Solid state imaging device and method for manufacturing the same
    1.
    发明授权
    Solid state imaging device and method for manufacturing the same 有权
    固态成像装置及其制造方法

    公开(公告)号:US07548666B2

    公开(公告)日:2009-06-16

    申请号:US11582984

    申请日:2006-10-19

    IPC分类号: G02B6/12

    摘要: A plurality of light receiving elements are arranged in a matrix with uniform space therebetween in a light receiving region defined on a semiconductor substrate. A plurality of read-out electrodes are formed on the semiconductor substrate in an arrangement corresponding to the light receiving elements to read charges generated by the light receiving elements, a light shield film having openings positioned above the light receiving elements is formed to cover the read-out electrodes, first optical waveguides are formed in the openings above the light receiving elements and second optical waveguides are formed on the light shield film. The second optical waveguides are in the form of dots, stripes or a grid when viewed in plan.

    摘要翻译: 多个光接收元件以限定在半导体衬底上的光接收区域中以均匀的间隔排列成矩阵。 多个读出电极以对应于光接收元件的布置形成在半导体衬底上,以读取由光接收元件产生的电荷,形成有位于光接收元件上方的开口的遮光膜覆盖读取 第一光波导形成在光接收元件上方的开口中,第二光波导形成在遮光膜上。 当在平面图中观察时,第二光波导是点,条纹或格栅的形式。

    Solid state imaging device and method for manufacturing the same
    2.
    发明申请
    Solid state imaging device and method for manufacturing the same 有权
    固态成像装置及其制造方法

    公开(公告)号:US20070170477A1

    公开(公告)日:2007-07-26

    申请号:US11582984

    申请日:2006-10-19

    IPC分类号: H01L31/113 H01L21/00

    摘要: A plurality of light receiving elements are arranged in a matrix with uniform space therebetween in a light receiving region defined on a semiconductor substrate. A plurality of read-out electrodes are formed on the semiconductor substrate in an arrangement corresponding to the light receiving elements to read charges generated by the light receiving elements, a light shield film having openings positioned above the light receiving elements is formed to cover the read-out electrodes, first optical waveguides are formed in the openings above the light receiving elements and second optical waveguides are formed on the light shield film. The second optical waveguides are in the form of dots, stripes or a grid when viewed in plan.

    摘要翻译: 多个光接收元件以限定在半导体衬底上的光接收区域中以均匀的间隔排列成矩阵。 多个读出电极以对应于光接收元件的布置形成在半导体衬底上,以读取由光接收元件产生的电荷,形成有位于光接收元件上方的开口的遮光膜覆盖读取 第一光波导形成在光接收元件上方的开口中,第二光波导形成在遮光膜上。 当在平面图中观察时,第二光波导是点,条纹或格栅的形式。

    Solid-state imaging device, signal charge detection device, and camera
    3.
    发明授权
    Solid-state imaging device, signal charge detection device, and camera 失效
    固态成像装置,信号充电检测装置和相机

    公开(公告)号:US07671386B2

    公开(公告)日:2010-03-02

    申请号:US11617173

    申请日:2006-12-28

    IPC分类号: H01L27/148

    摘要: The solid-state imaging device of the present invention includes: a floating diffusion capacity unit which is formed on a semiconductor substrate, and is operable to hold signal charges derived from incident light; an amplifier which is operable to convert the signal charges held in the floating diffusion capacity unit into a voltage; the first wire which connects the floating diffusion capacity unit to an input of the amplifier; and a second wire which is made of the same material as the first wire, formed in the same layer as the first wire, arranged around the first wire at least along long sides of the first wire, and electrically insulated from the first wire.

    摘要翻译: 本发明的固态成像装置包括:浮置扩散能量单元,其形成在半导体衬底上,并且可操作以保持源自入射光的信号电荷; 放大器,其可操作以将保持在所述浮动扩散容量单元中的信号电荷转换成电压; 将浮动扩散容量单元连接到放大器的输入端的第一线; 以及与第一线材相同的材料制成的第二线材,其形成在与第一线材相同的层中,至少沿着第一线材的长边布置在第一线材周围,并与第一线材电绝缘。

    Solid-state imaging device
    4.
    发明授权
    Solid-state imaging device 有权
    固态成像装置

    公开(公告)号:US07473944B2

    公开(公告)日:2009-01-06

    申请号:US11333924

    申请日:2006-01-18

    IPC分类号: H01L29/768

    摘要: A solid-state imaging device includes a semiconductor substrate including: a plurality of light-receptive portions that are arranged one-dimensionally or two-dimensionally; a vertical transfer portion that transfers signal electric charge read out from the light-receptive portions in a vertical direction; a horizontal transfer portion that transfers the signal electric charge transferred by the vertical transfer portion in a horizontal direction; a barrier region adjacent to the horizontal transfer portion, the barrier region letting only surplus electric charge of the horizontal transfer portion pass therethough; a drain region adjacent to the barrier region, into which the surplus electric charge passing through the barrier region is discharged; and an insulation film adjacent to the drain region. A portion of the drain region is located beneath the insulation film.

    摘要翻译: 一种固态成像装置,包括:半导体基板,包括:一维或二维布置的多个光接收部分; 垂直传送部分,其沿垂直方向传送从光接收部分读出的信号电荷; 水平传送部,其在垂直方向上传送由垂直传送部传送的信号电荷; 与水平转印部分相邻的势垒区域,仅允许水平转印部分的剩余电荷的势垒区域通过; 与阻挡区域相邻的漏极区域,通过阻挡区域的剩余电荷被排出到该漏极区域; 以及与漏区相邻的绝缘膜。 漏极区域的一部分位于绝缘膜下方。

    SOLID-STATE IMAGING DEVICE, SIGNAL CHARGE DETECTION DEVICE, AND CAMERA
    5.
    发明申请
    SOLID-STATE IMAGING DEVICE, SIGNAL CHARGE DETECTION DEVICE, AND CAMERA 失效
    固态成像装置,信号充电检测装置和摄像机

    公开(公告)号:US20070170470A1

    公开(公告)日:2007-07-26

    申请号:US11617173

    申请日:2006-12-28

    IPC分类号: H01L29/768

    摘要: The solid-state imaging device of the present invention includes: a floating diffusion capacity unit which is formed on a semiconductor substrate, and is operable to hold signal charges derived from incident light; an amplifier which is operable to convert the signal charges held in the floating diffusion capacity unit into a voltage; the first wire which connects the floating diffusion capacity unit to an input of the amplifier; and a second wire which is made of the same material as the first wire, formed in the same layer as the first wire, arranged around the first wire at least along long sides of the first wire, and electrically insulated from the first wire.

    摘要翻译: 本发明的固态成像装置包括:浮置扩散能量单元,其形成在半导体衬底上,并且可操作以保持源自入射光的信号电荷; 放大器,其可操作以将保持在所述浮动扩散容量单元中的信号电荷转换成电压; 将浮动扩散容量单元连接到放大器的输入端的第一线; 以及与第一线材相同的材料制成的第二线材,其形成在与第一线材相同的层中,至少沿着第一线材的长边布置在第一线材周围,并与第一线材电绝缘。

    Thin-film magnetic head for perpendicular magnetic recording having main magnetic pole layer on flat surface
    6.
    发明授权
    Thin-film magnetic head for perpendicular magnetic recording having main magnetic pole layer on flat surface 失效
    用于垂直磁记录的薄膜磁头,在平面上具有主磁极层

    公开(公告)号:US06751054B2

    公开(公告)日:2004-06-15

    申请号:US09903223

    申请日:2001-07-11

    IPC分类号: G11B5147

    CPC分类号: G11B5/1278 G11B5/313

    摘要: A thin-film magnetic head for perpendicular magnetic recording comprising an auxiliary magnetic pole layer; a main magnetic pole layer; a conductive coil layer in a spiral shape which is disposed between the main magnetic pole layer and the auxiliary magnetic pole layer and which cross the magnetic circuit; and insulating layers electrically insulating the auxiliary magnetic pole layer and the main magnetic pole layer from the conductive coil layer. The insulating layers have flat surfaces formed at the sides further from the auxiliary magnetic pole layer, the front end portion of the main magnetic pole layer is provided on one of the flat surfaces, and the conductive coil layer is disposed under the main magnetic pole layer so that a part of the conductive coil layer opposes the front end portion of the main magnetic pole layer.

    摘要翻译: 一种用于垂直磁记录的薄膜磁头,包括辅助磁极层; 主磁极层; 螺旋形状的导电线圈层,其设置在主磁极层和辅助磁极层之间并与磁路交叉; 以及将辅助磁极层和主磁极层与导电线圈层电绝缘的绝缘层。 绝缘层具有形成在辅助磁极层外侧的平面,主磁极层的前端部设置在一个平面上,导电线圈层配置在主磁极层的下方 使得导电线圈层的一部分与主磁极层的前端部相对。

    Method for manufacturing solid-state imaging device

    公开(公告)号:US06498103B2

    公开(公告)日:2002-12-24

    申请号:US09903411

    申请日:2001-07-11

    IPC分类号: H01L21311

    CPC分类号: H01L27/14692

    摘要: A method for manufacturing a solid-state imaging device includes forming a transfer channel portion and a light-receiving portion in a silicon substrate; forming a silicon oxide film on the silicon substrate; forming a silicon nitride film on the silicon oxide film, the silicon nitride film acting as a gate insulating film together with the silicon oxide film above the transfer channel portion and acting as an anti-reflection film above the light-receiving portion; forming a protection film on the silicon nitride film; forming a polysilicon film above the silicon nitride film via the protection film at least above the light-receiving portion; and etching the polysilicon film so as to form a transfer electrode above the transfer channel portion. The etching of the polysilicon film is carried out so that the polysilicon film is removed above the light-receiving portion while the protection portion remains.

    Solid-state imaging device and manufacturing method therefor

    公开(公告)号:US06351003B1

    公开(公告)日:2002-02-26

    申请号:US09290122

    申请日:1999-04-12

    IPC分类号: H01L31103

    CPC分类号: H01L27/14689 H01L27/14609

    摘要: A solid-state imaging device comprises a plurality of pixels, each pixel comprising a semiconductor substrate of a first conductivity type; a photo-receiving portion of a second conductivity type formed in the semiconductor substrate; a detecting portion of the second conductivity type formed in the semiconductor substrate; an insulating film formed on the semiconductor substrate; a transfer gate electrode formed on the insulating film at lest between the photo-receiving portion and the detecting portion; and a read-out circuit, which is electrically connected to the detecting portion. A diffusion region of the same conductivity type as the detecting portion is formed in a region of the semiconductor substrate that is adjacent to an end of the detecting portion near the gate electrode and separate from the photo-receiving portion. An impurity concentration in the photo-receiving portion and an impurity concentration in the diffusion region are lower than an impurity concentration in the detecting portion. With this solid-state imaging device and with the method for producing the same, a solid-state imaging device is provided that reduces crystal defects in the photo-receiving portion and improves the output image quality.

    Spin-valve type thin film element and its manufacturing method
    9.
    发明授权
    Spin-valve type thin film element and its manufacturing method 有权
    旋转阀型薄膜元件及其制造方法

    公开(公告)号:US06350487B1

    公开(公告)日:2002-02-26

    申请号:US09515971

    申请日:2000-02-29

    IPC分类号: G11B566

    摘要: A spin-valve type thin film element includes an antiferromagnetic layer, a pinned magnetic layer, a free magnetic layer, a non-magnetic electrically conductive layer, a bias layer, and an electrically conductive layer. The magnetization direction of the pinned magnetic layer in the end regions in relation to the track width is fixed in the direction of the leakage magnetic field from a recording medium, and the magnetization direction of the pinned magnetic layer in the central region is fixed in the direction inclined in relation to the direction of the leakage magnetic field from the recording medium. A method for manufacturing a spin-valve type thin film element includes the steps of forming a multi-layered film, magnetic annealing at a temperature T1, patterning the multi-layered film into a predetermined shape, forming a bias layer on both sides of the multi-layered film, magnetizing the bias layer, annealing without applying a magnetic field at a temperature T2, and magnetizing the bias layer.

    摘要翻译: 自旋阀型薄膜元件包括反铁磁层,钉扎磁性层,自由磁性层,非磁性导电层,偏置层和导电层。 端部区域中的钉扎磁性层相对于轨道宽度的磁化方向在来自记录介质的泄漏磁场的方向上固定,并且中心区域中的被钉扎磁性层的磁化方向固定在 相对于来自记录介质的泄漏磁场的方向倾斜的方向。 一种自旋阀型薄膜元件的制造方法包括以下步骤:在温度T1下形成多层膜,进行磁性退火,将多层膜图案化成预定的形状,在 多层膜,对偏置层进行磁化,在温度T2下不施加磁场进行退火,以及使偏置层磁化。