply a super-high-purity gas to a process unit.
摘要翻译： 本发明的气缸柜配管系统具有连续向主管线，主管线和分支管路供给净化气体的系统，从而防止气体在净化气体管路中停滞，并提供超高压 纯度气体输送到处理单元。
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公开(公告)号：US5295668A
公开(公告)日：1994-03-22
申请号：US842361
申请日：1992-04-13
申请人： Tadahiro Ohmi , Yoshiyuki Nakahara , Shigeki Hayashi , Takashi Sakanaka , Eiji Ohta , Fumio Nakahara
发明人： Tadahiro Ohmi , Yoshiyuki Nakahara , Shigeki Hayashi , Takashi Sakanaka , Eiji Ohta , Fumio Nakahara
摘要： It is a metal oxidation treatment apparatus for carrying out the inactivation treatment of metal tubes used especially in a super high purity gas piping system and an apparatus of super high vacuum.The support part of a support member is made as a tubular form member, and a tapered part is provided on the outer periphery thereof, and further, since a spring is mounted to be displaceable, even if fluctuation is present in the internal diameter of stainless steel tubes, it is possible to let the stainless tubes easily be supported on the support part. Also, even fluctuation of the length is present in the stainless steel tubes, the support member is always pushed to the stainless steel tubes. Oxidative gas diffusing out of the tube to be treated to the outside thereof can be released to the outside of the oxidation treatment furnace without letting it contact to the tube to be treated.
摘要翻译： PCT No.PCT / JP90 / 01230 Sec。 371日期：1992年4月13日 102（e）日期1992年4月13日PCT 1990年9月25日PCT PCT。 公开号WO91 / 05071 日期为1991年04月18日。它是一种金属氧化处理装置，用于特别在超高纯度气体管道系统和超高真空装置中使用的金属管的灭活处理。 支撑构件的支撑部分被制成管状构件，并且在其外周上设置有锥形部分，此外，由于弹簧安装成可移动，即使在不锈钢的内径中存在波动 钢管，可以使不锈钢管容易地支撑在支撑部分上。 此外，不锈钢管中存在长度均匀的波动，总是将支撑构件推到不锈钢管上。 从待处理的管扩散到其外部的氧化气体可以释放到氧化处理炉的外部，而不会使其与待处理的管接触。
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公开(公告)号：US5241987A
公开(公告)日：1993-09-07
申请号：US773893
申请日：1991-12-02
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Fumio Nakahara
IPC分类号： B01F15/04 , B01F3/02 , B01F3/04 , C23C16/44 , C23C16/448 , C23F4/00 , H01L21/205 , H01L21/302 , H01L21/3065
CPC分类号： B01F3/04985 , B01F3/026 , Y10T137/87249
摘要： When a process gas obtained by mixing a source gas with a diluting gas is supplied to a predetermined process apparatus, by supplying the process gas to the predetermined process apparatus through a gas contacting part connecting at least one source gas supplying pipe with at least one diluting gas supplying pipe, no chance that the source gas is exposed to air contamination is provided. Moreover, in particular, by forming the gas contacting part which is to be in contact with the above source gas, diluting gas and the like using such a material as metal, ceramic or the like, emission of materials having bad influences on the process gas, such as organic materials in particular, is eliminated. Furthermore, by providing a branching pipe or exhausting pipe, the degree of diluting the source gas can be varied stepwise, and by further combining with a flow rate adjuster, it can be varied continuously.
摘要翻译： PCT No.PCT / JP89 / 01014 Sec。 371 1991年12月2日第 102（e）日期1991年12月2日PCT提交1989年10月4日PCT公布。 出版物WO90 / 12641 1990年11月1日，当通过将源气体与稀释气体混合而获得的处理气体被供给到预定的处理装置时，通过将至少一个源气体 向管道供给至少一个稀释气体供给管，并且不存在源气体暴露于空气污染的可能性。 此外，特别地，通过使用诸如金属，陶瓷等的材料形成与上述源气体接触的气体接触部分，稀释气体等，对处理气体的影响的材料的排放 ，特别是有机材料被消除。 此外，通过设置分支管或排气管，可以逐渐改变源气体的稀释度，并且通过与流量调节器进一步组合，可以连续变化。
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公开(公告)号：US5226968A
公开(公告)日：1993-07-13
申请号：US602231
申请日：1990-11-05
CPC分类号： C23C8/10
摘要： A metal oxidation treatment apparatus to form the passivation film on the surface of the metal to be oxidized such as stainless steel or the like, comprising an oxidation furnace, a gas inlet to introduce gas into said oxidation furnace, a discharge outlet to discharge the gas from said oxidation furnace, and a heater to heat said oxidation furnace to the predetermined temperature, so that the metal to be oxidized is heated and oxidized in dry oxidation atmosphere while gas is passed in said oxidation furnace.
摘要翻译： 一种金属氧化处理装置，用于在待氧化的金属的表面上形成钝化膜，例如不锈钢等，包括氧化炉，将气体引入所述氧化炉的气体入口，排出气体 从所述氧化炉和加热器将所述氧化炉加热至预定温度，使得待氧化的金属在干燥氧化气氛中被加热并氧化，同时气体通过所述氧化炉。
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公开(公告)号：US5224998A
公开(公告)日：1993-07-06
申请号：US449846
申请日：1990-11-28
CPC分类号： C23C8/10
摘要： A metal oxidation treatment apparatus to form the passivation film on the surface of the metal to be oxidized such as stainless steel or the like, comprising an oxidation furnace, a gas inlet to introduce gas into said oxidation furnace, a discharge outlet to discharge the gas from said oxidation furnace, and a heater to heat said oxidation furnace to the predetermined temperature, so that the metal to be oxidized is heated and oxidized in dry oxidation atmosphere while gas is passed in said oxidation furnace.
摘要翻译： PCT No.PCT / JP89 / 00824 Sec。 371日期：1989年11月28日 102（e）1989年11月28日PCT PCT 1989年8月14日PCT公布。 第WO90 / 02212号公报 日本1990年3月8日。一种金属氧化处理装置，其在待氧化的金属的表面上形成钝化膜，例如不锈钢等，包括氧化炉，将气体引入所述氧化炉的气体入口， 用于从所述氧化炉排出气体的排出口，以及将所述氧化炉加热至预定温度的加热器，使得在氧化炉中通入气体时，将待氧化的金属在干燥氧化气氛中加热和氧化。
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公开(公告)号：US20080063592A1
公开(公告)日：2008-03-13
申请号：US11597265
申请日：2005-05-16
申请人： Fumio Nakahara , Kuroo Kizaki , Akira Miyake
发明人： Fumio Nakahara , Kuroo Kizaki , Akira Miyake
IPC分类号： C01B31/08
CPC分类号： B01J20/28019 , B01J20/20 , C01B32/336 , C01B32/384
摘要： An active carbon produced from an infusible carbonaceous material as a raw material, which active carbon when used for prevention of automobile fuel evaporation, etc., would not cause any trouble attributed to dust generation, exhibiting reduced pressure loss; and a process for producing the same. There is provided a spherical active carbon produced from an infusible solid carbon material as a raw material, wherein providing that x represents an average particle diameter (mm) and y an MS hardness (%), when x is in the range of 0.5 to 20, y is ≧100×(1-0.8×1.45(0.3-x)). This spherical active carbon can be produced by a process comprising mixing a carbon material with a carbonizable binder; extruding the mixture into a strand form; carrying out rolling granulation so as to obtain a spherical form; rendering the same infusible under appropriate conditions corresponding to the particle size; and performing carbonization and thereafter activation under conditions appropriately restricting the contact with activation gas.
摘要翻译： 从作为原料的不可渗入的碳质材料生成的活性碳，当用于防止汽车燃料蒸发等时使用的活性炭不会引起由于粉尘产生而引起的任何故障，表现出减小的压力损失; 及其制造方法。 提供由作为原料的不溶性固体碳材料制成的球状活性炭，其中x表示平均粒径（mm），y表示MS硬度（％），当x在0.5〜20的范围内时 ，y => 100×（1-0.8×1.4×（0.3-x））。 该球形活性炭可以通过包括将碳材料与可碳化粘合剂混合的方法来制备; 将混合物挤出成锭状; 进行轧制造粒，得到球形; 在与粒度对应的适当条件下使相同的不可渗透性; 进行碳酸化，然后在适当限制与活化气体接触的条件下进行活化。
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8.发明申请Filter element, method for manufacture thereof, and filter using said element 失效过滤元件，其制造方法和使用所述元件的过滤器公开(公告)号：US20050092675A1
公开(公告)日：2005-05-05
申请号：US10473866
申请日：2002-04-01
CPC分类号： B01D46/0036 , B01D39/1623 , B01D46/0001 , B01D46/0038 , B01D46/521 , B01D53/02 , B01D2253/102 , B01D2253/104 , B01D2253/11 , B01D2253/25 , B01D2253/304 , B01D2257/90 , B01D2259/4508 , B01D2259/4566 , B01J20/28004 , B01J20/28028 , B01J20/28033 , B01J20/3223 , Y10S55/05
摘要： The invention provides a filter element exhibiting an excellent deodorizing and adsorbing function with low pressure drop, as well as to a method for its manufacture and a filter using the element, and this is achieved by a filter element which satisfies the relationship that 0≦A≦1.1 mB+C and m=0.28−0.0005 D50, with the proviso that 0
摘要翻译： 本发明提供了一种过滤元件，其具有优异的低压降除臭和吸附功能，以及其制造方法和使用该元件的过滤器，这通过一种过滤元件实现，该过滤元件满足0 < A <= 1.1mB + C，m = 0.28-0.0005 D 50，条件是0
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9.发明授权Production process for polymers with hydroxyl groups and polymers obtained by the process 失效通过该方法获得的具有羟基和聚合物的聚合物的制备方法公开(公告)号：US06632878B1
公开(公告)日：2003-10-14
申请号：US09631287
申请日：2000-08-02
IPC分类号： C08F812
CPC分类号： C08F8/12 , C08F2800/10 , C08F118/08 , C08F218/08 , C08F210/02 , C08F116/18
摘要： A hydroxyl group containing polymer is prepared by a process, comprising: contacting the polymer having a substituent with high temperature, high pressure water, thereby converting the substituent to hydroxyl groups.
摘要翻译： 通过一种方法制备含羟基的聚合物，其包括：使具有取代基的聚合物与高温高压水接触，从而将取代基转化为羟基。
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10.发明授权Process for producing ethylene-vinyl ester copolymers, ethylene-vinyl alcohol copolymers, and process for producing shaped articles therefrom 失效乙烯 - 乙烯基酯共聚物的制造方法，乙烯 - 乙烯醇共聚物及其制造成型制品的方法
公开(公告)号：US5352750A
公开(公告)日：1994-10-04
申请号：US67990
申请日：1993-05-27
申请人： Hisamichi Yanai , Takanori Kitamura , Fumio Nakahara , Katsumi Shimizu , Akimasa Aoyama , Takeshi Moritani
发明人： Hisamichi Yanai , Takanori Kitamura , Fumio Nakahara , Katsumi Shimizu , Akimasa Aoyama , Takeshi Moritani
IPC分类号： C08F2/00 , C08F8/12 , C08F218/04
CPC分类号： C08F218/04 , B29C47/00 , C08F8/12 , C08J5/18 , C08F2800/10
摘要： Process for producing ethylene-vinyl ester copolymers using a polymerization solvent of a dialkyl sulfoxide (process X); process for producing ethylene-vinyl alcohol copolymer by liquid phase saponification using a solvent of a dialkyl sulfoxide (process Y); and process for producing shaped articles which comprises contacting the ethylene-vinyl alcohol copolymer obtained by the process Y, or that obtained by saponifying the ethylene-vinyl ester copolymer obtained by process X, to a non-solvent for ethylene-vinyl alcohol copolymer.Ethylene-vinyl ester copolymers having a wide range of ethylene content and higher degree of polymerization than that with solution polymerization using methanol.The rate of saponification is higher than that with single solvent system of lower alcohol.Production cost is low, because production process of polymer is directly connected to that of shaped articles utilizing the polymer.
摘要翻译： 使用二烷基亚砜的聚合溶剂制备乙烯 - 乙烯基酯共聚物的方法（方法X）; 通过使用二烷基亚砜的溶剂进行液相皂化生产乙烯 - 乙烯醇共聚物的方法（方法Y）; 以及制造成型制品的方法，其包括将通过方法Y获得的乙烯 - 乙烯醇共聚物或通过将由方法X获得的乙烯 - 乙烯基酯共聚物皂化而获得的乙烯 - 乙烯醇共聚物与乙烯 - 乙烯醇共聚物的非溶剂接触。 乙烯 - 乙烯基酯共聚物的乙烯含量范围宽，聚合度高于使用甲醇的溶液聚合。 皂化率高于单一溶剂体系的低级醇。 生产成本低，因为聚合物的生产过程直接与使用聚合物的成型制品相连。
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