公开(公告)号：US5581324A

公开(公告)日：1996-12-03

申请号：US446511

申请日：1995-05-22

申请人： Tsuneo Miyai ,  Yuji Imai ,  Tetsuo Taniguchi ,  Kousuke Suzuki

发明人： Tsuneo Miyai ,  Yuji Imai ,  Tetsuo Taniguchi ,  Kousuke Suzuki

IPC分类号： G03F7/20 ,  G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70875 ,  G03F7/70258 ,  G03F7/70866 ,  G03F7/70983

摘要： A projection exposure apparatus has a light source for emitting illumination light, an illumination optical system for illuminating a mask, on which a predetermined pattern is formed, with the illumination light, and a projection optical system for forming an image of the pattern on a photosensitive substrate, and images the image of the pattern on the photosensitive substrate in a predetermined imaging state. The apparatus also includes a temperature measurement sensor for measuring a change in temperature of the mask, a control system for calculating the change amount of the imaging state caused by the change in temperature, and a correction system for correcting the change in imaging state.

摘要翻译： 投影曝光装置具有用于发射照明光的光源，用于照亮其上形成有预定图案的掩模的照明光学系统与照明光，以及用于在感光体上形成图案的图像的投影光学系统 衬底，并以预定的成像状态将图案的图像在感光衬底上成像。 该装置还包括用于测量掩模温度变化的温度测量传感器，用于计算由温度变化引起的成像状态的变化量的控制系统和用于校正成像状态变化的校正系统。

公开(公告)号：US5936711A

公开(公告)日：1999-08-10

申请号：US931933

申请日：1997-09-17

申请人： Tsuneo Miyai ,  Yuji Imai

发明人： Tsuneo Miyai ,  Yuji Imai

IPC分类号： G03B27/42 ,  G03F7/20 ,  G03F9/00 ,  G03F9/02 ,  H01L21/027 ,  G03B21/86

CPC分类号： G03F7/70 ,  G03B27/42 ,  G03F9/70

摘要： A focusing operation is performed so that the center of an exposure region on a photosensitive substrate coincides with a focal point of a projection optical system, based on setting information of a variable field stop, which sets the exposure region. Even in a case where only a portion of an exposable region of the projection optical system PL is set as the exposure region using the variable field stop, and only the set portion is subjected to exposure, exposure is performed while the set exposure region is brought into accurate focus, thereby improving resolution. Accordingly, an appropriate focusing operation can be always performed so as to achieve high accuracy exposure, irrespective of variations in the shape of the exposure region.

摘要翻译： 基于设定曝光区域的可变场停止的设定信息，执行聚焦操作，使得感光基板上的曝光区域的中心与投影光学系统的焦点重合。 即使在投影光学系统PL的可曝光区域的一部分被设置为使用可变场停止的曝光区域的情况下，并且仅仅对设定部分进行曝光的情况下，在设定曝光区域被进行时进行曝光 精确集中，从而提高分辨率。 因此，无论曝光区域的形状的变化如何，都可以始终进行适当的聚焦操作，以实现高精度的曝光。

公开(公告)号：US5825470A

公开(公告)日：1998-10-20

申请号：US614057

申请日：1996-03-12

申请人： Tsuneo Miyai ,  Yuji Imai

发明人： Tsuneo Miyai ,  Yuji Imai

IPC分类号： G03F7/20 ,  G03B27/58 ,  G03B27/42 ,  B65B21/02

CPC分类号： G03F7/707 ,  G03F7/7075 ,  G03F7/70866 ,  G03F7/70916 ,  Y10S414/137

摘要： Disclosed is an exposure apparatus comprising a substrate holder washing unit and a substrate holder storing unit. While a substrate holder exported from an exposure stage is washed in the washing unit, a clean holder previously stored in the storing unit is transported to an X stage by using a robot hand and a transport arm, and it is installed to the X stage by using an attaching/detaching mechanism. The holder can be always maintained in a clean state without stopping the apparatus for a long period of time, resulting in improvement in throughput. Also disclosed is an exposure apparatus comprising a mechanism for cleaning a substrate holder by transporting a whetstone onto the holder, engaging the whetstone with an engaging member, and rotating the whetstone by using a rotary driving unit. The exposure apparatus is provided with a unit for drawing dust emerged upon cleaning with the whetstone.

摘要翻译： 公开了一种曝光装置，包括基板保持器清洗单元和基板保持器存储单元。 当从曝光台输出的基板保持器在洗涤单元中洗涤时，预先存储在存储单元中的清洁保持器通过使用机器人手和输送臂被运送到X台，并且通过 使用安装/拆卸机构。 保持器可以始终保持在清洁状态，而不会长时间地停止装置，从而提高了生产量。 还公开了一种曝光装置，其包括用于通过将磨石输送到保持器上来清洁衬底保持器的机构，将磨石与接合构件接合，并且通过使用旋转驱动单元旋转砂轮。 曝光装置设置有用于在用砂轮清洁时出现灰尘的单元。

公开(公告)号：US5424552A

公开(公告)日：1995-06-13

申请号：US115517

申请日：1993-09-02

申请人： Toshihiko Tsuji ,  Tetsuo Taniguchi ,  Yuji Imai ,  Mizutani Hideo

发明人： Toshihiko Tsuji ,  Tetsuo Taniguchi ,  Yuji Imai ,  Mizutani Hideo

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01N21/86

CPC分类号： G03F7/706 ,  G03F7/70241 ,  G03F7/70258 ,  G03F7/70883 ,  G03F7/70891 ,  G03F9/70 ,  G03F9/7034

摘要： A projection exposing apparatus for detecting a state of focus at two or more places in exposure region of a projection optical system by a focus state detection device. In accordance with the result of the detection of the focus state at the two or more places, the image forming characteristics of the projection optical system are measured by an image forming characteristics measuring device. A first pattern extending in the sagittal direction and a second pattern extending in the meridional direction are formed so that the focus state is measured by light beams transmitted these patterns and therefore the astigmatism, eccentricity or the spherical aberration is obtained so as to be corrected.

摘要翻译： 一种投影曝光装置，用于通过聚焦状态检测装置检测在投影光学系统的曝光区域中的两个或更多处的焦点状态。 根据两个以上的焦点状态的检测结果，通过图像形成特性测量装置测量投影光学系统的图像形成特性。 形成沿矢状方向延伸的第一图案和沿子午方向延伸的第二图案，使得通过透射这些图案的光束测量聚焦状态，因此获得像散，偏心或球面像差以进行校正。

公开(公告)号：US20100213881A1

公开(公告)日：2010-08-26

申请号：US12656952

申请日：2010-02-22

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： H01J1/62 ,  H05B37/00

CPC分类号： F21V3/12 ,  F21K9/232 ,  F21K9/64 ,  F21Y2105/10 ,  F21Y2115/10 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2924/01033

摘要： A light source apparatus that includes a light emitting diode and a fluorescent material film. The fluorescent material film converts ultraviolet or blue light emitted from the light emitting diode into white light. The film is formed by coating, on at least one side of a glass substrate, a liquid mixture of fluorescent material, an organic binder, and a solvent, followed by drying and firing, and another thin film is further formed by coating, on the fluorescent material film, a coating material that contains a metallic alkoxide and/or metallic alkoxide oligomer, followed by drying and firing.

摘要翻译： 一种包括发光二极管和荧光材料膜的光源装置。 荧光材料膜将从发光二极管发出的紫外线或蓝光转换成白光。 该膜通过在玻璃基板的至少一侧上涂布荧光材料，有机粘合剂和溶剂的液体混合物，然后进行干燥和烧制而形成，并且另外通过在 荧光材料膜，含有金属醇盐和/或金属醇盐低聚物的涂料，然后干燥和烧制。

公开(公告)号：US20100213852A1

公开(公告)日：2010-08-26

申请号：US12656472

申请日：2010-02-01

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： H01J7/24 ,  H01J1/62 ,  H05B37/00 ,  B05D5/06

CPC分类号： C09K11/02 ,  C09K11/08 ,  F21K9/232 ,  F21K9/64 ,  F21V3/061 ,  F21V3/12 ,  F21V9/30 ,  F21Y2115/10 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00011 ,  Y02B20/181 ,  H01L2924/00014 ,  H01L2924/01033

摘要： A light source apparatus that comprises a blue light emitting diode and a fluorescent material film capable of converting the blue light emitted from the blue light emitting diode into white light, wherein the fluorescent material film is formed by coating, on a glass substrate, a dispersion prepared by dispersing a composition containing metallic oxide fine particles and a yellow fluorescent material capable of absorbing part of the blue light, thereby emitting yellow light, in a metallic alkoxide and/or metallic alkoxide oligomer, followed by firing.

摘要翻译： 一种光源装置，其包括蓝色发光二极管和能够将从蓝色发光二极管发出的蓝色光转换为白色光的荧光材料膜，其中，荧光材料膜通过在玻璃基板上涂布分散体 通过在金属醇盐和/或金属醇盐低聚物中分散含有金属氧化物细颗粒和能够吸收部分蓝光的黄色荧光材料，从而发出黄色光，然后进行烧制而制备。

公开(公告)号：US20100100880A1

公开(公告)日：2010-04-22

申请号：US12577274

申请日：2009-10-12

申请人： Soichi Shigeta ,  Yuji Imai

发明人： Soichi Shigeta ,  Yuji Imai

IPC分类号： G06F9/455

CPC分类号： G06F11/3696 ,  H04L12/6418

摘要： A virtual system control apparatus includes a configuration information storage device that stores configuration information for operational systems of virtual systems; a first virtual machine image storage device that stores virtual machine images for the operational systems of the virtual systems; a configuration change information storage device that stores configuration change information that represents configuration information concerning difference between the operational system and a test system of the virtual system; a second virtual machine image storage device that stores virtual machine images for the virtual machine relating to the difference; and a controller. Thus, by adopting data configuration of the operational system and the test system, it becomes possible to easily and smoothly switch the virtual system between the operational system and the test system.

摘要翻译： 虚拟系统控制装置包括存储虚拟系统的操作系统的配置信息的配置信息存储装置; 第一虚拟机映像存储设备，其存储用于虚拟系统的操作系统的虚拟机映像; 配置变更信息存储装置，其存储表示与所述操作系统和所述虚拟系统的测试系统之间的差异的配置信息的配置变更信息; 第二虚拟机图像存储装置，其存储与所述差异有关的所述虚拟机的虚拟机图像; 和控制器。 因此，通过采用操作系统和测试系统的数据配置，可以在操作系统和测试系统之间容易且平滑地切换虚拟系统。

公开(公告)号：US20080147784A1

公开(公告)日：2008-06-19

申请号：US11902632

申请日：2007-09-24

申请人： Yuji Imai

发明人： Yuji Imai

IPC分类号： G06F15/16

CPC分类号： G06F16/957

摘要： There is provided a medium storing a Web service control program, a Web service control apparatus, and a Web service control method, capable of controlling, based on a request reservation procedure, the amount of Web service requests to be received.A Web service control apparatus comprises: a CM 21 that sets the upper limit of a Web service processing amount for a plurality of servers 23 capable of executing a Web service, and accepts or rejects the Web service reservation based on the upper limit of a Web service request processing amount of the servers 23, state of the servers 23, and Web service reservation request; a grid management server 25 that sets any of the plurality of servers 23 as a node for executing the Web service based on the Web service reservation accepted by the CM 21; and a CK 22 that receives a Web service request and transfers the Web service request to the node, the Web service request complying with the Web service reservation accepted by the CM 21.

摘要翻译： 提供了一种存储Web服务控制程序，Web服务控制装置和Web服务控制方法的介质，其能够基于请求预约过程来控制要接收的Web服务请求的数量。 Web服务控制装置包括：CM 21，其设定能够执行Web服务的多个服务器23的Web服务处理量的上限，并且基于Web的上限接受或拒绝Web服务预约 服务器23的服务请求处理量，服务器23的状态和Web服务预约请求; 网格管理服务器25，其基于由CM21接受的Web服务预约，将多个服务器23中的任一个设置为用于执行Web服务的节点; 以及CK 22，其接收Web服务请求并将所述Web服务请求传送到所述节点，所述Web服务请求符合CM 21所接受的Web服务预留。

公开(公告)号：US20060187857A1

公开(公告)日：2006-08-24

申请号：US11159114

申请日：2005-06-23

申请人： Yuji Imai ,  Satoshi Tsuchiya ,  Yutaka Ezaki

发明人： Yuji Imai ,  Satoshi Tsuchiya ,  Yutaka Ezaki

IPC分类号： H04L12/28

CPC分类号： H04L41/0893 ,  H04L12/2803 ,  H04L12/2821 ,  H04L12/283 ,  H04L41/22 ,  H04L2012/2849 ,  H04N5/765 ,  H04N5/781 ,  H04N21/25825 ,  H04N21/25833 ,  H04N21/4135 ,  H04N21/4227 ,  H04N21/42684 ,  H04N21/43615

摘要： A device control service providing system includes a service request receiving unit that receives, via a network, a device control service request for controlling a group of electronic devices, and a process execution requesting unit that requests respective device control servers to execute device control processes for controlling an operation of the electronic devices in the group based on the request received, where one of the device control servers executes the device control processes corresponding to one group of the electronic devices.

公开(公告)号：US06897899B1

公开(公告)日：2005-05-24

申请号：US09568381

申请日：2000-05-10

申请人： Masataka Ide ,  Junichi Ito ,  Yuji Imai

发明人： Masataka Ide ,  Junichi Ito ,  Yuji Imai

IPC分类号： G02B7/28 ,  G02B7/34 ,  G03B3/10 ,  G03B13/36 ,  H04N5/232

CPC分类号： H04N5/23212 ,  G02B7/28

摘要： An electronic image pickup apparatus comprises a photographic optical system; solid state image pickup devices disposed on a plant where a subject image formed by subject beams which have passed through the photographic optical system is formed; a main mirror disposed between the photographic optical system and the solid state image pickup devices, wherein a part of the main mirror is formed of a half mirror to divide the subject beams which have passed through the photographic optical system into an observing beam and a focus detecting beam; a sub-mirror for reflecting the subject beam which has passed through the part of the main mirror; a focus detecting optical system for forming an image of the subject beam reflected by the sub-mirror on a partial area of the solid image pickup devices; and an electrical circuit for outputting focus detecting information based on image signals of the partial areas of the solid image pickup devices. The structure provides an electronic image pickup apparatus which contributes to the down-sizing of the apparatus and to the reduction of production cost by eliminating an image pickup device which is dedicated for focus detection.

摘要翻译： 一种电子摄像装置，包括摄影光学系统; 设置在通过摄影光学系统通过被摄体光束形成的被摄体图像的植物上的固态摄像装置; 设置在摄影光学系统和固态摄像装置之间的主镜，其中主镜的一部分由半透明镜形成，以将已经通过摄影光学系统的被摄体光束分成观察光束和焦点 检测光束; 用于反射已经通过主镜的一部分的被摄体光束的副镜; 焦点检测光学系统，用于在固体图像拾取装置的部分区域上形成由副反射镜反射的对象光束的图像; 以及基于固体摄像装置的部分区域的图像信号输出焦点检测信息的电路。 该结构提供了一种电子图像拾取装置，其通过消除专用于焦点检测的图像拾取装置而有助于减小装置的尺寸和降低生产成本。