Wafer transfer hand
    1.
    发明授权
    Wafer transfer hand 失效
    晶圆转手

    公开(公告)号:US4848814A

    公开(公告)日:1989-07-18

    申请号:US112964

    申请日:1987-10-27

    摘要: A wafer transferring hand is so constructed that at least three seats made of a soft low-friction material are provided in an integral manner, a groove having a width slightly wider than the thickness of the wafer is formed in the laterally arranged seats, the bottom of the groove being arcuated in a manner conforming to the periphery of the wafer, while a similar groove having an adjustable width is provided in the seat arranged at the center, the bottom of the groove being spaced apart outwardly from the periphery of the wafer, and at least two cut-away portions are provided between the seats so as to provide a gap between the periphery of the wafer and the bottom of the cut-away portion.

    摘要翻译: 晶片传送手的结构使得至少三个由软质低摩擦材料制成的座椅以一体的方式设置,在横向布置的座椅中形成了宽度略大于晶片厚度的槽,底部 凹槽以与晶片周边相符的方式被弧形化,而具有可调节宽度的类似的凹槽设置在布置在中心的座中,凹槽的底部与晶片的周边间隔开, 并且至少两个切割部分设置在座之间,以便在晶片的周边和切除部分的底部之间提供间隙。

    Cylindrical linear motor
    3.
    发明授权
    Cylindrical linear motor 有权
    圆柱直线电机

    公开(公告)号:US07825548B2

    公开(公告)日:2010-11-02

    申请号:US12090949

    申请日:2006-04-17

    IPC分类号: H02K41/02

    摘要: The cylindrical linear motor includes: a stator 1 that has a plurality of coils 5 coiled in a cylindrical shape and arranged in an axial direction on an inner side of a metal pipe 4; a mover 2 disposed to face an inner side of the stator 1 with a magnetic gap therebetween and having a plurality of permanent magnets 6 inserted in the axial direction into a cylindrical can 9; shafts 8 inserted into the mover 2; shaft support members 7 for supporting the shafts 8 at both axial ends of the metal pipe 4; and shaft receiving member 10 each disposed at both ends of an inner side of the can 9 to be adjacent to the permanent magnets 6 and having a concave portion 10a for fitting to a cone of the shaft 8.

    摘要翻译: 圆筒状直线电动机包括:定子1,其具有多个卷绕成圆筒状的线圈5,并且在轴向上配置在金属管4的内侧; 移动器2,其设置成与定子1的内侧面相对,并且具有在轴向上插入到圆筒形罐9中的多个永磁体6; 轴8插入到动子2中; 轴支撑构件7,用于在金属管4的两个轴向端处支撑轴8; 以及轴承部件10,其分别设置在罐9的内侧的两端,与永磁体6相邻,并且具有用于与轴8的锥体嵌合的凹部10a。

    Dual-band frequency converter unit with high operability

    公开(公告)号:US06987957B2

    公开(公告)日:2006-01-17

    申请号:US10382278

    申请日:2003-03-05

    IPC分类号: H04N1/00

    CPC分类号: H04B1/406

    摘要: A dual-band frequency converter unit, for selectively performing frequency conversion between a 2.4-GHz high-frequency-band signal or a 5-GHz high-frequency-band signal and a baseband signal by frequency mixing, includes a local oscillator for generating a local oscillation signal; a first frequency divider for generating a half-frequency signal of the local oscillation signal; and a second frequency divider for generating a quarter-frequency signal of the local oscillation signal. Frequency conversion between the 2.4-GHz high-frequency-band signal and the baseband signal is performed by frequency mixing using the half-frequency signal of the local oscillation signal. Frequency conversion between the 5-GHz high-frequency-band signal and the baseband signal is performed by frequency mixing using the local oscillation signal and the quarter-frequency signal of the local oscillation signal.

    Thermo-transfer sheet and label and manufacturing method of the same
    6.
    发明授权
    Thermo-transfer sheet and label and manufacturing method of the same 失效
    热转印片和标签及其制造方法相同

    公开(公告)号:US5456969A

    公开(公告)日:1995-10-10

    申请号:US962845

    申请日:1992-10-19

    摘要: A thermo-transfer sheet is composed of a base film and an ink layer to be transferred having a softening point of more than 120.degree. C. A label is formed by the thermo-transfer sheet and provided with an image ink layer formed on a thermo-transfer image receiving sheet through a temperature-sensitive adhesive layer and the image ink layer has a softening point of more than 120.degree. C. The thermo-transfer sheet and the thermo-transfer image receiving sheet are prepared and a temperature-sensitive adhesive layer is formed on at least one of the surface of the thermo-transfer sheet or the transfer ink layer of the thermo-transfer image receiving sheet. These sheets are laminated and the laminated sheets are heated by means of a thermal head to thereby transfer the image ink layer having a softening point of more than 120.degree. C. on the thermo-transfer image receiving sheet. According to these processes, a label such as bar code is manufactured with an excellent durability such as friction-proof property, solvent-proof property and heat-proof property.

    摘要翻译: 热转印片由基膜和软化点大于120℃的待转印墨层构成。标签由热转印片形成,并具有形成于热敏片上的图像油墨层 通过温度敏感性粘合剂层转印图像接收片材,并且图像油墨层具有大于120℃的软化点。制备热转印片材和热转印图像接收片材,并且将温度敏感性粘合剂层 形成在热转印片的表面或热转印图像接收片的转印油墨层的至少一个上。 将这些片材层叠,并通过热敏头加热层压片材,从而将具有大于120℃的软化点的图像油墨层转印到热转印图像接收片材上。 根据这些方法,制造具有耐摩擦性,耐溶剂性和耐热性等优异耐久性的条形码等标签。

    Heat-treatment apparatus
    7.
    发明授权
    Heat-treatment apparatus 失效
    热处理设备

    公开(公告)号:US5407350A

    公开(公告)日:1995-04-18

    申请号:US17378

    申请日:1993-02-12

    摘要: A heat-treatment apparatus comprises a heat-treatment section for subjecting a heat-treatment to a wafer and a loading section for loading a wafer boat into and unloading it from the heat-treatment section. The loading section is connected to the heat-treatment section and includes in it a movable support member, a drive mechanism and a vertical base board as well as a load-lock chamber for maintaining the inside in vacuum. The movable support member supports a wafer boat. The movable support member is attached to a vertical base board so that it can move up and down. The drive mechanism is attached on the major surface of the vertical base board opposite to the surface facing the wafer boat. The drive mechanism drives the movable support to move up and down. The heat-treatment apparatus further comprises a wafer transfer section that includes an orientation flat alignment mechanism and a buffer stage disposed near the orientation flat alignment mechanism. The wafer transfer section includes a wafer cassette means, a buffer stage and a wafer transfer robot for transferring wafers between the orientation flat alignment mechanism and the wafer boat.

    摘要翻译: 一种热处理装置包括:对晶片进行热处理的热处理部和用于将晶片舟装载到热处理部的装载部。 加载部分连接到热处理部分,其中包括可移动支撑部件,驱动机构和垂直基板以及用于将内部保持在真空中的装载锁定室。 可移动支撑构件支撑晶片舟。 可移动支撑构件附接到垂直底板,使得其可以上下移动。 驱动机构附接在垂直基板的与面向晶片舟皿的表面相对的主表面上。 驱动机构驱动可动支架上下移动。 热处理装置还包括晶片转印部,该晶片转印部包括定位平面对准机构和设置在定向平直对准机构附近的缓冲台。 晶片传送部分包括用于在定向平坦对准机构和晶片舟皿之间传送晶片的晶片盒装置,缓冲台和晶片传送机器人。

    Vertical heat-treating apparatus and heat-treating process by using the
vertical heat-treating apparatus
    8.
    发明授权
    Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus 失效
    立式热处理装置及使用立式热处理装置的热处理工序

    公开(公告)号:US5388944A

    公开(公告)日:1995-02-14

    申请号:US13366

    申请日:1993-02-04

    摘要: A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer loading and unloading chamber, the robot chamber comprises a first load lock chamber while the wafer loading and unloading chamber comprises a second load lock chamber. These first and second load lock chambers are mutually connected by a pressure balancing gas conduit via pressure balancing valves. During heat treatment of the target objects, the wafer loading and unloading chamber and robot chamber are first set to inert gas atmospheres, then the pressure balancing gas conduit valves are opened to balance the pressures of the robot and cassette chambers. Gate valves between these chambers are then opened, and the cassette is conveyed via the robot chamber to a wafer boat in the wafer loading and unloading chamber. By this process gas flow between the two chambers when the gate valves are opened is suppressed to allow minimizing the production of particles.

    摘要翻译: 在热处理部分的反应管的底部提供晶片装载和卸载室,机器人腔室和盒室通过闸阀连接到晶片装载和卸载室,机器人腔室包括第一加载锁定室 晶片装卸室包括第二负载锁定室。 这些第一和第二负载锁定室通过压力平衡阀通过压力平衡气体导管相互连接。 在目标物体的热处理过程中,首先将晶片装卸室和机械手室设置为惰性气体环境,然后打开压力平衡气体管道阀门,以平衡机器人和盒室的压力。 然后打开这些室之间的闸阀,并且将盒经由机器人腔室输送到晶片装载和卸载室中的晶片舟皿。 通过该处理,当闸阀打开时两个室之间的气体流动被抑制以允许使颗粒的产生最小化。

    Varactor diode tuner with band switched coils and lines
    9.
    发明授权
    Varactor diode tuner with band switched coils and lines 失效
    变容二极管调谐器带有线圈切换线圈和线路

    公开(公告)号:US4710973A

    公开(公告)日:1987-12-01

    申请号:US813651

    申请日:1985-12-26

    申请人: Takeo Suzuki

    发明人: Takeo Suzuki

    IPC分类号: H04B1/18 H03J5/24 H04B1/26

    CPC分类号: H03J5/244

    摘要: A tuner in which a band switching signal corresponding to a channel selected from a plurality of UHF and VHF bands is generated to enable the formation of a suitable resonant circuit for receiving television signals of the selected channel. It includes a varactor diode, a plurality of resonant coils and distribution constant lines which are each grounded at one end. Each of the coils and the line is provided for forming a resonant circuit for tuning one of the bands. A plurality of switching diodes are provided for connecting the other ends of the coils and the line selectively to the other end of the varactor diode. The tuner further includes a device for turning on and off the switching diodes selectively in response to the band switching signal.

    摘要翻译: 一种调谐器,其中产生对应于从多个UHF和VHF频带选择的频道的频带切换信号,以便能够形成用于接收所选频道的电视信号的合适的谐振电路。 它包括变容二极管,多个谐振线圈和分布常数线,它们各自在一端接地。 每个线圈和线被提供用于形成用于调谐一个频带的谐振电路。 提供多个开关二极管,用于将线圈的另一端和线选择性地连接到变容二极管的另一端。 调谐器还包括响应于频带切换信号有选择地接通和断开开关二极管的装置。

    Arm operating device in automatic operating machine
    10.
    发明授权
    Arm operating device in automatic operating machine 失效
    手臂操作装置在自动操作机上

    公开(公告)号:US4503722A

    公开(公告)日:1985-03-12

    申请号:US362810

    申请日:1982-03-29

    IPC分类号: B25J9/10 F16H21/44

    摘要: In an arm operating device of an industrial robot, two chains are laid over the driving wheel provided in the supporting arm and the driven wheel provided in the bending arm, respectively, and are coupled through rigid transmission rods and a tension device to each other, and one of the transmission rods is rectangular in section, and is slightly pushed inwardly by a guide provided on the supporting arm, whereby the device operates positively and smoothly with being free from vibrations, and chain elongation and twist.

    摘要翻译: 在工业机器人的臂操作装置中,两根链条分别铺设在设置在支撑臂上的驱动轮和设置在弯曲臂中的从动轮上,并通过刚性传动杆和张力装置相互连接, 传动杆中的一个是矩形截面,并且由设置在支撑臂上的引导件略微向内推动,由此该装置能够正常且平稳地运行,没有振动和链伸长和扭曲。