公开(公告)号：US20140346353A1

公开(公告)日：2014-11-27

申请号：US14366564

申请日：2012-12-19

Applicant: UNIVERSITEIT ANTWERPEN

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26

CPC classification number: H01J37/04 ,  H01J3/02 ,  H01J3/021 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256 ,  H01J37/261 ,  H01J2237/06383 ,  H01J2237/2614

Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.

Abstract translation: 描述了一种用于对带电粒子束产生装置中沿着光束轴传播的带电粒子波进行轨道角动量的装置。 该装置包括支撑元件，该支撑元件具有适于传输沿着光束轴传播的带电粒子波的目标区域和用于沿着具有位于目标区域中的自由端部分的细长轮廓感应磁通量的感应装置，并且感应装置是 适于在细长轮廓中提供磁通量，以便当透射通过目标区域时引起带电粒子波相位相对于光束轴的角度梯度。 还公开了相应的方法，以及其在电子显微镜中的应用。

公开(公告)号：US09153412B2

公开(公告)日：2015-10-06

申请号：US14367487

申请日：2012-12-19

Applicant: UNIVERSITEIT ANTWERPEN

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/10 ,  H01J37/04 ,  H01J37/26 ,  G01N23/225

CPC classification number: H01J37/04 ,  G01N23/2251 ,  G01N2223/101 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/1504 ,  H01J2237/24557 ,  H01J2237/24564 ,  H01J2237/2614

Abstract: A device is arranged for imparting an orbital angular momentum to a charged particle wave propagating along an axis in a charged particle beam generating apparatus. The device includes a first conductive element comprising a plurality of angularly spaced electrical conductors arranged around the axis, and a second conductive element. The first and second conductive elements are spaced apart along the direction of the axis, and are adapted for transmitting a charged particle wave propagating along the axis. A connecting means is adapted for supplying an electrical potential to the plurality of angularly spaced electrical conductors for inducing an angular gradient of the phase of the charged particle wave when transmitted along the axis, in which the projection along the axis of the electrical potential varies as a function of an angular position with respect to the axis.

Abstract translation: 一种装置被布置用于对带电粒子束产生装置中沿着轴传播的带电粒子波施加轨道角动量。 所述装置包括第一导电元件，所述第一导电元件包括​​绕所述轴线布置的多个角度间隔的电导体和第二导电元件。 第一和第二导电元件沿着轴线的方向间隔开，并且适于传输沿轴线传播的带电粒子波。 连接装置适于为多个角度间隔的电导体提供电势，用于当沿轴线传输时引起带电粒子波相位的角度梯度，其中沿电位轴的突起变化为 相对于轴的角度位置的函数。

公开(公告)号：US20140346354A1

公开(公告)日：2014-11-27

申请号：US14367487

申请日：2012-12-19

Applicant: UNIVERSITEIT ANTWERPEN

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26

CPC classification number: H01J37/04 ,  G01N23/2251 ,  G01N2223/101 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/1504 ,  H01J2237/24557 ,  H01J2237/24564 ,  H01J2237/2614

Abstract: A device is arranged for imparting an orbital angular momentum to a charged particle wave propagating along an axis in a charged particle beam generating apparatus. The device includes a first conductive element comprising a plurality of angularly spaced electrical conductors arranged around the axis, and a second conductive element. The first and second conductive elements are spaced apart along the direction of the axis, and are adapted for transmitting a charged particle wave propagating along the axis. A connecting means is adapted for supplying an electrical potential to the plurality of angularly spaced electrical conductors for inducing an angular gradient of the phase of the charged particle wave when transmitted along the axis, in which the projection along the axis of the electrical potential varies as a function of an angular position with respect to the axis.

Abstract translation: 一种装置被布置用于对带电粒子束产生装置中沿着轴传播的带电粒子波施加轨道角动量。 所述装置包括第一导电元件，所述第一导电元件包括​​绕所述轴线布置的多个角度间隔的电导体和第二导电元件。 第一和第二导电元件沿着轴线的方向间隔开，并且适于传输沿轴线传播的带电粒子波。 连接装置适于为多个角度间隔的电导体提供电势，用于当沿轴线传输时引起带电粒子波相位的角度梯度，其中沿电位轴的突起变化为 相对于轴的角度位置的函数。

公开(公告)号：US11062872B2

公开(公告)日：2021-07-13

申请号：US16755941

申请日：2018-10-16

Applicant: UNIVERSITEIT ANTWERPEN

Inventor： Johan Verbeeck ,  Armand Béché

IPC: H01J37/04 ,  H01J37/28

Abstract: A device for locally manipulating a spatial phase distribution of a charged particle wave propagating along a beam axis comprises a support element having a target region for receiving the charged particle wave propagating along the beam axis and a plurality of phase adjusting elements, supported by the support element and located in the target region, for locally adjusting the phase of the charged particle wave when the charged particle wave impinges on the phase adjusting element. The device also comprises a plurality of control lines connected to the plurality of phase adjusting elements for individually controlling each phase adjusting element.

公开(公告)号：US09018596B2

公开(公告)日：2015-04-28

申请号：US14366564

申请日：2012-12-19

Applicant: Universiteit Antwerpen

Inventor： Johan Verbeeck ,  Gustaaf Van Tendeloo

IPC: H01J37/04 ,  H01J37/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256

CPC classification number: H01J37/04 ,  H01J3/02 ,  H01J3/021 ,  H01J37/06 ,  H01J37/08 ,  H01J37/256 ,  H01J37/261 ,  H01J2237/06383 ,  H01J2237/2614

Abstract: A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a support element having a target region adapted for transmitting a charged particle wave propagating along a beam axis and an induction means for inducing a magnetic flux along an elongated profile having a free end portion located in the target region and the induction means is adapted for providing a magnetic flux in the elongated profile in order to induce an angular gradient, relative to the beam axis, of the phase of the charged particle wave when transmitted through the target region. A corresponding method is also disclosed, as well as the use thereof in electron microscopy.

Abstract translation: 描述了一种用于对带电粒子束产生装置中沿着光束轴传播的带电粒子波进行轨道角动量的装置。 该装置包括支撑元件，该支撑元件具有适于传输沿着光束轴传播的带电粒子波的目标区域和用于沿着具有位于目标区域中的自由端部分的细长轮廓感应磁通量的感应装置，并且感应装置是 适于在细长轮廓中提供磁通量，以便当透射通过目标区域时引起带电粒子波相位相对于光束轴的角度梯度。 还公开了相应的方法，以及其在电子显微镜中的应用。