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公开(公告)号:US12191251B2
公开(公告)日:2025-01-07
申请号:US18334843
申请日:2023-06-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chien-Hsun Chen
IPC: H01L23/522 , H01L21/768 , H01L23/00 , H01L23/48 , H01L23/528 , H01L25/16
Abstract: A method includes forming a redistribution structure on a carrier, attaching an integrated passive device on a first side of the redistribution structure, attaching an interconnect structure to the first side of the redistribution structure, the integrated passive device interposed between the redistribution structure and the interconnect structure, depositing an underfill material between the interconnect structure and the redistribution structure, and attaching a semiconductor device on a second side of the redistribution structure that is opposite the first side of the redistribution structure.
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公开(公告)号:US20240379538A1
公开(公告)日:2024-11-14
申请号:US18782124
申请日:2024-07-24
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chien-Hsun Chen
IPC: H01L23/522 , H01L21/768 , H01L23/00 , H01L23/48 , H01L23/528 , H01L25/16
Abstract: A method includes forming a redistribution structure on a carrier, attaching an integrated passive device on a first side of the redistribution structure, attaching an interconnect structure to the first side of the redistribution structure, the integrated passive device interposed between the redistribution structure and the interconnect structure, depositing an underfill material between the interconnect structure and the redistribution structure, and attaching a semiconductor device on a second side of the redistribution structure that is opposite the first side of the redistribution structure.
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公开(公告)号:US11062998B2
公开(公告)日:2021-07-13
申请号:US16547567
申请日:2019-08-22
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chung-Hao Tsai , Chen-Hua Yu , Chuei-Tang Wang , Wei-Ting Chen , Chien-Hsun Chen , Shih-Ya Huang
IPC: H01L23/538 , H01L25/065 , H01L23/00 , H01L23/31 , H01L23/367 , H01L21/48 , H01L21/56 , H01L21/683 , H01L25/00
Abstract: A semiconductor package includes dies, a redistribution structure, a conductive structure and connectors. The conductive plate is electrically connected to contact pads of at least two dies and is disposed on redistribution structure. The conductive structure includes a conductive plate and a solder cover, and the conductive structure extend over the at least two dies. The connectors are disposed on the redistribution structure, and at least one connector includes a conductive pillar. The conductive plate is at same level height as conductive pillar. The vertical projection of the conductive plate falls on spans of the at least two dies.
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公开(公告)号:US20240363366A1
公开(公告)日:2024-10-31
申请号:US18771181
申请日:2024-07-12
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Yu-Min Liang , Yen-Ping Wang , Jiun Yi Wu , Chen-Hua Yu , Kai-Chiang Wu
IPC: H01L21/48 , H01L21/56 , H01L21/768 , H01L23/31 , H01L23/48 , H01L23/522
CPC classification number: H01L21/486 , H01L21/56 , H01L21/76898 , H01L23/3121 , H01L23/481 , H01L23/5226
Abstract: Interconnect devices, packaged semiconductor devices and methods are disclosed herein that are directed towards embedding a local silicon interconnect (LSI) device and through substrate vias (TSVs) into system on integrated substrate (SoIS) technology with a compact package structure. The LSI device may be embedded into SoIS technology with through substrate via integration to provide die-to-die FL connection arrangement for super large integrated Fan-Out (InFO) for SBT technology in a SoIS device. Furthermore, the TSV connection layer may be formed using lithographic or photoresist-defined vias to provide eLSI P/G out to a ball-grid-array (BGA) connection interface.
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5.
公开(公告)号:US11532587B2
公开(公告)日:2022-12-20
申请号:US17170268
申请日:2021-02-08
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Jiun Yi Wu , Chien-Hsun Lee , Chung-Shi Liu
Abstract: A method includes placing a package component over a carrier, encapsulating the package component in an encapsulant, and forming a connection structure over and electrically coupling to the package component. The formation of the connection structure includes forming a first via group over and electrically coupling to the package component, forming a first conductive trace over and contacting the first via group, forming a second via group overlying and contacting the first conductive trace, wherein each of the first via group and the second via group comprises a plurality of vias, forming a second conductive trace over and contacting the second via group, forming a top via overlying and contacting the second conductive trace, and forming an Under-Bump-Metallurgy (UBM) over and contacting the top via.
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公开(公告)号:US11177218B2
公开(公告)日:2021-11-16
申请号:US16824722
申请日:2020-03-20
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun-Yi Wu , Chien-Hsun Lee , Shou-Yi Wang , Chien-Hsun Chen
IPC: H01L25/065 , H01L23/538 , H01L23/31 , H01L21/52 , H01L23/00 , H01L21/56
Abstract: A package has a first semiconductor die, a second semiconductor die, a redistribution structure and a metallic bolstering pattern. The second semiconductor die is disposed beside the first semiconductor die and spaced apart from the first semiconductor die with a distance. The redistribution structure is disposed over the first semiconductor die and the second semiconductor die and is electrically connected with the first and second semiconductor dies. The metallic bolstering pattern is disposed between the redistribution structure and the first and second semiconductor dies. The metallic bolstering pattern is disposed on the redistribution structure and located over the first and second semiconductor dies, and the metallic bolstering pattern extends across the distance between the first and second semiconductor dies and extends beyond borders of the first and second semiconductor dies.
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公开(公告)号:US20230260862A1
公开(公告)日:2023-08-17
申请号:US18302589
申请日:2023-04-18
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Yu-Ling Tsai , Jiun Yi Wu , Chien-Hsun Lee , Chung-Shi Liu
IPC: H01L23/31 , H01L23/538 , H01L23/498
CPC classification number: H01L23/3121 , H01L23/5384 , H01L23/49827
Abstract: In an embodiment, a device includes: a first integrated circuit die having a first contact region and a first non-contact region; an encapsulant contacting sides of the first integrated circuit die; a dielectric layer contacting the encapsulant and the first integrated circuit die, the dielectric layer having a first portion over the first contact region, a second portion over the first non-contact region, and a third portion over a portion of the encapsulant; and a metallization pattern including: a first conductive via extending through the first portion of the dielectric layer to contact the first integrated circuit die; and a conductive line extending along the second portion and third portion of the dielectric layer, the conductive line having a straight portion along the second portion of the dielectric layer and a first meandering portion along the third portion of the dielectric layer.
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8.
公开(公告)号:US20230122816A1
公开(公告)日:2023-04-20
申请号:US18068088
申请日:2022-12-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Jiun Yi Wu , Chien-Hsun Lee , Chung -Shi Liu
Abstract: A method includes placing a package component over a carrier, encapsulating the package component in an encapsulant, and forming a connection structure over and electrically coupling to the package component. The formation of the connection structure includes forming a first via group over and electrically coupling to the package component, forming a first conductive trace over and contacting the first via group, forming a second via group overlying and contacting the first conductive trace, wherein each of the first via group and the second via group comprises a plurality of vias, forming a second conductive trace over and contacting the second via group, forming a top via overlying and contacting the second conductive trace, and forming an Under-Bump-Metallurgy (UBM) over and contacting the top via.
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公开(公告)号:US20210225764A1
公开(公告)日:2021-07-22
申请号:US17222225
申请日:2021-04-05
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jiun Yi Wu , Chen-Hua Yu , Chien-Hsun Chen
IPC: H01L23/522 , H01L25/16 , H01L23/528 , H01L23/00 , H01L21/768 , H01L23/48
Abstract: A method includes forming a redistribution structure on a carrier, attaching an integrated passive device on a first side of the redistribution structure, attaching an interconnect structure to the first side of the redistribution structure, the integrated passive device interposed between the redistribution structure and the interconnect structure, depositing an underfill material between the interconnect structure and the redistribution structure, and attaching a semiconductor device on a second side of the redistribution structure that is opposite the first side of the redistribution structure.
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公开(公告)号:US12080563B2
公开(公告)日:2024-09-03
申请号:US17994841
申请日:2022-11-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Hsun Chen , Yu-Min Liang , Yen-Ping Wang , Jiun Yi Wu , Chen-Hua Yu , Kai-Chiang Wu
IPC: H01L21/48 , H01L21/56 , H01L21/683 , H01L21/768 , H01L23/00 , H01L23/31 , H01L23/48 , H01L23/498 , H01L23/522 , H01L23/538
CPC classification number: H01L21/486 , H01L21/56 , H01L21/76898 , H01L23/3121 , H01L23/481 , H01L23/5226
Abstract: Interconnect devices, packaged semiconductor devices and methods are disclosed herein that are directed towards embedding a local silicon interconnect (LSI) device and through substrate vias (TSVs) into system on integrated substrate (SoIS) technology with a compact package structure. The LSI device may be embedded into SoIS technology with through substrate via integration to provide die-to-die FL connection arrangement for super large integrated Fan-Out (InFO) for SBT technology in a SoIS device. Furthermore, the TSV connection layer may be formed using lithographic or photoresist-defined vias to provide eLSI P/G out to a ball-grid-array (BGA) connection interface.
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