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公开(公告)号：US10066997B2
公开(公告)日：2018-09-04
申请号：US15120373
申请日：2015-02-17
Applicant: Universität Stuttgart
Inventor： Klaus Körner , Wolfgang Osten , Tobias Boettcher , Wolfram Lyda , Marc Gronle
IPC: G01N21/25 , G01J3/28 , G01J3/10 , G01J3/433 , G01B11/25 , G01J3/02 , G01B11/14 , G01B11/24 , G01J3/26
Abstract: The invention relates to methods and to devices for generating multispectral illuminating light having an addressable spectrum, for adaptive multispectral imaging and for capturing structural and/or topographical information of an object or of the distance to an object. The illuminating device comprises a multispectral light source and a modulator for temporal modulation of the individual spectral components of the multispectral light source having modulation frequencies. The multispectral light source comprises at least one light source having a continuous, quasi-continuous, or frequency comb spectrum and wavelength-dispersive means, or an assembly or array of monochromatic or quasi-monochromatic light sources having emission wavelengths or emission wavelength bands which are different from one another in each case. The modulator comprises at least one electrically controllable three-dimensional light modulator, or a plurality of electronic control modules assigned to the individual monochromatic or quasi-monochromatic light sources.
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2.发明申请Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry 有权用于光谱椭偏仪的装置和方法，特别是红外光谱椭偏仪公开(公告)号：US20160146722A1
公开(公告)日：2016-05-26
申请号：US14937444
申请日：2015-11-10
Applicant: Universität Stuttgart
Inventor： Klaus Koerner , Arnulf Roeseler , Daniel Claus , Wolfgang Osten
CPC classification number: G01N21/211 , G01B9/02091 , G01N21/65 , G01N2021/212 , G01N2021/213
Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).
Abstract translation: 本文公开了一种用于光谱椭偏仪的装置，优选用于红外光谱椭偏仪，以及使用该装置的光谱椭偏仪的方法。 在一些实施例中，该装置可以包括光源（12），检测器（30），偏振器（40），分析器（41）和测量探针（10）。 在一个实施例中，测量探针可以包括具有至少一个第一表面的至少一个第一表面的ATR棱镜（50），所述至少一个第一表面具有至少一个测量部分（M），其被配置为与测量对象（72）进行光学接触，以及至少一个第二 表面具有至少一个反射部分（RX）。
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3.发明授权公开(公告)号：US10481020B2
公开(公告)日：2019-11-19
申请号：US15572360
申请日：2016-05-20
Applicant: Universität Stuttgart
Inventor： Wolfgang Osten , Giancarlo Pedrini , Rainer Gadow , Klaus Körner
Abstract: The present invention relates to a method and an apparatus for establishing residual stresses in objects, in particular in coated objects, and to a method and an apparatus for coating objects. The method comprises: impinging a surface (8) of the object (5) with laser light and generating a hole or a pattern of holes and/or locally heated points in the object (5); establishing the surface deformations by an optical deforming measuring method after the object (5) is impinged by laser light; establishing the residual stresses present in the object (5) from the measured surface deformations, wherein the generation of the hole pattern is carried out by an optical scanning apparatus which comprises an optical deflection and/or modulation arrangement for controllable deflection and/or modulation of the laser light, and/or a focusing arrangement for controllable focusing of the laser light.
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公开(公告)号：US09383306B2
公开(公告)日：2016-07-05
申请号：US14937444
申请日：2015-11-10
Applicant: Universität Stuttgart
Inventor： Klaus Koerner , Arnulf Roeseler , Daniel Claus , Wolfgang Osten
CPC classification number: G01N21/211 , G01B9/02091 , G01N21/65 , G01N2021/212 , G01N2021/213
Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).
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公开(公告)号：US11231269B2
公开(公告)日：2022-01-25
申请号：US16468037
申请日：2017-12-07
Applicant: Universität Stuttgart
Inventor： Klaus Körner , Wolfgang Osten
Abstract: The present invention relates to an arrangement and a method for single-shot interferometry which can be used for detecting distance, profile, shape, undulation, roughness or the optical path length in or on optically rough or smooth objects or else for optical coherence tomography (OCT). The arrangement comprises a light source, an interferometer, in which an end reflector is arranged in the reference beam path, and also a detector for detecting an interferogram. In the reference beam path of the interferometer, the end reflector can be embodied with three plane reflecting surfaces as a prism mirror or air mirror assembly in order to generate between reference and object beams a lateral shear of magnitude delta_q for obtaining a spatial interferogram. The embodiment of said assembly with regard to the angles and the arrangement of the reflecting surfaces makes possible a large aperture angle for a high numerical aperture. In the method, in the reference beam path it is possible to carry out a reduction of the aperture angle of the reference beam using beam-limiting means in order to achieve an optimum adaptation to the geometrically given aperture angle of the end reflector in the reference beam path, which is designed to be smaller than the aperture angle in the object beam path. The end reflector in the reference beam path can also be used as part of a second interferometer for high-resolution measurement of the displacement of the arrangement for single-shot interferometry, wherein said displacement serves for focusing. The end reflector is embodied as a triple reflection arrangement (e.g. a prism arrangement) having three reflecting surfaces. The triple reflection arrangement can have an M- or W-beam path, a non-intersecting zigzag beam path or an intersecting (zigzag) beam path.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20180202872A1
公开(公告)日：2018-07-19
申请号：US15572360
申请日：2016-05-20
Applicant: Universität Stuttgart
Inventor： Wolfgang Osten , Giancarlo Pedrini , Rainer Gadow , Klaus Körner
Abstract: The present invention relates to a method and an apparatus for establishing residual stresses in objects, in particular in coated objects, and to a method and an apparatus for coating objects. The method comprises: impinging a surface (8) of the object (5) with laser light and generating a hole or a pattern of holes and/or locally heated points in the object (5); establishing the surface deformations by an optical deforming measuring method after the object (5) is impinged by laser light; establishing the residual stresses present in the object (5) from the measured surface deformations, wherein the generation of the hole pattern is carried out by an optical scanning apparatus which comprises an optical deflection and/or modulation arrangement for controllable deflection and/or modulation of the laser light, and/or a focusing arrangement for controllable focusing of the laser light.
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7.发明申请Measuring probe, an apparatus and a method for label free attenuated reflection infrared spectroscopy 审中-公开测量探针，无标签衰减反射红外光谱仪的设备和方法公开(公告)号：US20160143539A1
公开(公告)日：2016-05-26
申请号：US14936048
申请日：2015-11-09
Applicant: Universität Stuttgart
Inventor： Klaus Koerner , Daniel Claus , Alois Herkommer , Wolfgang Osten
CPC classification number: A61B5/0086 , A61B5/0035 , A61B5/0066 , A61B5/0075 , A61B5/4836 , A61B5/6848 , A61B2562/0238 , A61N2005/0612 , G01J3/0202 , G01J3/0213 , G01J3/42 , G01N21/552 , G01N21/8507 , G01N2021/434
Abstract: Disclosed herein is a measuring probe, an apparatus, and a method for infrared spectroscopy. In some embodiments the measuring probe may have an elongated form with a first end for coupling and decoupling infrared light into and out of the measuring probe and a second end. In other embodiments, the measuring probe may comprise an attenuated total reflection (ATR) prism arranged at the second end of the measuring probe. The ATR prism may include at least a first surface having at least one measuring portion configured to be brought in optical contact with a measured object. The ATR prism may include at least a second surface having at least one reflective portion. In some embodiments, the ATR prism may include a cutting portion for cutting through the measured object.
Abstract translation: 本文公开了一种用于红外光谱的测量探针，装置和方法。 在一些实施例中，测量探针可以具有细长形式，其具有第一端，用于将红外光耦合和分离出测量探针和从测量探针和第二端分离。 在其他实施例中，测量探针可以包括布置在测量探针的第二端处的衰减全反射（ATR）棱镜。 ATR棱镜可以包括至少一个第一表面，该第一表面具有至少一个测量部分，该测量部分被配置为与测量对象进行光学接触。 ATR棱镜可以包括具有至少一个反射部分的至少第二表面。 在一些实施例中，ATR棱镜可以包括用于切割被测物体的切割部分。
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公开(公告)号：US09772275B2
公开(公告)日：2017-09-26
申请号：US14840728
申请日：2015-08-31
Applicant: Universität Stuttgart
Inventor： Klaus Koerner , Christof Pruss , Alois Herkommer , Wolfgang Osten , Daniel Claus
CPC classification number: G01N21/35 , A61B5/0086 , A61B5/6848 , A61B10/0266 , G01N2201/06113
Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the invention relates to a method for spectroscopically measuring absorption. The measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.
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9.发明申请Method and Device for Generating Multispectral or Hyperspectral Light, for Hyperspectral Imaging and/or for Distance Measurement and/or 2D or 3D Profile Measurement of an Object by Means of Spectrometry 审中-公开用于生成多光谱或高光谱的方法和装置，用于高光谱成像和/或通过光谱法测量和/或对象的2D或3D轮廓测量公开(公告)号：US20170059408A1
公开(公告)日：2017-03-02
申请号：US15120373
申请日：2015-02-17
Applicant: Universität Stuttgart
Inventor： Klaus Körner , Wolfgang Osten , Tobias Boettcher , Wolfram Lyda , Marc Gronle
CPC classification number: G01J3/2823 , G01B11/14 , G01B11/2441 , G01B11/2509 , G01B11/2536 , G01J3/0229 , G01J3/10 , G01J3/26 , G01J3/4338 , G01J2003/2826
Abstract: The invention relates to methods and to devices for generating multispectral illuminating light having an addressable spectrum, for adaptive multispectral imaging and for capturing structural and/or topographical information of an object or of the distance to an object. The illuminating device comprises a multispectral light source and a modulator for temporal modulation of the individual spectral components of the multispectral light source having modulation frequencies. The multispectral light source comprises at least one light source having a continuous, quasi-continuous, or frequency comb spectrum and wavelength-dispersive means, or an assembly or array of monochromatic or quasi-monochromatic light sources having emission wavelengths or emission wavelength bands which are different from one another in each case. The modulator comprises at least one electrically controllable three-dimensional light modulator, or a plurality of electronic control modules assigned to the individual monochromatic or quasi-monochromatic light sources.
Abstract translation: 本发明涉及用于生成具有可寻址光谱的多光谱照明光的方法和装置，用于自适应多光谱成像和用于捕获物体的结构和/或形貌信息或到物体的距离。 照明装置包括多光谱光源和用于对具有调制频率的多光谱光源的各个光谱分量进行时间调制的调制器。 多光谱光源包括具有连续，准连续或频率梳状谱和波长分散装置的至少一个光源，或具有发射波长或发射波长带的单色或准单色光源的组件或阵列， 在每种情况下彼此不同。 调制器包括至少一个电可控三维光调制器或分配给各个单色或准单色光源的多个电子控制模块。
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公开(公告)号：US20160076997A1
公开(公告)日：2016-03-17
申请号：US14840728
申请日：2015-08-31
Applicant: Universität Stuttgart
Inventor： Klaus Koerner , Christof Pruss , Alois Herkommer , Wolfgang Osten , Daniel Claus
IPC: G01N21/35
CPC classification number: G01N21/35 , A61B5/0086 , A61B5/6848 , A61B10/0266 , G01N2201/06113
Abstract: Disclosed herein is a measuring probe and an arrangement for measuring spectral absorption, preferably in the infrared. Furthermore, the present disclosure relates to a method for spectroscopically measuring absorption. In some embodiments, the measuring probe may comprise a cutting apparatus configured to cut a slice or respectively flap off of a sample to be measured; a measuring gap configured to accommodate the sample slice; an optical window element for coupling measuring light into, or respectively out of the measuring gap; and an end reflector designed and arranged to reflect the measuring light propagated through the measuring gap back into the measuring gap. The arrangement for measuring spectral absorption may comprise the measuring probe, a light source and an apparatus for the spectral analysis of the measuring light coupled out of the measuring gap.
Abstract translation: 本文公开了一种测量探针和用于测量光谱吸收的装置，优选地在红外线中。 此外，本公开涉及用于光谱测量吸收的方法。 在一些实施例中，测量探针可以包括切割装置，其被配置为切割切片或分别从要测量的样品折回; 测量间隙，被配置成容纳样品切片; 用于将测量光耦合到测量间隙中或分别离开测量间隙的光学窗口元件; 以及设计和布置成将通过测量间隙传播的测量光反射回测量间隙的端部反射器。 用于测量光谱吸收的布置可以包括测量探针，光源和用于对测量间隙耦合的测量光进行光谱分析的装置。
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