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    Filter device
    1.
    发明授权
    Filter device 失效
    过滤装置

    公开(公告)号：US06949990B2

    公开(公告)日：2005-09-27

    申请号：US10665209

    申请日：2003-09-22

    申请人： Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Tsutomu Miyashita ,  Yoshio Satoh

    发明人： Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Tsutomu Miyashita ,  Yoshio Satoh

    IPC分类号： H03H9/58 ,  H03H9/02 ,  H03H9/10 ,  H03H9/17 ,  H03H9/205 ,  H03H9/25 ,  H03H9/64 ,  H03H9/56

    CPC分类号： H03H9/0547 ,  H03H9/0523 ,  H03H9/564 ,  H03H9/568

    摘要： A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.

    摘要翻译： 滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。 在该过滤器装置中，过滤元件和封装通过凸块彼此电连接。 该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。 滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分，以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。 在该结构中，形成有传输路径的电感与压电薄膜谐振器串联连接。

    Surface acoustic wave device and process for manufacturing the same
    5.
    发明授权
    Surface acoustic wave device and process for manufacturing the same 失效
    表面声波装置及其制造方法

    公开(公告)号：US06388361B1

    公开(公告)日：2002-05-14

    申请号：US09639099

    申请日：2000-08-16

    申请人： Tokihiro Nishihara ,  Osamu Ikata ,  Yoshio Satoh

    发明人： Tokihiro Nishihara ,  Osamu Ikata ,  Yoshio Satoh

    IPC分类号： H03H925

    CPC分类号： H03H9/02929 ,  H03H3/08 ,  H03H9/145 ,  H03H9/14541

    摘要： A surface acoustic wave device includes a substrate at least a surface of which has a piezoelectric function, and an electrode formed on the substrate, wherein the electrode is composed of a first film of Al containing Cu at or over a solid solubility limit of Cu to Al and one or more unit(s) of a second film of Al containing Mg at or over a Solid solubility limit of Mg to Al and a third film of Al containing Cu at or over the solid solubility limit of Cu to Al formed on the first film in this order, and the first film and the third film contain Mg diffused from the second film.

    摘要翻译： 表面声波装置包括至少其表面具有压电功能的基板和形成在基板上的电极，其中，所述电极由包含Cu的第一膜Al包含Cu或更多的Cu的固溶度极限 Al和一个或多个含有Mg的第一Al的单元，其含有Mg至Al的固溶度极限或超过Cu的Al的固溶度极限以上的含有Cu的Al的第三膜的Al 第一膜，第一膜和第三膜含有从第二膜扩散的Mg。

    Method of manufacturing surface acoustic wave device
    8.
    发明授权
    Method of manufacturing surface acoustic wave device 失效
    表面声波装置的制造方法

    公开(公告)号：US06413439B1

    公开(公告)日：2002-07-02

    申请号：US09437832

    申请日：1999-11-10

    申请人： Tokihiro Nishihara ,  Osamu Ikata ,  Yoshio Satoh

    发明人： Tokihiro Nishihara ,  Osamu Ikata ,  Yoshio Satoh

    IPC分类号： H01L4108

    CPC分类号： H03H3/08

    摘要： A method of manufacturing a surface acoustic device having an electrode containing an Al and an other metal comprising; forming patterning a layer of an Al and other metal forming the electrode by reactive ion etching which is conducted by using an etching gas containing a mixed gas comprising Cl2 and He at a gas pressure of 0.1 Pa to 3 Pa.

    摘要翻译： 一种制造具有包含Al和另一种金属的电极的表面声学装置的方法，包括： 通过反应离子蚀刻形成图案化形成电极的Al和其它金属层，所述反应离子蚀刻是通过使用包含Cl 2和He的混合气体的蚀刻气体，气体压力为0.1Pa至3Pa。

    Surface acoustic wave filter having a continuous electrode for connection of multiple bond wires
    9.
    发明授权
    Surface acoustic wave filter having a continuous electrode for connection of multiple bond wires 失效
    表面声波滤波器，具有用于连接多个接合线的连续电极

    公开(公告)号：US06242991B1

    公开(公告)日：2001-06-05

    申请号：US09244993

    申请日：1999-02-04

    申请人： Tokihiro Nishihara ,  Yoshio Satoh ,  Hidema Uchishiba ,  Takashi Matsuda ,  Osamu Ikata

    发明人： Tokihiro Nishihara ,  Yoshio Satoh ,  Hidema Uchishiba ,  Takashi Matsuda ,  Osamu Ikata

    IPC分类号： H03H964

    CPC分类号： H03H9/6483 ,  H03H9/02944 ,  H03H9/02984 ,  H03H9/145 ,  H03H9/64

    摘要： In A surface acoustic wave filter constituted with a ladder of resonators having a resonance frequency or an anti-resonance frequency, an input current flowing into a resonator in a parallel arm at the first stage from the input is so large as to deteriorate its lifetime caused from a heat generation by the resistance of the thin film wiring. As a measure to this problem, bonding wires (30, 31) connected onto points on connection electrodes (130, 131) for connecting an end of each of plural comb teeth electrodes 111 forming the resonators Rs1 & Rp1, or on a lead conductor (103-1) extended longitudinally from the connection electrode, are allotted at both sides of a center line (C1) of the plural comb teeth electrode group. Furthermore, a bonding wire may be connected substantially onto the center line C1 as well. It is preferable for the bonding wires to be located substantially symmetric with respect to the center line C1. It is preferable that the width along the longitudinal direction of the comb teeth electrodes is lager than a width of the comb teeth electrode.

    摘要翻译： 在由具有共振频率或反共振频率的谐振器的梯形构成的表面声波滤波器中，从输入端流入第一级并联臂的谐振器的输入电流大到导致其寿命恶化 由薄膜布线的电阻产生的热量。 作为这个问题的一个措施，连接在连接电极（130,131）上的点上的接合线（30,31）用于连接形成谐振器Rs1和Rp1的多个梳齿电极111的端部，或引线导体 103-1）从连接电极纵向延伸，分配在多个梳齿电极组的中心线（C1）的两侧。 此外，接合线也可以基本上连接在中心线C1上。 接合线优选相对于中心线C1大致对称。 优选梳齿电极沿着长度方向的宽度比梳齿电极的宽度大。