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公开(公告)号：US20100175714A1
公开(公告)日：2010-07-15
申请号：US12440400
申请日：2007-09-05
IPC分类号： B08B3/08
CPC分类号： G03F7/423 , H01L21/6708
摘要： A substrate processing apparatus and a substrate processing method, with which a resist can be removed satisfactorily from the substrate and a processing solution used for removing the resist can be recycled, are provided. The substrate processing apparatus includes: a substrate holding means holding a substrate; a peroxosulfuric acid generating means generating a peroxosulfuric acid using sulfuric acid; a mixing means mixing the peroxosulfuric acid generated by the peroxosulfuric acid generating means and sulfuric acid of higher temperature and higher concentration than the sulfuric acid used in the peroxosulfuric acid generating means; and a discharging means discharging, toward the substrate held by the substrate holding means, the mixed solution of the peroxosulfuric acid and the sulfuric acid mixed by the mixing means as a processing solution for removing a resist from the substrate.
摘要翻译： 提供了可以从衬底中令人满意地去除抗蚀剂的衬底处理设备和衬底处理方法，并且可以再循环用于除去抗蚀剂的处理溶液。 基板处理装置包括：保持基板的基板保持装置; 使用硫酸生成过氧硫酸的过氧硫酸生成装置; 将由过硫酸产生装置产生的过氧硫酸与比过硫酸产生装置中使用的硫酸更高和更高浓度的硫酸混合的混合装置; 以及排出装置将由所述基板保持装置保持的基板排出由所述混合装置混合的所述过硫酸和所述硫酸的混合溶液作为从所述基板除去抗蚀剂的处理溶液。
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公开(公告)号：US08038799B2
公开(公告)日：2011-10-18
申请号：US12440400
申请日：2007-09-05
IPC分类号： C23G1/02
CPC分类号： G03F7/423 , H01L21/6708
摘要： A substrate processing apparatus and a substrate processing method, with which a resist can be removed satisfactorily from the substrate and a processing solution used for removing the resist can be recycled, are provided. The substrate processing apparatus includes: a substrate holding means holding a substrate; a peroxosulfuric acid generating means generating a peroxosulfuric acid using sulfuric acid; a mixing means mixing the peroxosulfuric acid generated by the peroxosulfuric acid generating means and sulfuric acid of higher temperature and higher concentration than the sulfuric acid used in the peroxosulfuric acid generating means; and a discharging means discharging, toward the substrate held by the substrate holding means, the mixed solution of the peroxosulfuric acid and the sulfuric acid mixed by the mixing means as a processing solution for removing a resist from the substrate.
摘要翻译： 提供了可以从衬底中令人满意地去除抗蚀剂的衬底处理设备和衬底处理方法，并且可以再循环用于除去抗蚀剂的处理溶液。 基板处理装置包括：保持基板的基板保持装置; 使用硫酸生成过氧硫酸的过氧硫酸生成装置; 将由过硫酸产生装置产生的过氧硫酸与比过硫酸产生装置中使用的硫酸更高和更高浓度的硫酸混合的混合装置; 以及排出装置将由所述基板保持装置保持的基板排出由所述混合装置混合的所述过硫酸和所述硫酸的混合溶液作为从所述基板除去抗蚀剂的处理溶液。
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3.发明申请公开(公告)号：US20080251108A1
公开(公告)日：2008-10-16
申请号：US11663324
申请日：2005-09-14
IPC分类号： B08B13/00
CPC分类号： C25B1/28 , B08B3/08 , B08B3/14 , C02F2103/346 , H01L21/67057
摘要： If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous cleaning while increasing the persulfuric acid concentration adequately to ensure enhanced cleaning performance. The invention provides a feeding apparatus that feeds persulfuric acid to a cleaning apparatus. The cleaning system uses an electrolysis reactor 10 that regenerates the persulfuric acid solution by performing electrolytic reaction to produce persulfate ions from sulfate ions contained in the solution, and a circulation line 4, 5, 6 that circulates the persulfuric acid solution between the cleaning vessel 1 and the electrolysis reactor 10. Configured as above, the invention can provides a feeding apparatus. The cleaning system comprises said configuration and a cleaning vessel 1 that cleans objects 30 using a persulfuric acid solution 2 as cleaning fluid.
摘要翻译： 如果加入使用过硫酸的清洁系统中，本发明用于连续清洗，同时适当地增加过硫酸浓度以确保增强的清洁性能。 本发明提供一种将过硫酸供给到清洁装置的进料装置。 清洗系统使用电解反应器10，该电解反应器10通过进行电解反应，从溶液中含有的硫酸根离子生成过硫酸根离子，再循环过硫酸溶液;以及循环管线4,5,6，其将过硫酸溶液循环在清洗容器1 如上所述，本发明可以提供一种供给装置。 清洁系统包括所述构造和使用过硫酸溶液2作为清洁流体清洁物体30的清洁容器1。
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4.发明授权公开(公告)号：US09593424B2
公开(公告)日：2017-03-14
申请号：US11663324
申请日：2005-09-14
IPC分类号： C25B1/28 , B08B3/08 , B08B3/14 , H01L21/67 , C02F103/34
CPC分类号： C25B1/28 , B08B3/08 , B08B3/14 , C02F2103/346 , H01L21/67057
摘要： If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous cleaning while increasing the persulfuric acid concentration adequately to ensure enhanced cleaning performance. The invention provides a feeding apparatus that feeds persulfuric acid to a cleaning apparatus. The cleaning system uses an electrolysis reactor 10 that regenerates the persulfuric acid solution by performing electrolytic reaction to produce persulfate ions from sulfate ions contained in the solution, and a circulation line 4, 5, 6 that circulates the persulfuric acid solution between the cleaning vessel 1 and the electrolysis reactor 10. Configured as above, the invention can provides a feeding apparatus. The cleaning system comprises said configuration and a cleaning vessel 1 that cleans objects 30 using a persulfuric acid solution 2 as cleaning fluid.
摘要翻译： 如果加入使用过硫酸的清洁系统中，本发明用于连续清洗，同时适当地增加过硫酸浓度以确保增强的清洁性能。 本发明提供一种将过硫酸供给到清洁装置的进料装置。 清洗系统使用电解反应器10，该电解反应器10通过进行电解反应，从溶液中含有的硫酸根离子生成过硫酸根离子，再循环过硫酸溶液;以及循环管线4,5,6，其将过硫酸溶液循环在清洗容器1 如上所述，本发明可以提供一种供给装置。 清洁系统包括所述构造和使用过硫酸溶液2作为清洁流体清洁物体30的清洁容器1。
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公开(公告)号：US07651975B2
公开(公告)日：2010-01-26
申请号：US10551675
申请日：2004-03-31
IPC分类号： B41M5/337
CPC分类号： B41M5/3372
摘要： The present invention is a thermally sensitive recording medium containing a thermally sensitive color developing layer containing a colorless or pale colored basic leuco dye and a color-developing agent as the main components on a substrate, wherein the thermally sensitive recording layer contains an acrylic polymer obtained by the copolymerization of an alkyl acrylate, alkyl methacrylate and vinylsilane as monomer components and a colloidal. Further, the present invention is a thermally sensitive recording medium, wherein the colloidal silica possesses a chain structure.
摘要翻译： 本发明是一种热敏记录介质，其含有在基板上含有无色或浅色的碱性无色染料和显色剂作为主要成分的热敏彩色显影层，其中热敏记录层含有获得的丙烯酸聚合物 通过丙烯酸烷基酯，甲基丙烯酸烷基酯和乙烯基硅烷作为单体组分和胶体的共聚。 此外，本发明是热敏记录介质，其中胶体二氧化硅具有链结构。
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公开(公告)号：US20060191433A1
公开(公告)日：2006-08-31
申请号：US10551675
申请日：2004-03-31
IPC分类号： B41N3/00
CPC分类号： B41M5/3372
摘要： The present invention is a thermally sensitive recording medium comprising a thermally sensitive color developing layer containing colorless or pale colored basic leuco dye and a color developing agent as main components on a substrate, wherein said thermally sensitive recording layer is comprising an acrylic polymer obtained by copolymerization of alkyl acrylate, alkyl methacrylate and vinylsilane as monomer components and a colloidal silica, further, the present invention is a thermally sensitive recording medium, wherein said colloidal silica is possessing chain structure.
摘要翻译： 本发明是一种热敏记录介质，其包括在基板上含有无色或浅色基色无色染料和彩色显影剂作为主要成分的热敏显色层，其中所述热敏记录层包含通过共聚合获得的丙烯酸聚合物 的丙烯酸烷基酯，甲基丙烯酸烷基酯和乙烯基硅烷作为单体组分和胶体二氧化硅，此外，本发明是热敏记录介质，其中所述胶体二氧化硅具有链结构。
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公开(公告)号：US08492308B2
公开(公告)日：2013-07-23
申请号：US12674296
申请日：2008-08-21
申请人： Tatsuyuki Kurihara , Tatsuo Nagai , Yoshimi Midorikawa , Akihito Ogino , Mamoru Suga , Yoshimune Aosaki
发明人： Tatsuyuki Kurihara , Tatsuo Nagai , Yoshimi Midorikawa , Akihito Ogino , Mamoru Suga , Yoshimune Aosaki
IPC分类号： B41M5/333
CPC分类号： B41M5/3336 , B41M5/3335 , B41M5/426 , B41M5/44 , B41M2205/04 , B41M2205/38 , B41M2205/40
摘要： The present invention provides a thermosensitive recording medium with excellent color developing sensitivity, moist heat resistance and plasticizer resistance, as well as excellent heat resistance, background coloring, light resistance and the like in the printed image.A diphenyl sulfone derivative containing a hydroxyl group on one end and an alkoxy group on the other end has a higher melting point than the one containing hydroxyl groups on both ends. As a result, the thermosensitive recording medium obtained using the diphenyl sulfone derivative as the color developing agent in the thermosensitive color developing layer has excellent heat resistance. However the color developing sensitivity of the thermosensitive recording medium generally declines simultaneously, when a color developing agent with a high melting point is ordinarily used. The thermosensitive recording medium of the present invention that uses a combination of the diphenyl sulfone derivative and a specific phenol derivative in the thermosensitive color developing layer has a good color developing sensitivity and an improved balance among the properties such as moist heat resistance, plasticizer resistance and the like.
摘要翻译： 本发明提供了在印刷图像中具有优异的显色灵敏度，耐湿热性和耐增塑剂性以及优异的耐热性，背景着色，耐光性等的热敏记录介质。 一端含有羟基，另一端含有烷氧基的二苯砜衍生物的熔点比两末端羟基的熔点高。 结果，在热敏显色层中使用二苯砜衍生物作为彩色显影剂获得的热敏记录介质具有优异的耐热性。 然而，当通常使用具有高熔点的彩色显影剂时，热敏记录介质的显色灵敏度通常会同时下降。 在热敏显色层中使用二苯砜衍生物和特定苯酚衍生物的组合的本发明的热敏记录介质具有良好的显色灵敏度，并且在诸如耐湿热性，耐增塑剂性和 类似。
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公开(公告)号：US08313637B2
公开(公告)日：2012-11-20
申请号：US12934194
申请日：2008-12-26
申请人： Minoru Uchida , Tatsuo Nagai , Shunichi Kanamori
发明人： Minoru Uchida , Tatsuo Nagai , Shunichi Kanamori
摘要： A wear of an electrode is prevented as much as possible, thereby efficiently electrolyzing a sulfuric acid solution and the like. An electrolysis method includes: passing an electrolytic solution through an electrolysis cell including at least a pair of an anode and a cathode; and supplying the electrodes with an electric power, so as to electrolyze the electrolytic solution, wherein a viscosity of the electrolytic solution is set in a range in response to a current density upon the electric power supply to carry out the electrolysis. The viscosity of a sulfuric acid solution as the electrolytic solution is equal to or less than 10 cP when the current density is equal to or less than 50 A/dm2, the viscosity of the sulfuric acid solution is equal to or less than 8 cP when the current density is from more than 50 to 75 A/dm2, and the viscosity of the sulfuric acid solution is equal to or less than 6 cP when the current density is from more than 75 to 100 A/dm2. Particularly when a highly-concentrated sulfuric acid solution is electrolyzed at a high current density using diamond electrodes, the electrolysis process can be carried out highly efficiently while a wear of the electrode is reduced.
摘要翻译： 尽可能地防止电极的磨损，从而有效地电解硫酸溶液等。 电解方法包括：使电解液通过包括至少一对阳极和阴极的电解槽; 以及向所述电极供电，以便电解所述电解液，其中所述电解液的粘度响应于所述电源上的电流密度而设定在一定范围内以进行所述电解。 当电流密度等于或小于50A / dm 2时，作为电解液的硫酸溶液的粘度等于或小于10cP，硫酸溶液的粘度等于或小于8cP，当 电流密度为50〜75A / dm 2，当电流密度为75〜100A / dm 2时，硫酸溶液的粘度为6cP以下。 特别是当使用金刚石电极以高电流密度电解高浓度硫酸溶液时，可以高效地进行电解处理，同时降低电极的磨损。
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公开(公告)号：US20110017606A1
公开(公告)日：2011-01-27
申请号：US12934194
申请日：2008-12-26
申请人： Minoru Uchida , Tatsuo Nagai , Shunichi Kanamori
发明人： Minoru Uchida , Tatsuo Nagai , Shunichi Kanamori
摘要： A wear of an electrode is prevented as much as possible, thereby efficiently electrolyzing a sulfuric acid solution and the like. An electrolysis method includes: passing an electrolytic solution through an electrolysis cell including at least a pair of an anode and a cathode; and supplying the electrodes with an electric power, so as to electrolyze the electrolytic solution, wherein a viscosity of the electrolytic solution is set in a range in response to a current density upon the electric power supply to carry out the electrolysis. The viscosity of a sulfuric acid solution as the electrolytic solution is equal to or less than 10 cP when the current density is equal to or less than 50 A/dm2, the viscosity of the sulfuric acid solution is equal to or less than 8 cP when the current density is from more than 50 to 75 A/dm2, and the viscosity of the sulfuric acid solution is equal to or less than 6 cP when the current density is from more than 75 to 100 A/dm2. Particularly when a highly-concentrated sulfuric acid solution is electrolyzed at a high current density using diamond electrodes, the electrolysis process can be carried out highly efficiently while a wear of the electrode is reduced.
摘要翻译： 尽可能地防止电极的磨损，从而有效地电解硫酸溶液等。 电解方法包括：使电解液通过包括至少一对阳极和阴极的电解槽; 以及向所述电极供电，以便电解所述电解液，其中所述电解液的粘度响应于所述电源上的电流密度而设定在一定范围内以进行所述电解。 当电流密度等于或小于50A / dm 2时，作为电解液的硫酸溶液的粘度等于或小于10cP，硫酸溶液的粘度等于或小于8cP，当 电流密度为50〜75A / dm 2，当电流密度为75〜100A / dm 2时，硫酸溶液的粘度为6cP以下。 特别是当使用金刚石电极以高电流密度电解高浓度硫酸溶液时，可以高效地进行电解处理，同时降低电极的磨损。
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公开(公告)号：US07232791B2
公开(公告)日：2007-06-19
申请号：US10505021
申请日：2003-02-28
申请人： Tatsuo Nagai , Kaoru Hamada , Tadakazu Fukuchi , Takashi Sasaki
发明人： Tatsuo Nagai , Kaoru Hamada , Tadakazu Fukuchi , Takashi Sasaki
IPC分类号： B41M5/323
CPC分类号： B41M5/34 , B41M5/3372 , B41M5/3375
摘要： In the multi colored thermally sensitive recording medium, at least one kind of dye precursor is contained in complex fine particles which contain dye precursor and polymer of multi valence isocyanate compound, further contain 4,4′-diisocyanate-3,3′-dimethyl-1,1′biphenyl and/or polymethylene.polyphenyl.polyisocyanate.
摘要翻译： 在多色热敏记录介质中，在含有染料前体和多价异氰酸酯化合物的聚合物的复合微粒中含有至少一种染料前体，还含有4,4'-二异氰酸酯-3,3'-二甲基 - 1,1'-联苯和/或聚亚甲基聚苯基多异氰酸酯。
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