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196 条记录 (耗时 0.021 秒)

    Non-circular substrate holders
    2.
    发明授权
    Non-circular substrate holders 失效
    非圆形基板支架

    公开(公告)号：US08216379B2

    公开(公告)日：2012-07-10

    申请号：US12428869

    申请日：2009-04-23

    申请人： Tetsuya Ishikawa ,  Liang-Yuh Chen

    发明人： Tetsuya Ishikawa ,  Liang-Yuh Chen

    IPC分类号： H01L21/20 ,  B23Q3/18

    CPC分类号： H01L21/68764 ,  C23C16/4583 ,  C30B25/12 ,  H01L21/68771

    摘要： A substrate holder comprises a generally circular planar body, the body having greater than or equal to two pairs of diametrically opposed, parallel flat edges, and wherein the substrate holder is configured to fit on a generally circular susceptor within a processing chamber. In some embodiments the substrate holder has four pairs of diametrically opposed, parallel flat edges, whereby the substrate holder is substantially octagonal. Furthermore, in some embodiments the substrate holder covers less than eighty percent of the susceptor area. A method of processing a substrate using the substrate holder includes: loading the substrate into a recess in the substrate holder; transferring the substrate holder through a loadlock into the processing chamber, the substrate holder being presented with a smallest cross-section aligned for passage through the loadlock; placing the substrate holder on the susceptor; and processing the substrate. The substrate holder may carry a plurality of substrates. Alternatively, the substrate holder may carry a single large substrate, the substrate being trimmed to fit the substrate holder.

    摘要翻译： 衬底保持器包括大致圆形的平面主体，主体具有大于或等于两对直径相对的平行平坦边缘，并且其中衬底保持器被配置为装配在处理室内的大致圆形的基座上。 在一些实施例中，衬底保持器具有四对直径相对的平行平坦边缘，由此衬底保持器基本上为八边形。 此外，在一些实施例中，衬底支架覆盖小于基座区域的百分之八十。 使用衬底保持器处理衬底的方法包括：将衬底加载到衬底保持器中的凹部中; 将衬底保持器通过装载锁转移到处理室中，衬底保持器具有对准以通过负载锁的最小横截面; 将基板支架放置在基座上; 并处理基板。 衬底保持器可以承载多个衬底。 或者，衬底保持器可以承载单个大的衬底，衬底被修整以适合衬底保持器。

    NON-CIRCULAR SUBSTRATE HOLDERS
    5.
    发明申请
    NON-CIRCULAR SUBSTRATE HOLDERS 失效
    非圆形基板支架

    公开(公告)号：US20100273314A1

    公开(公告)日：2010-10-28

    申请号：US12428869

    申请日：2009-04-23

    申请人： TETSUYA ISHIKAWA ,  Liang-Yuh Chen

    发明人： TETSUYA ISHIKAWA ,  Liang-Yuh Chen

    IPC分类号： H01L21/20 ,  B23Q3/18

    CPC分类号： H01L21/68764 ,  C23C16/4583 ,  C30B25/12 ,  H01L21/68771

    摘要： A substrate holder comprises a generally circular planar body, the body having greater than or equal to two pairs of diametrically opposed, parallel flat edges, and wherein the substrate holder is configured to fit on a generally circular susceptor within a processing chamber. In some embodiments the substrate holder has four pairs of diametrically opposed, parallel flat edges, whereby the substrate holder is substantially octagonal. Furthermore, in some embodiments the substrate holder covers less than eighty percent of the susceptor area. A method of processing a substrate using the substrate holder includes: loading the substrate into a recess in the substrate holder; transferring the substrate holder through a loadlock into the processing chamber, the substrate holder being presented with a smallest cross-section aligned for passage through the loadlock; placing the substrate holder on the susceptor; and processing the substrate. The substrate holder may carry a plurality of substrates. Alternatively, the substrate holder may carry a single large substrate, the substrate being trimmed to fit the substrate holder.

    摘要翻译： 衬底保持器包括大致圆形的平面主体，主体具有大于或等于两对直径相对的平行平坦边缘，并且其中衬底保持器被配置为装配在处理室内的大致圆形的基座上。 在一些实施例中，衬底保持器具有四对直径相对的平行平坦边缘，由此衬底保持器基本上为八边形。 此外，在一些实施例中，衬底支架覆盖小于基座区域的百分之八十。 使用衬底保持器处理衬底的方法包括：将衬底加载到衬底保持器中的凹部中; 将衬底保持器通过装载锁转移到处理室中，衬底保持器具有对准以通过负载锁的最小横截面; 将基板支架放置在基座上; 并处理基板。 衬底保持器可以承载多个衬底。 或者，衬底保持器可以承载单个大的衬底，衬底被修整以适合衬底保持器。

    Method of Preparing a Material of a Battery Cell
    7.
    发明申请
    Method of Preparing a Material of a Battery Cell 有权

    公开(公告)号：US20220410105A1

    公开(公告)日：2022-12-29

    申请号：US17899048

    申请日：2022-08-30

    申请人： Liang-Yuh Chen

    发明人： Liang-Yuh Chen

    IPC分类号： B01J8/18 ,  C01B13/14 ,  C01B13/34 ,  B22F9/22 ,  C01G1/02 ,  B22F9/08 ,  B01J8/24 ,  B01J12/02 ,  C01B25/45 ,  H01M4/04 ,  H01M4/36

    摘要： A continuous process for producing a material of a battery cell using a system having a mist generator, a drying chamber, one or more gas-solid separators and a reactor is provided. A mist generated from a liquid mixture of two or more metal precursor compounds in desired ratio is dried inside the drying chamber. Heated air or gas is served as the gas source for forming various gas-solid mixtures and as the energy source for reactions inside the drying chamber and the reactor. One or more gas-solid separators are used in the system to separate gas-solid mixtures from the drying chamber into solid particles mixed with the metal precursor compounds and continuously deliver the solid particles into the reactor for further reaction to obtain final solid material particles with desired crystal structure, particle size, and morphology.

    Method of Preparing a Material of a Battery Cell
    8.
    发明申请
    Method of Preparing a Material of a Battery Cell 有权

    公开(公告)号：US20210260550A1

    公开(公告)日：2021-08-26

    申请号：US17319974

    申请日：2021-05-13

    申请人： Liang-Yuh Chen

    发明人： Liang-Yuh Chen

    IPC分类号： B01J8/18 ,  C01B13/14 ,  C01B13/34 ,  B22F9/22 ,  C01G1/02 ,  B22F9/08 ,  B01J8/24 ,  B01J12/02 ,  C01B25/45 ,  H01M4/04 ,  H01M4/36

    摘要： A continuous process for producing a material of a battery cell using a system having a mist generator, a drying chamber, one or more gas-solid separators and a reactor is provided. A mist generated from a liquid mixture of two or more metal precursor compounds in desired ratio is dried inside the drying chamber. Heated air or gas is served as the gas source for forming various gas-solid mixtures and as the energy source for reactions inside the drying chamber and the reactor. One or more gas-solid separators are used in the system to separate gas-solid mixtures from the drying chamber into solid particles mixed with the metal precursor compounds and continuously deliver the solid particles into the reactor for further reaction to obtain final solid material particles with desired crystal structure, particle size, and morphology.

    Method of preparing a material of a battery cell
    9.
    发明授权
    Method of preparing a material of a battery cell 有权

    公开(公告)号：US11059012B2

    公开(公告)日：2021-07-13

    申请号：US16747450

    申请日：2020-01-20

    申请人： Liang-Yuh Chen

    发明人： Liang-Yuh Chen

    IPC分类号： B01J8/18 ,  C01B13/14 ,  C01B13/34 ,  B22F9/22 ,  C01G1/02 ,  B22F9/08 ,  B01J8/24 ,  B01J12/02 ,  C01B25/45 ,  H01M4/04 ,  H01M4/36 ,  H01M4/505 ,  H01M4/525

    摘要： A continuous process for producing a material of a battery cell using a system having a mist generator, a drying chamber, one or more gas-solid separators and a reactor is provided. A mist generated from a liquid mixture of two or more metal precursor compounds in desired ratio is dried inside the drying chamber. Heated air or gas is served as the gas source for forming various gas-solid mixtures and as the energy source for reactions inside the drying chamber and the reactor. One or more gas-solid separators are used in the system to separate gas-solid mixtures from the drying chamber into solid particles mixed with the metal precursor compounds and continuously deliver the solid particles into the reactor for further reaction to obtain final solid material particles with desired crystal structure, particle size, and morphology.

    Method of Preparing a Material of a Battery Cell
    10.
    发明申请
    Method of Preparing a Material of a Battery Cell 审中-公开

    公开(公告)号：US20180361338A1

    公开(公告)日：2018-12-20

    申请号：US16114114

    申请日：2018-08-27

    申请人： Liang-Yuh Chen

    发明人： Liang-Yuh Chen

    IPC分类号： B01J8/18 ,  B01J8/24 ,  B01J12/02 ,  B22F9/08 ,  B22F9/22 ,  C01B13/14 ,  C01B13/34 ,  C01G1/02

    摘要： A continuous process for producing a material of a battery cell using a system having a mist generator, a drying chamber, one or more gas-solid separators and a reactor is provided. A mist generated from a liquid mixture of two or more metal precursor compounds in desired ratio is dried inside the drying chamber. Heated air or gas is served as the gas source for forming various gas-solid mixtures and as the energy source for reactions inside the drying chamber and the reactor. One or more gas-solid separators are used in the system to separate gas-solid mixtures from the drying chamber into solid particles mixed with the metal precursor compounds and continuously deliver the solid particles into the reactor for further reaction to obtain final solid material particles with desired crystal structure, particle size, and morphology.