公开(公告)号：US5861715A

公开(公告)日：1999-01-19

申请号：US770505

申请日：1996-12-20

申请人： Tatsushi Igarashi ,  Osamu Mizuno ,  Kazuo Nakamura ,  Shoichi Mayama

发明人： Tatsushi Igarashi ,  Osamu Mizuno ,  Kazuo Nakamura ,  Shoichi Mayama

IPC分类号： H01J61/86 ,  G03F7/20 ,  H01J61/35 ,  H01J61/40 ,  H01J17/16

CPC分类号： G03F7/70016 ,  H01J61/40

摘要： A discharge lamp in which ultraviolet radiation of short wavelengths can be advantageously cut and in which the amount of emitted light (i-line) of 365 nm wavelength can be increased is achieved according to the invention by providing a quartz glass arc tube that is coated with a plurality of coating layers which include a layer which has Ta.sub.2 O.sub.5 as the main component, and at least one additional coating layer which has a refraction coefficient which differs from the refraction coefficient of the coating layer having the Ta.sub.2 O.sub.5 main component. These layers act to prevent the reflection of light with a wavelength of 365 nm which is incident on the coatings on the arc tube and to cut at least 50% of the ultraviolet radiation having wavelengths of 230 nm or less. According to the invention, the coating layers can be provided on the outer side of the arc tube, on the inner side of the arc tube, or on both on the inner and outer sides of the arc tube.

摘要翻译： 根据本发明，可以通过提供涂覆的石英玻璃电弧管来实现其中可以有利地切割短波长的紫外线辐射并且其中可以增加365nm波长的发射光（i线）的量的放电灯 具有包括以Ta 2 O 5为主要成分的层的多个涂层以及至少一个附加的涂层，其具有与具有Ta 2 O 5主要成分的涂层的折射系数不同的折射系数。 这些层用于防止入射在电弧管上的涂层上的365nm波长的光的反射，并切割波长为230nm或更小的紫外线辐射的至少50％。 根据本发明，涂层可以设置在电弧管的外侧，在电弧管的内侧上，或者设置在电弧管的内侧和外侧上。

公开(公告)号：US5757132A

公开(公告)日：1998-05-26

申请号：US725039

申请日：1996-10-02

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

IPC分类号： H01J65/00 ,  H01J61/067

CPC分类号： H01J65/046

摘要： To maintain the relative positional relationship between an inner tube and an inner electrode of a dielectric barrier discharge tube having a roughly cylindrical, double tube arrangement of an outer tube coaxially arranged about an inner tube with a discharge space defined therebetween, an outer electrode on an outer surface of the outer tube, an inner electrode on an inner surface of the inner tube, and a discharge gas which forms excimer molecules by a dielectric barrier discharge filling said discharge space, despite repeated expansion and contraction of the inner electrode due to the dielectric barrier discharge lamp being repeatedly turned on and off, according to the invention, the inner electrode is formed of a substantially tubular metal component or the like, and a motion preventing component is provided at opposite ends of the inner electrode for maintaining an axial position of the inner electrode relative to the inner tube.

摘要翻译： 为了保持介质阻挡放电管的内管和内电极之间的相对位置关系，所述介质阻挡放电管具有围绕内管同轴布置的外管的大致圆筒形双管布置，其间限定有放电空间，外电极 外管的外表面，内管的内表面上的内电极和通过填充所述放电空间的介电阻挡放电形成准分子分子的放电气体，尽管内电极由于电介质的反复膨胀和收缩 根据本发明，根据本发明，内部电极由基本上管状的金属部件等形成，并且在内部电极的相对端设置防止运动部件，用于保持轴向位置 内部电极相对于内管。

公开(公告)号：US5739636A

公开(公告)日：1998-04-14

申请号：US589703

申请日：1996-01-22

申请人： Akiyasu Yamaguchi ,  Yukio Yasuda ,  Hiromitsu Matsuno ,  Tatsushi Igarashi

发明人： Akiyasu Yamaguchi ,  Yukio Yasuda ,  Hiromitsu Matsuno ,  Tatsushi Igarashi

IPC分类号： G02B21/16 ,  G03F7/20 ,  H01J61/16 ,  H01J61/18 ,  H01J61/35 ,  H01J61/52 ,  H01J61/86 ,  H01J61/12

CPC分类号： G03F7/70016 ,  H01J61/18 ,  H01J61/35 ,  H01J61/52 ,  H01J61/86

摘要： A cadmium discharge lamp which can emit line spectra with wavelengths of 214.+-.2 nm with high power is achieved by encapsulating metallic cadmium, in an amount producing a pressure in stationary lighting operation in the range from 2 kPa to 13.7 kPa, together with at least one of the rare gases xenon, krypton, argon and neon, in a temperature-controlled arc tube which is provided with electrodes located adjacently opposite one another, and by operating the lamp such that J/P is in the range from 1.4 to 75, where J is the discharge current in stationary lighting operation in amperes and the P is the cadmium pressure in stationary lighting operation.

摘要翻译： 可以通过在2kPa至13.7kPa的范围内将固定照明操作中产生压力的金属镉密封在一起，可以发射波长为214 +/- 2nm的线光谱的镉放电灯， 至少有一种稀有气体氙气，氪气，氩气和氖气在一个温度控制的电弧管中，其中设置有彼此相邻的电极，并通过操作灯使得J / P在1.4〜 75，其中J是静止照明中的放电电流，以安培为单位，P是静止照明操作中的镉压力。

公开(公告)号：US5986402A

公开(公告)日：1999-11-16

申请号：US961262

申请日：1997-10-30

申请人： Mitsuo Narita ,  Akihiko Sugitani ,  Yoshihiro Horikawa ,  Takashi Ito ,  Tatsushi Igarashi

发明人： Mitsuo Narita ,  Akihiko Sugitani ,  Yoshihiro Horikawa ,  Takashi Ito ,  Tatsushi Igarashi

IPC分类号： H01J61/073 ,  H01J61/12 ,  H01J61/30 ,  H01J61/82 ,  H01J61/86 ,  H01J61/88 ,  H01J17/06

CPC分类号： H01J61/125 ,  H01J61/30 ,  H01J61/827 ,  H01J61/86

摘要： A metal halide lamp with a distance of less than 3.0 mm between the electrodes, in which in the hermetically sealed portion no cracks occur, which can be produced without difficulty, and which enables advantageous operation is achieved with a halide lamp in which an arc tube made of quartz glass contains a cathode and an anode spaced from each other at a distance of less than or equal to 2.9 mm together with mercury and metal halides, and which is operated with a nominal wattage range of from 100 to 400 W using direct current, by causing the ratio D/H to be greater than or equal to 1.9 when D is the maximum inside diameter in millimeters in a direction which orthogonally intersects the axial direction of the electrodes in the discharge space and H is the length of the cathode projecting within the discharge space, also in millimeters.

摘要翻译： 在电极之间距离小于3.0mm的金属卤化物灯，其中在密封部分中没有发生裂纹，这可以毫无困难地产生，并且这可以通过卤素灯实现有利的操作，其中电弧管 由石英玻璃制成的阴极和阳极与水银和金属卤化物一起以小于或等于2.9mm的距离彼此间隔开，并且使用直流电流在100至400W的标称功率范围内操作 当D是在放电空间中与电极的轴向正交的方向上的最大内径（以毫米计）的最大内径时，D / H的比率大于或等于1.9，H是阴极突出的长度 在放电空间内，也以毫米计。

公开(公告)号：US5763999A

公开(公告)日：1998-06-09

申请号：US531374

申请日：1995-09-20

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Masashi Okamoto ,  Tatsushi Igarashi ,  Fumitoshi Takemoto

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Masashi Okamoto ,  Tatsushi Igarashi ,  Fumitoshi Takemoto

IPC分类号： G21K5/00 ,  H01J65/00 ,  H01J65/04 ,  H01J61/067

CPC分类号： H01J65/046

摘要： A light source device in which the radiated light from the dielectric barrier discharge lamp can always be stabilized even if the discharge vessel of the dielectric barrier discharge lamp is large or the load on the tube wall within the discharge vessel is small. This is achieved according to the invention by the provision of a light source device having a discharge lamp which has a generally cylindrical, coaxial double-tube arrangement of an outer tube and an inner tube, in which there is an outer electrode on the outer tube, in which there is an inner electrode on the inner tube, and in which a discharge space between the inner and outer tubes is filled with a discharge gas for formation of excimer molecules by a dielectric barrier discharge, and of a power source for operating this discharge lamp in accordance with the relationship: Vs/Vp.ltoreq.0.5 where Vs is the starting voltage and Vp is the voltage applied to the discharge lamp during steady-state luminous operation.

摘要翻译： 即使介电阻挡放电灯的放电容量大或者放电容器内的管壁上的负荷较小，来自电介质阻挡放电灯的辐射光总能稳定的光源装置。 根据本发明，通过提供一种具有放电灯的光源装置来实现，所述放电灯具有外管和内管的大致圆筒形同轴双管布置，其中在外管上具有外电极 其中在内管上存在内电极，并且其中内管和外管之间的放电空间填充有用于通过电介质阻挡放电形成准分子的放电气体，以及用于操作该电极的电源 放电灯按照Vs / Vp

公开(公告)号：US5666026A

公开(公告)日：1997-09-09

申请号：US530655

申请日：1995-09-20

申请人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

发明人： Hiromitsu Matsuno ,  Nobuyuki Hishinuma ,  Kenichi Hirose ,  Kunio Kasagi ,  Fumitoshi Takemoto ,  Yoshinori Aiura ,  Tatsushi Igarashi

IPC分类号： G21K5/00 ,  H01J65/00 ,  H01J65/04 ,  H01J17/16 ,  H01J61/06

CPC分类号： H01J65/046

摘要： A dielectric barrier discharge lamp having a generally cylindrical double-tube arrangement of an outer tube coaxially disposed about an inner tube, with an outer electrode disposed on an outside surface of the outer tube, an inner electrode disposed on an inside surface of the inner tube, and a discharge space provided between the outer tube and the inner tube which is filled with a discharge gas for formation of excimer molecules by dielectric barrier discharge achieves firm engagement of the inner electrode against the inner tube and a stable discharge over a long time even if part of the electrode corrodes due to the ozone produced or it wears. This is achieved by embodiments in which the inner electrode is a generally tubular part which is slit in an axial direction along the full length thereof. The tubular part can be a single cylindrically sheet having opposite longitudinally extending edges spaced from each other by a gap or overlapped. Alternatively, the tubular part can be formed of a pair of substantially semi-cylindrical parts which are separated by a gap between each pair of longitudinally extending edges.

摘要翻译： 一种电介质阻挡放电灯，其具有大致圆柱形的双管布置，外管同轴地设置在内管周围，外电极设置在外管的外表面上，内电极设置在内管的内表面上 并且设置在外管和内管之间的放电空间，其填充有用于通过电介质阻挡放电形成准分子分子的放电气体，使得内部电极与内管牢固接合，并且长时间稳定地放电甚至 如果电极的一部分由于产生的臭氧或其磨损而腐蚀。 这是通过其中内部电极是沿着其整个长度沿轴向方向狭缝的大致管状部分的实施例来实现的。 管状部件可以是单个圆柱形片材，其具有彼此间隔开或重叠的相对的纵向延伸边缘。 或者，管状部分可以由一对基本上半圆柱形的部分形成，这些部分由每对纵向延伸边缘之间的间隙分开。

公开(公告)号：US5589735A

公开(公告)日：1996-12-31

申请号：US506829

申请日：1995-07-25

申请人： Akiyasu Yamaguchi ,  Yukio Yasuda ,  Tsuneo Okanuma ,  Tatsushi Igarashi ,  Hiromitsu Matsuno ,  Tatsumi Hiramoto

发明人： Akiyasu Yamaguchi ,  Yukio Yasuda ,  Tsuneo Okanuma ,  Tatsushi Igarashi ,  Hiromitsu Matsuno ,  Tatsumi Hiramoto

IPC分类号： H01J61/86 ,  G03F7/20 ,  H01J61/30 ,  H01J61/74 ,  H01J7/08 ,  H01J61/18

CPC分类号： G03F7/70016 ,  H01J61/30 ,  H01J61/74

摘要： An emission device which operates a cadmium lamp with a light intensity sufficient for used in industrial applications is achieved by an emission device having a cadmium lamp with a fluorescent tube within which a cathode and an anode are space a small distance apart and a buffer gas for easier initiation of luminous operation and metallic cadmium in an amount per unit volume of the fluorescent tube of 1.times.10.sup.-4 g/cm.sup.3 to 3.times.10.sup.-3 g/cm.sup.3 are encapsulated, and a power source device for supplying an electrical input between the cathode and the anode in an electrical input range from 0.5 kW to 5.0 kW with the condition:6.03+2.79 W.ltoreq.r.ltoreq.40being satisfied, where the electrical input of the power source device into the cadmium lamp in steady-state luminous operation is W (kW) and the maximum inside radius of the fluorescent tube is r (mm).

摘要翻译： 操作具有足以用于工业应用的光强度的镉灯的发射装置通过具有镉灯的发射装置来实现，所述镉灯具有荧光管，阴极和阳极间隔开小间隔，并且缓冲气体用于 封装了1×10 -4 g / cm 3〜3×10 -3 g / cm 3的荧光灯的单位体积的发光操作的更容易的起始和金属镉，以及用于在阴极和阴极之间提供电输入的电源装置 在0.5kW至5.0kW的电输入范围内的阳极，条件为：6.03 + 2.79W

公开(公告)号：US5581152A

公开(公告)日：1996-12-03

申请号：US303033

申请日：1994-09-08

申请人： Hiromitsu Matsuno ,  Tatsushi Igarashi ,  Tatsumi Hiramoto ,  Fumitoshi Takemoto ,  Nobuyuki Hishinuma ,  Yasuo Oonishi ,  Kunio Kasagi ,  Takashi Asahina ,  Yasuhiko Wakahata

发明人： Hiromitsu Matsuno ,  Tatsushi Igarashi ,  Tatsumi Hiramoto ,  Fumitoshi Takemoto ,  Nobuyuki Hishinuma ,  Yasuo Oonishi ,  Kunio Kasagi ,  Takashi Asahina ,  Yasuhiko Wakahata

IPC分类号： H01J65/00 ,  H01J65/04 ,  H01J61/067

CPC分类号： H01J65/046 ,  H01J65/00

摘要： In a dielectric barrier discharge lamp, in which a discharge vessel, in which a discharge gas forming "excimer" molecules is encapsulated, is provided with a dielectric provided with a netlike electrode and a window, through which the light goes, the first object of the invention is achieved by an arrangement in which a thickness of ends of the above-described netlike electrodes is greater than the average thickness of the entire electrode. Another object of the invention is achieved by an arrangement in which a holder incorporated in the discharge vessel has an outer dimension that is less than/equal to an outer dimension of the netlike electrodes. A further object of the invention is achieved by an arrangement by which the discharge vessel has a hollow cylindrical shape formed from an external tube and an internal tube and a means for hermetic sealing is arranged inside the internal tube.

摘要翻译： 在其中封装了形成“准分子”分子的放电气体的放电容器的电介质阻挡放电灯中，设置有电介质，所述电介质设置有网状电极和窗，光通过该电介质，第一物体 本发明通过上述网状电极的端部的厚度大于整个电极的平均厚度的结构来实现。 本发明的另一个目的是通过一种结构实现的，其中结合在放电容器中的保持器的外形尺寸小于/等于网状电极的外部尺寸。 本发明的另一个目的是通过这样一种布置实现放电容器具有由外管和内管形成的中空圆筒形状，并且用于气密密封的装置设置在内管的内部。

公开(公告)号：US5471278A

公开(公告)日：1995-11-28

申请号：US154404

申请日：1993-11-19

申请人： Yukio Yasuda ,  Akiyasu Yamaguchi ,  Tatsushi Igarashi ,  Yasuo Oonishi ,  Kenzo Kai ,  Masanori Sugihara ,  Takashi Mori ,  Akira Miyaji

发明人： Yukio Yasuda ,  Akiyasu Yamaguchi ,  Tatsushi Igarashi ,  Yasuo Oonishi ,  Kenzo Kai ,  Masanori Sugihara ,  Takashi Mori ,  Akira Miyaji

IPC分类号： G03F7/20 ,  H01J61/16 ,  H01J61/18 ,  H01J61/86

CPC分类号： G03F7/70016 ,  H01J61/18 ,  H01J61/86

摘要： A cadmium/inert gas discharge lamp of the short arc type, which suppresses an unnecessary emission upstream and downstream of the necessary emission spectra in a wavelength range of 210 to 230 nm, achieves a high efficiency of the emission spectra in the range 210 to 230 nm and can be used in very satisfactory manner for industrial applications. Also, a highly efficient projection exposure device through the incorporation of a cadmium/rare gas discharge lamp of the short arc type having good emission spectrum characteristics in the wavelength range 210 to 230 nm, which can transmit in projecting manner fine image patterns with a large depth of focus. The cadmium/rare gas discharge lamp of the short arc type is arranged within a temperature-regulated quartz bulb, and is provided with a pair of adjacently facing electrodes, together with inert gas selected from xenon, krypton, argon, neon or mixtures of them. Metal cadmium with a pressure of 14 to 200 kPa is encapsulated in the tube in a stationary lighting operation. The lamp is operated in such a way that J/P, i.e. the ratio between a discharge current in a stationary lighting operation J (A) and a cadmium pressure in a stationary lighting operation P (kPa) is in a range 0.13 to 15. Also, a projection exposure device, which has the above-described discharge lamp and a power supply for carrying out the lighting operation of the discharge lamp under the above-described condtions.

摘要翻译： 短波型的镉/惰性气体放电灯在210〜230nm的波长范围内抑制必要的发射光谱的上游和下游的不必要的发光，实现了210〜230的发射光谱的高效率 nm，可以以非常满意的方式用于工业应用。 另外，通过并入具有210〜230nm的波长范围内的发射光谱特性良好的短弧型镉/稀有气体放电灯的高效投影曝光装置，能以突出的方式突出显示具有大的图像的精细图像图案 焦点深度。 短弧型的镉/稀有气体放电灯布置在温度调节的石英灯泡内，并且设置有一对相邻的电极以及选自氙气，氪气，氩气，氖气或它们的混合物的惰性气体 。 压力为14至200kPa的金属镉在静止照明操作中封装在管中。 灯的操作方式是J / P，即静止点亮操作J（A）中的放电电流与静止点亮操作P（k​​Pa）中的镉压力之比在0.13至15的范围内。 此外，具有上述放电灯的投影曝光装置和用于在上述条件下进行放电灯的点亮操作的电源。

公开(公告)号：US4543472A

公开(公告)日：1985-09-24

申请号：US438790

申请日：1982-11-03

申请人： Tetsuji Arai ,  Tatsushi Igarashi

发明人： Tetsuji Arai ,  Tatsushi Igarashi

IPC分类号： F27B17/00 ,  H05B3/00 ,  H05B1/00 ,  F27D11/00

CPC分类号： F27B17/0025 ,  H05B3/0047

摘要： Disclosed herein is a plane light source unit comprising a plurality of lamps disposed closely with each other in proximity to a mirror with the longitudinal axes of the lamps extending parallelly in a plane. Each of the lamps comprises an elongated sealed tubular body and a filament formed of alternating non-luminous portions and luminous portions and provided within the tubular body along the longitudinal axis of the tubular body. A radiant heating furnace comprising the above plane light source unit and a cooling system therefor is also disclosed. The plane light source unit and a radiant heating furnace incorporating the same light source unit can irradiate light onto a region of a large area with a uniform irradiation energy density. They are suitable for heat treatment of semiconductor wafers.

摘要翻译： 这里公开了一种平面光源单元，其包括彼此靠近反射镜彼此紧密配置的多个灯，其中灯的纵向轴线平行于平面延伸。 每个灯包括细长的密封管状体和由交替的非发光部分和发光部分形成的细丝，并且沿着管状体的纵向轴线设置在管状体内。 还公开了一种包括上述平面光源单元和其冷却系统的辐射加热炉。 结合有相同的光源单元的平面光源单元和辐射加热炉可以以均匀的照射能量密度将光照射到大面积的区域上。 它们适用于半导体晶片的热处理。