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公开(公告)号：US08591752B2
公开(公告)日：2013-11-26
申请号：US13399030
申请日：2012-02-17
CPC分类号： H01J37/321 , C23F4/00 , C23G5/00 , H01J2237/334 , H01L43/12
摘要： A method for plasma-etching a magnetic film and plasma-cleaning, in which deposits in an etching processing chamber are efficiently removed while corrosion of a wafer is suppressed, is provided. A plasma processing method for plasma-etching a to-be-processed substrate having a magnetic film in an etching processing chamber includes the steps of plasma-etching the magnetic film using a first gas not containing chlorine, transferring out the to-be-processed substrate from the etching processing chamber, first plasma-cleaning of the etching processing chamber using a second gas containing chlorine, and second plasma-cleaning using a third gas containing hydrogen after the first plasma cleaning.
摘要翻译： 提供了一种用于等离子体蚀刻磁性膜和等离子体清洁的方法，其中在蚀刻处理室中的沉积物被有效地去除，同时腐蚀晶片被抑制。 在蚀刻处理室中对具有磁性膜的被处理基板进行等离子体蚀刻的等离子体处理方法包括使用不含氯的第一气体等离子体蚀刻磁性膜的步骤，将待处理的 来自蚀刻处理室的衬底，首先使用含氯的第二气体对蚀刻处理室进行等离子体清洁，以及在第一等离子体清洗之后使用含有氢的第三气体进行第二等离子体清洁。
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公开(公告)号：US20130146563A1
公开(公告)日：2013-06-13
申请号：US13399030
申请日：2012-02-17
IPC分类号： H01F41/00
CPC分类号： H01J37/321 , C23F4/00 , C23G5/00 , H01J2237/334 , H01L43/12
摘要： A method for plasma-etching a magnetic film and plasma-cleaning, in which deposits in an etching processing chamber are efficiently removed while corrosion of a wafer is suppressed, is provided. A plasma processing method for plasma-etching a to-be-processed substrate having a magnetic film in an etching processing chamber includes the steps of plasma-etching the magnetic film using a first gas not containing chlorine, transferring out the to-be-processed substrate from the etching processing chamber, first plasma-cleaning of the etching processing chamber using a second gas containing chlorine, and second plasma-cleaning using a third gas containing hydrogen after the first plasma cleaning.
摘要翻译： 提供了一种用于等离子体蚀刻磁性膜和等离子体清洁的方法，其中在蚀刻处理室中的沉积物被有效地去除，同时腐蚀晶片被抑制。 在蚀刻处理室中对具有磁性膜的被处理基板进行等离子体蚀刻的等离子体处理方法包括使用不含氯的第一气体等离子体蚀刻磁性膜的步骤，将待处理的 来自蚀刻处理室的衬底，首先使用含氯的第二气体对蚀刻处理室进行等离子体清洁，以及在第一等离子体清洗之后使用含有氢的第三气体进行第二等离子体清洁。
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公开(公告)号：US08613811B2
公开(公告)日：2013-12-24
申请号：US13123053
申请日：2009-10-07
申请人： Daisuke Fujita , Keisuke Sagisaka , Keiko Onishi
发明人： Daisuke Fujita , Keisuke Sagisaka , Keiko Onishi
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/184 , C01B2204/02 , C01B2204/04
摘要： The present invention provides a graphene-coated member of a novel structure, and a process for producing such graphene-coated members. A graphene-coated member according to a first invention is a graphene-coated member that has a graphene film on a surface of a metallic base of a desired shape. The base includes carbon in a solid-solution state, and the graphene film is formed from solid-solution carbon precipitated at the base surface.
摘要翻译： 本发明提供了一种新颖结构的石墨烯涂层构件，以及这种石墨烯涂覆构件的制造方法。 根据第一发明的石墨烯涂覆构件是在所需形状的金属基底的表面上具有石墨烯膜的石墨烯涂覆构件。 基底包括固溶态碳，石墨烯膜由在基面沉淀的固溶碳形成。
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公开(公告)号：US20130284489A1
公开(公告)日：2013-10-31
申请号：US13996761
申请日：2011-02-28
申请人： Daisuke Fujita
发明人： Daisuke Fujita
IPC分类号： H01B17/36
摘要： A gas insulated bus is provided which comprises a metallic container whose axis is an axis line; a main circuit conductor housed in the metallic container; a metallic container to be connected with an end of the metallic container and whose axis is an axis line crossing the axis line; a main circuit conductor housed in the metallic container; an insulating spacer of a single-leg structure that supports and insulates a connection portion of the main circuit conductors; a metal-made shield attached to the insulating spacer and provided with an opening open in a direction of the axis line and an opening open in a direction of the axis line, the shield covering the connection portion, the shield being substantially in a barrel or spindle shape having an outside diameter exceeding that of the main circuit conductors.
摘要翻译： 提供一种气体绝缘母线，其包括：轴线为轴线的金属容器; 容纳在金属容器中的主电路导体; 金属容器，与金属容器的端部连接，其轴线是与轴线交叉的轴线; 容纳在金属容器中的主电路导体; 单腿结构的绝缘间隔件，其支撑并绝缘主电路导体的连接部分; 金属制的屏蔽件，其附接到绝缘间隔件并且设置有在轴线方向上敞开的开口和在轴线方向上敞开的开口，所述屏蔽覆盖连接部分，屏蔽件基本上在桶中或 主轴形状的外径超过主电路导体的外径。
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公开(公告)号：US20130237618A1
公开(公告)日：2013-09-12
申请号：US13885206
申请日：2011-11-18
IPC分类号： C07C29/154
CPC分类号： C07C29/154 , B01J23/80 , Y02P20/52 , C07C31/04
摘要： An object of the invention is to provide a methanol production process which can efficiently produce methanol from carbon dioxide and hydrogen while suppressing loads to the global environment. The process for producing methanol of the invention includes a step (a) of reacting hydrogen and carbon dioxide with each other in a reactor in the presence of a copper-containing catalyst to produce a reaction mixture containing methanol; a step (b) of circulating part or all of the reaction mixture to the step (a); a step (c1) of combusting part of the reaction mixture to produce a combustion product and energy, and a step (c2) of circulating part or all of the combustion product to the step (a), the step (c1) and the step (c2) being performed when the reaction mixture contains a compound (p) containing carbon and hydrogen except methanol at not less than 0.1 mol % (wherein all components of the reaction mixture excluding methanol and water represent 100 mol %); and a step (d) of separating a component including methanol from the reaction mixture.
摘要翻译： 本发明的一个目的是提供一种甲醇生产方法，该方法能够在抑制来自全球环境的负荷的情况下从二氧化碳和氢气中有效地生产甲醇。 本发明的制备甲醇的方法包括在反应器中在含铜催化剂存在下使氢气和二氧化碳彼此反应的步骤（a），以产生含有甲醇的反应混合物; 步骤（b）将部分或全部反应混合物循环到步骤（a）; 将反应混合物的一部分燃烧以产生燃烧产物和能量的步骤（c1），以及将步骤（c1）和步骤（c1）和步骤（c1）循环到步骤（a）中的部分或全部燃烧产物的步骤 （c2）当反应混合物含有不少于0.1mol％的甲醇以外的碳和氢的化合物（p）时（其中除甲醇和水之外的反应混合物的所有组分均为100mol％）; 和从反应混合物中分离包含甲醇的组分的步骤（d）。
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公开(公告)号：US08228665B2
公开(公告)日：2012-07-24
申请号：US12739974
申请日：2007-11-01
申请人： Daisuke Fujita , Takuya Otsuka , Hitoshi Sadakuni
发明人： Daisuke Fujita , Takuya Otsuka , Hitoshi Sadakuni
IPC分类号： H02B13/02
CPC分类号： H02B5/06
摘要： The object is to provide ring-bus-type gas insulated switchgear that ensures maintenance and inspection performance, reduces the installation space, and further reduces costs. Each of a plurality of breaker units is formed by connecting an instrument current transformer and a disconnector to each of the upper and lower branch ports drawn horizontally from the side surface of a vertical breaker in the same direction, and the breaker units are arranged in parallel. Adjacent disconnectors are connected to each other by a connection bus, so that the bus route runs alternately at upper and lower levels. Furthermore, the breaker units positioned at the two ends are connected linearly to each other by a communication bus. In addition, the line-side devices are arranged to face the corresponding breaker units across the disconnectors.
摘要翻译： 目的是提供环形母线式气体绝缘开关柜，确保维护和检查性能，减少安装空间，进一步降低成本。 多个断路器单元中的每一个通过将仪表电流互感器和隔离开关连接到从垂直断路器的侧表面沿相同方向从水平方向拉出的上部和下部分支端口而形成，并且断路器单元并联布置 。 相邻的隔离开关通过连接总线相互连接，使总线路线交替上下运行。 此外，位于两端的断路器单元通过通信总线彼此线性连接。 此外，线路侧设备布置成跨过隔离开关面对相应的断路器单元。
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公开(公告)号：US08000087B2
公开(公告)日：2011-08-16
申请号：US12738769
申请日：2007-11-29
申请人： Daisuke Fujita , Takuya Otsuka , Hitoshi Sadakuni
发明人： Daisuke Fujita , Takuya Otsuka , Hitoshi Sadakuni
IPC分类号： H02B13/02
摘要： Each integral unit is structured by arranging partial units (I), (II), and (Ill) side by side, while line-side devices are branched from positions between the partial units adjacent to each other. Each of the partial units is structured by connecting a current transformer and a disconnector in sequence to each of upper and lower outlets horizontally drawn out from a lateral face of a vertical-type circuit breaker in the same direction. Any two partial units positioned adjacent to each other are connected in series by connecting the disconnectors included therein with a connection bus. The line-side devices are positioned to oppose the circuit breakers while the disconnectors are interposed therebetween. The switchgear includes a plurality of integral units. Two ends of each of the integral units are respectively connected to two main buses that are provided in an upper position and a lower position while the disconnectors are interposed therebetween.
摘要翻译： 每个整体单元通过并排布置部分单元（I），（II）和（III）而构成，而线侧装置从彼此相邻的部分单元之间的位置分支。 每个部分单元通过将电流互感器和隔离开关依次连接到从垂直型断路器的侧面在相同方向上水平拉出的每个上部和下部出口来构成。 通过将包括在其中的隔离开关与连接总线连接，彼此相邻定位的两个部分单元串联连接。 线路侧设备定位成与断路器相对，而隔离开关之间插入断路器。 开关装置包括多个整体单元。 每个整体单元的两端分别连接到设置在上部位置和下部位置的两个主要总线，同时隔离开关之间。
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8.发明申请Conductive material using carbon nano-tube, and manufacturing method thereof 审中-公开使用碳纳米管的导电材料及其制造方法公开(公告)号：US20050081983A1
公开(公告)日：2005-04-21
申请号：US10504867
申请日：2002-07-15
IPC分类号： B82Y30/00 , B82Y99/00 , C01B31/02 , H01B1/04 , H01B1/24 , H01B13/00 , H01G9/00 , H01G11/22 , H01G11/36 , H01G11/86 , H01M4/96 , B44C1/165
摘要： An object of the invention is to provide a carbon nanotube electrode which is suited to quantity production and advantageous in cost, and a process for producing the same. When carbon nanotubes on respective catalyst particles 12 on an endless belt 3 gradually fall down to a horizontal position while moving around a driven drum 2 after traveling from a CVD zone to a transfer zone with the movement of the belt, the carbon nanotubes 11 have their outer ends pressed against a conductive film 8. The conductive film 8 is sent out from a film feeder 9 downward and heated by a heater 10 to a temperature not lower than the softening temperature of the film to below the melting temperature thereof. The carbon nanotubes 11 are transferred from the catalyst particles 12 to the conductive film 8 substantially perpendicular to the film surface by being pressed against the conductive film 8 in this way.
摘要翻译： 本发明的目的是提供一种适合于数量生产并且成本有利的碳纳米管电极及其制造方法。 当循环带3上的各个催化剂颗粒12上的碳纳米管随着带的移动而从CVD区域移动到转移区域时，随着从动滚筒2移动而逐渐下降到水平位置时，碳纳米管11具有它们 外端压靠导电膜8。 导电膜8从薄膜馈送器9向下送出，并通过加热器10加热至不低于薄膜软化温度的温度，使其低于其熔融温度。 以这种方式将碳纳米管11从基板垂直于膜表面的催化剂颗粒12转移到导电膜8。
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公开(公告)号：US09269475B2
公开(公告)日：2016-02-23
申请号：US13879525
申请日：2010-11-15
申请人： Daisuke Fujita
发明人： Daisuke Fujita
摘要： A gas-insulated bus bar includes a metal container, a main circuit conductor that is accommodated in the metal container, an insulation spacer of a one-legged structure that includes one end portion attached to the metal container and the other end portion holding the main circuit conductor in the metal container, a shield that is substantially barrel-shaped, attached to the other end portion, and having an outer diameter larger than an outer diameter of the main circuit conductor, and a branch pipe provided on a side of the metal container and branched in a direction substantially perpendicular to an axis line, thereby including an inside portion where the one end portion is arranged. When viewing from a direction parallel to a branching direction of the branch pipe, the insulation spacer and the shield have respective sizes that are arranged within an area defined by an inner diameter of the branch pipe.
摘要翻译： 气体绝缘母线包括金属容器，容纳在金属容器中的主电路导体，单脚结构的绝缘垫片，其包括一个端部附接到金属容器，另一端保持主体 金属容器中的电路导体，基本上是桶形的屏蔽件，附接到另一端部，并且具有大于主电路导体的外径的外径，以及设置在金属的一侧的分支管 容器并且在基本上垂直于轴线的方向上分支，从而包括其中一个端部布置的内部部分。 当从分支管的分支方向平行的方向观察时，绝缘间隔件和屏蔽件具有布置在由分支管的内径限定的区域内的各自的尺寸。
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公开(公告)号：US09019685B2
公开(公告)日：2015-04-28
申请号：US13641764
申请日：2011-04-14
摘要： A spiral capacitor-inductor device in which an array of unit capacitors 101 is arranged in a loop along the length is provided as the fourth circuit element. An input signal is applied to one end of the array of the unit capacitors, an output signal is taken out from the other end, an electric charge stored in each unit capacitor increases or decreases in accordance with increase or decrease in the bias applied to the device, the increase or decrease in the electric charge causes the current of the loop to increase or decrease, and, as a result, the magnetic flux 103 generated in the device varies. Accordingly, the fourth circuit element is provided that follows after an inductor, a capacitor, and a resistor is provided in which the electric charge stored determines the magnitude of its magnetic flux.
摘要翻译： 作为第四电路元件提供螺旋电容器 - 电感器装置，其中单元电容器101的阵列沿着该长度布置在环路中。 输入信号被施加到单位电容器的阵列的一端，从另一端取出输出信号，存储在每个单位电容器中的电荷根据施加到单元电容器的偏压的增加或减小而增加或减小 装置中，电荷的增加或减少导致环路的电流增加或减小，结果，装置中产生的磁通量103变化。 因此，在提供电感器，电容器和电阻器之后，提供第四电路元件，其中存储的电荷决定其磁通量的大小。
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