公开(公告)号：US20070172239A1

公开(公告)日：2007-07-26

申请号：US11526604

申请日：2006-09-26

申请人： Tomotaka Yamazaki ,  Ryuji Ishii ,  Shinji Sakano ,  Nobuaki Tajimi

发明人： Tomotaka Yamazaki ,  Ryuji Ishii ,  Shinji Sakano ,  Nobuaki Tajimi

IPC分类号： H04J14/00

CPC分类号： H04J14/0226 ,  H04J14/0232 ,  H04J14/0247 ,  H04J14/0252 ,  H04J14/0282

摘要： It is configured to have a first optical line terminal for transmitting a video signal of a first wavelength; a second optical line terminal for transmitting a downstream data signal of a second wavelength and receiving an upstream data signal of a third wavelength; and a wavelength division multiplexer for wavelength division multiplexing the video signal and the upstream data signal and the descend data signal, where an attenuator is provided between the second optical line terminal and the wavelength division multiplexer, the attenuator having a characteristic that an attenuation amount given to the second wavelength is larger than an attenuation amount given to the third wavelength.

摘要翻译： 它被配置为具有用于发送第一波长的视频信号的第一光线路终端; 第二光线路终端，用于发送第二波长的下行数据信号并接收第三波长的上行数据信号; 以及波分多路复用器，用于对视频信号和上行数据信号以及下降数据信号进行波分复用，其中衰减器设置在第二光线路终端与波分复用器之间，衰减器具有给定的衰减量的特性 到第二波长大于给予第三波长的衰减量。

公开(公告)号：US07020401B2

公开(公告)日：2006-03-28

申请号：US09943101

申请日：2001-08-30

申请人： Shinji Sakano ,  Ryuji Ishii ,  Yoshinori Yamada

发明人： Shinji Sakano ,  Ryuji Ishii ,  Yoshinori Yamada

IPC分类号： H04B10/02

CPC分类号： H04B10/29 ,  H03L7/087 ,  H03L7/095 ,  H03L7/197 ,  H04J3/0688 ,  H04J14/02 ,  H04L7/033

摘要： A wavelength converter and a wavelength division-multiplexing optical communication apparatus automatically generate clock signals of a specified frequency that match send/receive digital signals and regenerates timing for the send/receive digital signals. The wavelength converter includes: optical/electrical signal converters (2A, 2B) that convert input optical signals into electric digital signals; clock generator circuits (4A, 4B) that automatically identify the transmission mode for digital signals and generate phase-synchronized clocks of a specified frequency that match the signal transmission mode; timing regeneration circuits (6A, 6B) that regenerate clock timing for the digital signals based upon the phase-synchronized clocks from the clock generator circuits; and electric/optical converters (3A, 3B) that convert the digital signals from the timing regeneration circuits into optical signals of a specified wavelength.

摘要翻译： 波长转换器和波分复用光通信装置自动生成与发送/接收数字信号相匹配的指定频率的时钟信号，并重新发送/接收数字信号的定时。 波长转换器包括：将输入光信号转换成电数字信号的光/电信号转换器（2A，2B）; 时钟发生器电路（4A，4B），其自动识别数字信号的传输模式，并产生与信号传输模式匹配的指定频率的相位同步时钟; 定时再生电路（6A，6B），其基于来自时钟发生器电路的相位同步时钟再生数字信号的时钟定时; 以及将来自定时再生电路的数字信号转换成指定波长的光信号的电/光转换器（3A，3B）。

公开(公告)号：US07567269B2

公开(公告)日：2009-07-28

申请号：US11115111

申请日：2005-04-27

申请人： Shinji Sakano ,  Kanji Tabeya ,  Masahito Hirokawa

发明人： Shinji Sakano ,  Kanji Tabeya ,  Masahito Hirokawa

IPC分类号： H04N7/14 ,  H04L12/66

CPC分类号： H04L29/06027 ,  H04L12/66 ,  H04L65/1006 ,  H04N7/148 ,  H04N21/6137 ,  H04N21/6187 ,  H04N21/632 ,  H04N21/64322

摘要： A television phone adapter which permits an ordinary analog telephone to switch between being a telephone with a video function and a telephone without a video function. The television phone adapter includes a telephone adapter unit that detects dial operation of an analog telephone connected to a router with an IP telephone function, a video adapter unit that connects and disconnects a video connection using an IP network, sends a video taken by a camera to a communication partner and outputs a video received from the communication partner to a display 4 through the video connection in the connected state. A translation table stores correspondence between dial operation and a setting content. A main control unit controls connection and disconnection of the video connection by the video adapter unit, according to setting/content items corresponding to dial numbers or dial tones detected by the telephone adapter unit, when the control content translation table stores the setting/content items corresponding to the dial numbers or tones detected by the telephone adapter unit.

摘要翻译： 一种允许普通模拟电话在具有视频功能的电话和没有视频功能的电话之间切换的电视电话适配器。 电视电话适配器包括电话适配器单元，其检测连接到具有IP电话功能的路由器的模拟电话的拨号操作，使用IP网络连接和断开视频连接的视频适配器单元，发送由相机拍摄的视频 并且通过连接状态下的视频连接将从通信伙伴接收的视频输出到显示器4。 翻译表存储拨号操作与设置内容之间的对应关系。 当控制内容转换表存储设置/内容项目时，主控制单元根据与电话适配器单元检测到的拨号号码或拨号音相对应的设置/内容项目来控制视频适配器单元的视频连接的连接和断开 对应于由电话适配器单元检测到的拨号号码或音调。

公开(公告)号：US20080107281A1

公开(公告)日：2008-05-08

申请号：US11933482

申请日：2007-11-01

申请人： Masahito Togami ,  Shinji Sakano ,  Toshiyuki Matsuda

发明人： Masahito Togami ,  Shinji Sakano ,  Toshiyuki Matsuda

IPC分类号： H04B3/20

CPC分类号： H04M9/082

摘要： An acoustic echo canceller system having a filter with high suppression performance of acoustic echo, generated by using microphone array having a plurality of microphone elements, judging a band where only a speaker sound is present, based on phase difference among microphones, and carrying out adaptation of an adaptive filter for only such a band.

摘要翻译： 一种声学回声消除器系统，具有具有高回声抑制性能的滤波器，该滤波器通过使用具有多个麦克风元件的麦克风阵列产生，根据麦克风之间的相位差来判断仅存在扬声器声音的频带，并且执行适配 仅适用于这种频带的自适应滤波器。

公开(公告)号：US07302176B2

公开(公告)日：2007-11-27

申请号：US10853864

申请日：2004-05-26

申请人： Shinji Sakano ,  Yasushi Sawada ,  Hideaki Tsushima ,  Yoshiaki Ikoma

发明人： Shinji Sakano ,  Yasushi Sawada ,  Hideaki Tsushima ,  Yoshiaki Ikoma

IPC分类号： G02F1/00 ,  H04B10/12 ,  H04B10/00

CPC分类号： H04J14/0294 ,  H04B10/032 ,  H04J14/0206 ,  H04J14/0209 ,  H04J14/0213 ,  H04J14/0219 ,  H04J14/0221 ,  H04J14/0227 ,  H04J14/0228 ,  H04J14/0238 ,  H04J14/0241 ,  H04J14/0283 ,  H04J14/0297 ,  H04Q11/0066 ,  H04Q2011/0081 ,  H04Q2011/0098

摘要： A medium-scale IP telecommunications network is configured in a low-cost optical network with good reliability and expandability. A physical configuration example has a center node 2-1 and eight local nodes 2-11 through 2-18 connected in one OADM ring 2-21/2-22. The logical configuration is a star configuration with the central node 2-1 at its origin with all traffic passing through the center node 2-1. The local nodes 2-11 through 2-18 are connected to the central node 2-1 by wavelength-unit optical channels or optical paths λ1 through λ8. Channels are added as required. Initially, for example, the center node 2-1 and the local node 2-5 are connected by λ5, but λ13 can added when the need arises. Since the logical star network is limited to approximately two add/drop optical channels at local nodes, costs are reduced by using inexpensive filters (e.g., dielectric interference film filters or fiber Bragg reflectors) that are capable of extracting only the specific wavelength of the optical channel. High reliability is provided through the use of optical switches for correction of fiber transmission path failures.

摘要翻译： 中等规模的IP电信网络配置在低成本的光网络中，具有良好的可靠性和可扩展性。 物理配置示例具有连接在一个OADM环2-21/2-22中的中心节点2-1和8个本地节点2-11至2-18。 逻辑配置是一个星型配置，其中心节点2-1位于其原点，所有业务通过中心节点2 - 1。 局部节点2至11至2-18通过波长单位光学信道或光学路径λ1至λ8连接到中心节点2-1。 根据需要添加渠道。 最初，例如，中心节点2-1和本地节点2-5通过λ5连接，但是当需要时可以添加lambda 13。 由于逻辑星形网络在局部节点处限制在大约两个加/减光通道，所以通过使用廉价的滤波器（例如，介质干涉膜滤波器或光纤布拉格反射器），能够仅提取光学特定波长的成本降低 渠道。 通过使用光学开关提供光纤传输路径故障的高可靠性。

公开(公告)号：US4803692A

公开(公告)日：1989-02-07

申请号：US903376

申请日：1986-09-03

申请人： Shinji Sakano ,  Hiroyoshi Matsumura

发明人： Shinji Sakano ,  Hiroyoshi Matsumura

IPC分类号： H01S5/00 ,  H01S3/107 ,  H01S5/0625 ,  H01S5/068 ,  H01S5/125 ,  H01S5/14 ,  H01S3/19

CPC分类号： H01S3/107 ,  H01S5/141 ,  H01S5/06256 ,  H01S5/125

摘要： It is possible to narrow the emission spectrum linewidth of a semiconductor laser device by coupling optically an external resonator with one end surface of the semiconductor laser. However, the structure of the external resonator should match the phase of the light emitted by the laser. Heretofore, this matching has been effected by adjusting the length of the external resonator, and hence productivity and reproducibility have not been good. According to this invention, characteristics of the external resonator can be adjusted electrically to be matched with the phase of the emitted light owing to the fact that the external resonator is made of a material, whose refractive index can be varied electrically. Therefore the semiconductor laser device according to this invention is very practical.

摘要翻译： 通过将外部谐振器与半导体激光器的一个端面光学耦合，可以缩小半导体激光器件的发射光谱线宽。 然而，外部谐振器的结构应与激光发射的光的相位相匹配。 迄今为止，这种匹配是通过调节外部谐振器的长度而实现的，因此生产率和再现性不好。 根据本发明，外部谐振器的特性可以被电调节以与发射光的相位匹配，这是由于外部谐振器由折射率可以变化的材料制成。 因此，根据本发明的半导体激光器件非常实用。

公开(公告)号：US07774082B2

公开(公告)日：2010-08-10

申请号：US11867421

申请日：2007-10-04

申请人： Shigeru Kubota ,  Shinji Sakano

发明人： Shigeru Kubota ,  Shinji Sakano

IPC分类号： G06F19/00 ,  G06F11/30 ,  G21C17/00 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

CPC分类号： H01L21/67745 ,  H01L21/67276

摘要： First feedforward calculation is executed when a preprocessing surface profile is measured and a processing chamber with its processing parameter value having been obtained through the first feedforward calculation judged to be within an allowable range is determined. Wafer transfer is executed only in conjunction with a processing chamber having a processing parameter value judged to be within the allowable range, and the wafer is carried to the entry point of the processing chamber. Then, second feedforward calculation is executed by reflecting the results of feedback calculation executed based upon the most recent processing having been executed in the particular processing chamber and wafer processing is executed in the processing chamber based upon the processing parameter value calculated in the second feedforward calculation.

摘要翻译： 当测量预处理表面轮廓并且确定通过判断为在允许范围内的通过第一前馈计算获得其处理参数值的处理室时，执行第一前馈计算。 晶片传送仅与被判定为在容许范围内的处理参数值的处理室结合执行，并且晶片被传送到处理室的入口点。 然后，通过反映基于在特定处理室中执行的最近处理而执行的反馈计算的结果来执行第二前馈计算，并且基于在第二前馈计算中计算的处理参数值在处理室中执行晶片处理 。

公开(公告)号：US07054786B2

公开(公告)日：2006-05-30

申请号：US10332011

申请日：2001-07-03

申请人： Shinji Sakano ,  Tsuyoshi Sendoda

发明人： Shinji Sakano ,  Tsuyoshi Sendoda

IPC分类号： G06F19/00

CPC分类号： H01J37/32935 ,  H01L21/31116 ,  H01L22/20

摘要： In an operation monitoring method according to the present invention, operation data of a plasma processing system (1) are detected for every wafer (W) by means of a plurality of detectors, and a principal component analysis using the operation data is carried out by means of a controller (10). An operation state of the plasma processing system (1) is evaluated by using the results of the principal component analysis.

摘要翻译： 在根据本发明的操作监视方法中，通过多个检测器，针对每个晶片（W）检测等离子体处理系统（1）的操作数据，并且使用该操作数据的主成分分析由 控制器（10）的装置。 使用主成分分析的结果对等离子体处理系统（1）的运转状态进行评价。

公开(公告)号：US20050125090A1

公开(公告)日：2005-06-09

申请号：US10984932

申请日：2004-11-10

申请人： Shinji Sakano ,  Satoshi Harada

发明人： Shinji Sakano ,  Satoshi Harada

IPC分类号： G05B13/04 ,  G05B23/02 ,  G06F19/00 ,  H01L21/3065 ,  H01L21/66

CPC分类号： G05B13/048 ,  G05B23/0254 ,  H01J37/32862

摘要： A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.

摘要翻译： 一种用于预测处理结果的方法包括对在第一标准处理期间获得的多个检测数据执行主成分分析的过程，以构建主成分分析模型; 获得主成分分析模型残差作为第一残差的过程; 执行第二标准处理的处理; 以及在第二标准处理期间从多个检测器获得多个检测数据的处理。 并且，将在第二标准处理期间获得的检测数据应用于主成分分析模型，以获得第二残差。 该方法还包括基于加权参考来加权第二残差的过程，以及使用加权的第二残差构建新的多变量分析模型; 以及使用多变量分析模型预测第二标准处理的处理结果的处理。

公开(公告)号：US06586262B1

公开(公告)日：2003-07-01

申请号：US09926544

申请日：2001-11-16

申请人： Susumu Saito ,  Shinji Sakano

发明人： Susumu Saito ,  Shinji Sakano

IPC分类号： H01L2100

CPC分类号： H01J37/32935 ,  H01J37/32972

摘要： The present invention is a method for end point detection where emission spectra are detected during etching of an object to be processed, such as a semiconductor wafer, by a spectrometer, and an end point of the etching is detected, comprising performing etching of a sample, corresponding to a product, prior to etching of a semiconductor wafer which is the product, sequentially measuring full-spectra of plasma, performing principal component analysis of the emission spectra using the emission intensities of all wavelengths of each of the full-spectra, holding the results as data, thereafter obtaining a principal component score for each of the full-spectra sequentially measured during etching of a semiconductor wafer to be manufactured on the basis of the emission intensities of all the wavelengths, and then detecting an end point of etching on the basis of a substantial change of the principal component score for each of the full-spectra sequentially measured.

摘要翻译： 本发明是一种终点检测方法，其中通过光谱仪在诸如半导体晶片的待处理物体的蚀刻期间检测发射光谱，并且检测蚀刻的终点，包括进行样品的蚀刻 对应于产品，在蚀刻作为产品的半导体晶片之前，顺序地测量等离子体的全谱，使用每个全光谱的所有波长的发射强度进行发射光谱的主成分分析，保持 结果作为数据，然后根据所有波长的发射强度获得在待制造的半导体晶片的蚀刻期间顺序测量的每个全频谱的主分量得分，然后检测蚀刻终点 依次测量每个全频谱的主分量得分的实质变化的基础。