公开(公告)号：US09738076B2

公开(公告)日：2017-08-22

申请号：US14348023

申请日：2012-09-12

申请人： Tamaki Sato ,  Masafumi Morisue ,  Tetsushi Ishikawa ,  Hirono Yoneyama

发明人： Tamaki Sato ,  Masafumi Morisue ,  Tetsushi Ishikawa ,  Hirono Yoneyama

IPC分类号： B41J2/16 ,  B29C33/00 ,  B05B15/02

CPC分类号： B41J2/1621 ,  B05B15/50 ,  B29C33/0083 ,  B41J2/1601 ,  B41J2/1603 ,  B41J2/1604 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1637 ,  B41J2/1639 ,  Y10T29/49083 ,  Y10T29/49401

摘要： A manufacturing method of a liquid ejection head, which includes a step of preparing a substrate including a first layer, a step of forming a flow path mold for forming the flow path and a member located outside the mold with a gap between the mold and the member from the first layer, a step of providing a second layer so that the second layer fills the gap and covers the mold and the member located outside the mold with the gap between them, a step of forming an ejection orifice forming member for forming an ejection orifice from the second layer, a step of removing the member located outside the mold with the gap between them, and a step of forming a wall member located outside the ejection orifice forming member with at least a partial gap between the ejection orifice forming member and the wall member.

公开(公告)号：US20120222308A1

公开(公告)日：2012-09-06

申请号：US13505574

申请日：2010-11-02

申请人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama ,  Takumi Suzuki

发明人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama ,  Takumi Suzuki

IPC分类号： B41J2/16

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1631 ,  Y10T29/49401

摘要： A method for manufacturing a liquid ejection head which has an ejection port ejecting a liquid and a flow path communicating with the ejection port, includes a first step of preparing a substrate on which a first layer and a second layer are evenly laminated in this order; a second step of forming a member (A) for forming the ejection port from the second layer; a third step of forming a mold for forming the flow path from the first layer; a fourth step of providing a third layer so as to cover the mold and so as to come into close contact with the member (A); and a fifth step of removing the mold to form the flow path.

摘要翻译： 一种液体喷射头的制造方法，其具有喷射液体的喷射口和与喷射口连通的流路，包括：准备第一层和第二层依次均匀地层叠的基板的第一工序; 形成用于从第二层形成喷射口的部件（A）的第二步骤; 从第一层形成用于形成流路的模具的第三步骤; 提供第三层以覆盖模具并与构件（A）紧密接触的第四步骤; 以及除去模具以形成流路的第五步骤。

公开(公告)号：US20130004668A1

公开(公告)日：2013-01-03

申请号：US13634514

申请日：2011-03-28

申请人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama

发明人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama

IPC分类号： B05D1/32

CPC分类号： B41J2/1603 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1645 ,  B41J2002/14475

摘要： A method of manufacturing a liquid discharge head having a flow path communicating with a discharge port for discharging liquid includes in the following order: preparing a substrate with an evenly provided first layer as a flat layer; forming, of the first layer, a pattern of the flow path for forming the flow path, and a member (A) provided outside the pattern via a gap; providing a second layer so as to fill the gap and to cover the pattern and the member (A); forming, of the second layer, a member (B) for forming the discharge port on the pattern; and removing the member (A), providing, at least on the substrate, a third layer so as to hold it in intimate contact with the member (B), and removing the pattern to form the flow path.

摘要翻译： 制造具有与用于排出液体的排出口连通的流路的排液头的方法包括以下顺序：制备具有均匀设置的第一层作为平坦层的基板; 第一层形成用于形成流路的流路的图案，以及经由间隙设置在图案外部的构件（A）; 提供第二层以填充间隙并覆盖图案和构件（A）; 在所述图案上形成用于形成所述排出口的部件（B）的第二层; 以及移除所述构件（A），至少在所述基板上提供第三层，以便将其保持与所述构件（B）紧密接触，并且移除所述图案以形成所述流动路径。

公开(公告)号：US09168749B2

公开(公告)日：2015-10-27

申请号：US13126879

申请日：2009-12-02

申请人： Yoshikazu Saito ,  Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Yoneyama ,  Masafumi Morisue ,  Ryoji Kanri

发明人： Yoshikazu Saito ,  Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Yoneyama ,  Masafumi Morisue ,  Ryoji Kanri

IPC分类号： C08F2/46 ,  B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/1631 ,  B41J2/1637

摘要： This invention relates to a manufacturing method of a liquid discharge head comprising: forming an active energy ray-curable resin layer on a surface of a substrate on which discharge energy generating elements are formed, attaching a material permeable to active energy rays onto a surface of the active energy ray-curable resin layer, pressing against the material permeable to active energy rays, a master mold being transparent to the active energy rays and having protrusions corresponding to a pattern of discharge ports so as to transfer the protrusions to the material permeable to active energy rays, selectively irradiating the active energy ray-curable resin layer with active energy rays according to a pattern of liquid flow paths so as to cure the active energy ray-curable resin layer, removing the master mold, and removing uncured portions of the active energy ray-curable resin layer.

摘要翻译： 本发明涉及一种液体排出头的制造方法，包括：在其上形成有放电能量产生元件的基板的表面上形成活性能量射线固化树脂层，将可活性能量射线的材料附着在 活性能量射线固化树脂层，压靠可渗透活性能量射线的材料，主模具对活性能量射线是透明的，并具有对应于排出口图案的突起，以将突起转移到可渗透的材料 活性能量射线，根据液体流路的图案选择性地用活性能量射线照射活性能量射线固化树脂层，以固化活性能量射线固化树脂层，除去母模，并除去 活性能量射线固化树脂层。

公开(公告)号：US09114617B2

公开(公告)日：2015-08-25

申请号：US13634514

申请日：2011-03-28

申请人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama

发明人： Tamaki Sato ,  Masafumi Morisue ,  Hirono Yoneyama

IPC分类号： B41J2/05 ,  B41J2/16 ,  B41J2/14

CPC分类号： B41J2/1603 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/164 ,  B41J2/1645 ,  B41J2002/14475

摘要： A method of manufacturing a liquid discharge head having a flow path communicating with a discharge port for discharging liquid includes in the following order: preparing a substrate with an evenly provided first layer as a flat layer; forming, of the first layer, a pattern of the flow path for forming the flow path, and a member (A) provided outside the pattern via a gap; providing a second layer so as to fill the gap and to cover the pattern and the member (A); forming, of the second layer, a member (B) for forming the discharge port on the pattern; and removing the member (A), providing, at least on the substrate, a third layer so as to hold it in intimate contact with the member (B), and removing the pattern to form the flow path.

摘要翻译： 制造具有与用于排出液体的排出口连通的流路的排液头的方法包括以下顺序：制备具有均匀设置的第一层作为平坦层的基板; 第一层形成用于形成流路的流路的图案，以及经由间隙设置在图案外部的构件（A）; 提供第二层以填充间隙并覆盖图案和构件（A）; 在所述图案上形成用于形成所述排出口的部件（B）的第二层; 以及移除所述构件（A），至少在所述基板上提供第三层，以便将其保持与所述构件（B）紧密接触，并且移除所述图案以形成所述流动路径。

公开(公告)号：US20110206861A1

公开(公告)日：2011-08-25

申请号：US13126879

申请日：2009-12-02

申请人： Yoshikazu Saito ,  Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Yoneyama ,  Masafumi Morisue ,  Ryoji Kanri

发明人： Yoshikazu Saito ,  Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Yoneyama ,  Masafumi Morisue ,  Ryoji Kanri

IPC分类号： B29C71/04

CPC分类号： B41J2/1603 ,  B41J2/1631 ,  B41J2/1637

摘要： This invention relates to a manufacturing method of a liquid discharge head comprising: forming an active energy ray-curable resin layer on a surface of a substrate on which discharge energy generating elements are formed, attaching a material permeable to active energy rays onto a surface of the active energy ray-curable resin layer, pressing against the material permeable to active energy rays, a master mold being transparent to the active energy rays and having protrusions corresponding to a pattern of discharge ports so as to transfer the protrusions to the material permeable to active energy rays, selectively irradiating the active energy ray-curable resin layer with active energy rays according to a pattern of liquid flow paths so as to cure the active energy ray-curable resin layer, removing the master mold, and removing uncured portions of the active energy ray-curable resin layer.

摘要翻译： 本发明涉及一种液体排出头的制造方法，包括：在其上形成有放电能量产生元件的基板的表面上形成活性能量射线固化树脂层，将可活性能量射线的材料附着在 活性能量射线固化树脂层，压靠可渗透活性能量射线的材料，主模具对活性能量射线是透明的，并具有对应于排出口图案的突起，以将突起转移到可渗透的材料 活性能量射线，根据液体流路的图案选择性地用活性能量射线照射活性能量射线固化树脂层，以固化活性能量射线固化树脂层，除去母模，并除去 活性能量射线固化树脂层。

公开(公告)号：US20100159405A1

公开(公告)日：2010-06-24

申请号：US12634214

申请日：2009-12-09

申请人： Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Naito ,  Masafumi Morisue ,  Yoshikazu Saito ,  Ryoji Kanri

发明人： Hiroe Ishikura ,  Takumi Suzuki ,  Tamaki Sato ,  Hirono Naito ,  Masafumi Morisue ,  Yoshikazu Saito ,  Ryoji Kanri

IPC分类号： G03F7/20 ,  C08F2/46

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： According to the fine pattern manufacturing method of the invention, the residue of a pattern which is obtained by pressing a mold is prevented from occurring, so that the structure can be more easily manufactured.

摘要翻译： 根据本发明的精细图案制造方法，可以防止发生通过按压模具得到的图案的残留物，从而可以更容易地制造结构。

公开(公告)号：US07521383B2

公开(公告)日：2009-04-21

申请号：US11425559

申请日：2006-06-21

申请人： Masafumi Morisue ,  Ryosuke Watanabe ,  Junya Maruyama ,  Daiki Yamada

发明人： Masafumi Morisue ,  Ryosuke Watanabe ,  Junya Maruyama ,  Daiki Yamada

IPC分类号： H01L21/00

CPC分类号： H01L27/1266 ,  H01L27/1214 ,  H01L27/13 ,  H01L31/18 ,  Y10S438/94

摘要： A first layer (an insulating layer), a second layer (a metal layer), and a third layer (an insulating layer) are formed over a substrate. Then, a fourth layer including a semiconductor element is formed over the third layer. After applying an organic resin film covering the fourth layer, laser light is irradiated to sections of a rear surface side of the substrate. By irradiating the second layer with laser light, the state of being covered with the organic resin film can be maintained at the same time as forming a space under the organic resin film by ablating (alternatively, evaporating or breaking down) an irradiated region of the second layer, to cause a lift in the film in a periphery thereof.

摘要翻译： 在基板上形成第一层（绝缘层），第二层（金属层）和第三层（绝缘层）。 然后，在第三层上形成包括半导体元件的第四层。 在涂覆覆盖第四层的有机树脂膜之后，激光照射到基板的后表面侧的部分。 通过用激光照射第二层，可以在与有机树脂膜之间形成空间的同时通过烧蚀（或者，蒸发或分解）有机树脂膜的照射区域同时保持有机树脂膜被覆盖的状态。 第二层，以在其周围引起膜的提升。

公开(公告)号：US07476572B2

公开(公告)日：2009-01-13

申请号：US10592527

申请日：2005-03-15

申请人： Masafumi Morisue ,  Gen Fujii

发明人： Masafumi Morisue ,  Gen Fujii

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L29/66757 ,  H01L27/12 ,  H01L27/1292 ,  H01L29/458 ,  H01L29/4908 ,  H01L29/66765 ,  H01L2224/16 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2924/01004 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01029 ,  H01L2924/01037 ,  H01L2924/01046 ,  H01L2924/01055 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/04941 ,  H01L2924/07811 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/3025 ,  H01L2924/00

摘要： An object of the invention is to provide a method for manufacturing a thin film transistor in a self-aligning manner by using the droplet discharging method regardless of the accuracy of a discharge position for a droplet discharging device. In view of the object, an organic resin film or the like is applied and processed into a predetermined shape by etch-back, exposure, development and the like. By utilizing the organic resin film with the predetermined shape as a mask, a semiconductor layer containing an impurity of one conductivity type is etched. By utilizing the organic resin film with the predetermined shape, regions with different wettabilities are formed.

摘要翻译： 本发明的目的是提供一种通过使用液滴排放方法以自对准方式制造薄膜晶体管的方法，而不管液滴排放装置的排出位置的精度如何。 鉴于目的，通过回蚀，曝光，显影等将有机树脂膜等施加并加工成预定的形状。 通过利用具有预定形状的有机树脂膜作为掩模，蚀刻含有一种导电类型的杂质的半导体层。 通过利用具有预定形状的有机树脂膜，形成具有不同润湿性的区域。

公开(公告)号：US20050158665A1

公开(公告)日：2005-07-21

申请号：US11025921

申请日：2005-01-03

申请人： Shinji Maekawa ,  Gen Fujii ,  Hiroko Shiroguchi ,  Masafumi Morisue

发明人： Shinji Maekawa ,  Gen Fujii ,  Hiroko Shiroguchi ,  Masafumi Morisue

IPC分类号： H01L21/469 ,  B05D1/12 ,  G02B5/20 ,  G03F7/00 ,  H01L21/02

CPC分类号： G02B5/201 ,  G03F7/0007 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3281 ,  H01L27/3295 ,  H01L29/66757 ,  H01L29/66765 ,  H01L51/56

摘要： The invention provides a manufacturing method of a substrate having a film pattern including an insulating film, a semiconductor film, a conductive film and the like by simple steps, and also a manufacturing method of a semiconductor device which is low in cost with high throughput and yield. According to the invention, after forming a first protective film which has low wettability on a substrate, a material which has high wettability is applied or discharged on an outer edge of a first mask pattern, thereby a film pattern and a substrate having the film pattern are formed.

摘要翻译： 本发明通过简单的步骤提供了具有包括绝缘膜，半导体膜，导电膜等的膜图案的基板的制造方法，以及低成本，高生产率的半导体器件的制造方法， 产量。 根据本发明，在形成在基材上具有低润湿性的第一保护膜之后，在第一掩模图案的外边缘上施加或排出具有高润湿性的材料，从而形成膜图案和具有膜图案的基板 形成。