公开(公告)号：US20250112066A1

公开(公告)日：2025-04-03

申请号：US18899015

申请日：2024-09-27

Applicant: Tokyo Electron Limited

Inventor： Shinichi MIZUSHINO ,  Shunsuke INTO ,  Yuichiro KUNUGIMOTO ,  Akihiro TOYOZAWA ,  Daisuke ISHIMARU ,  Yuki MATSUTAKE ,  Shigeyuki IIDA ,  Takafumi HAYAMA

IPC: H01L21/67 ,  G02F1/29 ,  G03B13/34 ,  G03F7/16 ,  H01L21/66 ,  H04N23/56 ,  H04N23/60

Abstract: A liquid processing apparatus includes multiple stages on each of which a substrate is to be placed; multiple nozzles shared by the multiple stages, and each for supplying a processing liquid to the substrate; a camera shared by the multiple nozzles, and for monitoring states of the multiple nozzles; and an imaging condition changing program module for causing circuitry to change an imaging condition of the camera according to a monitoring condition.

公开(公告)号：US20140240486A1

公开(公告)日：2014-08-28

申请号：US14183912

申请日：2014-02-19

Applicant: TOKYO ELECTRON LIMITED

Inventor： Motoi OKADA ,  Shigeyuki IIDA

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  H01L21/67288

Abstract: Disclosed is monitoring device of monitoring a state of a substrate processing process in a substrate processing apparatus. The monitoring device includes: an imaging unit configured to image a processing state of the substrate processing process; a storage unit; a storage control unit configured to store a moving picture imaged by the imaging unit after adding a time stamp to the moving picture; a group classification unit configured to group a plurality of moving pictures stored in the storage unit into moving pictures of a normal group and moving pictures of a group other than the normal group; and a threshold generation unit configured to generate a threshold for detecting an abnormal moving picture based on the moving pictures of the normal group grouped by the group classification unit.

Abstract translation: 公开了一种监视基板处理装置中的基板处理工序的状态的监视装置。 监视装置包括：成像单元，被配置为对基板处理处理的处理状态进行成像; 存储单元; 存储控制单元，被配置为在向所述运动图像添加时间戳之后存储由所述成像单元成像的运动图像; 组分类单元，被配置为将存储在存储单元中的多个运动图像分组成正常组的运动图像和正常组以外的组的运动图像; 以及阈值生成单元，其被配置为基于由所述组分类单元分组的所述正常组的运动图像生成用于检测异常运动图像的阈值。