公开(公告)号：US10429964B2

公开(公告)日：2019-10-01

申请号：US15307545

申请日：2015-04-28

Applicant: ULVAC, INC.

Inventor： Manabu Harada ,  Hidenori Yanagitsubo ,  Atsuhito Ihori ,  Toshihiro Suzuki ,  Masahiro Matsumoto ,  Noriaki Tani ,  Masashi Kubo

IPC: G06F3/041 ,  C23C14/35 ,  C23C14/08 ,  C23C14/10

Abstract: A touch panel of the present invention includes a touch panel substrate, a cover substrate provided to overlap the touch panel, and a connection part including a scattering layer laminated from the cover substrate side toward the touch panel substrate side and is provided between the touch panel substrate and the cover substrate in an area other than a display area.

公开(公告)号：US20130186340A1

公开(公告)日：2013-07-25

申请号：US13735623

申请日：2013-01-07

Applicant: ULVAC, INC.

Inventor： Miki Omori ,  Tetsuji Kiyota ,  Yuuichi Tachino ,  Masashi Kubo

IPC: C23C16/455

CPC classification number: C23C16/45563 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/45561 ,  C23C16/54

Abstract: A stage holds the substrate inside the vacuum chamber, gas supply device alternately supplies gases to the substrate, and exhaust device exhausts gases inside the vacuum chamber. The gas supply device has at least one ejection nozzle, disposed on one side of the stage, for ejecting the gases from one side of the substrate to the other side thereof and also along an upper surface of the substrate. In this case, that surface side of the substrate held by the stage on which the thin film is formed is defined as the upper side. The exhaust device includes: an exhaust port disposed to open through a lower wall of the vacuum chamber on the other side of the stage; an exhaust chamber disposed under the vacuum chamber in communication with the exhaust port; and a vacuum pump connected to the exhaust chamber to evacuate the exhaust chamber.

Abstract translation: 阶段保持真空室内的基板，气体供给装置交替地向基板供给气体，排气装置排出真空室内的气体。 气体供给装置具有设置在载物台的一侧的至少一个喷射喷嘴，用于将气体从基板的一侧喷射到其另一侧，并且还沿着基板的上表面喷射。 在这种情况下，将由形成有薄膜的台架保持的基板的表面侧定义为上侧。 排气装置包括：排气口，设置成穿过台架另一侧的真空室的下壁开口; 设置在与排气口连通的真空室下方的排气室; 以及连接到排气室以抽真空排气室的真空泵。

公开(公告)号：US09903012B2

公开(公告)日：2018-02-27

申请号：US14652423

申请日：2012-12-18

Applicant: ULVAC, INC.

Inventor： Takashi Yoshida ,  Masahiro Matsumoto ,  Noriaki Tani ,  Susumu Ikeda ,  Masashi Kubo

IPC: C23C14/00 ,  C23C14/08 ,  C23C14/10 ,  C23C14/34

CPC classification number: C23C14/0036 ,  C23C14/0063 ,  C23C14/083 ,  C23C14/10 ,  C23C14/3464

Abstract: A film formation method is one for forming an organic layer comprising a fluorine-containing resin on an inorganic layer (3) formed on a substrate and comprising an inorganic substance. In the method, for the formation of the inorganic layer, a reactive sputtering procedure using water vapor as a reactive gas is carried out to form the inorganic layer on the substrate. Subsequently, the organic layer is formed on the inorganic layer. A film formation device enables the implementation of the film formation method.

公开(公告)号：US09891731B2

公开(公告)日：2018-02-13

申请号：US14647034

申请日：2014-07-10

Applicant: ULVAC, Inc.

Inventor： Manabu Harada ,  Atsuhito Ihori ,  Toshihiro Suzuki ,  Hidenori Yanagitsubo ,  Masahiro Matsumoto ,  Masashi Kubo ,  Makoto Arai

IPC: G06F3/041 ,  G02B5/26 ,  G02B5/22 ,  G02B5/28

CPC classification number: G06F3/041 ,  G02B5/22 ,  G02B5/26 ,  G02B5/286 ,  G06F2203/04103 ,  G06F2203/04107

Abstract: A touch panel of the present invention includes: a cover substrate; a connector being provided on an area of the cover substrate other than a display area, and including a color layer and a shield layer, the shield layer being formed from a multilayer structure, the multilayer structure being configured so that a metal layer and a dielectric layer which is thicker than the metal layer are alternately laminated; and a touch panel substrate being arranged to face the cover substrate with the connector interposed therebetween.

公开(公告)号：US20160109971A1

公开(公告)日：2016-04-21

申请号：US14647034

申请日：2014-07-10

Applicant: ULVAC, INC.

Inventor： Manabu Harada ,  Atsuhito Ihori ,  Toshihiro Suzuki ,  Hidenori Yanagitsubo ,  Masahiro Matsumoto ,  Masashi Kubo ,  Makoto Arai

IPC: G06F3/041 ,  G02B5/22

CPC classification number: G06F3/041 ,  G02B5/22 ,  G02B5/26 ,  G02B5/286 ,  G06F2203/04103 ,  G06F2203/04107

Abstract: A touch panel of the present invention includes: a cover substrate; a connector being provided on an area of the cover substrate other than a display area, and including a color layer and a shield layer, the shield layer being formed from a multilayer structure, the multilayer structure being configured so that a metal layer and a dielectric layer which is thicker than the metal layer are alternately laminated; and a touch panel substrate being arranged to face the cover substrate with the connector interposed therebetween.

Abstract translation: 本发明的触摸面板包括：盖基板; 在所述盖基板的除了显示区域的区域上设置的连接器，所述连接器包括彩色层和屏蔽层，所述屏蔽层由多层结构形成，所述多层结构被配置为使得金属层和电介质 比金属层厚的层交替层叠; 并且触摸面板基板被布置为与所述盖基板相对，并且所述连接器插入在所述盖基板之