公开(公告)号：US06523833B1

公开(公告)日：2003-02-25

申请号：US09547403

申请日：2000-04-11

申请人： Tsuneo Ishigaki ,  Mamoru Fukuda ,  Yasuyuki Nishimura ,  Kazumasa Nishida

发明人： Tsuneo Ishigaki ,  Mamoru Fukuda ,  Yasuyuki Nishimura ,  Kazumasa Nishida

IPC分类号： F16J1502

CPC分类号： F16J15/062 ,  F16J15/025

摘要： A ring-shaped low load seal attached into a ring-shaped dovetail groove having an opening portion, a first side wall face, a second side wall face, and a bottom wall face. This seal has a trileaf cross-sectional configuration composed of a first arc portion, a second arc portion, a protruding portion, and a concave portion disposed between the first arc portion and the second arc portion.

摘要翻译： 安装在具有开口部，第一侧壁面，第二侧壁面和底壁面的环状燕尾槽中的环状低负载密封件。 该密封件具有由第一弧形部分，第二弧形部分，突出部分和设置在第一弧形部分和第二弧形部分之间的凹部组成的三叶截面形状。

公开(公告)号：US06433308B1

公开(公告)日：2002-08-13

申请号：US09674518

申请日：2000-11-20

申请人： Tsuneo Ishigaki ,  Keiichi Shibuya ,  Mamoru Fukuda ,  Kenji Waragai

发明人： Tsuneo Ishigaki ,  Keiichi Shibuya ,  Mamoru Fukuda ,  Kenji Waragai

IPC分类号： H05B100

CPC分类号： F16K49/002 ,  F16K3/184 ,  F16K51/02 ,  Y10T137/6606

摘要： A high vacuum valve prevents the transfer of heat from a valve plug of a valve via a valve shaft to a low temperature portion. The high vacuum valve is constructed such that the valve plug arrives at a position opposed to a valve seat in accordance with rectilinear motion of the valve shaft and then the valve plug is pressed against the valve seat in accordance with swinging motion of the valve shaft to close the valve.

摘要翻译： 高真空阀阻止通过阀轴将热量从阀的阀塞传递到低温部分。 高真空阀被构造成使得阀塞根据阀轴的直线运动到达与阀座相对的位置，然后根据阀轴的摆动运动将阀塞压在阀座上 关闭阀门。

公开(公告)号：US06932111B2

公开(公告)日：2005-08-23

申请号：US10807790

申请日：2004-03-24

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K3/02 ,  F16K3/06 ,  F16K3/10 ,  F16K51/00 ,  F16K51/02 ,  H01L21/02 ,  F17D1/00

CPC分类号： F16K3/06 ,  F16K3/10 ,  Y10T137/87917

摘要： A gate valve apparatus minimizes the chance that radicals and plasma in exhaust gas will contact a main valve seal, thereby preventing deterioration of the main valve seal. Slats of a flow control device are installed in an exhaust flow path to control the pressure in a process chamber. The main valve seal is provided on an abutting surface of a main valve element. An annular projection is provided on a pump-side inner wall surface of an accommodating chamber. When it is in a non-sealing position, the main valve element is moved toward the pump-side inner wall surface of the accommodating chamber to bring an outer peripheral portion of the main valve element into contact with the annular projection. Thus, the main valve seal is shielded from radicals and plasma in exhaust gas by the main valve element, the annular projection and the pump-side inner wall surface of the accommodating chamber. A shielding ring may be secured to an outer peripheral portion of the main valve element radially outward of the main valve seal instead of using the annular projection.

摘要翻译： 闸阀装置使废气中的自由基和等离子体与主阀密封件接触的机会最小化，从而防止主阀密封件的劣化。 流量控制装置的板条安装在排气流路中以控制处理室中的压力。 主阀密封件设置在主阀元件的抵接表面上。 在容纳室的泵侧内壁面上设置有环状突起。 当主阀元件处于非密封位置时，主阀元件朝向容纳室的泵侧内壁面移动，使主阀体的外周部与环状突起接触。 因此，主阀密封件通过主阀元件，环形突起和容纳室的泵侧内壁表面与废气中的自由基和等离子体隔离。 屏蔽环可以固定到主阀元件的外周部分，而不是使用环形突起，而不是主阀密封件的径向外侧。

公开(公告)号：US6095193A

公开(公告)日：2000-08-01

申请号：US149799

申请日：1998-09-08

申请人： Ikuo Kanzaka ,  Tsuneo Ishigaki

发明人： Ikuo Kanzaka ,  Tsuneo Ishigaki

IPC分类号： F16K1/52 ,  F16K31/122 ,  F16K41/10 ,  F16K51/02

CPC分类号： F16K31/1225 ,  F16K1/526 ,  F16K41/10

摘要： A smooth vent valve in which an on-off valve and a flow control valve are provided in series and arranged to be capable of being operated by respective actuating mechanisms, thereby accurately performing the on-off operation of the on-off valve and the flow rate control of the flow control valve. The smooth vent valve (11) has an on-off valve (8) and a flow control valve (9), which are coaxially provided between an inlet port (18) and outlet port (19) of a valve body (13 to 15). The on-off valve (8) and the flow control valve (9) are placed in series. An actuating mechanism for the on-off valve (8) and an actuating mechanism for the flow control valve (9) are formed separately from each other. When the on-off valve is in an open position, the flow control valve can be switched between a throttling position and an open position while continuously changing the flow rate.

摘要翻译： 一种平滑排气阀，其中开关阀和流量控制阀串联设置并且布置成能够由相应的致动机构操作，从而精确地执行开关阀和流动的开关操作 流量控制阀的速率控制。 平滑排气阀（11）具有同向设置在阀体（13至15）的入口（18）和出口（19）之间的开关阀（8）和流量控制阀（9） ）。 开关阀（8）和流量控制阀（9）串联配置。 用于开关阀（8）的致动机构和用于流量控制阀（9）的致动机构彼此分开地形成。 当开关阀处于打开位置时，流量控制阀可以在节流位置和打开位置之间切换，同时连续改变流量。

公开(公告)号：US5927334A

公开(公告)日：1999-07-27

申请号：US781622

申请日：1997-01-09

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K51/02 ,  F16K11/044 ,  F16K11/18 ,  F16K31/06 ,  F16K11/14

CPC分类号： F16K31/0627 ,  F16K11/044 ,  Y10T137/86919 ,  Y10T137/87217

摘要： A three-port valve capable of switching flow paths from one to another without undesired communication between the switched flow paths. A first valve seat (55) and a second valve seat (56) are disposed opposite to each other in a central valve chamber (42). A first passage (49) extending through the first valve seat (55) is communicated with a first port (45). A second passage (51) extending through the second valve seat (56) is communicated with a second port (47). The central valve chamber (42) is communicated with a third port (46). A valve body having a first seal surface (76) and a second seal surface (77) is disposed between the first valve seat (55) and the second valve seat (56). The distance between the first and second seal surfaces (76 and 77) of the valve body is variable. At least one of the seal surfaces (76 and 77) of the valve body is always placed in close contact with the first valve seat (55) or the second valve seat (56). At a stage in a switching operation of the valve, both the two seal surfaces (76 and 77) of the valve body are placed in close contact with the first and second valve seats (55 and 56), respectively.

摘要翻译： 一种三通阀，能够将流路从一个切换到另一个，而不需要在切换的流动路径之间的不需要的通信。 第一阀座（55）和第二阀座（56）在中心阀室（42）中相对设置。 延伸穿过第一阀座（55）的第一通道（49）与第一端口（45）连通。 延伸穿过第二阀座（56）的第二通道（51）与第二端口（47）连通。 中心阀室（42）与第三端口（46）连通。 具有第一密封表面（76）和第二密封表面（77）的阀体设置在第一阀座（55）和第二阀座（56）之间。 阀体的第一和第二密封表面（76和77）之间的距离是可变的。 阀体的至少一个密封表面（76和77）总是与第一阀座（55）或第二阀座（56）紧密接触。 在阀的切换操作的阶段，阀体的两个密封表面（76和77）分别与第一和第二阀座（55和56）紧密接触。

公开(公告)号：US5145152A

公开(公告)日：1992-09-08

申请号：US727434

申请日：1991-07-09

申请人： Hiroshi Komuro ,  Tsuneo Ishigaki

发明人： Hiroshi Komuro ,  Tsuneo Ishigaki

IPC分类号： F16K7/16 ,  F16K51/02

CPC分类号： F16K51/02 ,  F16K7/16

摘要： In a high-vacuum valve whose valve body is brought in and out of contact with a valve seat, a metal diaphragm facing the valve seat defines a valve seat, an actuating mechanism to open and close the valve body is provided on the reverse side of the diaphragm outside the valve chamber, and a spring is provided between the actuating mechanism and diaphragm in a position corresponding to the position of the valve seat. This high-vacuum valve eliminates the stagnation of gas in its passage, reduces the surface area of its passage, and precludes the detrimental effect of the powder of abraded metal.

摘要翻译： 在其阀体与阀座接触并脱离接触的高真空阀中，面向阀座的金属隔膜形成阀座，用于打开和关闭阀体的致动机构设置在 阀室外的隔膜，并且弹簧设置在致动机构和隔膜之间的位置对应于阀座的位置。 这种高真空阀消除了通道中气体的停滞，减少了通道的表面积，并且排除了磨损金属粉末的不利影响。

公开(公告)号：US06619618B2

公开(公告)日：2003-09-16

申请号：US09929485

申请日：2001-08-15

申请人： Tsuneo Ishigaki ,  Seiichi Furutate ,  Kenji Waragai

发明人： Tsuneo Ishigaki ,  Seiichi Furutate ,  Kenji Waragai

IPC分类号： F16K2500

CPC分类号： F16K3/0218 ,  F16K51/02

摘要： In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate is mounted to a tip end of a shaft operated by driving of a cylinder device and the gate is pressed against a valve seat provided around a rectangular valve opening by tilting the shaft after the gate is moved to a position facing the valve opening by movement of the shaft by driving of the cylinder device, the gate is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft and a small thickness on each of opposite end portion sides.

摘要翻译： 在具有矩形栅极的闸阀中，由于施加到闸门的弯矩而在相对端部产生弯曲被容易地抑制。 为此，在通过驱动缸装置而操作的轴的末端安装矩形闸门的较长侧的中心部分的闸阀中，并且将门压靠设置在矩形侧壁上的阀座 在通过缸体装置的驱动通过轴的移动将门移动到与阀开口相对的位置之后，通过倾斜轴来开启阀门，门形成为在支点附近具有包括大厚度的不均匀的壁厚 连接到轴的部分和在相对端部侧的每一个上具有小的厚度。

公开(公告)号：US4409580A

公开(公告)日：1983-10-11

申请号：US316531

申请日：1981-10-29

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K31/06 ,  H01F7/06 ,  H01F7/10 ,  H01F7/16

CPC分类号： F16K31/0658 ,  H01F7/10 ,  H01F7/1607 ,  H01F2007/1676

摘要： A solenoid actuator for use with an electromagnetic valve which includes a magnetic frame for establishing a magnetic circuit around an energizing coil, which is formed by bending a sheet-like magnetic frame constituent plate with an eddy current eliminating slit being defined therein, thereby enabling simplification in structure of the magnetic frame, effective utilization of electric power and reduction in the magnetic resistance, and attaining inexpensive fabrication, great electromagnetic force with electrical power-saving and small magnetic loss.

摘要翻译： 一种与电磁阀一起使用的螺线管致动器，其包括用于通过弯曲具有限定在其中的涡流消除狭缝的片状磁性构架板形成的通电线圈周围的磁路的磁性框架，从而能够简化 在磁性框架的结构中，有效利用电力并降低磁阻，并且获得廉价的制造，具有省电和小磁损耗的大电磁力。

公开(公告)号：US07234679B2

公开(公告)日：2007-06-26

申请号：US11431878

申请日：2006-05-10

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K35/00

CPC分类号： F16K3/184 ,  F16K51/02

摘要： A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward end thereof, wherein when a rotational force is applied to the rotary latch in one direction, the latch surface is pressed against a joint surface of the single shaft, whereby the valve element is latched to said single shaft, and when a rotational force is applied to the rotary latch in the opposite direction, the latch surface is separated from the joint surface of the single shaft to unlatch the valve element.

摘要翻译： 闸阀具有连接到单个轴的传送室侧阀元件和处理室侧阀元件。 一个可旋转地支撑在一个阀元件的内表面上的旋转闩锁，旋转闩锁在其前端具有一个锁定表面，其中当一个方向上向旋转闩锁施加旋转力时，闩锁表面被按压 单个轴的接合表面，由此阀元件被锁定到所述单个轴上，并且当旋转力沿相反方向施加到旋转闩锁时，闩锁表面与单个轴的接合表面分离以解锁 阀元件。

公开(公告)号：US07066443B2

公开(公告)日：2006-06-27

申请号：US10738678

申请日：2003-12-16

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K3/10

CPC分类号： F16K3/184 ,  F16K51/02

摘要： A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft actuated with a single three-position air cylinder to selectively close a process chamber opening and a transfer chamber opening or fully open both the openings to allow an object to pass therethrough. A lever member is secured to the single shaft. A roller supported by the lever member is kept in engagement with a cam groove of a cam member. A cam support member for supporting the cam member is connected to the piston rod of the three-position air cylinder. A spring is interposed between the lever member and the cam support member. When the piston rod is in the first (lower extremity) position, both the transfer chamber-side valve element and the process chamber-side valve element fully open the transfer chamber opening and the process chamber opening, respectively. As the piston rod shifts from the first position to the second position, the roller shifts from engagement with an upper position of the cam groove to engagement with an intermediate position, causing the process chamber-side valve element to close the process chamber opening. As the piston rod shifts from the second position to the third (upper extremity) position, the roller shifts from the engagement with the intermediate position to engagement with a lower position of the cam groove, causing the transfer chamber-side valve element to close the transfer chamber opening.

摘要翻译： 闸阀具有传送室侧阀元件和处理室侧阀元件，其连接到用单个三位置气缸致动的单个轴，以选择性地关闭处理室开口和传送室打开或完全打开 允许物体通过的开口。 杠杆构件被固定到单个轴。 由杠杆构件支撑的辊保持与凸轮构件的凸轮槽接合。 用于支撑凸轮构件的凸轮支撑构件连接到三位置气缸的活塞杆。 弹簧设置在杆构件和凸轮支撑构件之间。 当活塞杆处于第一（下肢）位置时，传送室侧阀元件和处理室侧阀元件分别完全打开传送室开口和处理室开口。 当活塞杆从第一位置移动到第二位置时，辊从与凸轮槽的上部位置的接合转移到与中间位置接合，使得处理室侧阀元件关闭处理室开口。 当活塞杆从第二位置移动到第三（上肢）位置时，辊从与中间位置的接合转移到与凸轮槽的下部位置接合，导致传送室侧阀元件关闭 传送室开口。