公开(公告)号：US20240069262A1

公开(公告)日：2024-02-29

申请号：US17821606

申请日：2022-08-23

Applicant: VIAVI Solutions Inc.

Inventor： Jinhui YANG ,  Marius GRIGONIS ,  Andrew CLARK

IPC: G02B5/28 ,  G02B5/20

CPC classification number: G02B5/286 ,  G02B5/207 ,  G02B5/288

Abstract: An optical interference filter includes one or more sets of layers. Each set of layers includes a first layer that includes at least aluminum and nitrogen (e.g., an aluminum nitride (AlN) material), a second layer that includes at least silicon and oxygen (e.g., a silicon dioxide (SiO2) material), and a third layer that includes at least hydrogen and silicon (e.g., a hydrogenated silicon (Si:H) material). The second layer is disposed between the first layer and the third layer.

公开(公告)号：US20210404053A1

公开(公告)日：2021-12-30

申请号：US17447308

申请日：2021-09-10

Applicant: VIAVI Solutions Inc.

Inventor： Andrew CLARK ,  Georg J. OCKENFUSS

IPC: C23C14/35 ,  C23C14/00 ,  C23C14/10 ,  C23C14/14 ,  C23C14/34

Abstract: A sputtering system may include a substrate. The sputtering system may include at least one target. The at least one target may include at least one coating material to coat at least one layer onto the substrate. The at least one coating material may be sputtered onto the substrate in a presence of an inert gas. The inert gas may include argon gas and helium gas.

公开(公告)号：US20200056281A1

公开(公告)日：2020-02-20

申请号：US16103632

申请日：2018-08-14

Applicant: VIAVI Solutions Inc.

Inventor： Andrew CLARK ,  Georg J. OCKENFUSS

IPC: C23C14/35 ,  C23C14/34 ,  C23C14/00 ,  C23C14/10 ,  C23C14/14

Abstract: A sputtering system may include a substrate. The sputtering system may include at least one target. The at least one target may include at least one coating material to coat at least one layer onto the substrate. The at least one coating material may be sputtered onto the substrate in a presence of an inert gas. The inert gas may include argon gas and helium gas.

公开(公告)号：US20190218669A1

公开(公告)日：2019-07-18

申请号：US16250842

申请日：2019-01-17

Applicant: VIAVI SOLUTIONS INC.

Inventor： Adam Andrew PREUSS ,  Richard A. BRADLEY, JR. ,  Georg J. OCKENFUSS ,  Markus K. TILSCH ,  Andrew CLARK ,  Marius GRIGONIS ,  Andy SHKABKO ,  Nicolas Alexander DAVIS ,  Anthony Jay Kemp COTTRELL

IPC: C23C28/00 ,  C23C4/131 ,  C23C4/08 ,  C23C4/134 ,  C23C4/067 ,  C23C14/16 ,  C23C14/34

CPC classification number: C23C28/34 ,  C23C4/06 ,  C23C4/067 ,  C23C4/08 ,  C23C4/131 ,  C23C4/134 ,  C23C14/025 ,  C23C14/028 ,  C23C14/06 ,  C23C14/165 ,  C23C14/34 ,  C23C14/564 ,  C23C16/0281 ,  C23C16/24 ,  C23C16/4401 ,  C23C16/4407 ,  C23C16/4412 ,  C23C28/023 ,  C23C28/322 ,  H01J37/32477

Abstract: A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.

公开(公告)号：US20210332474A1

公开(公告)日：2021-10-28

申请号：US16619840

申请日：2018-09-28

Applicant: VIAVI Solutions Inc.

Inventor： Zhao YUAN ,  Markus K. TILSCH ,  Georg J. OCKENFUSS ,  Marius GRIGONIS ,  Andrew CLARK ,  Donggong PENG ,  Yinxiang XIA ,  Eric NYBANK ,  Neil PINKERTON

IPC: C23C14/54 ,  C23C14/35 ,  G05B15/02

Abstract: A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.