公开(公告)号：US12261213B2

公开(公告)日：2025-03-25

申请号：US17814779

申请日：2022-07-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Kuei-Yu Kao ,  Chen-Ping Chen ,  Chih-Han Lin

IPC: H01L29/78 ,  H01L21/027 ,  H01L21/311 ,  H01L21/762 ,  H01L21/8234 ,  H01L27/088 ,  H01L29/06 ,  H01L29/10 ,  H01L29/423 ,  H01L29/51 ,  H01L29/66

Abstract: A method includes simultaneously forming a first dummy gate stack and a second dummy gate stack on a first portion and a second portion of a protruding fin, simultaneously removing a first gate electrode of the first dummy gate stack and a second gate electrode of the second dummy gate stack to form a first trench and a second trench, respectively, forming an etching mask, wherein the etching mask fills the first trench and the second trench, patterning the etching mask to remove the etching mask from the first trench, removing a first dummy gate dielectric of the first dummy gate stack, with the etching mask protecting a second dummy gate dielectric of the second dummy gate stack from being removed, and forming a first replacement gate stack and a second replacement gate stack in the first trench and the second trench, respectively.

公开(公告)号：US11908920B2

公开(公告)日：2024-02-20

申请号：US17722787

申请日：2022-04-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Kuei-Yu Kao ,  Chih-Han Lin ,  Ming-Ching Chang ,  Chao-Cheng Chen

IPC: H01L29/66 ,  H01L21/8234 ,  H01L29/78 ,  H01L21/306

CPC classification number: H01L29/66545 ,  H01L21/30621 ,  H01L21/823431 ,  H01L29/66795 ,  H01L29/7856 ,  H01L2029/7858

Abstract: A method of forming a semiconductor device includes: forming a fin protruding above a substrate; forming isolation regions on opposing sides of the fin; forming a dummy gate electrode over the fin; removing lower portions of the dummy gate electrode proximate to the isolation regions, where after removing the lower portions, there is a gap between the isolation regions and a lower surface of the dummy gate electrode facing the isolation regions; filling the gap with a gate fill material; after filling the gap, forming gate spacers along sidewalls of the dummy gate electrode and along sidewalls of the gate fill material; and replacing the dummy gate electrode and the gate fill material with a metal gate.

公开(公告)号：US11893334B2

公开(公告)日：2024-02-06

申请号：US17875139

申请日：2022-07-27

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. ,  TSMC NANJING COMPANY LIMITED

Inventor： Yi-Lin Chuang ,  Shi-Wen Tan ,  Song Liu ,  Shih-Yao Lin ,  Wen-Yuan Fang

IPC: G06F30/00 ,  G06F30/392 ,  G06F30/373 ,  G06F30/398 ,  G06F30/394

CPC classification number: G06F30/392 ,  G06F30/373 ,  G06F30/394 ,  G06F30/398

Abstract: A method is provided and includes several operations: forming a first group of macros in a first region, wherein the first group of macros are aligned with a first boundary of a channel that is coupled thereto through pins of the first group of macros; forming a second group of macros in the first region to align with a second boundary of the channel that is coupled thereto through pins of the second group of macros, wherein the first and second groups of macros are coupled to a first register; and forming a third group of macros in a second region different from the first region. A first macro and a second macro that are in the third group of macros are aligned with the first and second boundaries respectively. The third group of macros are coupled to a second register different from the first register.

公开(公告)号：US20230361197A1

公开(公告)日：2023-11-09

申请号：US18354995

申请日：2023-07-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Chih-Han Lin ,  Shu-Uei Jang ,  Ya-Yi Tsai ,  Shu-Yuan Ku

IPC: H01L21/8234 ,  H01L27/088 ,  H01L29/66

CPC classification number: H01L29/66545 ,  H01L21/823431 ,  H01L21/823481 ,  H01L27/0886 ,  H01L29/6681

Abstract: A method includes forming a dummy gate stack, etching the dummy gate stack to form an opening, depositing a first dielectric layer extending into the opening, and depositing a second dielectric layer on the first dielectric layer and extending into the opening. A planarization process is then performed to form a gate isolation region including the first dielectric layer and the second dielectric layer. The dummy gate stack is then removed to form trenches on opposing sides of the gate isolation region. The method further includes performing a first etching process to remove sidewall portions of the first dielectric layer, performing a second etching process to thin the second dielectric layer, and forming replacement gates in the trenches.

公开(公告)号：US11757019B2

公开(公告)日：2023-09-12

申请号：US17650942

申请日：2022-02-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Chih-Han Lin ,  Shu-Uei Jang ,  Ya-Yi Tsai ,  Shu-Yuan Ku

IPC: H01L29/66 ,  H01L21/8234 ,  H01L27/088

CPC classification number: H01L29/66545 ,  H01L21/823431 ,  H01L21/823481 ,  H01L27/0886 ,  H01L29/6681

Abstract: A method includes forming a dummy gate stack, etching the dummy gate stack to form an opening, depositing a first dielectric layer extending into the opening, and depositing a second dielectric layer on the first dielectric layer and extending into the opening. A planarization process is then performed to form a gate isolation region including the first dielectric layer and the second dielectric layer. The dummy gate stack is then removed to form trenches on opposing sides of the gate isolation region. The method further includes performing a first etching process to remove sidewall portions of the first dielectric layer, performing a second etching process to thin the second dielectric layer, and forming replacement gates in the trenches.

公开(公告)号：US20230207670A1

公开(公告)日：2023-06-29

申请号：US18178140

申请日：2023-03-03

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Pei-Hsiu Wu ,  Chih Ping Wang ,  Chih-Han Lin ,  Jr-Jung Lin ,  Yun Ting Chou ,  Chen-Yu Wu

IPC: H01L29/66 ,  H01L29/78 ,  H01L29/06 ,  H01L21/311 ,  H01L21/285

CPC classification number: H01L29/6681 ,  H01L29/7851 ,  H01L29/0649 ,  H01L29/66636 ,  H01L21/31111 ,  H01L21/31116 ,  H01L29/66545 ,  H01L21/28518

Abstract: A method includes forming isolation regions extending into a semiconductor substrate, wherein semiconductor strips are located between the isolation regions, and forming a dielectric dummy strip between the isolation regions, recessing the isolation regions. Some portions of the semiconductor strips protrude higher than top surfaces of the recessed isolation regions to form protruding semiconductor fins, and a portion of the dielectric dummy strip protrudes higher than the top surfaces of the recessed isolation regions to form a dielectric dummy fin. The method further includes etching the dielectric dummy fin so that a top width of the dielectric dummy fin is smaller than a bottom width of the dielectric dummy fin. A gate stack is formed on top surfaces and sidewalls of the protruding semiconductor fins and the dielectric dummy fin.

公开(公告)号：US20230005797A1

公开(公告)日：2023-01-05

申请号：US17869590

申请日：2022-07-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Chih-Han Lin ,  Shu-Uei Jang ,  Ya-Yi Tsai ,  Shu-Yuan Ku

IPC: H01L21/8238 ,  H01L27/092 ,  H01L29/49 ,  H01L29/66 ,  H01L21/28

Abstract: A device includes a semiconductor substrate and a first gate stack over the semiconductor substrate, the first gate stack being between a first gate spacer and a second gate spacer. The device further includes a second gate stack over the semiconductor substrate between the first gate spacer and the second gate spacer and a dielectric material separating the first gate stack from the second gate stack. The dielectric material is at least partially between the first gate spacer and the second gate spacer, a first width of an upper portion of the dielectric material is greater than a second width of a lower portion of the dielectric material, and a third width of an upper portion of the first gate spacer is less than a fourth width of a lower portion of the first gate spacer.

公开(公告)号：US11532723B2

公开(公告)日：2022-12-20

申请号：US16870429

申请日：2020-05-08

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Kuei-Yu Kao ,  Chen-Ping Chen ,  Chih-Han Lin

IPC: H01L29/165 ,  H01L29/66 ,  H01L29/78 ,  H01L21/8234 ,  H01L21/311 ,  H01L29/06 ,  H01L21/027 ,  H01L29/423 ,  H01L29/51 ,  H01L29/10 ,  H01L27/088 ,  H01L21/762

Abstract: A method includes simultaneously forming a first dummy gate stack and a second dummy gate stack on a first portion and a second portion of a protruding fin, simultaneously removing a first gate electrode of the first dummy gate stack and a second gate electrode of the second dummy gate stack to form a first trench and a second trench, respectively, forming an etching mask, wherein the etching mask fills the first trench and the second trench, patterning the etching mask to remove the etching mask from the first trench, removing a first dummy gate dielectric of the first dummy gate stack, with the etching mask protecting a second dummy gate dielectric of the second dummy gate stack from being removed, and forming a first replacement gate stack and a second replacement gate stack in the first trench and the second trench, respectively.

公开(公告)号：US20220359207A1

公开(公告)日：2022-11-10

申请号：US17869057

申请日：2022-07-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Kuei-Yu Kao ,  Chih-Han Lin ,  Ming-Ching Chang ,  Chao-Cheng Chen

IPC: H01L21/28 ,  H01L29/78 ,  H01L29/66 ,  H01L21/762 ,  H01L29/06 ,  H01L29/423 ,  H01L21/8234 ,  H01L27/088

Abstract: A method of forming a semiconductor device includes: forming a fin protruding above a substrate; forming isolation regions on opposing sides of the fin; forming a dummy gate over the fin; reducing a thickness of a lower portion of the dummy gate proximate to the isolation regions, where after reducing the thickness, a distance between opposing sidewalls of the lower portion of the dummy gate decreases as the dummy gate extends toward the isolation regions; after reducing the thickness, forming a gate fill material along at least the opposing sidewalls of the lower portion of the dummy gate; forming gate spacers along sidewalls of the dummy gate and along sidewalls of the gate fill material; and replacing the dummy gate with a metal gate.

公开(公告)号：US11476347B2

公开(公告)日：2022-10-18

申请号：US17018793

申请日：2020-09-11

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Shih-Yao Lin ,  Kuei-Yu Kao ,  Chen-Ping Chen ,  Chih-Han Lin ,  Ming-Ching Chang ,  Chao-Cheng Chen

IPC: H01L29/40 ,  H01L29/66 ,  H01L29/78 ,  H01L21/3213 ,  H01L21/311

Abstract: A method includes forming a dummy gate electrode on a semiconductor region, forming a first gate spacer on a sidewall of the dummy gate electrode, and removing an upper portion of the first gate spacer to form a recess, wherein a lower portion of the first gate spacer remains, filling the recess with a second gate spacer, removing the dummy gate electrode to form a trench, and forming a replacement gate electrode in the trench.