Film-forming composition
    1.
    发明授权
    Film-forming composition 有权
    成膜组合物

    公开(公告)号:US07914854B2

    公开(公告)日:2011-03-29

    申请号:US12160176

    申请日:2006-12-19

    IPC分类号: C08L83/04 B05D3/02

    摘要: An SiO2-based film-forming composition giving a protective film which, after impurity diffusion, can be easily stripped off and which has a higher protective effect. The film-forming composition is one for forming a protective film which in the diffusion of an impurity into a silicon wafer, serves to partly prevent the impurity diffusion. This film-forming composition comprises a high-molecular silicon compound and a compound having a protective element which undergoes covalent bonding to the element to be diffused in the impurity diffusion and thereby comes to have eight valence electrons. The protective element is preferably gallium or aluminum when phosphorus is used as the element to be diffused, and is preferably tantalum, niobium, arsenic, or antimony when boron is used as the diffusion element.

    摘要翻译: 提供保护膜的SiO 2系膜形成组合物,其在杂质扩散后容易剥离并具有较高的保护效果。 成膜组合物是用于形成保护膜的组合物,其在将杂质扩散到硅晶片中用于部分地防止杂质扩散。 该成膜组合物包含高分子硅化合物和具有保护元素的化合物,该保护元素与待杂质扩散的元素进行共价键合,从而具有8价电子。 当使用磷作为扩散元件时,保护元件优选为镓或铝,并且当使用硼作为扩散元件时,保护元件优选为钽,铌,砷或锑。

    FILM-FORMING COMPOSITION
    2.
    发明申请
    FILM-FORMING COMPOSITION 有权
    成膜组合物

    公开(公告)号:US20090014845A1

    公开(公告)日:2009-01-15

    申请号:US12160176

    申请日:2006-12-19

    摘要: An SiO2-based film-forming composition giving a protective film which, after impurity diffusion, can be easily stripped off and which has a higher protective effect. The film-forming composition is one for forming a protective film which in the diffusion of an impurity into a silicon wafer, serves to partly prevent the impurity diffusion. This film-forming composition comprises a high-molecular silicon compound and a compound having a protective element which undergoes covalent bonding to the element to be diffused in the impurity diffusion and thereby comes to have eight valence electrons. The protective element is preferably gallium or aluminum when phosphorus is used as the element to be diffused, and is preferably tantalum, niobium, arsenic, or antimony when boron is used as the diffusion element.

    摘要翻译: 提供保护膜的SiO 2系膜形成组合物,其在杂质扩散后容易剥离并具有较高的保护效果。 成膜组合物是用于形成保护膜的组合物,其在将杂质扩散到硅晶片中用于部分地防止杂质扩散。 该成膜组合物包含高分子硅化合物和具有保护元素的化合物,该保护元素与待杂质扩散的元素进行共价键合,从而具有8价电子。 当使用磷作为扩散元件时,保护元件优选为镓或铝,并且当使用硼作为扩散元件时,保护元件优选为钽,铌,砷或锑。

    Three-dimensional shape-measuring device
    3.
    发明授权
    Three-dimensional shape-measuring device 有权
    三维形状测量装置

    公开(公告)号:US07630537B2

    公开(公告)日:2009-12-08

    申请号:US10560048

    申请日:2004-06-03

    IPC分类号: G06K9/00

    摘要: A 3-D shape measurement apparatus for grasping the state of an object with ease and accuracy is provided. The 3-D shape measurement apparatus includes: a first 3-D sensor 10a having a projecting device 11 for projecting a light pattern on a target area, and a (first) image capturing apparatus 12a placed at a first interval d1 from the projecting device 11 to capture an image of the target area on which the light pattern is projected; a second 3-D sensor 10b having a projecting device 11, and a (second) image capturing apparatus 12b placed at a second interval d2 longer than the first interval d1 from the projecting device 11 to capture an image of the target area on which the light pattern is projected; 3-D information computing means 22 for obtaining external shape information on an object 2 based on the shift of the pattern on the image acquired with the first 3-D sensor 10a; variation information computing means 23 for obtaining variation information on the object 2 based on the shift of the pattern on the image acquired with the second 3-D sensor 10b; and information composing means 24 for composing the external shape information and the variation information.

    摘要翻译: 提供一种用于简单且准确地掌握物体状态的3-D形状测量装置。 3维形状测量装置包括:具有用于将目标区域上的光图案投影的投影装置11的第一3-D传感器10a和从投影装置以第一间隔d1放置的第一图像拍摄装置12a 11捕获其上投射有光图案的目标区域的图像; 具有投影装置11的第二3-D传感器10b和从投影装置11以比第一间隔d1更长的第二间隔d2放置的第二图像拍摄装置12b,以捕获其上的目标区域的图像 灯光图案投影; 3-D信息计算装置22,用于基于由第一3-D传感器10a获取的图像上的图案的移位来获得关于对象2的外部形状信息; 变化信息计算装置23,用于基于由第二3-D传感器10b获取的图像上的图案的移动来获得关于对象2的变化信息; 以及用于构成外部形状信息和变化信息的信息组合装置24。

    Condition-analyzing device
    4.
    发明授权
    Condition-analyzing device 有权
    条件分析装置

    公开(公告)号:US07545279B2

    公开(公告)日:2009-06-09

    申请号:US10560027

    申请日:2004-06-03

    IPC分类号: G03H1/02 G08B23/00

    摘要: A condition analysis apparatus capable of grasping the condition of an object easily and accurately is provided. The condition analysis apparatus 1 includes a three-dimensional sensor 10 for measuring sampling-point-moves in the height direction of an object 2 existing in a target area at a plurality of sampling points, and area definition means 22 for defining an area where a plurality of the sampling-point-moves are in the generally same phase. The thus constructed condition analysis apparatus 1 can grasp the condition of the object 2 easily and accurately. Preferably, the condition analysis apparatus 1 includes information output means 40 for outputting information of an area including the area defined by the area definition means 22.

    摘要翻译: 提供了能够容易且准确地掌握对象的状态的条件分析装置。 条件分析装置1包括:三维传感器10,用于测量存在于多个采样点的目标区域中的物体2的高度方向上的采样点移动;以及区域定义装置22,用于限定 多个采样点移动处于大致相同的阶段。 这样构成的条件分析装置1能够容易且准确地掌握物体2的状态。 优选地,条件分析装置1包括用于输出包括由区域定义装置22限定的区域的区域的信息的信息输出装置40。

    Material for forming silica based film
    5.
    发明授权
    Material for forming silica based film 有权
    用于形成二氧化硅基膜的材料

    公开(公告)号:US07235500B2

    公开(公告)日:2007-06-26

    申请号:US11000735

    申请日:2004-12-01

    IPC分类号: H01L21/31 H01L21/469

    摘要: A material for forming a silica based film which enables the production of a silica based film with a reduced etching rate relative to hydrofluoric acid. This material includes a solid fraction containing a film forming component capable of generating a silica based film, an organic solvent, and water, and the water content of the material, as determined by gas chromatography measurement, is within a range from 0.1 to 50% by weight.

    摘要翻译: 用于形成二氧化硅基膜的材料,其能够以相对于氢氟酸的蚀刻速率降低的方式制备二氧化硅基膜。 该材料包括含有能够产生二氧化硅基膜,有机溶剂和水的成膜组分的固体部分,并且通过气相色谱测量确定的材料的水含量在0.1至50%的范围内, 重量。

    Pressure sensor capable of changing resolution in accordance with amount of pressing force
    6.
    发明授权
    Pressure sensor capable of changing resolution in accordance with amount of pressing force 有权
    压力传感器能够根据按压力来改变分辨率

    公开(公告)号:US07178405B2

    公开(公告)日:2007-02-20

    申请号:US11157283

    申请日:2005-06-21

    申请人: Isao Sato

    发明人: Isao Sato

    IPC分类号: G01N3/08

    摘要: A pressure sensor includes a surface sheet whose front side is an operating surface and a substrate sheet that includes a plurality of switches and that is disposed below the back side of the surface sheet at a predetermined space therebetween. When the operating surface is depressed, the surface sheet is deformed toward the substrate sheet and a switch of the plurality of switches is turned into an input state, and a resolution of a switch signal from each of the switches varies in accordance with the amount of a pressing force applied on the operating surface. Therefore, an electronic device, such as a cellular phone, installed with the pressure sensor can have various functions realized by a variation in the resolution.

    摘要翻译: 压力传感器包括其前侧是操作表面的表面片和包括多个开关的基片,并且位于表面片的背面之间的预定间隔处。 当操作表面被压下时,表面片朝向衬底片变形,并且多个开关的开关变成输入状态,并且来自每个开关的开关信号的分辨率根据 施加在操作表面上的按压力。 因此,安装有压力传感器的诸如蜂窝电话的电子设备可以具有通过分辨率的变化实现的各种功能。

    Polymer injection molding unit
    7.
    发明授权
    Polymer injection molding unit 失效
    聚合物注塑单元

    公开(公告)号:US5843486A

    公开(公告)日:1998-12-01

    申请号:US673169

    申请日:1996-06-26

    IPC分类号: B29C45/37 B29C45/73 B29C35/08

    摘要: A polymer injection molding unit is disclosed having a mold wall which includes a portion made of an infrared transmissible material which is radiated by an external infrared radiation source. Due to the passage of the infrared radiation through the infrared transmissible material, the infrared radiation is not absorbed by the mold wall and the mold wall is not substantially heated. The infrared radiation passes through the mold wall and is absorbed by the molten polymer material near the mold wall. As a result, the temperature of the molten polymer material rises and its viscosity is lowered to thereby enhance the shape transcription of complicated or fine shapes present on the mold wall, without increasing the temperature of the mold wall.

    摘要翻译: 公开了一种聚合物注射成型单元,其具有模具壁,该模具壁包括由外部红外辐射源辐射的由红外线传输材料制成的部分。 由于红外辐射通过红外透射材料,红外辐射不被模具壁吸收,并且模具壁基本上不被加热。 红外辐射通过模具壁,并被模具壁附近的熔融聚合物材料吸收。 结果,熔融聚合物材料的温度升高并且其粘度降低,从而增加存在于模具壁上的复杂或精细形状的形状转印,而不增加模具壁的温度。

    Control apparatus and a control method of a gas turbine combustor
    8.
    发明授权
    Control apparatus and a control method of a gas turbine combustor 失效
    燃气轮机燃烧器的控制装置和控制方法

    公开(公告)号:US5339620A

    公开(公告)日:1994-08-23

    申请号:US872139

    申请日:1992-04-22

    IPC分类号: F02C9/28 F02C9/50 F23R3/26

    CPC分类号: F23R3/26

    摘要: A control apparatus of a gas turbine combustor obtains a stable combustion with limited NOx emission through a control of a fuel flow rate according to a turbine output and a control of a flow rate of intake air mixed with the fuel. The control apparatus includes an apparatus for detecting at least one of the temperature and the humidity of intake air taken into the combustor, an apparatus for determining and storing, in advance, a stable combustion limit line between a stable combustion region and an unstable combustion region, on a plane of coordinates of a ratio of fuel flow rate to an intake air flow rate or an intake air flow rate and the temperature or the humidity of the intake air, on each turbine load, an apparatus for detecting an instant operational point of the combustor on the plane of coordinates, and an apparatus for correcting the intake air flow rate or the ratio of fuel flow rate to the intake air flow rate according to an increase in the detected temperature or humidity so that the instant operational point does not cross the stable combustion limit line.

    摘要翻译: 燃气轮机燃烧器的控制装置通过根据涡轮机输出控制燃料流量和控制与燃料混合的进气的流量来获得具有有限NOx排放的稳定燃烧。 控制装置包括用于检测进入燃烧器的进气的温度和湿度中的至少一个的装置,用于预先确定和存储稳定燃烧区域和不稳定燃烧区域之间的稳定燃烧极限线的装置 在每个涡轮机负载上的燃料流量比与进气流量或进气流量之比的坐标平面和进气的温度或湿度之间,检测即时操作点的装置 坐标平面上的燃烧器,以及用于根据检测到的温度或湿度的增加来校正进气流量或燃料流量与进气流量比的装置,使得即时操作点不交叉 稳定燃烧极限线。