公开(公告)号：US08969977B2

公开(公告)日：2015-03-03

申请号：US12964935

申请日：2010-12-10

申请人： Tsutomu Kono ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

发明人： Tsutomu Kono ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

IPC分类号： H01L29/84 ,  G01F1/684 ,  G01F1/692

CPC分类号： G01F15/16 ,  G01F1/684 ,  G01F1/6842 ,  G01F1/692 ,  H01L23/495 ,  H01L29/84 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/00

摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.

摘要翻译： 本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。 本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中， 电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。 本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元 或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。

公开(公告)号：US20110140211A1

公开(公告)日：2011-06-16

申请号：US12964935

申请日：2010-12-10

申请人： Tsutomu KONO ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

发明人： Tsutomu KONO ,  Yuuki Okamoto ,  Takeshi Morino ,  Keiji Hanzawa

IPC分类号： H01L29/84 ,  H01L21/50

CPC分类号： G01F15/16 ,  G01F1/684 ,  G01F1/6842 ,  G01F1/692 ,  H01L23/495 ,  H01L29/84 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/00

摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.

摘要翻译： 本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。 本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中， 电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。 本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元 或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。

公开(公告)号：US08640538B2

公开(公告)日：2014-02-04

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/68

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：US20130192388A1

公开(公告)日：2013-08-01

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/34

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：US07882735B2

公开(公告)日：2011-02-08

申请号：US12769291

申请日：2010-04-28

申请人： Keiji Hanzawa ,  Yoshihiko Akagi ,  Takuto Okamoto ,  Kohei Suseki ,  Takeshi Morino

发明人： Keiji Hanzawa ,  Yoshihiko Akagi ,  Takuto Okamoto ,  Kohei Suseki ,  Takeshi Morino

IPC分类号： G01F1/68

CPC分类号： G01F1/6965 ,  G01F1/72

摘要： An object of the invention is to provide a thermal air flowmeter which can reduce a detection error occurring during pulsating air flow due to a difference of response between rising and falling of detected flow or due to air flow dependence of response. A thermal air flowmeter 1 includes a heat-generating resistor 7 which heats liquid, a heating drive circuit 5 which causes current to flow in the heat-generating resistor 7 and thereby controls heating of the heat-generating resistor 7, and a temperature-sensitive resistor 9 which detects a temperature of the fluid heated by the heat-generating resistor 7. The thermal air flowmeter 1 detects a flow Q of the liquid based on the amount of heat of the liquid heated by the heat-generating resistor 7. Further included are: flow correction value calculating means 17 which calculates a flow correction value ca based on a variation dQ/dt of the detected flow Q and on a flow correction coefficient a set dependent on the detected flow Q; and flow correction means 18 which corrects the detected flow Q based on the flow correction value ca.

摘要翻译： 本发明的目的是提供一种热空气流量计，其可以减少由于检测到的流量的上升和下降之间的响应差异或由于响应的气流依赖性而在脉动空气流中发生的检测误差。 热空气流量计1包括加热液体的发热电阻器7，使发热电阻器7中的电流流动并由此控制发热电阻器7的加热的加热驱动电路5以及对温度敏感的热敏电阻 电阻器9，其检测由发热电阻器7加热的流体的温度。热空气流量计1基于由发热电阻器7加热的液体的热量来检测液体的流量Q。还包括 是：流量校正值运算单元17，其基于检测出的流量Q的变动量dQ / dt，根据检测出的流量Q对流量校正系数a计算流量校正值ca; 以及流量校正装置18，其基于流量校正值ca校正检测到的流量Q。

公开(公告)号：USD660192S1

公开(公告)日：2012-05-22

申请号：US29385385

申请日：2011-02-14

申请人： Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Ryo Sato ,  Yasuo Onose

设计人： Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Ryo Sato ,  Yasuo Onose

公开(公告)号：US07942053B2

公开(公告)日：2011-05-17

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US09784605B2

公开(公告)日：2017-10-10

申请号：US14407730

申请日：2012-06-15

申请人： Noboru Tokuyasu ,  Shinobu Tashiro ,  Keiji Hanzawa ,  Takeshi Morino ,  Ryosuke Doi ,  Akira Uenodan

发明人： Noboru Tokuyasu ,  Shinobu Tashiro ,  Keiji Hanzawa ,  Takeshi Morino ,  Ryosuke Doi ,  Akira Uenodan

IPC分类号： G01F1/68 ,  G01F1/684 ,  G01F1/696 ,  G01F15/14

CPC分类号： G01F1/684 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/6965 ,  G01F15/14

摘要： The present invention has been made to improve measurement accuracy of a thermal flow meter. In the thermal flowmeter according to the invention, a circuit package (400) that measures a flow rate is molded in a first resin molding process. In a second resin molding process, a housing (302) having an inlet trench (351), a bypass passage trench on frontside (332), an outlet trench (353), and the like are formed through resin molding, and an outer circumferential surface of the circuit package (400) produced in the first resin molding process is enveloped by a resin in the second resin molding process to fix the circuit package (400) to the housing (302).

公开(公告)号：US20100275685A1

公开(公告)日：2010-11-04

申请号：US12769291

申请日：2010-04-28

申请人： Keiji HANZAWA ,  Yoshihiko Akagi ,  Takuto Okamoto ,  Kohei Suseki ,  Takeshi Morino

发明人： Keiji HANZAWA ,  Yoshihiko Akagi ,  Takuto Okamoto ,  Kohei Suseki ,  Takeshi Morino

IPC分类号： G01F1/69

CPC分类号： G01F1/6965 ,  G01F1/72

摘要： An object of the invention is to provide a thermal air flowmeter which can reduce a detection error occurring during pulsating air flow due to a difference of response between rising and falling of detected flow or due to air flow dependence of response. A thermal air flowmeter 1 includes a heat-generating resistor 7 which heats liquid, a heating drive circuit 5 which causes current to flow in the heat-generating resistor 7 and thereby controls heating of the heat-generating resistor 7, and a temperature-sensitive resistor 9 which detects a temperature of the fluid heated by the heat-generating resistor 7. The thermal air flowmeter 1 detects a flow Q of the liquid based on the amount of heat of the liquid heated by the heat-generating resistor 7. Further included are: flow correction value calculating means 17 which calculates a flow correction value ca based on a variation dQ/dt of the detected flow Q and on a flow correction coefficient a set dependent on the detected flow Q; and flow correction means 18 which corrects the detected flow Q based on the flow correction value ca.

摘要翻译： 本发明的目的是提供一种热空气流量计，其可以减少由于检测到的流量的上升和下降之间的响应差异或由于响应的气流依赖性而在脉动空气流中发生的检测误差。 热空气流量计1包括加热液体的发热电阻器7，使发热电阻器7中的电流流动并由此控制发热电阻器7的加热的加热驱动电路5以及对温度敏感的热敏电阻 电阻器9，其检测由发热电阻器7加热的流体的温度。热空气流量计1基于由发热电阻器7加热的液体的热量来检测液体的流量Q。还包括 是：流量校正值运算单元17，其基于检测出的流量Q的变动量dQ / dt，根据检测出的流量Q对流量校正系数a计算流量校正值ca; 以及流量校正装置18，其基于流量校正值ca校正检测到的流量Q。

公开(公告)号：US09587970B2

公开(公告)日：2017-03-07

申请号：US14363235

申请日：2011-12-07

申请人： Takeshi Morino ,  Shinobu Tashiro ,  Noboru Tokuyasu ,  Ryosuke Doi ,  Keiji Hanzawa

发明人： Takeshi Morino ,  Shinobu Tashiro ,  Noboru Tokuyasu ,  Ryosuke Doi ,  Keiji Hanzawa

IPC分类号： G01F1/68 ,  G01F1/684 ,  G01F1/692 ,  G01F5/00 ,  F02D41/18 ,  H01L35/34

CPC分类号： G01F1/6842 ,  F02D41/187 ,  G01F1/6845 ,  G01F1/692 ,  G01F5/00 ,  H01L35/34

摘要： An airflow measuring apparatus includes a sub-passage that takes in part of flow of fluid flowing through an intake pipe, a sensor element disposed in the sub-passage to measure the flow of fluid, a circuit part converting the flow of fluid detected by the sensor element into an electric signal, a connector part connected to the circuit part to output a signal externally, and a casing supporting the sensor element and the circuit part. The sensor element is disposed in the intake pipe, and includes a cavity disposed at a semiconductor substrate and a diaphragm including a thin film part that covers the cavity. The sensor element on a lead frame has surfaces that are mold-packaged with resin so that the diaphragm and part of the lead frame are exposed. One hole is disposed at the lead frame for communication between the cavity and exterior.

摘要翻译： 一种气流测量装置，包括：副通路，其采取流过进气管的流体的一部分流动;设置在该通路中的传感器元件，以测量流体的流动;电路部分， 传感器元件变成电信号，连接到电路部分的连接器部分，以在外部输出信号，以及支撑传感器元件和电路部分的壳体。 传感器元件设置在进气管中，并且包括设置在半导体基板处的空腔和包括覆盖空腔的薄膜部分的隔膜。 引线框架上的传感器元件具有用树脂模制包装的表面，使得隔膜和引线框架的一部分被暴露。 一个孔设置在引线框架处，用于在空腔和外部之间连通。