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公开(公告)号：US06701782B2
公开(公告)日：2004-03-09
申请号：US10199116
申请日：2002-07-22
IPC分类号： G01F168
CPC分类号： G01F1/692
摘要： A flow sensor, which includes a diaphragm, is made such that the diaphragm is flat or outwardly deformed to allow fluid flow rate measurements at higher flow rates. The diaphragm is made of an upper set of insulating films, electric devices, and a lower set of insulating films. The component layers of the diaphragm are formed such that the average stress in the upper set of insulating films is more compressive than the average stress in the lower set of insulating films.
摘要翻译： 包括隔膜的流量传感器被制成使得隔膜是平坦的或向外变形的，以允许在较高流速下进行流体流速测量。 隔膜由上一组绝缘膜，电气设备和下一组绝缘膜制成。 隔膜的部件层形成为使得上部绝缘膜中的平均应力比下部绝缘膜中的平均应力更大的压缩。
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公开(公告)号：US20110227040A1
公开(公告)日：2011-09-22
申请号：US13043842
申请日：2011-03-09
申请人： Takao IWAKI , Hiroyuki Wado , Yukihiro Takeuchi
发明人： Takao IWAKI , Hiroyuki Wado , Yukihiro Takeuchi
摘要： A temperature sensor includes a semiconductor substrate and a quantum well structural part disposed on the semiconductor substrate. The semiconductor substrate is made of a plurality of elements. The quantum well structural part has a resistance value that changes with temperature. The quantum well structural part includes a plurality of semiconductor layers made of the elements. The semiconductor layers include a plurality of quantum barrier layers and a quantum well layer disposed between the quantum barrier layers. When the semiconductor substrate has a lattice constant “a,” each of the quantum barrier layers has a lattice constant “b,” and the quantum well layer has a lattice constant “c,” the semiconductor substrate, the quantum barrier layers, and the quantum well layer satisfy a relationship of b
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公开(公告)号：US20060194332A1
公开(公告)日：2006-08-31
申请号：US11410093
申请日：2006-04-25
申请人： Hiroyuki Wado , Makiko Sugiura , Yukihiro Takeuchi , Takao Iwaki
发明人： Hiroyuki Wado , Makiko Sugiura , Yukihiro Takeuchi , Takao Iwaki
IPC分类号： G01N33/00
CPC分类号： G01N27/124
摘要： A more reliable gas sensor includes a support film formed on a surface of a substrate and a heater electrode. Surrounding the heater electrode is a heater electrical insulation layer 4. Detection electrodes are formed above the electrical insulation layer. A flat insulating layer is formed over the heater insulation layer, and surfaces of the detection electrodes are exposed and flush with the upper surface of the flat insulating layer. A sensitive film is formed above the flat insulating layer in contact with the surfaces of the detection electrodes. A hollow cavity is formed in the substrate.
摘要翻译： 更可靠的气体传感器包括形成在基板的表面上的支撑膜和加热器电极。 加热器电极周围是加热器电绝缘层4。 检测电极形成在电绝缘层的上方。 在加热器绝缘层之上形成平坦的绝缘层，并且检测电极的表面暴露并与平坦绝缘层的上表面齐平。 敏感膜形成在与检测电极的表面接触的平坦绝缘层的上方。 在基板中形成中空腔。
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公开(公告)号：US06602428B2
公开(公告)日：2003-08-05
申请号：US09991986
申请日：2001-11-26
IPC分类号： H01L2100
CPC分类号： G01F1/6845 , B81B2201/0264 , B81B2203/0127 , B81C1/00182 , B81C2201/014 , B81C2201/0169 , G01L9/0042
摘要： A sensor for measuring a physical amount such as an amount of air includes a membrane structure composed of metal stripes sandwiched between first and second insulating layers. A metal layer made of platinum or the like is formed on the first insulating layer and then heat-treated to improve its properties. Then, the metal layer is etched into a form of the metal stripes. The second insulating layer made of a material such as silicon dioxide is formed on the etched metal stripes. Since the metal layer is heat-treated before it is etched into the form of metal stripes, the metal stripes are not deformed by the heat-treatment. The second insulating layer can be formed on the metal stripes without generating cracks in the second insulating layer.
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公开(公告)号：US06626037B1
公开(公告)日：2003-09-30
申请号：US09515496
申请日：2000-02-29
IPC分类号： G01F168
CPC分类号： G01F1/692 , G01F1/6845
摘要： A flow sensor, which can detect flow velocity in a wide range including high flow velocity area with simple structure. A flow sensor includes a substrate having a hollow portion; and a thin film structure portion provided above the hollow portion. The thin film structure portion is provided with a heater formed in a center portion, an upper and a lower stream temperature detectors for detecting temperature of the fluid, a fluid thermometer for detecting temperature of the fluid, and thermal couple films provided on the substrate at a portion, where is between the heater and both temperature detectors. According to this structure, the thermal couple films enhance thermal coupling between the heater and the temperature detectors. Accordingly, it can prevent the temperature of the upper stream temperature detector from falling to around the temperature of the fluid, and it can raise a certain flow velocity at which a cooling of the low stream temperature detector due to the flowing fluid exceeds a heating by the heater. Therefore, it can detect flow velocity in a wide range including high flow velocity area.
摘要翻译： 一种流量传感器，可以在宽范围内检测流速，包括结构简单的高流速区域。 流量传感器包括具有中空部分的基板; 以及设置在中空部分上方的薄膜结构部分。 薄膜结构部分设置有形成在中心部分的加热器，用于检测流体温度的上下流温度检测器，用于检测流体温度的流体温度计，以及设置在基板上的热耦合膜 加热器和两个温度检测器之间的部分。 根据该结构，热耦合膜增强了加热器和温度检测器之间的热耦合。 因此，能够防止上游温度检测器的温度下降到流体的温度附近，并且能够提高一定的流速，在该流速下，由流动的流体导致的低流量温度检测器的冷却超过加热 加热器。 因此，它可以检测到包括高流速面积在内的宽范围内的流速。
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公开(公告)号：US08411281B2
公开(公告)日：2013-04-02
申请号：US13301988
申请日：2011-11-22
申请人： Tomoki Tanemura , Yukihiro Takeuchi , Takao Iwaki , Megumi Suzuki
发明人： Tomoki Tanemura , Yukihiro Takeuchi , Takao Iwaki , Megumi Suzuki
IPC分类号： G01B9/02
CPC分类号： G01J3/26
摘要： A Fabry-Perot interferometer includes a fixed mirror structure and a movable mirror structure. The fixed mirror structure has a fixed mirror in a spectral region. The movable mirror structure includes a membrane spaced from the fixed mirror structure. The membrane has a movable mirror in the spectral region and multiple springs arranged one inside the other around the spectral region. A spring constant of the inner spring is less than a spring constant of the outer spring. One of the fixed mirror structure and the membrane has multiple electrodes, and the other of the fixed mirror structure and the membrane has at least one electrode that is paired with the electrodes to form opposing electrode pairs arranged one inside the other around the spectral region. The number of the opposing electrode pairs is equal to the number of the springs.
摘要翻译： 法布里 - 珀罗干涉仪包括固定镜结构和可移动镜结构。 固定镜结构在光谱区域具有固定的反射镜。 可移动镜结构包括与固定镜结构间隔开的膜。 膜在光谱区域具有可移动反射镜，并且在光谱区域周围布置有多个弹簧。 内弹簧的弹簧常数小于外弹簧的弹簧常数。 固定镜结构和膜中的一个具有多个电极，固定镜结构和膜中的另一个具有至少一个与电极成对的电极，以在光谱区域周围形成相对的电极对。 相对电极对的数量等于弹簧的数量。
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公开(公告)号：US06786089B2
公开(公告)日：2004-09-07
申请号：US10253502
申请日：2002-09-25
申请人： Koichi Goto , Yukihiro Takeuchi , Takao Iwaki , Yasushi Goka
发明人： Koichi Goto , Yukihiro Takeuchi , Takao Iwaki , Yasushi Goka
IPC分类号： G01L168
CPC分类号： G01F15/12 , G01F1/6842 , G01F5/00
摘要： An airflow meter has a member that defines a bypass passage. The bypass passage has a sensing passage in which a sensor tip is disposed. The sensing passage is restricted in at least a lateral direction that is a direction perpendicular to both a longitudinal direction of the sensing passage and a perpendicular direction perpendicular to the surface of the sensor tip. This arrangement defines relatively wider distance in the perpendicular direction on the sensor tip.
摘要翻译： 气流计具有限定旁路通道的构件。 旁通通道具有传感器尖端设置在其中的感测通道。 感测通道至少沿垂直于感测通道的纵向方向的方向和垂直于传感器尖端表面的垂直方向的横向限制。 这种布置在传感器顶端上沿垂直方向限定相对更宽的距离。
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公开(公告)号：US07107846B2
公开(公告)日：2006-09-19
申请号：US11265281
申请日：2005-11-03
申请人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
发明人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814 , G01P2015/0817
摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
摘要翻译： 电容型加速度传感器包括半导体基板，通过弹簧部分支撑在基板上的重量部分，与重物部分一体化的可动电极以及与该基板悬臂连接的固定电极。 根据加速度，可移动电极与可动电极的相对表面一起移动。 可动电极的相对表面面对固定电极的相对表面，以提供电容器。 电容器的电容根据可动电极的位移而变化，使得外部电路作为电容变化来检测加速度。 可移动和固定电极的每个相对表面具有用于增加电容变化的凹凸部分。
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公开(公告)号：US07004026B2
公开(公告)日：2006-02-28
申请号：US10703461
申请日：2003-11-10
申请人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
发明人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814 , G01P2015/0817
摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
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公开(公告)号：US20060053890A1
公开(公告)日：2006-03-16
申请号：US11265281
申请日：2005-11-03
申请人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
发明人： Kazuhiko Kano , Tetsuo Yoshioka , Takao Iwaki , Yukihiro Takeuchi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814 , G01P2015/0817
摘要： A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.
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