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1.发明申请Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process 审中-公开用于确定半导体制造工艺的状态的半导体制造装置和方法和装置公开(公告)号：US20060073619A1
公开(公告)日：2006-04-06
申请号：US11293213
申请日：2005-12-05
IPC分类号： H01L21/00 , H01L21/306 , C23F1/00
CPC分类号： H01J37/32935 , H01L21/31116
摘要： In a semiconductor device fabrication apparatus for performing an etching process for a semiconductor wafer having a plurality of films formed on a surface thereof and disposed in a chamber, by using plasma generated in the chamber, a change in light of multi-wavelength from the surface of the semiconductor wafer is measured during a predetermined period of the etching process, and a state of the etching process is judged from the displayed change amount of light of multi-wavelength.
摘要翻译： 在半导体器件制造装置中，通过使用在室内产生的等离子体，对具有形成在其表面上的多个膜并且设置在室中的半导体晶片进行蚀刻处理，从表面的多波长的光的变化 在蚀刻处理的预定周期期间测量半导体晶片，并且根据所显示的多波长的光的变化量来判断蚀刻处理的状态。
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公开(公告)号：US20090159211A1
公开(公告)日：2009-06-25
申请号：US12041741
申请日：2008-03-04
IPC分类号： C23F1/08
CPC分类号： H01J37/32972 , G01N21/68 , H01J37/32091 , H01J37/32935
摘要： The invention provides a plasma processing apparatus for measuring the etching quantity of the material being processed and detecting the end point of etching using optical interference on the surface of a sample being processed, so as to simultaneously realize long life and ensure sufficient light to be received via a light transmitting unit, to enable long term stable operation and to improve the processing accuracy via accurate etching quantity detection. In a plasma processing apparatus for processing a sample being processed by generating plasma between a shower plate and a lower electrode, a detector for detecting light from a surface of the sample being processed via the shower plate includes a light transmitting unit composed of a light guide into which light is entered and a spectroscope for analyzing the light obtained by the light transmitting unit, wherein the end surface of the light transmitting unit through which light is entered is arranged at a distance of five times or greater of the mean free path of gas molecules within the vacuum reactor from the end surface of the shower plate facing the plasma.
摘要翻译： 本发明提供了一种用于测量被处理材料的蚀刻量的等离子体处理装置，并且利用正在处理的样品表面上的光学干涉来检测蚀刻终点，以同时实现长寿命并确保足够的光被接收 通过光发射单元，能够进行长期稳定的操作，并通过精确的蚀刻量检测来提高加工精度。 在用于通过在淋浴板和下部电极之间产生等离子体来处理被处理样品的等离子体处理装置中，用于检测经由淋浴板处理的样品的表面的光的检测器包括：光导体， 进入光的分光器和用于分析由光发射单元获得的光的分光镜，其中进入光的光透射单元的端面布置在气体的平均自由程的五倍或更大的距离 真空反应器内的分子从淋浴板的端面朝向等离子体。
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公开(公告)号：US08083888B2
公开(公告)日：2011-12-27
申请号：US12041741
申请日：2008-03-04
CPC分类号： H01J37/32972 , G01N21/68 , H01J37/32091 , H01J37/32935
摘要： The invention provides a plasma processing apparatus for measuring the etching quantity of the material being processed and detecting the end point of etching using optical interference on the surface of a sample being processed, so as to simultaneously realize long life and ensure sufficient light to be received via a light transmitting unit, to enable long term stable operation and to improve the processing accuracy via accurate etching quantity detection. In a plasma processing apparatus for processing a sample being processed by generating plasma between a shower plate and a lower electrode, a detector for detecting light from a surface of the sample being processed via the shower plate includes a light transmitting unit composed of a light guide into which light is entered and a spectroscope for analyzing the light obtained by the light transmitting unit, wherein the end surface of the light transmitting unit through which light is entered is arranged at a distance of five times or greater of the mean free path of gas molecules within the vacuum reactor from the end surface of the shower plate facing the plasma.
摘要翻译： 本发明提供了一种用于测量被处理材料的蚀刻量的等离子体处理装置，并且利用正在处理的样品表面上的光学干涉来检测蚀刻终点，以同时实现长寿命并确保足够的光被接收 通过光发射单元，能够进行长期稳定的操作，并通过精确的蚀刻量检测来提高加工精度。 在用于通过在淋浴板和下部电极之间产生等离子体来处理被处理样品的等离子体处理装置中，用于检测经由淋浴板处理的样品的表面的光的检测器包括：光导体， 进入光的分光器和用于分析由光发射单元获得的光的分光镜，其中进入光的光透射单元的端面布置在气体的平均自由程的五倍或更大的距离 真空反应器内的分子从淋浴板的端面朝向等离子体。
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4.发明申请OPTICAL TRANSFER SYSTEM, OPTICAL TRANSMISSION DEVICE, AND OPTICAL RECEPTION DEVICE 有权光传输系统，光传输设备和光接收设备公开(公告)号：US20130136451A1
公开(公告)日：2013-05-30
申请号：US13814617
申请日：2011-09-30
IPC分类号： H04J14/06
CPC分类号： H04J14/06 , H04B10/5053 , H04B10/532 , H04B10/616 , H04J14/002
摘要： In an optical transfer system, an optical transmission unit generates an optical signal in which respective polarization components are alternately present on a time axis, a time period during which the respective polarization components are simultaneously present on the time axis is substantially zero, and a symbol repetition cycle of optical signals of the respective polarization components becomes Ts, an optical reception unit causes an interference between local oscillation light and a received optical signal and converts an interfered optical signal to an electric signal, and a received electric-signal processing unit performs analog-digital conversion of an electric signal, elimination of a delay difference of Ts/2 between the respective polarized signal components, and adaptive equalization of a distortion other than the delay difference.
摘要翻译： 在光传输系统中，光传输单元产生在时间轴上交替存在各偏振分量的光信号，时间轴上同时存在各偏振分量的时间段基本上为零，以及符号 各个偏振分量的光信号的重复周期变为Ts，光接收单元引起局部振荡光和接收到的光信号之间的干扰，并将干扰的光信号转换为电信号，并且接收的电信号处理单元执行模拟 电信号的数字转换，消除各极化信号分量之间的Ts / 2的延迟差，以及除了延迟差之外的失真的自适应均衡。
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公开(公告)号：US20130003141A1
公开(公告)日：2013-01-03
申请号：US13467252
申请日：2012-05-09
IPC分类号： H04N1/04
CPC分类号： H04N1/0249 , G03G15/602 , H04N1/0083 , H04N1/0473 , H04N1/1017 , H04N1/103 , H04N1/1039 , H04N1/1043 , H04N2201/0081 , H04N2201/02454 , H04N2201/02466 , H04N2201/02479 , H04N2201/0464 , H04N2201/04725
摘要： An image reading apparatus includes a drive unit that is mounted on a carriage having an image reading sensor, which is moved with respect to an original, mounted thereon and moves the carriage. The drive unit includes: a motor; a gear train for transmitting rotation of the motor so as to move the carriage; an encoder sensor for reading a code wheel fixed to a rotary shaft of the motor; and a support member for holding the motor. The encoder sensor is urged against a part of the support member by a resilient member, to be thus fixed to the support member.
摘要翻译： 图像读取装置包括安装在具有相对于原件移动的图像读取传感器的滑架上的驱动单元，其安装在其上并移动滑架。 驱动单元包括：马达; 用于传递电机的旋转以便移动滑架的齿轮系; 编码器传感器，用于读取固定到电动机的旋转轴的码轮; 以及用于保持电动机的支撑构件。 编码器传感器通过弹性构件被推靠在支撑构件的一部分上，从而被固定到支撑构件上。
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公开(公告)号：US20120288284A1
公开(公告)日：2012-11-15
申请号：US13576276
申请日：2010-02-25
申请人： Tsuyoshi Yoshida , Takashi Sugihara
发明人： Tsuyoshi Yoshida , Takashi Sugihara
IPC分类号： H04B10/04
CPC分类号： H04B10/50575 , H04B10/5053 , H04B10/50595
摘要： An optical transmitter generating an arbitrary optical waveform including an analog optical waveform, which is capable of controlling a bias to a Null point easily. The optical transmitter modulates light from a light source by an optical modulator with use of a data sequence being an electric signal, to thereby generate the arbitrary optical waveform, and includes: a light intensity detector detecting intensity of output light of the optical modulator; a data signal generator generating the data sequence; an average modulation degree calculator calculating an average modulation degree of the data sequence based on the data sequence; and a bias controller performing bias control on the optical modulator based on the intensity of the output light detected by the light intensity detector and the average modulation degree of the data sequence calculated by the average modulation degree calculator.
摘要翻译： 产生包括模拟光波形的任意光波形的光发射机，其能够容易地将偏压控制到空点。 光发射机通过光调制器利用作为电信号的数据序列来调制来自光源的光，从而产生任意的光波形，并且包括：光强检测器，检测光调制器的输出光的强度; 产生数据序列的数据信号发生器; 平均调制度计算器，基于所述数据序列计算所述数据序列的平均调制度; 以及偏置控制器，基于由光强度检测器检测的输出光的强度和由平均调制度计算器计算的数据序列的平均调制度，对光调制器进行偏置控制。
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公开(公告)号：US20100244554A1
公开(公告)日：2010-09-30
申请号：US12714269
申请日：2010-02-26
IPC分类号： B62D55/10 , B62D55/06 , B62D55/104 , B62D55/18
CPC分类号： B62D55/21 , B62D55/104 , B62D55/14
摘要： There is provided a running device for track-laying vehicle, which can resolve a feeling of fear of falling height in a leading end portion of a crawler while relax a large impact when the crawler runs over a raised contact area. The running device includes a spring constant equalizing unit that equalizes an apparent spring constant of a second arm of lower track roller bogie device over a total length. The apparent spring constant is generated in maximum reverse camber of the crawler. The spring constant equalizing unit increases an oscillation angle α of the second arm that can abut on the first arm in the maximum reverse camber of the crawler such that the oscillation angle α of the second arm is larger than a crossing angle β of the connecting link. Desirably the increased maximum oscillation angle of the second arm is 1.3-2.0 times the crossing angle β.
摘要翻译： 提供了一种用于履带铺设车辆的运行装置，其可以在履带运行在凸起的接触区域上的同时放松大的冲击力的同时，消除履带的前端部的下降高度的恐惧感。 运行装置包括弹簧常数均衡单元，其在总长度上均衡下轨道滚子转向架装置的第二臂的表观弹簧常数。 表观弹簧常数是在履带的最大反向弯度中产生的。 弹簧常数均衡单元增加了能够抵靠履带的最大反向弧度中的第一臂上的第二臂的摆动角度α，使得第二臂的摆动角α大于交叉角度＆amp; bgr; 的连接链接。 理想地，第二臂的最大振荡角增加是交叉角度的1.3-2.0倍。
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公开(公告)号：US07108085B2
公开(公告)日：2006-09-19
申请号：US10699914
申请日：2003-11-04
申请人： Tsuyoshi Yoshida , Teiji Yamamoto
发明人： Tsuyoshi Yoshida , Teiji Yamamoto
IPC分类号： B62D55/108
CPC分类号： B60G21/0551 , B60G2202/135 , B60G2204/1222 , B60G2204/1224 , B60G2204/418 , B60G2204/421 , B60G2300/32 , B62D55/0842
摘要： An equalizer bar itself serving as a suspension device of a track-type vehicle has spring effects imparted through torsional deformation relative to vertical oscillatory movements of track frames. Arm portions are fixed in directions opposite to each other in two ends of an equalizer bar main body. Free end portions of the arm portions are individually supported in the track frames to be rotatable in directions opposite to each other. The track frames are therefore regulated in the magnitudes of oscillatory movements according to the spring effects of the equalizer bar main body, whereby travel-time oscillations, oscillatory movements, and/or the like of the vehicle body are sufficiently restrained.
摘要翻译： 作为轨道式车辆的悬挂装置的均衡杆本身具有通过相对于轨道框架的垂直振荡运动的扭转变形而赋予的弹簧效应。 臂部在均衡棒主体的两端彼此相反的方向固定。 臂部的自由端部分别支撑在轨道框架中，以能够相互相反的方向转动。 因此，根据平衡棒主体的弹簧效应，轨道框架以振荡运动的大小进行调节，从而足够地抑制车体的行进时间振荡，振荡运动等。
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公开(公告)号：US20060113214A1
公开(公告)日：2006-06-01
申请号：US11287230
申请日：2005-11-28
CPC分类号： B65D81/107
摘要： To provide a package for an electric apparatus which allows a power cord to be efficiently housed when an electric apparatus is packed and which enables the power supply cord to be appropriately held in a packaging box. A power supply plug holding member 50 is formed by creating a cut-in portion 52 through which a power supply plug 611 is inserted, in a foldable packaging material such as a corrugated fiberboard and then folding the packaging material into a general U shape. The power supply plug 611 of an electric apparatus 61 is locked in the cut-in portion 52 in the power supply plug holding member 50, which is then housed between a packaging box 62 and the electric apparatus 61.
摘要翻译： 提供一种用于电气设备的包装，其允许在电气设备被包装时有效地容纳电源线，并且使电源线能够适当地保持在包装盒中。 电源插头保持构件50通过在诸如瓦楞纸板的可折叠包装材料中产生插入电源插头611的切入部分52形成，然后将包装材料折叠成U形。 电气设备61的电源插头611被锁定在电源插头保持构件50中的切入部分52中，然后容纳在包装盒62和电气设备61之间。
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公开(公告)号：USD518074S1
公开(公告)日：2006-03-28
申请号：US29218469
申请日：2004-12-03
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