摘要:
A package is mainly formed of a package body having a storage area for storing a pressure sensor, a capacity type pressure sensor stored in the storage area of the package body, a lid seals the package body in which the pressure sensor is stored, an adhesive agent for fixing the pressure sensor to the package body, and a bonding wire for electrically coupling a bonding pad of the pressure sensor and a conductive portion of the package body. An adhesive area of the package body and the pressure sensor is set to the area other than a projection area of the diaphragm of the pressure sensor on a mount bottom surface. This makes it possible to provide the package for the pressure sensor capable of detecting the pressure with high sensitivity although the gap between the substrate and the diaphragm has the value with the magnitude of several μms.
摘要:
A pressure-sensor package mainly includes a pressure sensor, a support substrate, and a resin layer. The pressure sensor includes a glass substrate having a fixed electrode, and a silicon substrate having a diaphragm that is disposed apart from the fixed electrode by a predetermined distance. The support substrate is a silicon/glass composite substrate on which the pressure sensor is mounted such that the support substrate and the diaphragm face each other. The resin layer fixes the pressure sensor and the support substrate together. The pressure sensor is mounted on a mounting area of the support substrate with a joint member therebetween. Accordingly, even if a gap between the support substrate and the diaphragm has a size of about several micrometers, the pressure-sensor package is capable of performing pressure detection with high sensitivity.
摘要:
A package is mainly formed of a package body having a storage area for storing a pressure sensor, a capacity type pressure sensor stored in the storage area of the package body, a lid seals the package body in which the pressure sensor is stored, an adhesive agent for fixing the pressure sensor to the package body, and a bonding wire for electrically coupling a bonding pad of the pressure sensor and a conductive portion of the package body. An adhesive area of the package body and the pressure sensor is set to the area other than a projection area of the diaphragm of the pressure sensor on a mount bottom surface. This makes it possible to provide the package for the pressure sensor capable of detecting the pressure with high sensitivity although the gap between the substrate and the diaphragm has the value with the magnitude of several μms.
摘要:
The resin optical component mold includes a first mold and a second mold for defining a cavity for molding a resin optical component having a minutely concavo-convex shaped surface, on which a plurality of minute concave or convex portions in units of submicrons is formed, by injection molding light transmitting resin. A master mold 36 formed of an inorganic oxide layer having a minutely concavo-convex shaped surface 36a, on which a concavo-convex shape complementary to the concavo-convex shape formed on the minutely concavo-convex shaped surface of the resin optical component is formed, is provided on the internal surface of the first mold.
摘要:
A multiple operation switch that provides electric signal in accordance with the angle of tilting an operating rod protruding from the front panel of an electronic apparatus. The switch comprises a lower case provided at the recessed bottom with a lower switching portion formed of a movable contact and a first fixed contact point. A movable contact body is provided with a conductive flange that makes contact, when tilted by the operating rod, in part with at least two of the second fixed contact points disposed on the reverse surface of upper case. Which movable contact body is supported at the conductive flange by a holding member pushed upward by a coil spring provided in the lower case so that it is engaged in a tiltable manner with an upper case. The second fixed contact points and the conductive flange constitute an upper switching portion.
摘要:
A pressure-resistant explosion-proof electric motor (44) is surrounded by a double casing comprised of inner and outer cases with a motor-cooling oil passage (54) formed therebetween. A flange (26) is detachably fitted to the top surface of a tank to hold the electric motor (44) in the tank. A downwardly-extending pipe (28) is at an upper end fixed to the flange and at a lower end connected through a terminal box (30) to the electric motor (44). A centrifugal pump (67) is fixed to the underside of the electric motor (44) to have its rotary shaft connected to the output shaft (60) of the electric motor (44). A motor cover accommodates therein the electric motor and the terminal box (30) in a watertight manner. A protective pipe (71) extends from the flange (26) to the motor cover (69) and accommodates therein the downwardly-extending pipe (28) in a watertight manner. A cooling oil is circulated through the motor-cooling oil passage (54) to cool the electric motor. This water-immersed cargo handling pump is suitable for transferring the liquid in a tank of a vessel.
摘要:
Provided is a capacitive acceleration sensor including a silicon substrate, which includes a movable electrode having a comb shape and a fixed electrode having a comb shape opposed to the comb shape of the movable electrode, and a pair of glass substrates having a concave portion forming a cavity on at least one side thereof, wherein the silicon substrate and the glass substrates are bonded to each other so that the movable electrode and the fixed electrode is disposed in the cavity. Accordingly, it is possible to provide the capacitive acceleration sensor having a small size and high sensitivity.
摘要:
A pressure sensor includes a gold-silicon eutectic crystal layer interposed between the contact layer and the silicon substrate. Because the contact layer and the silicon substrate are electrically connected to each other by using a gold-silicon eutectic reaction at the time of bonding the silicon substrate and the glass substrate, a contact resistance between the contact layer and the silicon substrate can be stabilized, and a Q value of the sensor can be stabilized. In addition, since the contact layer and the silicon substrate are bonded to each other by the gold-silicon eutectic reaction, the bonding strength is sufficient.