公开(公告)号：US20170023642A1

公开(公告)日：2017-01-26

申请号：US15166716

申请日：2016-05-27

Applicant: Translarity, Inc.

Inventor： Douglas A. Preston ,  Christopher T. Lane ,  Mark Gardiner ,  Morgan T. Johnson ,  Doug Buck ,  Nikolai Kalnin

IPC: G01R31/28 ,  G01R1/04 ,  G01R1/073

CPC classification number: G01R31/2891 ,  G01R1/0466 ,  G01R1/07378 ,  G01R31/2889

Abstract: Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for testing semiconductor dies includes a semiconductor wafer translator having a wafer-side positioned to face toward a device under test, and an inquiry-side facing away from the wafer-side. The apparatus also includes a flexible arm peripherally connected to the wafer translator, and an evacuation opening within the flexible arm or within the wafer translator. The evacuation opening is open to a flow of a gas in a first position of the flexible arm, and closed to a flow of the gas in a second position of the flexible arm.

Abstract translation: 本文公开了使用晶片转换器测试半导体晶片的系统和方法。 在一个实施例中，用于测试半导体管芯的设备包括半导体晶片转换器，其具有面向被测器件的晶片侧，以及面向晶片侧的查询侧。 该装置还包括外围连接到晶片转换器的柔性臂以及柔性臂内或晶片转换器内的抽空开口。 排气开口对于柔性臂的第一位置中的气体流开放，并且在柔性臂的第二位置中关闭到气体流。

公开(公告)号：US20170016954A1

公开(公告)日：2017-01-19

申请号：US15179641

申请日：2016-06-10

Applicant: Translarity, Inc.

Inventor： Nikolai Kalnin ,  Christopher T. Lane ,  David Ekstrom ,  Morgan T. Johnson ,  Douglas A. Preston

IPC: G01R31/28 ,  G01R1/04 ,  H01L21/67 ,  H01L21/66 ,  H01L21/683 ,  H01L21/677

CPC classification number: G01R31/2891 ,  F04B37/14 ,  G01R1/0466 ,  G01R31/2893 ,  H01L21/67144 ,  H01L21/67242 ,  H01L21/677 ,  H01L21/6838 ,  H01L22/14

Abstract: Systems and methods for testing semiconductor wafers using a wafer translator are disclosed herein. In one embodiment, an apparatus for testing semiconductor dies on a wafer includes a wafer translator having a wafer-side facing toward the wafer, and an inquiry-side facing away from the wafer-side. The wafer has an active side facing the translator. The apparatus includes a peripheral seal configured to seal a space between the wafer translator and the wafer, and a valve in a fluidic communication with the space between the wafer translator and the wafer.

Abstract translation: 本文公开了使用晶片转换器测试半导体晶片的系统和方法。 在一个实施例中，用于在晶片上测试半导体管芯的装置包括具有晶片侧面向晶片的晶片转换器和面向晶片侧的查询侧。 晶片具有面向平移器的有源侧。 该装置包括构造成密封晶片转换器和晶片之间的空间的外围密封件，以及与晶片转换器和晶片之间的空间流体连通的阀。