公开(公告)号：US06835955B2

公开(公告)日：2004-12-28

申请号：US10695903

申请日：2003-10-30

申请人： Takunori Iki ,  Yoshifumi Tsunekawa ,  Tomohiko Hayashi

发明人： Takunori Iki ,  Yoshifumi Tsunekawa ,  Tomohiko Hayashi

IPC分类号： H01L2904

CPC分类号： G02F1/136213

摘要： An electro-optical device includes, above a substrate, data lines extending in a first direction, scanning lines which extend in a second direction and which cross the data lines, pixel electrodes and thin film transistors disposed so as to correspond to regions in which the data lines and the scanning lines cross, storage capacitors electrically connected to the thin film transistors and the pixel electrodes, and a shield layer disposed between the data lines and the pixel electrodes. An upper electrode and a lower electrode between which a dielectric film forming each storage capacitor is supported including a first portion laminated along a plane parallel with one surface of the substrate and a second portion laminated along a plane orthogonal to the surface of the substrate, the sectional shape of the capacitor including a projecting shape.

公开(公告)号：US07119391B2

公开(公告)日：2006-10-10

申请号：US10633682

申请日：2003-08-05

申请人： Takunori Iki ,  Tomohiko Hayashi

发明人： Takunori Iki ,  Tomohiko Hayashi

IPC分类号： H01L21/00

CPC分类号： H01L27/146 ,  H01L27/1255 ,  H01L29/78666 ,  H01L29/78675

摘要： The invention provides a substrate device having thin film transistors (TFTs), each including a semiconductor layer and capacitors formed above the TFTs, that are provided on a substrate. Each of the capacitors can include a first electrode electrically connected to a part of the semiconductor layer, a second electrode arranged to face the first electrode, and a dielectric film including a nitride film arranged between the first electrode and the second electrode on the substrate. Further, the nitride film has an aperture facing the semiconductor layer as seen in plan view. Accordingly, it is possible to effectively hydrogenate the semiconductor layer using the aperture.

摘要翻译： 本发明提供了一种具有薄膜晶体管（TFT）的衬底器件，每个薄膜晶体管（TFT）包括设置在衬底上的半导体层和形成在TFT之上的电容器。 每个电容器可以包括电连接到半导体层的一部分的第一电极，布置成面对第一电极的第二电极和包括布置在基板上的第一电极和第二电极之间的氮化物膜的电介质膜。 此外，如平面图所示，氮化物膜具有面向半导体层的孔。 因此，可以使用孔径有效地氢化半导体层。

公开(公告)号：US20080067521A1

公开(公告)日：2008-03-20

申请号：US11900943

申请日：2007-09-14

申请人： Takunori Iki

发明人： Takunori Iki

IPC分类号： H01L29/04

CPC分类号： H01L29/78633 ,  G02F1/136209 ,  G02F1/136277 ,  H01L27/1255

摘要： An electro-optical device in which a plurality of thin films are laminated on a substrate and a transistor is formed by a part of the plurality of laminated thin films includes a light-shielding insulating layer that forms a part of the plurality of thin films and is laminated on the substrate so as to cover at least a part of a semiconductor layer of the transistor in plan view.

摘要翻译： 其中多个薄膜层叠在基板上并且由多个层叠薄膜的一部分形成的晶体管的电光装置包括形成多个薄膜的一部分的遮光绝缘层和 层叠在基板上，以便在平面图中覆盖晶体管的半导体层的至少一部分。

公开(公告)号：US20110073868A1

公开(公告)日：2011-03-31

申请号：US12889726

申请日：2010-09-24

申请人： Masashi Nakagawa ,  Masahiro Yasukawa ,  Takunori Iki

发明人： Masashi Nakagawa ,  Masahiro Yasukawa ,  Takunori Iki

IPC分类号： H01L33/08

CPC分类号： H01L27/124 ,  G09G3/3688 ,  G09G2310/0297 ,  H01L27/1214 ,  H01L27/3262 ,  H01L27/3265 ,  H01L27/3272 ,  H01L27/3276 ,  H01L27/3279

摘要： An electro-optical device comprises: a first data line extending in a first direction; a second data line extending in the first direction and arranged so as to be at least partially overlapped with the first data line; a first scanning line and a second scanning line extending in a second direction intersecting the first direction; a first transistor electrically connected to the first data line and electrically connected to the first scanning line; a first pixel electrode electrically connected to the first transistor; a second transistor electrically connected to the second data line and electrically connected to the second scanning line; and a second pixel electrode electrically connected to the second transistor.

摘要翻译： 电光装置包括：沿第一方向延伸的第一数据线; 第二数据线在第一方向上延伸并且布置成至少部分地与第一数据线重叠; 第一扫描线和第二扫描线，沿与第一方向相交的第二方向延伸; 电连接到第一数据线并电连接到第一扫描线的第一晶体管; 电连接到第一晶体管的第一像素电极; 电连接到第二数据线并电连接到第二扫描线的第二晶体管; 以及电连接到第二晶体管的第二像素电极。

公开(公告)号：US07652293B2

公开(公告)日：2010-01-26

申请号：US11900943

申请日：2007-09-14

申请人： Takunori Iki

发明人： Takunori Iki

IPC分类号： H01L27/14

CPC分类号： H01L29/78633 ,  G02F1/136209 ,  G02F1/136277 ,  H01L27/1255

摘要： An electro-optical device in which a plurality of thin films are laminated on a substrate and a transistor is formed by a part of the plurality of laminated thin films includes a light-shielding insulating layer that forms a part of the plurality of thin films and is laminated on the substrate so as to cover at least a part of a semiconductor layer of the transistor in plan view.

摘要翻译： 其中多个薄膜层叠在基板上并且由多个层叠薄膜的一部分形成的晶体管的电光装置包括形成多个薄膜的一部分的遮光绝缘层和 层叠在基板上，以便在平面图中覆盖晶体管的半导体层的至少一部分。

公开(公告)号：US07403237B2

公开(公告)日：2008-07-22

申请号：US11029502

申请日：2005-01-06

申请人： Takunori Iki

发明人： Takunori Iki

IPC分类号： G02F1/136 ,  G02F1/1343

CPC分类号： G02F1/136227 ,  G02F1/136209 ,  G02F2001/13629 ,  H01L21/76841 ,  H01L21/7685

摘要： There is provided an electro-optical device comprising, above a substrate, a first conductor layer, a second conductor layer, an interlayer insulating film formed between the first conductor layer and the second conductor layer, and a contact hole, provided in the interlayer insulating film, for electrically connecting the first conductor layer and the second conductor layer in a contact portion. The first conductor layer has a multilayered structure in which an electrolytic corrosion preventing film is provided on a conductor film, in a region including at least the contact portion among the entire region thereof, and the electrolytic corrosion preventing film is not provided in other regions thereof. Thus, an electrolytic corrosion can be prevented and a contact resistance can be reduced. Further, heat can be prevented from generating.

摘要翻译： 提供了一种电光装置，其包括在基板上方的第一导体层，第二导体层，形成在第一导体层和第二导体层之间的层间绝缘膜，以及设置在层间绝缘体中的接触孔 膜，用于在接触部分中电连接第一导体层和第二导体层。 第一导体层具有多层结构，其中在至少包括其整个区域中的接触部分的区域中，在导体膜上设置电解腐蚀防止膜，并且在其它区域中不设置电解腐蚀防止膜 。 因此，可以防止电解腐蚀，并且可以降低接触电阻。 此外，可以防止发热。

公开(公告)号：US07317497B2

公开(公告)日：2008-01-08

申请号：US11598731

申请日：2006-11-14

申请人： Yuichi Shimizu ,  Yasuji Yamasaki ,  Takunori Iki

发明人： Yuichi Shimizu ,  Yasuji Yamasaki ,  Takunori Iki

IPC分类号： G02F1/1343 ,  H01L31/00 ,  H01L29/04

CPC分类号： G02F1/1362 ,  G02F2001/136218

摘要： An electro-optical device includes, above a substrate: data lines extending in a first direction; scanning lines extending in a second direction and intersecting the data lines; pixel electrodes and thin film transistors disposed so as to correspond to intersection regions of the data lines and the scanning lines; storage capacitors electrically connected to the thin film transistors and the pixel electrodes; and shielding layers disposed between the data lines and the pixel electrodes. Further, nitride films are included in the shielding layers and are formed along the data lines and are wider than the data lines.

摘要翻译： 电光装置包括：在基板上方：沿第一方向延伸的数据线; 沿着第二方向延伸并与数据线相交的扫描线; 被配置为对应于数据线和扫描线的交叉区域的像素电极和薄膜晶体管; 电连接到薄膜晶体管和像素电极的存储电容器; 以及设置在数据线和像素电极之间的屏蔽层。 此外，氮化物膜包括在屏蔽层中并且沿着数据线形成并且比数据线宽。

公开(公告)号：US09231109B2

公开(公告)日：2016-01-05

申请号：US12652277

申请日：2010-01-05

申请人： Takunori Iki

发明人： Takunori Iki

IPC分类号： H01L29/205 ,  H01L29/786 ,  H01L27/12

CPC分类号： G02F1/136213 ,  G02F1/133345 ,  G02F1/136227 ,  G02F1/136286 ,  G02F1/1368 ,  G02F2201/123 ,  H01L27/124 ,  H01L27/1255 ,  H01L29/78633

摘要： An electro-optical device includes a first light shielding film; a transistor element formed on the first light shielding film to overlap the first light shielding film; a second light shielding film formed on the transistor element to overlap the transistor element and electrically connected to an input terminal of the transistor element; a transparent conductive film extended toward an upper layer side of the second light shielding film in an opening region, through which light penetrates, of the display region; a dielectric film formed on the transparent conductive film in the opening region; and a transparent pixel electrode formed on the dielectric film in the opening region, constituting a storage capacitor together with the transparent conductive film and the dielectric film, and having a transparent pixel electrode which is electrically connected to the transistor element.

摘要翻译： 电光装置包括第一遮光膜; 形成在第一遮光膜上以与第一遮光膜重叠的晶体管元件; 形成在所述晶体管元件上以与所述晶体管元件重叠并电连接到所述晶体管元件的输入端子的第二遮光膜; 透明导电膜，其在所述显示区域的光穿过的开口区域朝向所述第二遮光膜的上层侧延伸; 在所述开口区域中形成在所述透明导电膜上的电介质膜; 以及形成在开口区域中的电介质膜上的透明像素电极，与透明导电膜和电介质膜一起构成存储电容器，并且具有电连接到晶体管元件的透明像素电极。

公开(公告)号：US08264628B2

公开(公告)日：2012-09-11

申请号：US12582565

申请日：2009-10-20

申请人： Takunori Iki

发明人： Takunori Iki

IPC分类号： G02F1/1343

CPC分类号： H01G4/33 ,  G02F1/136213 ,  H01G4/002 ,  H01G4/005 ,  H01L27/1255 ,  H01L28/40

摘要： A capacitor element includes a lower conductive portion, an underlying film which covers the lower conductive portion, a lower electrode formed on the underling film, a capacitor insulating film including (i) a dielectric film formed on the lower electrode and (ii) a protective film formed on the dielectric film and having a lower etching rate than that of the dielectric film, and an upper electrode formed on the capacitor insulating film. The upper electrode and the lower conductive portion are electrically connected to each other through a connection portion exposed from the underlying film by partially removing the underlying film and the capacitor insulating film.

摘要翻译： 电容器元件包括下导电部分，覆盖下导电部分的底膜，形成在底膜上的下电极，电容器绝缘膜，其包括（i）形成在下电极上的电介质膜和（ii）保护性 形成在电介质膜上并且具有比电介质膜低的蚀刻速率的膜，以及形成在电容器绝缘膜上的上电极。 通过部分去除下面的膜和电容器绝缘膜，上电极和下导电部分通过暴露于下面的膜的连接部分彼此电连接。

公开(公告)号：US07122836B2

公开(公告)日：2006-10-17

申请号：US10690275

申请日：2003-10-22

申请人： Yasuji Yamasaki ,  Kenichi Takahara ,  Takunori Iki

发明人： Yasuji Yamasaki ,  Kenichi Takahara ,  Takunori Iki

IPC分类号： H01L29/04

CPC分类号： G02F1/136213 ,  G02F1/136209 ,  G02F1/136227 ,  G02F1/136286 ,  H01L27/124 ,  H01L27/1255

摘要： An electro-optical device includes: data lines extending in a first direction on a substrate; scanning lines extending in a second direction and intersecting with the data lines; pixel electrodes and thin film transistors disposed corresponding to intersections of the data lines and the scanning lines; storage capacitors electrically connected to the thin film transistors and the pixel electrodes; and a shielding layer disposed between the data lines and the pixel electrodes. One of a pair of electrodes forming the storage capacitor is formed of a multi-layered film containing a low resistance film.

摘要翻译： 电光装置包括：在基板上沿第一方向延伸的数据线; 沿着第二方向延伸并与数据线相交的扫描线; 对应于数据线和扫描线的交点设置的像素电极和薄膜晶体管; 电连接到薄膜晶体管和像素电极的存储电容器; 以及设置在数据线和像素电极之间的屏蔽层。 形成存储电容器的一对电极之一由含有低电阻膜的多层膜形成。