摘要:
An SiO2-based film-forming composition giving a protective film which, after impurity diffusion, can be easily stripped off and which has a higher protective effect. The film-forming composition is one for forming a protective film which in the diffusion of an impurity into a silicon wafer, serves to partly prevent the impurity diffusion. This film-forming composition comprises a high-molecular silicon compound and a compound having a protective element which undergoes covalent bonding to the element to be diffused in the impurity diffusion and thereby comes to have eight valence electrons. The protective element is preferably gallium or aluminum when phosphorus is used as the element to be diffused, and is preferably tantalum, niobium, arsenic, or antimony when boron is used as the diffusion element.
摘要:
An SiO2-based film-forming composition giving a protective film which, after impurity diffusion, can be easily stripped off and which has a higher protective effect. The film-forming composition is one for forming a protective film which in the diffusion of an impurity into a silicon wafer, serves to partly prevent the impurity diffusion. This film-forming composition comprises a high-molecular silicon compound and a compound having a protective element which undergoes covalent bonding to the element to be diffused in the impurity diffusion and thereby comes to have eight valence electrons. The protective element is preferably gallium or aluminum when phosphorus is used as the element to be diffused, and is preferably tantalum, niobium, arsenic, or antimony when boron is used as the diffusion element.
摘要:
A 3-D shape measurement apparatus for grasping the state of an object with ease and accuracy is provided. The 3-D shape measurement apparatus includes: a first 3-D sensor 10a having a projecting device 11 for projecting a light pattern on a target area, and a (first) image capturing apparatus 12a placed at a first interval d1 from the projecting device 11 to capture an image of the target area on which the light pattern is projected; a second 3-D sensor 10b having a projecting device 11, and a (second) image capturing apparatus 12b placed at a second interval d2 longer than the first interval d1 from the projecting device 11 to capture an image of the target area on which the light pattern is projected; 3-D information computing means 22 for obtaining external shape information on an object 2 based on the shift of the pattern on the image acquired with the first 3-D sensor 10a; variation information computing means 23 for obtaining variation information on the object 2 based on the shift of the pattern on the image acquired with the second 3-D sensor 10b; and information composing means 24 for composing the external shape information and the variation information.
摘要:
A condition analysis apparatus capable of grasping the condition of an object easily and accurately is provided. The condition analysis apparatus 1 includes a three-dimensional sensor 10 for measuring sampling-point-moves in the height direction of an object 2 existing in a target area at a plurality of sampling points, and area definition means 22 for defining an area where a plurality of the sampling-point-moves are in the generally same phase. The thus constructed condition analysis apparatus 1 can grasp the condition of the object 2 easily and accurately. Preferably, the condition analysis apparatus 1 includes information output means 40 for outputting information of an area including the area defined by the area definition means 22.
摘要:
A material for forming a silica based film which enables the production of a silica based film with a reduced etching rate relative to hydrofluoric acid. This material includes a solid fraction containing a film forming component capable of generating a silica based film, an organic solvent, and water, and the water content of the material, as determined by gas chromatography measurement, is within a range from 0.1 to 50% by weight.
摘要:
A pressure sensor includes a surface sheet whose front side is an operating surface and a substrate sheet that includes a plurality of switches and that is disposed below the back side of the surface sheet at a predetermined space therebetween. When the operating surface is depressed, the surface sheet is deformed toward the substrate sheet and a switch of the plurality of switches is turned into an input state, and a resolution of a switch signal from each of the switches varies in accordance with the amount of a pressing force applied on the operating surface. Therefore, an electronic device, such as a cellular phone, installed with the pressure sensor can have various functions realized by a variation in the resolution.
摘要:
A polymer injection molding unit is disclosed having a mold wall which includes a portion made of an infrared transmissible material which is radiated by an external infrared radiation source. Due to the passage of the infrared radiation through the infrared transmissible material, the infrared radiation is not absorbed by the mold wall and the mold wall is not substantially heated. The infrared radiation passes through the mold wall and is absorbed by the molten polymer material near the mold wall. As a result, the temperature of the molten polymer material rises and its viscosity is lowered to thereby enhance the shape transcription of complicated or fine shapes present on the mold wall, without increasing the temperature of the mold wall.
摘要:
A control apparatus of a gas turbine combustor obtains a stable combustion with limited NOx emission through a control of a fuel flow rate according to a turbine output and a control of a flow rate of intake air mixed with the fuel. The control apparatus includes an apparatus for detecting at least one of the temperature and the humidity of intake air taken into the combustor, an apparatus for determining and storing, in advance, a stable combustion limit line between a stable combustion region and an unstable combustion region, on a plane of coordinates of a ratio of fuel flow rate to an intake air flow rate or an intake air flow rate and the temperature or the humidity of the intake air, on each turbine load, an apparatus for detecting an instant operational point of the combustor on the plane of coordinates, and an apparatus for correcting the intake air flow rate or the ratio of fuel flow rate to the intake air flow rate according to an increase in the detected temperature or humidity so that the instant operational point does not cross the stable combustion limit line.
摘要:
There is disclosed a semiconductor memory device comprising memory cells (M11 to Mmn) for storing binary data, and first reference cells (DM11 to DMm1) and second reference cells (DM12 to DMm2) corresponding to respective two storage states of the memory cell, to make comparisons between the storage state of the memory cell and the storage states of the both reference cells at first and second sense amplifiers (1, 2) to compare outputs from the both sense amplifiers at the third sense amplifier (3) to thereby detect storage data of the memory cell. Thus, there can be provided a high speed memory device which has a less number of memory cells and of a high integration structure, and which has a little possibility of an erroneous operation in reading.
摘要:
A device for detecting combustion conditions in a plurality of combustors in a gas-turbine apparatus which includes the combustors and a gas turbine driven by combustion gas from the combustors, comprises a plurality of sensors for measuring concentration of unburnt component in the combustion gas, which is disposed on the downstream side of the gas turbine, a unit for obtaining a distribution pattern of the measured concentration and for investigating the obtained distribution pattern to detect combustion conditions in the combustors.