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公开(公告)号:US20080182095A1
公开(公告)日:2008-07-31
申请号:US11931168
申请日:2007-10-31
申请人: Fumiteru Asai , Takatoshi Sasaki , Tsubasa Miki , Tomokazu Takahashi , Toshio Shintani , Akiyoshi Yamamoto
发明人: Fumiteru Asai , Takatoshi Sasaki , Tsubasa Miki , Tomokazu Takahashi , Toshio Shintani , Akiyoshi Yamamoto
CPC分类号: H01L21/6836 , B23K26/146 , B23K26/40 , B23K2103/50 , C09J7/21 , C09J2203/326 , H01L21/78 , H01L2221/68327 , Y10T428/249962
摘要: The present invention provides an adhesive sheet for water jet laser dicing, comprising an adhesive layer laminated on a base film, wherein the base film is composed of mesh formed by a fiber. According to the adhesive sheet for water jet laser dicing in the present invention, a film composed of mesh is used as the base film to ensure that the perforation size and opening area are relatively larger than in nonwoven fabric and perforated sheets, thus making it possible to maintain stable permeability to liquids originating in the liquid stream during water jet laser dicing and to provide an adhesive sheet that allows extremely thin semiconductor wafers or materials to be processed while preventing die fly-off or defects such as cracking and chipping in IC components, chips, or the like.
摘要翻译: 本发明提供了一种水射流激光切割用粘合片,其特征在于,包括层叠在基膜上的粘合剂层,其中,所述基膜由纤维形成的网构成。 根据本发明的喷水激光切割用粘合片,使用由网状构成的膜作为基膜,以确保穿孔尺寸和开口面积比无纺布和穿孔片材相对大,从而使其成为可能 在喷水激光切割期间保持对源自液体流的液体的稳定的渗透性,并且提供允许极薄的半导体晶片或材料被加工同时防止芯片脱落或缺陷如IC部件中的破裂和碎裂的粘合片, 芯片等。
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公开(公告)号:US20110151252A1
公开(公告)日:2011-06-23
申请号:US13061011
申请日:2009-08-20
申请人: Toshio Shintani , Akiyoshi Yamamoto , Tsubasa Miki
发明人: Toshio Shintani , Akiyoshi Yamamoto , Tsubasa Miki
IPC分类号: C09J133/08
CPC分类号: C09J4/06 , C08F220/06 , C08K3/105 , C08K3/16 , C08K5/098 , C08L71/02 , C09J7/22 , C09J7/38 , C09J2203/326 , C09J2205/102 , C09J2433/00 , C09J2471/00 , Y10T428/2891
摘要: An adhesive tape or sheet comprises an adhesive layer which contains 0.3 to 10 parts by weight of an polyether polyol compound, and 0.005 to 2 parts by weight of at least one alkali metal salt for 100 parts by weight of an acrylic adhesive which is formed with a copolymer of methyl acrylate monomer, ethyl acrylate monomer, or methyl acrylate monomer and ethyl acrylate monomer, acrylate monomer, and 2-ethylhexyl acrylate monomer.
摘要翻译: 粘合带或片材包含含有0.3-10重量份聚醚多元醇化合物的粘合剂层和100重量份丙烯酸粘合剂0.005至2重量份的碱金属盐,该丙烯酸粘合剂形成有 丙烯酸甲酯单体,丙烯酸乙酯单体或丙烯酸甲酯单体和丙烯酸乙酯单体,丙烯酸酯单体和丙烯酸2-乙基己酯单体的共聚物。
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公开(公告)号:US20090311474A1
公开(公告)日:2009-12-17
申请号:US12307882
申请日:2008-04-15
申请人: Tomokazu Takahashi , Fumiteru Asai , Toshio Shintani , Takatoshi Sasaki , Akiyoshi Yamamoto , Tsubasa Miki
发明人: Tomokazu Takahashi , Fumiteru Asai , Toshio Shintani , Takatoshi Sasaki , Akiyoshi Yamamoto , Tsubasa Miki
IPC分类号: B32B3/10
CPC分类号: H01L21/67132 , C09J7/20 , C09J2201/20 , C09J2205/31 , H01L21/67092 , Y10T428/24331
摘要: An object of the present invention is to provide an adhesive sheet which, through improvement in the permeability of liquids originating in a liquid stream during water jet laser dicing, allows chips, IC components, or the like to be detached, prevents machining precision from being compromised such as by chipping or the scattering of chips and the like, and allows extremely thin semiconductor wafers or materials to be processed. The adhesive sheet for water jet laser dicing of the present invention comprises an adhesive layer laminated on a base film, the base film made of mesh fiber.
摘要翻译: 本发明的目的是提供一种粘合片,其通过在喷水激光切割期间通过提高液体流中的液体的渗透性而允许芯片,IC部件等被分离,从而防止加工精度 例如通过切片或芯片等的散射而受到损害,并且允许非常薄的半导体晶片或材料被加工。 本发明的喷水激光切割用粘合片包括层压在基膜上的粘合剂层,由网状纤维构成的基膜。
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公开(公告)号:US20080057270A1
公开(公告)日:2008-03-06
申请号:US11892616
申请日:2007-08-24
申请人: Tsubasa Miki , Fumiteru Asai , Tomokazu Takahashi , Takatoshi Sasaki , Toshio Shintani , Akiyoshi Yamamoto
发明人: Tsubasa Miki , Fumiteru Asai , Tomokazu Takahashi , Takatoshi Sasaki , Toshio Shintani , Akiyoshi Yamamoto
IPC分类号: B32B3/24
CPC分类号: H01L21/6836 , B23K26/146 , B23K26/40 , B23K2103/50 , C09J4/06 , C09J7/241 , C09J2201/20 , C09J2203/326 , C09J2407/00 , C09J2409/00 , C09J2423/006 , C09J2433/00 , H01L21/78 , H01L2221/68327 , Y10T428/24273
摘要: An adhesive sheet for water jet laser dicing, comprises an adhesive layer laminated on a base film, wherein the adhesive sheet has perforations, has a porosity of 3 to 90% and has a fracture elongation of at least 100%.
摘要翻译: 一种用于水射流激光切割的粘合片,包括层压在基膜上的粘合剂层,其中粘合片具有穿孔,孔隙率为3-90%,断裂伸长率为至少100%。
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公开(公告)号:US20080108262A1
公开(公告)日:2008-05-08
申请号:US11931124
申请日:2007-10-31
申请人: Fumiteru Asai , Takatoshi Sasaki , Toshio Shintani , Tomokazu Takahashi , Tsubasa Miki , Akiyoshi Yamamoto
发明人: Fumiteru Asai , Takatoshi Sasaki , Toshio Shintani , Tomokazu Takahashi , Tsubasa Miki , Akiyoshi Yamamoto
CPC分类号: H01L21/6836 , B23K26/146 , B23K26/40 , B23K2103/50 , B26F3/004 , C09J7/21 , C09J7/22 , C09J2201/20 , C09J2203/326 , H01L21/78 , H01L2221/68327 , Y10T428/26 , Y10T428/28 , Y10T442/10
摘要: The present invention provides an adhesive sheet for water jet laser dicing, comprising an adhesive layer laminated on a base film which has a mean opening diameter of 5 μm to 30 μm. According to the adhesive sheet of the invention, a base film having a mean opening diameter of a certain size is used, thus ensuring better permeability to liquids originating in a liquid stream, and preventing the material that is being processed from being separated by the liquids from the adhesive sheet. In addition, the relatively low mean opening diameter makes it possible to control rippling on the surface of the base film and kept the surface flat, resulting in better adhesion to the material being processed and ensuring that the material being processed is secured during the dicing stage. The ability to improve the adhesion between the base film and the adhesive layer also makes it possible to prevent the separation of the adhesive form the base film and the adhesion of the adhesion on the material being processed when picked up after dicing.
摘要翻译: 本发明提供一种水喷射激光切割用粘合片,其特征在于,具有层叠在平均开口直径为5〜30μm的基底膜上的粘合剂层。 根据本发明的粘合片,使用具有一定尺寸的平均开口直径的基膜,从而确保对来自液体流的液体的更好的渗透性,并且防止被处理的材料被液体分离 从粘合片。 另外,相对低的平均开口直径使得可以控制基膜的表面上的波纹并保持表面平坦,导致对被处理材料的更好的附着力,并确保在切割阶段期间确保正在加工的材料 。 提高基膜和粘合剂层之间的粘合力的能力也使得可以防止粘合剂从基膜剥离,以及在切割后拾取时对待处理材料的粘合的粘附。
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公开(公告)号:US20080057253A1
公开(公告)日:2008-03-06
申请号:US11892567
申请日:2007-08-24
申请人: Takatoshi Sasaki , Tsubasa Miki , Fumiteru Asai , Tomokazu Takahashi , Toshio Shintani , Akiyoshi Yamamoto
发明人: Takatoshi Sasaki , Tsubasa Miki , Fumiteru Asai , Tomokazu Takahashi , Toshio Shintani , Akiyoshi Yamamoto
CPC分类号: H01L21/6836 , B23K26/146 , B23K26/40 , B23K2103/50 , C09J7/20 , C09J2201/20 , C09J2203/326 , C09J2407/00 , C09J2409/00 , C09J2423/006 , C09J2433/00 , H01L2221/68327 , Y10T428/15 , Y10T428/28 , Y10T428/2852
摘要: An adhesive sheet for water jet laser dicing, comprises an adhesive layer laminated on a base film, wherein the adhesive constituting the adhesive layer is an energy radiation curing type adhesive, and said adhesive sheet has an adhesive strength of at least 1.5 N/20 mm.
摘要翻译: 一种用于水射流激光切割的粘合片,包括层压在基膜上的粘合剂层,其中构成粘合剂层的粘合剂是能量辐射固化型粘合剂,并且所述粘合片具有至少1.5N / 20mm的粘合强度 。
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公开(公告)号:US20100028662A1
公开(公告)日:2010-02-04
申请号:US12521822
申请日:2007-12-20
IPC分类号: B32B5/00
CPC分类号: C09J7/22 , C09J7/38 , C09J2203/326 , C09J2205/31 , C09J2433/00 , H01L21/568 , H01L21/6835 , H01L2221/68381 , H01L2924/0002 , Y10T428/265 , H01L2924/00
摘要: An object of the present invention is to provide a stable adhesive sheet in which the disappearance of the laser-printings prevents almost entirely, without leaving adhesive residue whatsoever during the cut of the substrate. An adhesive sheet for processing semiconductor substrates comprises a UV rays- and/or radiation-transmittable base film and an adhesive layer that undergoes a polymerization curing reaction by means of UV rays and/or radiation, wherein the adhesive layer has a thickness of 7 to 15 μm.
摘要翻译: 本发明的目的是提供一种稳定的粘合片,其中激光打印的消失几乎完全防止,而在基片的切割期间不会留下粘合剂残留物。 用于处理半导体衬底的粘合片包括通过紫外线和/或辐射进行聚合固化反应的紫外线和/或辐射透射性底膜和粘合剂层,其中所述粘合剂层的厚度为7至 15妈妈
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公开(公告)号:US20080085397A1
公开(公告)日:2008-04-10
申请号:US11905567
申请日:2007-10-02
CPC分类号: H01L21/6836 , B23K26/40 , B23K2103/50 , C09J7/22 , C09J7/241 , C09J7/29 , C09J2201/162 , C09J2205/114 , C09J2423/006 , H01L21/78 , H01L2221/68327 , Y10T428/24355 , Y10T428/28
摘要: An adhesive sheet for laser processing comprises an adhesive layer laminated on the surface of a base film, wherein the base film has a textured contact-reducing layer on the back side thereof. According to the adhesive sheet for laser processing of the present invention, the melting of the base film caused by the local concentration of laser beam energy at the places irradiated with the laser beam can be effectively prevented. Accordingly, the back side of the base film can be prevented from locally adhering to the processing table in the dicing apparatus, and subsequent steps, namely, drawing the base film to separate the workpiece from the adhesive layer, and individually recovering these, can be carried out easily and efficiently.
摘要翻译: 用于激光加工的粘合片包括层压在基膜的表面上的粘合剂层,其中所述基膜在其背面具有纹理化的接触减少层。 根据本发明的激光加工用粘合片,能够有效地防止由激光束照射的部位的激光能量的局部浓度引起的基膜熔化。 因此,可以防止基膜的背面局部粘附在切割装置的处理台上,随后的步骤即拉出基膜以将粘合剂层分离出来,并单独地回收它们,可以是 轻松高效地进行。
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公开(公告)号:US20080261038A1
公开(公告)日:2008-10-23
申请号:US11969023
申请日:2008-01-03
IPC分类号: B32B7/12
CPC分类号: H01L21/6836 , C08G18/672 , C08L61/00 , C08L2666/16 , C09D175/16 , C09J7/385 , C09J133/02 , C09J2201/622 , C09J2203/326 , C09J2205/31 , H01L2221/68327 , Y10T428/28 , Y10T428/2809 , Y10T428/2852 , Y10T428/2883 , Y10T428/2891
摘要: An adhesive sheet for processing semiconductor substrates comprises a UV rays- and/or radiation-transmittable base film and an adhesive layer that undergoes a polymerization curing reaction by means of UV rays and/or radiation, wherein the adhesive layer is formed using a multifunctional acrylate oligomer and/or monomer having a double bond, and is blended so as to result in 1 double bond per total average molecular weight of 225 to 8000 as determined on the basis of the weight average molecular weight of the multifunctional acrylate oligomer and/or monomer.
摘要翻译: 用于处理半导体衬底的粘合片包括紫外线和/或辐射透射性底膜和通过紫外线和/或辐射进行聚合固化反应的粘合剂层,其中粘合剂层使用多官能丙烯酸酯 低聚物和/或具有双键的单体,并且根据多官能丙烯酸酯低聚物和/或单体的重均分子量测定,共混以达到每平均分子量为225至8000的1双键 。
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10.
公开(公告)号:US20080118764A1
公开(公告)日:2008-05-22
申请号:US11875169
申请日:2007-10-19
IPC分类号: B32B27/00
CPC分类号: C09J11/06 , C09J7/38 , C09J11/08 , C09J2203/326 , C09J2205/102 , C09J2205/31 , C09J2433/00 , H01L21/67005 , H01L21/67132 , H01L21/6836 , H01L2221/68327 , Y10T428/31855
摘要: An adhesive sheet for processing semiconductor wafers and/or substrates comprises a UV- and/or radiation-transmittable base film and an adhesive layer that undergoes a polymerization curing reaction by means of UV rays and/or radiation, wherein the adhesive layer comprises at least a tackifier and a surfactant. The adhesive sheet of the present invention can be to lower the adhesive strength to the optimal level during pick up or the like after irradiation with UV rays and/or radiation, while maintaining adhesion with adherends before irradiation with UV rays and/or radiation by ensuring that, regardless of the texture on the surface of adherends such as semiconductor wafers and/or substrates, the adhering surface favorably conforms to the texture with preserving enough adhesive and cohesive strength.
摘要翻译: 用于处理半导体晶片和/或基板的粘合片包括通过UV射线和/或辐射进行聚合固化反应的UV和/或辐射透射性底膜和粘合剂层,其中粘合剂层至少包括 增粘剂和表面活性剂。 本发明的粘合片可以在用紫外线和/或辐射照射之后将粘合强度降低到拾取等期间的最佳水平,同时在用紫外线和/或辐射照射之前保持与被粘物的粘附,确保 无论在诸如半导体晶片和/或基板的被粘附体的表面上的纹理如何,粘合表面有利地符合纹理,同时保持足够的粘合力和内聚强度。
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