公开(公告)号：US6095193A

公开(公告)日：2000-08-01

申请号：US149799

申请日：1998-09-08

申请人： Ikuo Kanzaka ,  Tsuneo Ishigaki

发明人： Ikuo Kanzaka ,  Tsuneo Ishigaki

IPC分类号： F16K1/52 ,  F16K31/122 ,  F16K41/10 ,  F16K51/02

CPC分类号： F16K31/1225 ,  F16K1/526 ,  F16K41/10

摘要： A smooth vent valve in which an on-off valve and a flow control valve are provided in series and arranged to be capable of being operated by respective actuating mechanisms, thereby accurately performing the on-off operation of the on-off valve and the flow rate control of the flow control valve. The smooth vent valve (11) has an on-off valve (8) and a flow control valve (9), which are coaxially provided between an inlet port (18) and outlet port (19) of a valve body (13 to 15). The on-off valve (8) and the flow control valve (9) are placed in series. An actuating mechanism for the on-off valve (8) and an actuating mechanism for the flow control valve (9) are formed separately from each other. When the on-off valve is in an open position, the flow control valve can be switched between a throttling position and an open position while continuously changing the flow rate.

摘要翻译： 一种平滑排气阀，其中开关阀和流量控制阀串联设置并且布置成能够由相应的致动机构操作，从而精确地执行开关阀和流动的开关操作 流量控制阀的速率控制。 平滑排气阀（11）具有同向设置在阀体（13至15）的入口（18）和出口（19）之间的开关阀（8）和流量控制阀（9） ）。 开关阀（8）和流量控制阀（9）串联配置。 用于开关阀（8）的致动机构和用于流量控制阀（9）的致动机构彼此分开地形成。 当开关阀处于打开位置时，流量控制阀可以在节流位置和打开位置之间切换，同时连续改变流量。

公开(公告)号：US06464203B1

公开(公告)日：2002-10-15

申请号：US09709328

申请日：2000-11-13

申请人： Tsuneo Ishigaki ,  Ikuo Kanzaka ,  Kenji Waragai

发明人： Tsuneo Ishigaki ,  Ikuo Kanzaka ,  Kenji Waragai

IPC分类号： F16K318

CPC分类号： F16K3/10

摘要： A gate 3 for opening and closing an opening 2 of a chamber 1 is fixed to a top end of an arm 7 swung between a position facing the opening and a retreating position on the side thereof. A base end of the arm 7 is supported by an output shaft 10 of a fluid pressure cylinder 8 driven in parallel with a direction in which the gate comes into contact with and is separated from the opening 2, and a cam follower 12 fit in a guide groove 14 of a machine frame 6 is provided at the base end of the arm 7. The guide groove is formed by an axial-direction groove 14a for carrying the gate 3 at the position facing the opening 2 and then moving it when the gate is located at a position in the vicinity of the opening of the chamber 1, and a slant-periphery direction groove 14b connected thereto for retreating the gate to the side of the opening.

摘要翻译： 用于打开和关闭室1的开口2的门3固定到在面向开口的位置和其侧面上的退回位置之间摆动的臂7的顶端。 臂7的基端由流体压力缸8的输出轴10支撑，该输出轴10与闸门与开口2接触并与开口2分离的方向平行地驱动，并且凸轮从动件12配合在 机架6的引导槽14设置在臂7的基端。引导槽由轴向槽14a形成，用于在朝向开口2的位置处承载门3，然后在门 位于室1的开口附近的位置和与其连接的倾斜周边方向槽14b，用于将闸门向开口侧退回。

公开(公告)号：US06390449B1

公开(公告)日：2002-05-21

申请号：US09593367

申请日：2000-06-14

申请人： Tsuneo Ishigaki ,  Kenji Waragai ,  Ikuo Kanzaka

发明人： Tsuneo Ishigaki ,  Kenji Waragai ,  Ikuo Kanzaka

IPC分类号： F16K31122

CPC分类号： F16K51/02 ,  F16K3/184

摘要： A gate valve is disclosed comprising an elevatable lever member connected to a piston rod, a displacement member for making up and down movements integrally with the lever member and being tiltably disposed about supporting rollers acting as a pivot point or fulcrum at an end position of displacement, spring members interveningly disposed between the lever member and the displacement member, pin members fixed into side surfaces of the lever member, and engaging grooves formed in side surfaces of the displacement member and engaging with the pin members.

摘要翻译： 公开了一种闸阀，其包括连接到活塞杆的升降杆构件，用于与杆构件一体地上下移动的位移构件，并且可倾斜地设置在作为位移端部位置处的枢转点或支点的支撑辊周围 插入在杠杆构件和位移构件之间的弹簧构件，固定在杠杆构件的侧面的销构件以及形成在移动构件的侧表面中并与销构件接合的接合槽。

公开(公告)号：US06932111B2

公开(公告)日：2005-08-23

申请号：US10807790

申请日：2004-03-24

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K3/02 ,  F16K3/06 ,  F16K3/10 ,  F16K51/00 ,  F16K51/02 ,  H01L21/02 ,  F17D1/00

CPC分类号： F16K3/06 ,  F16K3/10 ,  Y10T137/87917

摘要： A gate valve apparatus minimizes the chance that radicals and plasma in exhaust gas will contact a main valve seal, thereby preventing deterioration of the main valve seal. Slats of a flow control device are installed in an exhaust flow path to control the pressure in a process chamber. The main valve seal is provided on an abutting surface of a main valve element. An annular projection is provided on a pump-side inner wall surface of an accommodating chamber. When it is in a non-sealing position, the main valve element is moved toward the pump-side inner wall surface of the accommodating chamber to bring an outer peripheral portion of the main valve element into contact with the annular projection. Thus, the main valve seal is shielded from radicals and plasma in exhaust gas by the main valve element, the annular projection and the pump-side inner wall surface of the accommodating chamber. A shielding ring may be secured to an outer peripheral portion of the main valve element radially outward of the main valve seal instead of using the annular projection.

摘要翻译： 闸阀装置使废气中的自由基和等离子体与主阀密封件接触的机会最小化，从而防止主阀密封件的劣化。 流量控制装置的板条安装在排气流路中以控制处理室中的压力。 主阀密封件设置在主阀元件的抵接表面上。 在容纳室的泵侧内壁面上设置有环状突起。 当主阀元件处于非密封位置时，主阀元件朝向容纳室的泵侧内壁面移动，使主阀体的外周部与环状突起接触。 因此，主阀密封件通过主阀元件，环形突起和容纳室的泵侧内壁表面与废气中的自由基和等离子体隔离。 屏蔽环可以固定到主阀元件的外周部分，而不是使用环形突起，而不是主阀密封件的径向外侧。

公开(公告)号：US5927334A

公开(公告)日：1999-07-27

申请号：US781622

申请日：1997-01-09

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K51/02 ,  F16K11/044 ,  F16K11/18 ,  F16K31/06 ,  F16K11/14

CPC分类号： F16K31/0627 ,  F16K11/044 ,  Y10T137/86919 ,  Y10T137/87217

摘要： A three-port valve capable of switching flow paths from one to another without undesired communication between the switched flow paths. A first valve seat (55) and a second valve seat (56) are disposed opposite to each other in a central valve chamber (42). A first passage (49) extending through the first valve seat (55) is communicated with a first port (45). A second passage (51) extending through the second valve seat (56) is communicated with a second port (47). The central valve chamber (42) is communicated with a third port (46). A valve body having a first seal surface (76) and a second seal surface (77) is disposed between the first valve seat (55) and the second valve seat (56). The distance between the first and second seal surfaces (76 and 77) of the valve body is variable. At least one of the seal surfaces (76 and 77) of the valve body is always placed in close contact with the first valve seat (55) or the second valve seat (56). At a stage in a switching operation of the valve, both the two seal surfaces (76 and 77) of the valve body are placed in close contact with the first and second valve seats (55 and 56), respectively.

摘要翻译： 一种三通阀，能够将流路从一个切换到另一个，而不需要在切换的流动路径之间的不需要的通信。 第一阀座（55）和第二阀座（56）在中心阀室（42）中相对设置。 延伸穿过第一阀座（55）的第一通道（49）与第一端口（45）连通。 延伸穿过第二阀座（56）的第二通道（51）与第二端口（47）连通。 中心阀室（42）与第三端口（46）连通。 具有第一密封表面（76）和第二密封表面（77）的阀体设置在第一阀座（55）和第二阀座（56）之间。 阀体的第一和第二密封表面（76和77）之间的距离是可变的。 阀体的至少一个密封表面（76和77）总是与第一阀座（55）或第二阀座（56）紧密接触。 在阀的切换操作的阶段，阀体的两个密封表面（76和77）分别与第一和第二阀座（55和56）紧密接触。

公开(公告)号：US5145152A

公开(公告)日：1992-09-08

申请号：US727434

申请日：1991-07-09

申请人： Hiroshi Komuro ,  Tsuneo Ishigaki

发明人： Hiroshi Komuro ,  Tsuneo Ishigaki

IPC分类号： F16K7/16 ,  F16K51/02

CPC分类号： F16K51/02 ,  F16K7/16

摘要： In a high-vacuum valve whose valve body is brought in and out of contact with a valve seat, a metal diaphragm facing the valve seat defines a valve seat, an actuating mechanism to open and close the valve body is provided on the reverse side of the diaphragm outside the valve chamber, and a spring is provided between the actuating mechanism and diaphragm in a position corresponding to the position of the valve seat. This high-vacuum valve eliminates the stagnation of gas in its passage, reduces the surface area of its passage, and precludes the detrimental effect of the powder of abraded metal.

摘要翻译： 在其阀体与阀座接触并脱离接触的高真空阀中，面向阀座的金属隔膜形成阀座，用于打开和关闭阀体的致动机构设置在 阀室外的隔膜，并且弹簧设置在致动机构和隔膜之间的位置对应于阀座的位置。 这种高真空阀消除了通道中气体的停滞，减少了通道的表面积，并且排除了磨损金属粉末的不利影响。

公开(公告)号：US06619618B2

公开(公告)日：2003-09-16

申请号：US09929485

申请日：2001-08-15

申请人： Tsuneo Ishigaki ,  Seiichi Furutate ,  Kenji Waragai

发明人： Tsuneo Ishigaki ,  Seiichi Furutate ,  Kenji Waragai

IPC分类号： F16K2500

CPC分类号： F16K3/0218 ,  F16K51/02

摘要： In a gate valve having a rectangular gate, generation of flection at opposite end portions due to bending moment applied to the gate is suppressed easily. For this purpose, in the gate valve in which a central portion of a longer side of the rectangular gate is mounted to a tip end of a shaft operated by driving of a cylinder device and the gate is pressed against a valve seat provided around a rectangular valve opening by tilting the shaft after the gate is moved to a position facing the valve opening by movement of the shaft by driving of the cylinder device, the gate is formed to have an uneven wall thickness including a large thickness in a vicinity of a fulcrum portion connected to the shaft and a small thickness on each of opposite end portion sides.

摘要翻译： 在具有矩形栅极的闸阀中，由于施加到闸门的弯矩而在相对端部产生弯曲被容易地抑制。 为此，在通过驱动缸装置而操作的轴的末端安装矩形闸门的较长侧的中心部分的闸阀中，并且将门压靠设置在矩形侧壁上的阀座 在通过缸体装置的驱动通过轴的移动将门移动到与阀开口相对的位置之后，通过倾斜轴来开启阀门，门形成为在支点附近具有包括大厚度的不均匀的壁厚 连接到轴的部分和在相对端部侧的每一个上具有小的厚度。

公开(公告)号：US06523833B1

公开(公告)日：2003-02-25

申请号：US09547403

申请日：2000-04-11

申请人： Tsuneo Ishigaki ,  Mamoru Fukuda ,  Yasuyuki Nishimura ,  Kazumasa Nishida

发明人： Tsuneo Ishigaki ,  Mamoru Fukuda ,  Yasuyuki Nishimura ,  Kazumasa Nishida

IPC分类号： F16J1502

CPC分类号： F16J15/062 ,  F16J15/025

摘要： A ring-shaped low load seal attached into a ring-shaped dovetail groove having an opening portion, a first side wall face, a second side wall face, and a bottom wall face. This seal has a trileaf cross-sectional configuration composed of a first arc portion, a second arc portion, a protruding portion, and a concave portion disposed between the first arc portion and the second arc portion.

摘要翻译： 安装在具有开口部，第一侧壁面，第二侧壁面和底壁面的环状燕尾槽中的环状低负载密封件。 该密封件具有由第一弧形部分，第二弧形部分，突出部分和设置在第一弧形部分和第二弧形部分之间的凹部组成的三叶截面形状。

公开(公告)号：US4409580A

公开(公告)日：1983-10-11

申请号：US316531

申请日：1981-10-29

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K31/06 ,  H01F7/06 ,  H01F7/10 ,  H01F7/16

CPC分类号： F16K31/0658 ,  H01F7/10 ,  H01F7/1607 ,  H01F2007/1676

摘要： A solenoid actuator for use with an electromagnetic valve which includes a magnetic frame for establishing a magnetic circuit around an energizing coil, which is formed by bending a sheet-like magnetic frame constituent plate with an eddy current eliminating slit being defined therein, thereby enabling simplification in structure of the magnetic frame, effective utilization of electric power and reduction in the magnetic resistance, and attaining inexpensive fabrication, great electromagnetic force with electrical power-saving and small magnetic loss.

摘要翻译： 一种与电磁阀一起使用的螺线管致动器，其包括用于通过弯曲具有限定在其中的涡流消除狭缝的片状磁性构架板形成的通电线圈周围的磁路的磁性框架，从而能够简化 在磁性框架的结构中，有效利用电力并降低磁阻，并且获得廉价的制造，具有省电和小磁损耗的大电磁力。

公开(公告)号：US07234679B2

公开(公告)日：2007-06-26

申请号：US11431878

申请日：2006-05-10

申请人： Tsuneo Ishigaki

发明人： Tsuneo Ishigaki

IPC分类号： F16K35/00

CPC分类号： F16K3/184 ,  F16K51/02

摘要： A gate valve has a transfer chamber-side valve element and a process chamber-side valve element connected to a single shaft. A rotary latch pivotably supported on an inner surface of one of the valve element with the rotary latch having a latch surface at a forward end thereof, wherein when a rotational force is applied to the rotary latch in one direction, the latch surface is pressed against a joint surface of the single shaft, whereby the valve element is latched to said single shaft, and when a rotational force is applied to the rotary latch in the opposite direction, the latch surface is separated from the joint surface of the single shaft to unlatch the valve element.

摘要翻译： 闸阀具有连接到单个轴的传送室侧阀元件和处理室侧阀元件。 一个可旋转地支撑在一个阀元件的内表面上的旋转闩锁，旋转闩锁在其前端具有一个锁定表面，其中当一个方向上向旋转闩锁施加旋转力时，闩锁表面被按压 单个轴的接合表面，由此阀元件被锁定到所述单个轴上，并且当旋转力沿相反方向施加到旋转闩锁时，闩锁表面与单个轴的接合表面分离以解锁 阀元件。