公开(公告)号：US20230168418A1

公开(公告)日：2023-06-01

申请号：US17457123

申请日：2021-12-01

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Jinhui YANG ,  Marius GRIGONIS ,  Karen Denise HENDRIX ,  Andy SHKABKO

IPC: G02B5/28 ,  G02B1/10

CPC classification number: G02B5/286 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers comprises an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers comprises at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US20240411072A1

公开(公告)日：2024-12-12

申请号：US18808234

申请日：2024-08-19

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Jinhui YANG ,  Marius GRIGONIS ,  Karen Denise HENDRIX ,  Andy SHKABKO

IPC: G02B5/28 ,  G02B1/10

Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers includes an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers includes at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.

公开(公告)号：US20190218669A1

公开(公告)日：2019-07-18

申请号：US16250842

申请日：2019-01-17

Applicant: VIAVI SOLUTIONS INC.

Inventor： Adam Andrew PREUSS ,  Richard A. BRADLEY, JR. ,  Georg J. OCKENFUSS ,  Markus K. TILSCH ,  Andrew CLARK ,  Marius GRIGONIS ,  Andy SHKABKO ,  Nicolas Alexander DAVIS ,  Anthony Jay Kemp COTTRELL

IPC: C23C28/00 ,  C23C4/131 ,  C23C4/08 ,  C23C4/134 ,  C23C4/067 ,  C23C14/16 ,  C23C14/34

CPC classification number: C23C28/34 ,  C23C4/06 ,  C23C4/067 ,  C23C4/08 ,  C23C4/131 ,  C23C4/134 ,  C23C14/025 ,  C23C14/028 ,  C23C14/06 ,  C23C14/165 ,  C23C14/34 ,  C23C14/564 ,  C23C16/0281 ,  C23C16/24 ,  C23C16/4401 ,  C23C16/4407 ,  C23C16/4412 ,  C23C28/023 ,  C23C28/322 ,  H01J37/32477

Abstract: A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.