摘要:
A wafer transferring hand is so constructed that at least three seats made of a soft low-friction material are provided in an integral manner, a groove having a width slightly wider than the thickness of the wafer is formed in the laterally arranged seats, the bottom of the groove being arcuated in a manner conforming to the periphery of the wafer, while a similar groove having an adjustable width is provided in the seat arranged at the center, the bottom of the groove being spaced apart outwardly from the periphery of the wafer, and at least two cut-away portions are provided between the seats so as to provide a gap between the periphery of the wafer and the bottom of the cut-away portion.
摘要:
An electromagnetic steel plate forming member provides the two magnet holes for inserting therein the two permanent magnets per pole along the V-shape, which are provided in the region of the radial pole pitch lines OP provided in the rotor core at the predetermined pole pitch angle θ, one magnet hole is displaced in a direction apart from the center line OC of the pole pitch lines OP, and the other magnet hole is displaced in a direction approaching to the center line OC of the pole pitch lines OP.
摘要:
The cylindrical linear motor includes: a stator 1 that has a plurality of coils 5 coiled in a cylindrical shape and arranged in an axial direction on an inner side of a metal pipe 4; a mover 2 disposed to face an inner side of the stator 1 with a magnetic gap therebetween and having a plurality of permanent magnets 6 inserted in the axial direction into a cylindrical can 9; shafts 8 inserted into the mover 2; shaft support members 7 for supporting the shafts 8 at both axial ends of the metal pipe 4; and shaft receiving member 10 each disposed at both ends of an inner side of the can 9 to be adjacent to the permanent magnets 6 and having a concave portion 10a for fitting to a cone of the shaft 8.
摘要:
A dual-band frequency converter unit, for selectively performing frequency conversion between a 2.4-GHz high-frequency-band signal or a 5-GHz high-frequency-band signal and a baseband signal by frequency mixing, includes a local oscillator for generating a local oscillation signal; a first frequency divider for generating a half-frequency signal of the local oscillation signal; and a second frequency divider for generating a quarter-frequency signal of the local oscillation signal. Frequency conversion between the 2.4-GHz high-frequency-band signal and the baseband signal is performed by frequency mixing using the half-frequency signal of the local oscillation signal. Frequency conversion between the 5-GHz high-frequency-band signal and the baseband signal is performed by frequency mixing using the local oscillation signal and the quarter-frequency signal of the local oscillation signal.
摘要:
A thermo-transfer sheet is composed of a base film and an ink layer to be transferred having a softening point of more than 120.degree. C. A label is formed by the thermo-transfer sheet and provided with an image ink layer formed on a thermo-transfer image receiving sheet through a temperature-sensitive adhesive layer and the image ink layer has a softening point of more than 120.degree. C. The thermo-transfer sheet and the thermo-transfer image receiving sheet are prepared and a temperature-sensitive adhesive layer is formed on at least one of the surface of the thermo-transfer sheet or the transfer ink layer of the thermo-transfer image receiving sheet. These sheets are laminated and the laminated sheets are heated by means of a thermal head to thereby transfer the image ink layer having a softening point of more than 120.degree. C. on the thermo-transfer image receiving sheet. According to these processes, a label such as bar code is manufactured with an excellent durability such as friction-proof property, solvent-proof property and heat-proof property.
摘要:
A heat-treatment apparatus comprises a heat-treatment section for subjecting a heat-treatment to a wafer and a loading section for loading a wafer boat into and unloading it from the heat-treatment section. The loading section is connected to the heat-treatment section and includes in it a movable support member, a drive mechanism and a vertical base board as well as a load-lock chamber for maintaining the inside in vacuum. The movable support member supports a wafer boat. The movable support member is attached to a vertical base board so that it can move up and down. The drive mechanism is attached on the major surface of the vertical base board opposite to the surface facing the wafer boat. The drive mechanism drives the movable support to move up and down. The heat-treatment apparatus further comprises a wafer transfer section that includes an orientation flat alignment mechanism and a buffer stage disposed near the orientation flat alignment mechanism. The wafer transfer section includes a wafer cassette means, a buffer stage and a wafer transfer robot for transferring wafers between the orientation flat alignment mechanism and the wafer boat.
摘要:
A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer loading and unloading chamber, the robot chamber comprises a first load lock chamber while the wafer loading and unloading chamber comprises a second load lock chamber. These first and second load lock chambers are mutually connected by a pressure balancing gas conduit via pressure balancing valves. During heat treatment of the target objects, the wafer loading and unloading chamber and robot chamber are first set to inert gas atmospheres, then the pressure balancing gas conduit valves are opened to balance the pressures of the robot and cassette chambers. Gate valves between these chambers are then opened, and the cassette is conveyed via the robot chamber to a wafer boat in the wafer loading and unloading chamber. By this process gas flow between the two chambers when the gate valves are opened is suppressed to allow minimizing the production of particles.
摘要:
A tuner in which a band switching signal corresponding to a channel selected from a plurality of UHF and VHF bands is generated to enable the formation of a suitable resonant circuit for receiving television signals of the selected channel. It includes a varactor diode, a plurality of resonant coils and distribution constant lines which are each grounded at one end. Each of the coils and the line is provided for forming a resonant circuit for tuning one of the bands. A plurality of switching diodes are provided for connecting the other ends of the coils and the line selectively to the other end of the varactor diode. The tuner further includes a device for turning on and off the switching diodes selectively in response to the band switching signal.
摘要:
In an arm operating device of an industrial robot, two chains are laid over the driving wheel provided in the supporting arm and the driven wheel provided in the bending arm, respectively, and are coupled through rigid transmission rods and a tension device to each other, and one of the transmission rods is rectangular in section, and is slightly pushed inwardly by a guide provided on the supporting arm, whereby the device operates positively and smoothly with being free from vibrations, and chain elongation and twist.