公开(公告)号：US06415664B2

公开(公告)日：2002-07-09

申请号：US09778737

申请日：2001-02-08

申请人： Takao Iwaki ,  Kazuhiko Kano ,  Toshiki Isogai

发明人： Takao Iwaki ,  Kazuhiko Kano ,  Toshiki Isogai

IPC分类号： G01P900

CPC分类号： G01C19/5719

摘要： An angular velocity sensor has a weight portion that can be drive-oscillated in a driving direction and be oscillated in a detecting direction when an angular velocity is applied, and unnecessary oscillation suppressing electrodes that can generate an electrostatic force to be applied to the weight portion in the detecting direction. The electrostatic force prevents the weight portion from being drive-oscillated in a direction other than the driving direction. As a result, unnecessary oscillation of the weight portion can be prevented even when the angular velocity sensor has a processing error.

摘要翻译： 角速度传感器具有可以沿着驱动方向驱动振荡并且当施加角速度时沿检测方向振动的重量部分，以及可产生施加到重物部分的静电力的不必要的振动抑制电极 在检测方向。 静电力防止重物部分沿除驱动方向以外的方向驱动振荡。 结果，即使当角速度传感器具有处理误差时也可以防止重量部分的不必要的振动。

公开(公告)号：US20060053890A1

公开(公告)日：2006-03-16

申请号：US11265281

申请日：2005-11-03

申请人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

发明人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814 ,  G01P2015/0817

摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

公开(公告)号：US07107846B2

公开(公告)日：2006-09-19

申请号：US11265281

申请日：2005-11-03

申请人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

发明人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814 ,  G01P2015/0817

摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

摘要翻译： 电容型加速度传感器包括半导体基板，通过弹簧部分支撑在基板上的重量部分，与重物部分一体化的可动电极以及与该基板悬臂连接的固定电极。 根据加速度，可移动电极与可动电极的相对表面一起移动。 可动电极的相对表面面对固定电极的相对表面，以提供电容器。 电容器的电容根据可动电极的位移而变化，使得外部电路作为电容变化来检测加速度。 可移动和固定电极的每个相对表面具有用于增加电容变化的凹凸部分。

公开(公告)号：US07004026B2

公开(公告)日：2006-02-28

申请号：US10703461

申请日：2003-11-10

申请人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

发明人： Kazuhiko Kano ,  Tetsuo Yoshioka ,  Takao Iwaki ,  Yukihiro Takeuchi

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0814 ,  G01P2015/0817

摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

公开(公告)号：US06705160B2

公开(公告)日：2004-03-16

申请号：US10197474

申请日：2002-07-18

申请人： Takao Iwaki ,  Toshimasa Yamamoto ,  Hiroyuki Wado

发明人： Takao Iwaki ,  Toshimasa Yamamoto ,  Hiroyuki Wado

IPC分类号： G01F168

CPC分类号： G01F1/692

摘要： A thin-film type flow sensor having a thin-film part in which a plurality of patterned resistor films are sandwiched between a pair of insulator films. The resistance ratios among the resistor films are minimized from one sensor to another made from the same wafer. The flow sensor has a lower insulator film, the resistor films, and an upper film laminated in succession on a substrate. The resistor films include a patterned fluid thermometer, a temperature detector, and a heater. The heater has a wiring configuration in which resistor elements are connected in a parallel manner. The wiring widths of the heater and the thermometer can thus be made identical, so that the resistance ratios become invariant over the wafer surface, irrespective of a disparity in etching variations.

摘要翻译： 一种薄膜型流量传感器，其具有多个图案化的电阻膜夹在一对绝缘膜之间的薄膜部分。 电阻膜之间的电阻比从一个传感器到另一个由相同晶片制成的电阻比最小化。 流量传感器具有下层绝缘膜，电阻膜和在基片上连续层压的上层膜。 电阻膜包括图案化流体温度计，温度检测器和加热器。 加热器具有其中电阻元件以并联方式连接的布线配置。 因此，加热器和温度计的布线宽度可以相同，使得电阻比在晶片表面上变得不变，而不管蚀刻变化的不同。

公开(公告)号：US20110019202A1

公开(公告)日：2011-01-27

申请号：US12805225

申请日：2010-07-20

申请人： Takao Iwaki ,  Hiroyuki Wado

发明人： Takao Iwaki ,  Hiroyuki Wado

IPC分类号： G01B9/02

CPC分类号： G02B26/001 ,  G01J3/26

摘要： A Fabry-Perot interferometer and a manufacturing method of the same are disclosed. The Fabry-Perot interferometer includes a first mirror structure and a second mirror structure opposed to each other with a gap therebetween. A first mirror and a first electrode of the first mirror structure are electrically insulated from each other, or, a second mirror and a second electrode of the second mirror structure are electrically insulated from each other. In a state of voltage application between the first and second electrode, a distance “dmi” between the first mirror and the second mirror is shorter than a distance “dei” between a first-electrode-inclusive-portion and a second-electrode-inclusive-portion.

摘要翻译： 公开了一种法布里 - 珀罗干涉仪及其制造方法。 法布里 - 珀罗干涉仪包括彼此相对并且间隔开的第一反射镜结构和第二反射镜结构。 第一反射镜结构的第一反射镜和第一电极彼此电绝缘，或者第二反射镜结构的第二反射镜和第二电极彼此电绝缘。 在第一和第二电极之间的施加电压的状态下，第一反射镜和第二反射镜之间的距离“dmi”比第一电极包含部分和第二电极之间的距离“dei”短 -一部分。

公开(公告)号：US20060194332A1

公开(公告)日：2006-08-31

申请号：US11410093

申请日：2006-04-25

申请人： Hiroyuki Wado ,  Makiko Sugiura ,  Yukihiro Takeuchi ,  Takao Iwaki

发明人： Hiroyuki Wado ,  Makiko Sugiura ,  Yukihiro Takeuchi ,  Takao Iwaki

IPC分类号： G01N33/00

CPC分类号： G01N27/124

摘要： A more reliable gas sensor includes a support film formed on a surface of a substrate and a heater electrode. Surrounding the heater electrode is a heater electrical insulation layer 4. Detection electrodes are formed above the electrical insulation layer. A flat insulating layer is formed over the heater insulation layer, and surfaces of the detection electrodes are exposed and flush with the upper surface of the flat insulating layer. A sensitive film is formed above the flat insulating layer in contact with the surfaces of the detection electrodes. A hollow cavity is formed in the substrate.

摘要翻译： 更可靠的气体传感器包括形成在基板的表面上的支撑膜和加热器电极。 加热器电极周围是加热器电绝缘层4。 检测电极形成在电绝缘层的上方。 在加热器绝缘层之上形成平坦的绝缘层，并且检测电极的表面暴露并与平坦绝缘层的上表面齐平。 敏感膜形成在与检测电极的表面接触的平坦绝缘层的上方。 在基板中形成中空腔。

公开(公告)号：US06983653B2

公开(公告)日：2006-01-10

申请号：US10731094

申请日：2003-12-10

申请人： Takao Iwaki ,  Hiroyuki Wado ,  Toshimasa Yamamoto ,  Kiyokazu Isomura ,  Tomoyuki Mizutani ,  Akihiko Teshigahara ,  Ryuuichirou Abe

发明人： Takao Iwaki ,  Hiroyuki Wado ,  Toshimasa Yamamoto ,  Kiyokazu Isomura ,  Tomoyuki Mizutani ,  Akihiko Teshigahara ,  Ryuuichirou Abe

IPC分类号： G01F1/68

CPC分类号： G01F1/692

摘要： A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy consumption. Further, the sensor has high detection accuracy, and the thin film portion has high endurance. Furthermore, the flow sensor with a passivation film has appropriate thickness so as to improve strength of a thin film portion.

摘要翻译： 用于检测流体流动的流量传感器包括薄膜部分。 薄膜部分具有用于检测加热器周围温度的加热器和检测器。 加热器由半导体制成。 该流量传感器具有高传感器灵敏度，低能耗。 此外，传感器具有高检测精度，薄膜部分具有高耐久性。 此外，具有钝化膜的流量传感器具有适当的厚度，以便提高薄膜部分的强度。

公开(公告)号：US06938473B2

公开(公告)日：2005-09-06

申请号：US10298230

申请日：2002-11-18

申请人： Takao Iwaki ,  Toshiyuki Morishita ,  Yasushi Kohno ,  Hiroyuki Wado ,  Yasushi Goka ,  Makoto Tsunekawa ,  Toshirou Gotou ,  Kiyoyuki Sugiura

发明人： Takao Iwaki ,  Toshiyuki Morishita ,  Yasushi Kohno ,  Hiroyuki Wado ,  Yasushi Goka ,  Makoto Tsunekawa ,  Toshirou Gotou ,  Kiyoyuki Sugiura

IPC分类号： G01F1/684 ,  G01F1/68

CPC分类号： G01F1/6842

摘要： An airflow meter has a membrane type sensor element. The sensor element is supported on a support member so that a sensing surface of the sensor element is in parallel to the airflow direction. The airflow meter has at least one means for protecting the sensor element from dust such as foreign particles. The protecting means is provided with an obstruction member that is disposed upstream or downstream of the sensor element with respect to the airflow direction. The sensor element is hidden behind the obstruction member. The obstruction member has gradually spreading surfaces and gradually converging surfaces along the airflow direction. Alternatively, the protecting means can be provided with a deflector, a cover member, a flow guide member, an inlet or a dust collector.

摘要翻译： 气流计具有膜式传感器元件。 传感器元件支撑在支撑构件上，使得传感器元件的感测表面平行于气流方向。 气流计具有至少一种用于保护传感器元件免受诸如外来颗粒的灰尘的装置。 保护装置设置有相对于气流方向设置在传感器元件的上游或下游的阻塞构件。 传感器元件隐藏在阻塞构件后面。 阻塞构件具有逐渐扩散的表面并沿着气流方向逐渐收敛表面。 或者，保护装置可以设置有偏转器，盖构件，导流构件，入口或集尘器。

公开(公告)号：US06701782B2

公开(公告)日：2004-03-09

申请号：US10199116

申请日：2002-07-22

申请人： Takao Iwaki ,  Toshimasa Yamamoto ,  Hiroyuki Wado ,  Yukihiro Takeuchi

发明人： Takao Iwaki ,  Toshimasa Yamamoto ,  Hiroyuki Wado ,  Yukihiro Takeuchi

IPC分类号： G01F168

CPC分类号： G01F1/692

摘要： A flow sensor, which includes a diaphragm, is made such that the diaphragm is flat or outwardly deformed to allow fluid flow rate measurements at higher flow rates. The diaphragm is made of an upper set of insulating films, electric devices, and a lower set of insulating films. The component layers of the diaphragm are formed such that the average stress in the upper set of insulating films is more compressive than the average stress in the lower set of insulating films.

摘要翻译： 包括隔膜的流量传感器被制成使得隔膜是平坦的或向外变形的，以允许在较高流速下进行流体流速测量。 隔膜由上一组绝缘膜，电气设备和下一组绝缘膜制成。 隔膜的部件层形成为使得上部绝缘膜中的平均应力比下部绝缘膜中的平均应力更大的压缩。