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公开(公告)号：US06235446B1
公开(公告)日：2001-05-22
申请号：US09134163
申请日：1998-08-14
IPC分类号： G03F7004
CPC分类号： G03F7/039 , G03F7/0045 , Y10S430/106 , Y10S430/111
摘要： A radiation sensitive resin composition comprising (A) a copolymer possessing recurring units of the formulas (1), (2), and (3), which turns alkali soluble in the presence of acid and (B) a photosensitive acid generator. Because the composition can resolve line-and-space patterns, isolated patterns, and contact hole patterns with satisfactory appearance and high resolution, it is useful as a chemically amplified positive resist for use in the manufacture of semiconductor devices.
摘要翻译： 一种辐射敏感性树脂组合物，其包含（A）具有式（1），（2）和（3）的重复单元的共聚物，其在酸的存在下使碱溶解，并且（B）感光酸产生剂。 因为该组合物可以分辨线和空间图案，隔离图案和具有令人满意的外观和高分辨率的接触孔图案，因此它可用作用于制造半导体器件的化学放大型正性抗蚀剂。
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公开(公告)号：US6136500A
公开(公告)日：2000-10-24
申请号：US135855
申请日：1998-08-18
CPC分类号： G03F7/004 , Y10S430/115 , Y10S430/122
摘要： Positive as well as negative radiation sensitive resin compositions that, in addition to being capable of providing excellent resolution and pattern profile, are particularly excellent in avoiding the problems of "nano-edge roughness" or "coating surface roughness". The positive type radiation sensitive resin composition comprises (A) (a) an acid-decomposable group-containing resin, or (b) an alkali-soluble resin and an alkali dissolution controller, and (B) a photoacid generator comprising "a compound that upon exposure to radiation generates a carboxylic acid having a boiling point of 150.degree. C. or higher", and "a compound that upon exposure to radiation generates an acid other than a carboxylic acid". The negative type radiation sensitive resin composition comprises (C) an alkali-soluble resin, (D) a cross-linking agent, and the component (B) as described above.
摘要翻译： 除了能够提供优异的分辨率和图案轮廓之外，正面和负面的辐射敏感性树脂组合物在避免“纳米边缘粗糙度”或“涂层表面粗糙度”的问题方面特别优异。 正型辐射敏感性树脂组合物包含（A）（a）含酸可分解基团的树脂，或（b）碱溶性树脂和碱溶解控制剂，和（B）光酸产生剂，其包含“ 暴露于辐射后会产生沸点为150℃以上的羧酸“，”暴露于辐射后的化合物会产生羧酸以外的酸“。 负型辐射敏感性树脂组合物包含（C）碱溶性树脂，（D）交联剂和如上所述的组分（B）。
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公开(公告)号：US6120972A
公开(公告)日：2000-09-19
申请号：US136051
申请日：1998-08-18
CPC分类号： G03F7/0045 , G03F7/039
摘要： A radiation-sensitive resin composition comprising (A) a copolymer which comprises (a) a repeating unit (I) formed by cleavage of a carbon--carbon double bond of a monomer having one polymerizable carbon--carbon double bond and (b) a repeating unit (II) formed by cleavage of a carbon--carbon double bond of a monomer having two or more polymerizable carbon--carbon double bonds and at least one divalent group decomposed by an acid of the following formulas (1) or (2), ##STR1## wherein R.sup.1, R.sup.2, R.sup.3 and R.sup.4 are an alkyl group having 1-5 carbon atoms or an aryl group having 6-14 carbon atoms individually, said monomer having a structure in which each carbon--carbon double bond combines via said divalent group, and (B) a photoacid generator. The radiation-sensitive resin composition exhibits excellent sensitivity and resolution, fewer effect from the swing curves, excellent pattern profile, and superior heat resistance, high sensitivity to ultraviolet rays, far ultraviolet rays, X-rays, and various types of radiation such as charged particle rays, and is useful as a chemically amplified positive tone resist used in the manufacture of integrated circuit devices.
摘要翻译： 一种辐射敏感性树脂组合物，其包含（A）共聚物，其包含（a）通过裂解具有一个可聚合碳 - 碳双键的单体的碳 - 碳双键形成的重复单元（I）和（b）重复 通过裂解具有两个或多个可聚合碳 - 碳双键的单体的碳 - 碳双键形成的单元（II）和由下式（1）或（2）的酸分解的至少一个二价基团，其中 R1，R2，R3和R4分别是具有1-5个碳原子的烷基或具有6-14个碳原子的芳基，所述单体具有其中每个碳 - 碳双键通过所述二价基团结合的结构和（ B）光致酸发生器。 辐射敏感性树脂组合物表现出优异的灵敏度和分辨率，较少的挥发曲线影响，优异的图案轮廓和优异的耐热性，对紫外线，远紫外线，X射线以及各种类型的辐射如带电的高灵敏度 粒子射线，并且可用作用于制造集成电路器件的化学放大正色调抗蚀剂。
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公开(公告)号：US5994022A
公开(公告)日：1999-11-30
申请号：US965432
申请日：1997-11-06
IPC分类号： G03F7/004 , G03F7/039 , H01L21/027
CPC分类号： G03F7/039 , G03F7/0045 , Y10S430/106 , Y10S430/109 , Y10S430/111 , Y10S430/121
摘要： A radiation sensitive resin composition useful as a chemically amplified positive tone resist is provided. The composition comprises (A) a copolymer which becomes soluble in an alkali developing solution by the action of an acid, the copolymer containing a recurring unit (I) having a structure which is decomposed by the action of an acid and increases the solubility in an alkaline developing solution and a recurring unit(II) obtained from a compound having at least two (meth)acryloyl groups in the molecule by the cleavage of the carbon-carbon double bond, and (B) a photoacid generator which produces an acid on being irradiated by a radiation. The composition exhibits high resolution, superb capability of producing superior pattern forms, and excellent resistance to PED, and high process stability, is affected by a standing wave only to a minimum extent, and possessed prominent heat resistance.
摘要翻译： 提供了可用作化学放大正性抗蚀剂的辐射敏感性树脂组合物。 该组合物包含（A）通过酸作用而变得可溶于碱性显影液的共聚物，该共聚物含有具有通过酸作用分解的结构的重复单元（I），并增加其在 碱性显影液和通过裂解碳 - 碳双键从分子中具有至少两个（甲基）丙烯酰基的化合物获得的重复单元（II），和（B）产生酸的光致酸产生剂 用辐射照射。 该组合物表现出高分辨率，优异的图案形式的出色能力和优异的耐PED性，并且工艺稳定性高，仅受驻波的影响最小，具有显着的耐热性。
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公开(公告)号：US6143460A
公开(公告)日：2000-11-07
申请号：US314124
申请日：1999-05-19
CPC分类号： G03F7/0045 , G03F7/039 , Y10S430/106
摘要： A novel diazodisulfone compound capable of generating acid having high sensitivity to far ultraviolet rays typified by a KrF excimer laser and the like and capable of providing a resist with superior resolution and patterns when used as a photoacid generator for a chemically amplified resist, and a radiation-sensitive resin composition comprising the diazodisulfone compound. The diazodisulfone compound is represented by the following formulas (1) and (2). ##STR1## The radiation-sensitive resin composition comprises the diazodisulfone compound and resin represented by 4-hydroxystyrene/4-(1'-ethoxyethoxy)styrene copolymer.
摘要翻译： 一种能够产生以KrF准分子激光器等为代表的远紫外线具有高灵敏度的酸并且当用作化学放大抗蚀剂的光酸产生剂时能够提供具有优异分辨率和图案的抗蚀剂的新型重氮二砜化合物， 包含重氮二砜化合物的敏感性树脂组合物。 重氮二砜化合物由下式（1）和（2）表示。 辐射敏感性树脂组合物包含重氮二砜化合物和由4-羟基苯乙烯/ 4-（1'-乙氧基乙氧基）苯乙烯共聚物表示的树脂。
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公开(公告)号：US09172135B2
公开(公告)日：2015-10-27
申请号：US13415567
申请日：2012-03-08
CPC分类号： H01Q1/38 , H01Q9/0407 , H01Q19/005 , H01Q19/28 , H01Q21/08
摘要： This disclosure provides a horizontal radiation antenna including a grounded conductor plate on the back surface of a multilayer substrate, a radiation element to which a microstrip line is connected on a front surface of the multilayer substrate, and a passive element on an end portion side of the multilayer substrate compared with the radiation element. An intermediate grounded conductor plate is provided within the multilayer substrate between insulation layers and faces the microstrip line. The intermediate grounded conductor plate defines a notch portion whose end portion side is open. The intermediate grounded conductor surrounds the radiation element and the passive element in the notch portion. The intermediate grounded conductor is electrically connected to the grounded conductor plate.
摘要翻译： 本公开内容提供了一种水平辐射天线，包括在多层基板的背面上的接地导体板，在多层基板的前表面上连接有微带线的辐射元件和在多层基板的前表面上的无源元件 多层基板与辐射元件相比较。 中间接地导体板设置在绝缘层之间的多层基板内并面向微带线。 中间接地导体板限定其端部侧开口的切口部分。 中间接地导体围绕辐射元件和凹口部分中的无源元件。 中间接地导体与接地导体板电连接。
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7.发明授权公开(公告)号：US08778516B2
公开(公告)日：2014-07-15
申请号：US13402249
申请日：2012-02-22
摘要： A production method of a base plate for a disk drive made by aluminum die casting which can reduce scattering of particles and minimizes particle contamination is provided. The production method of a base plate for a disk drive includes a forming step for forming a base member by aluminum die casting, a coating step for coating the base member with a resin film, a machining step for removing a part of the resin film and a surface layer of the base member in order to expose the aluminum surface, a pretreatment step for immersing the base member with the exposed aluminum surface in a pretreatment solution containing no fluoride, and a metal film forming step for coating the exposed aluminum surface with a metal film.
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公开(公告)号：US20100164823A1
公开(公告)日：2010-07-01
申请号：US12723334
申请日：2010-03-12
申请人： Hiroyuki Kubo , Hiromitsu Ito , Kuniaki Yosui , Eiichi Kobayashi
发明人： Hiroyuki Kubo , Hiromitsu Ito , Kuniaki Yosui , Eiichi Kobayashi
IPC分类号： H01Q7/08
CPC分类号： H01Q7/08
摘要： A portable electronic device includes a circuit board and an antenna coil installed on the circuit board. The antenna coil includes a magnetic core and a coil wound at either side of an unwound portion. The winding direction of the coil is changed at either side of the unwound portion. When the length of the magnetic core is defined as X and the distance between two intersecting points at which a virtual line formed by projecting the central line of the magnetic core onto the circuit board intersects the outer periphery of the circuit board is defined as Y, the antenna coil satisfies Y≧X≧0.8Y.
摘要翻译： 便携式电子设备包括安装在电路板上的电路板和天线线圈。 天线线圈包括磁芯和缠绕在退绕部分两侧的线圈。 线圈的卷绕方向在解卷部分的任一侧改变。 当磁芯的长度被定义为X，并且通过将磁芯的中心线投影到电路板上而形成的虚拟线与电路板的外周相交的两个相交点之间的距离被定义为Y， 天线线圈满足Y≥X≥0.8Y。
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公开(公告)号：US07543732B2
公开(公告)日：2009-06-09
申请号：US10849140
申请日：2004-05-20
申请人： Eiichi Kobayashi , Yusuke Kondo , Hisayuki Ishizu , Nobutaka Oda , Kazuo Ao
发明人： Eiichi Kobayashi , Yusuke Kondo , Hisayuki Ishizu , Nobutaka Oda , Kazuo Ao
IPC分类号： B23K31/12
CPC分类号： G01N3/00 , B23K11/11 , B23K31/12 , G01N2203/0216 , G01N2203/0296
摘要： A technique for evaluation of the strength of a spot welded portion of a panel is provided. A stress value at the welded portion of the panel is calculated by a stress analysis according to a FEM using the elements, and then the strength of the welded portion is evaluated based on the stress value at the welded portion. A portion in the proximity of the spot welded portion is divided, with a central portion of the spot welded portion registered with a nodal point of the elements, into a central element and plural concentric ring-like elements from the center side provided by the central portion of the spot welded portion. Thereafter, the plural concentric ring-like elements are individually divided in a circumferential direction each into a plurality of portions to form the elements. Then, the strength is evaluated based on the stress value of the second ring-like element.
摘要翻译： 提供了用于评价面板的点焊部的强度的技术。 通过使用这些元素的FEM的应力分析来计算面板的焊接部的应力值，然后基于焊接部的应力值来评价焊接部的强度。 在点焊附近的部分被分割，点焊部分的中心部分与元件的节点对齐成中心元件，并且由中心部分提供的多个同心环状元件 点焊部的一部分。 此后，多个同心环状元件在圆周方向上分别分成多个部分以形成元件。 然后，基于第二环状元件的应力值来评价强度。
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公开(公告)号：US20070150155A1
公开(公告)日：2007-06-28
申请号：US11708596
申请日：2007-02-20
IPC分类号： G06F7/00
CPC分类号： A61B1/0052 , A61B1/00059 , A61B1/0016 , G02B23/2476
摘要： At startup, a main CPU renders and copies various types of unique parameters stored in an SRAM card corresponding to an ID unique to endoscopes to DPRAM and SDRAM and enables the endoscopes to be used with these parameters. Also in the event of desiring to change the set parameters, the user requests a change via an HM, whereby the changed parameters are copied to the SDRAM via the DPRAM, and electrically-operated curving actions of the endoscope can be performed with the changed parameters.
摘要翻译： 在启动时，主CPU将存储在SRAM卡中的各种类型的独特参数呈现并复制到与DPRAM和SDRAM相同的内窥镜唯一ID，并使内窥镜与这些参数一起使用。 此外，在希望改变设定参数的情况下，用户通过HM请求改变，由此通过DPRAM将改变的参数复制到SDRAM，并且可以利用改变的参数来执行内窥镜的电动弯曲动作 。
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