摘要:
A process and apparatus is described for the processing of thin films on semiconductor substrates using one or more liquid precursor sources wherein the liquid precursor source with the highest vapor pressure is first vaporized and then introduced as a vapor into a common manifold connected to a processing chamber, with the point of introduction being spaced away from the processing chamber. A second liquid precursor source, having a vapor pressure lower than the first liquid precursor source, is then introduced in vaporized form into the manifold at a point closer to the processing chamber. This is repeated for each liquid precursor source, with each succeeding liquid precursor source having the next lower vapor pressure being introduced in vaporized form into the manifold at a point closer to the processing chamber than the previous liquid precursor source. A temperature gradient may then be maintained along the manifold with the temperature gradually increased in a direction toward the processing chamber while still mitigating premature boiling of the liquid precursor sources prior to vaporization, or condensation of already vaporized liquid precursor sources or components.
摘要:
A process and apparatus is described for the processing of thin films on semiconductor substrates using one or more liquid precursor sources wherein the liquid precursor source with the highest vapor pressure is first vaporized and then introduced as a vapor into a common manifold connected to a processing chamber, with the point of introduction being spaced away from the processing chamber. A second liquid precursor source, having a vapor pressure lower than the first liquid precursor source, is then introduced in vaporized form into the manifold at a point closer to the processing chamber. This is repeated for each liquid precursor source, with each succeeding liquid precursor source having the next lower vapor pressure being introduced in vaporized form into the manifold at a point closer to the processing chamber than the previous liquid precursor source. A temperature gradient may then be maintained along the manifold with the temperature gradually increased in a direction toward the processing chamber while still mitigating premature boiling of the liquid precursor sources prior to vaporization, or condensation of already vaporized liquid precursor sources or components.
摘要:
The flow of a liquid reagent gas into a vapor deposition process chamber is adjusted in response to control information provided by a process controller. The controller executes a prescribed mathematical algorithm which utilizes first and second steady-state pressure differentials. The first pressure differential is measured during the flowing of a carrier gas into the chamber. The second pressure differential is measured after the release of the liquid reagent into the chamber.
摘要:
The flow of a liquid reagent gas into a vapor deposition process chamber is adjusted in response to control information provided by a process controller. The controller executes a prescribed mathematical algorithm which utilizes first and second steady-state pressure differentials. The first pressure differential is measured during the flowing of a carrier gas into the chamber. The second pressure differential is measured after the release of the liquid reagent into the chamber.
摘要:
This invention relates to a light delivery and collection device for performing spectroscopic analysis of a subject. The light delivery and collection device comprises a reflective cavity with two apertures. The first aperture receives excitation light which then diverges and projects onto the second aperture. The second aperture is applied to the subject such that the reflective cavity substantially forms an enclosure covering an area of the subject. The excitation light interacts with the covered area of the subject to produce inelastic scattering and/or fluorescence emission from the subject. The reflective cavity reflects the excitation light as well as the inelastic scattering and/or fluorescence emission that is reflected and/or back-scattered from the subject and redirects it towards the subject. This causes more excitation light to penetrate into the subject hence enabling sub-surface measurement and also improves the collection efficiency of the inelastic scattering or fluorescence emission. The shape of the reflective cavity is optimized to further improve the collection efficiency.
摘要:
This invention relates to an apparatus and method for performing bidirectional Raman spectroscopy of a sample, preferably a diffusely scattering sample, in which two excitation light sources are employed to illuminate the sample from two opposite directions to excite Raman scattering signal from the sample. The Raman scattering signal which transmits through the sample are collected by two optical devices each positioned on the opposite side of the sample to obtain two transmission Raman spectra of the sample, which enables the accurate determination of the composition of the whole sample.
摘要:
A system and method for determining the composition of a sample is provided. The system and method according to the present invention comprises: obtaining one or more spectra of the sample; obtaining one or more spectra of one or more target materials; pre-process the sample and the target spectra; providing a variable reduction means that combines certain contiguous spectral variables into a single variable, wherein the intensities of the said single variable is the sum of the intensities of the said spectral variables to be combined; determining an average spectrum and the statistic distribution of the sample and/or each of the target material in the reduced dimension; determining the likelihood the sample had the same composition of each of the one or more target material; and displaying the list of the most likely target material to a user.
摘要:
Identifying a location of a mobile device is disclosed (e.g., presuming user consent to the same). One or more received signal strengths (RSSs), comprising a first RSS, may be received by a first access point (AP) from the mobile device. The RSSs may be used to identify a grid area, comprising a first grid space. A signal distance between the first grid space and the first AP may be identified using the first RSS, and combined with a first grid space distance, comprising a known distance between the first grid space and the first AP, to determine a first grid space likelihood score for the first grid space. A second grid space likelihood score may be determined for a second grid space (e.g., and a third, etc.), and the grid space comprising a desired grid space likelihood score (e.g., highest) may be selected as the mobile device location.
摘要:
A method, an apparatus and a system for detecting a connection status of an optical fiber jumper are provided in the embodiments of the present invention. The method for detecting a connection status of an optical fiber jumper includes: judging a connection status of a second port and a first port according to whether an optical signal sent by the first port to the second port through a first optical fiber is received, wherein the first optical fiber is connected to two ends of an optical fiber jumper, and the two ends of the optical fiber jumper are connected to the first port and the second port respectively; and obtaining a port identification corresponding to the first port according to the optical signal if the optical signal is received.
摘要:
1- or 2- or 7-(substituted)-3-(optionally hetero)arylamino-[1H,2H]-pyrazolo[3,4-d]pyrimidine-4,6(5H,7H)-dione derivatives, in free, salt or prodrug form, are useful as pharmaceuticals, particularly as phosphodiesterase 1 inhibitors, useful for the treatment of diseases involving disorders of the dopamine D1 receptor intracellular pathway, such as Parkinson's disease, depression, narcolepsy and damage to cognitive function, e.g., in schizophrenia or disorders that may be ameliorated through enhanced progesterone-signaling pathway, e.g., female sexual dysfunction.