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公开(公告)号:US20230095480A1
公开(公告)日:2023-03-30
申请号:US17449150
申请日:2021-09-28
Applicant: VIAVI Solutions Inc.
Inventor: Jinhui YANG , Marius GRIGONIS , Georg J. OCKENFUSS , Karen Denise HENDRIX
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material, and wherein a stress of the first subset of layers is between −1000 and 800 megapascals; and a second subset of layers, wherein the second subset of layers comprises at least one other material.
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公开(公告)号:US20170356841A1
公开(公告)日:2017-12-14
申请号:US15620723
申请日:2017-06-12
Applicant: VIAVI SOLUTIONS INC.
Inventor: Georg OCKENFUSS , Markus BILGER , Marius GRIGONIS
IPC: G01N21/17 , G02B5/18 , G02B5/30 , G02B5/28 , G01N21/3563
CPC classification number: G02B1/14 , C23C14/0635 , C23C14/3457 , C23C14/3464 , G01N21/17 , G01N2021/3568 , G02B1/115 , G02B5/1809 , G02B5/20 , G02B5/208 , G02B5/285 , G02B5/3066
Abstract: An optical filter including at least one of a high refractive index material and a low refractive index material; wherein the optical filter exhibits a reduced angle shift in at least one of a visible, near infrared, and an extreme ultraviolet wavelength is disclosed. A method of depositing a film is also disclosed.
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公开(公告)号:US20240069262A1
公开(公告)日:2024-02-29
申请号:US17821606
申请日:2022-08-23
Applicant: VIAVI Solutions Inc.
Inventor: Jinhui YANG , Marius GRIGONIS , Andrew CLARK
Abstract: An optical interference filter includes one or more sets of layers. Each set of layers includes a first layer that includes at least aluminum and nitrogen (e.g., an aluminum nitride (AlN) material), a second layer that includes at least silicon and oxygen (e.g., a silicon dioxide (SiO2) material), and a third layer that includes at least hydrogen and silicon (e.g., a hydrogenated silicon (Si:H) material). The second layer is disposed between the first layer and the third layer.
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公开(公告)号:US20190196072A1
公开(公告)日:2019-06-27
申请号:US16290612
申请日:2019-03-01
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY, JR. , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B1/115 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20230168418A1
公开(公告)日:2023-06-01
申请号:US17457123
申请日:2021-12-01
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS , Jinhui YANG , Marius GRIGONIS , Karen Denise HENDRIX , Andy SHKABKO
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers comprises an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers comprises at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.
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公开(公告)号:US20210278577A1
公开(公告)日:2021-09-09
申请号:US16810212
申请日:2020-03-05
Applicant: VIAVI SOLUTIONS INC.
Inventor: Jaroslaw ZIEBA , Markus BILGER , Marius GRIGONIS , Andrew David CLARK
Abstract: An optical device including a substrate; an optical coating including materials that absorb light in an ultraviolet wavelength and reduces an amount of the light reflected from the optical coating; and an organic functional coating is disclosed. A method of making an optical device a method of increasing durability to ultraviolet light exposure in an optical device are also disclosed.
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公开(公告)号:US20160266289A1
公开(公告)日:2016-09-15
申请号:US15158191
申请日:2016-05-18
Applicant: Viavi Solutions, Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY, JR. , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
Abstract translation: 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3,在800nm至1100nm的波长范围内的消光系数小于0.0005。
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公开(公告)号:US20240393516A1
公开(公告)日:2024-11-28
申请号:US18792711
申请日:2024-08-02
Applicant: VIAVI Solutions Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY , Marius GRIGONIS , Georg J. OCKENFUSS
IPC: G02B5/28 , C23C14/08 , C23C14/18 , C23C14/54 , C23C14/58 , G01J5/0802 , G02B1/11 , G02B1/115 , G02B5/20 , G06V40/20 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20230324592A1
公开(公告)日:2023-10-12
申请号:US18312831
申请日:2023-05-05
Applicant: VIAVI Solutions Inc.
Inventor: Scott ROWLANDS , Georg J. OCKENFUSS , Tim GUSTAFSON , Marius GRIGONIS
CPC classification number: G02B5/208 , G02B1/115 , G02B1/007 , C23C14/34 , C23C28/345 , C23C14/083 , C23C14/0694 , C23C14/10 , C23C14/081 , G02B5/20
Abstract: An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.
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公开(公告)号:US20230097506A1
公开(公告)日:2023-03-30
申请号:US17449149
申请日:2021-09-28
Applicant: VIAVI Solutions Inc.
Inventor: Jinhui YANG , Marius GRIGONIS , Georg J. OCKENFUSS , Karen Denise HENDRIX
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate. The set of layers includes a first subset of layers, wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers, wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.
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