Arrangement and method for robust single-shot interferometry

    公开(公告)号:US11231269B2

    公开(公告)日:2022-01-25

    申请号:US16468037

    申请日:2017-12-07

    Abstract: The present invention relates to an arrangement and a method for single-shot interferometry which can be used for detecting distance, profile, shape, undulation, roughness or the optical path length in or on optically rough or smooth objects or else for optical coherence tomography (OCT). The arrangement comprises a light source, an interferometer, in which an end reflector is arranged in the reference beam path, and also a detector for detecting an interferogram. In the reference beam path of the interferometer, the end reflector can be embodied with three plane reflecting surfaces as a prism mirror or air mirror assembly in order to generate between reference and object beams a lateral shear of magnitude delta_q for obtaining a spatial interferogram. The embodiment of said assembly with regard to the angles and the arrangement of the reflecting surfaces makes possible a large aperture angle for a high numerical aperture. In the method, in the reference beam path it is possible to carry out a reduction of the aperture angle of the reference beam using beam-limiting means in order to achieve an optimum adaptation to the geometrically given aperture angle of the end reflector in the reference beam path, which is designed to be smaller than the aperture angle in the object beam path. The end reflector in the reference beam path can also be used as part of a second interferometer for high-resolution measurement of the displacement of the arrangement for single-shot interferometry, wherein said displacement serves for focusing. The end reflector is embodied as a triple reflection arrangement (e.g. a prism arrangement) having three reflecting surfaces. The triple reflection arrangement can have an M- or W-beam path, a non-intersecting zigzag beam path or an intersecting (zigzag) beam path.

    Optical method and arrangement for measuring residual stresses, in particular in coated objects

    公开(公告)号:US10481020B2

    公开(公告)日:2019-11-19

    申请号:US15572360

    申请日:2016-05-20

    Abstract: The present invention relates to a method and an apparatus for establishing residual stresses in objects, in particular in coated objects, and to a method and an apparatus for coating objects. The method comprises: impinging a surface (8) of the object (5) with laser light and generating a hole or a pattern of holes and/or locally heated points in the object (5); establishing the surface deformations by an optical deforming measuring method after the object (5) is impinged by laser light; establishing the residual stresses present in the object (5) from the measured surface deformations, wherein the generation of the hole pattern is carried out by an optical scanning apparatus which comprises an optical deflection and/or modulation arrangement for controllable deflection and/or modulation of the laser light, and/or a focusing arrangement for controllable focusing of the laser light.

    Method and Device for Generating Multispectral or Hyperspectral Light, for Hyperspectral Imaging and/or for Distance Measurement and/or 2D or 3D Profile Measurement of an Object by Means of Spectrometry
    5.
    发明申请
    Method and Device for Generating Multispectral or Hyperspectral Light, for Hyperspectral Imaging and/or for Distance Measurement and/or 2D or 3D Profile Measurement of an Object by Means of Spectrometry 审中-公开
    用于生成多光谱或高光谱的方法和装置,用于高光谱成像和/或通过光谱法测量和/或对象的2D或3D轮廓测量

    公开(公告)号:US20170059408A1

    公开(公告)日:2017-03-02

    申请号:US15120373

    申请日:2015-02-17

    Abstract: The invention relates to methods and to devices for generating multispectral illuminating light having an addressable spectrum, for adaptive multispectral imaging and for capturing structural and/or topographical information of an object or of the distance to an object. The illuminating device comprises a multispectral light source and a modulator for temporal modulation of the individual spectral components of the multispectral light source having modulation frequencies. The multispectral light source comprises at least one light source having a continuous, quasi-continuous, or frequency comb spectrum and wavelength-dispersive means, or an assembly or array of monochromatic or quasi-monochromatic light sources having emission wavelengths or emission wavelength bands which are different from one another in each case. The modulator comprises at least one electrically controllable three-dimensional light modulator, or a plurality of electronic control modules assigned to the individual monochromatic or quasi-monochromatic light sources.

    Abstract translation: 本发明涉及用于生成具有可寻址光谱的多光谱照明光的方法和装置,用于自适应多光谱成像和用于捕获物体的结构和/或形貌信息或到物体的距离。 照明装置包括多光谱光源和用于对具有调制频率的多光谱光源的各个光谱分量进行时间调制的调制器。 多光谱光源包括具有连续,准连续或频率梳状谱和波长分散装置的至少一个光源,或具有发射波长或发射波长带的单色或准单色光源的组件或阵列, 在每种情况下彼此不同。 调制器包括至少一个电可控三维光调制器或分配给各个单色或准单色光源的多个电子控制模块。

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