公开(公告)号：US20070051685A1

公开(公告)日：2007-03-08

申请号：US11304348

申请日：2005-12-15

申请人： Kenneth Wittmer ,  Walter Crewson ,  John Lane

发明人： Kenneth Wittmer ,  Walter Crewson ,  John Lane

IPC分类号： C02F1/48

CPC分类号： C02F1/484 ,  C02F2201/4613 ,  C02F2201/483 ,  C02F2209/005 ,  C02F2303/22 ,  H03K3/57 ,  H03K17/79

摘要： A method and apparatus for treating a fluid to destroy, remove, or reduce undesirable agents, such as microorganisms, particles or ions, contained in the fluid and/or to inhibit the formation of scale are disclosed. The invention includes an apparatus for treating a fluid to destroy, remove, or reduce undesirable agents, such as microorganisms, particles, or ions, contained in the fluid and/or to inhibit the formation of scale. The apparatus can include an open fluid directional means or conduit. The preferred open fluid directional means is a conduit manufactured of resilient, corrosion-resistant material. The apparatus is attached to a power source and has a controller means. The controller means is desirably a microprocessor and can include a switching means for regulating the current to the apparatus. However, simpler circuits and components can be used for the controller means. The apparatus includes a field generating means. The field generating means forms a treatment field. The treatment field is a magnetic field and/or an electrical field in an effective dose sufficient to treat the fluid. The effective dose is determined by the exposure time(s) and strength(s) of the treatment field(s) and the concentration of contaminants present in the fluid subjected to the treatment.

摘要翻译： 公开了一种用于处理流体以破坏，去除或减少包含在流体中的不期望的试剂，例如微生物，颗粒或离子和/或抑制水垢形成的方法和装置。 本发明包括一种用于处理流体以破坏，去除或减少包含在流体中的不期望的物质，例如微生物，颗粒或离子和/或抑制水垢形成的装置。 该装置可以包括开放的流体定向装置或导管。 优选的开放流体定向装置是由弹性的耐腐蚀材料制成的导管。 该装置附接到电源并具有控制装置。 控制器装置理想地是微处理器，并且可以包括用于调节到设备的电流的开关装置。 然而，更简单的电路和组件可以用于控制器装置。 该装置包括场产生装置。 场产生装置形成治疗场。 治疗场是具有足以治疗流体的有效剂量的磁场和/或电场。 有效剂量由处理场的暴露时间和强度以及存在于经受处理的流体中的污染物的浓度决定。

公开(公告)号：US20060196817A1

公开(公告)日：2006-09-07

申请号：US11304186

申请日：2005-12-15

申请人： Walter Crewson ,  John Lane

发明人： Walter Crewson ,  John Lane

IPC分类号： B01D35/06

CPC分类号： C02F1/487 ,  B03C5/02 ,  B03C2201/18 ,  C02F1/48 ,  C02F2201/483 ,  C02F2303/22

摘要： A method and apparatus for treating a fluid to destroy, remove or reduce undesirable agents, such as microorganisms, particles or ions, contained in the fluid and/or to inhibit the formation of scale. At least two charge carrying bodies or electrodes are spaced from one another by a gap located in or very close to the fluid, and a high voltage and high frequency cyclically varying voltage difference is imposed on the two bodies which creates a charge related cyclically varying electric field extending between the two bodies, across the gap and into the fluid to exert a treating effect on the fluid. The charge related electric field may be used by itself or in combination with other fields created by one or more electric coils associated with the fluid. Where two coils are used, their magnetic fields can be axially bucking and an axial gap between these coils has an axial width of an optimum value yielding an optimum fluid treatment effectiveness for the fields near the gap.

摘要翻译： 用于处理流体以破坏，去除或减少包含在流体中的不期望的试剂，例如微生物，颗粒或离子和/或抑制水垢形成的方法和装置。 至少两个电荷携带体或电极通过位于或非常接近流体的间隙彼此间隔开，并且高电压和高频周期性变化的电压差被施加到两个体上，这产生电荷相关的周期性变化的电 在两个物体之间延伸，穿过间隙并进入流体以对流体施加处理效果。 电荷相关电场可以单独使用或与由与流体相关联的一个或多个电线圈产生的其它场合组合使用。 使用两个线圈时，它们的磁场可以轴向屈曲，并且这些线圈之间的轴向间隙具有最佳值的轴向宽度，从而为间隙附近的场产生最佳的流体处理效果。

公开(公告)号：US20110319710A1

公开(公告)日：2011-12-29

申请号：US13166979

申请日：2011-06-23

申请人： Molly Phillips-Hungerford ,  Benjamin E. Morris ,  John Lane

发明人： Molly Phillips-Hungerford ,  Benjamin E. Morris ,  John Lane

IPC分类号： A61B1/018

CPC分类号： A61B17/29 ,  A61B1/00142 ,  A61B17/10 ,  A61B17/1285 ,  A61B46/13

摘要： A medical device for insertion through a channel of an endoscope comprises a sheath forming a smooth outer surface over a first abrasive portion of a length of the device. A second portion of the length of the device remains uncovered by the sheath.

摘要翻译： 用于插入通过内窥镜的通道的医疗装置包括在装置的长度的第一研磨部分上形成平滑的外表面的护套。 设备长度的第二部分保持未被护套覆盖。

公开(公告)号：US20080305736A1

公开(公告)日：2008-12-11

申请号：US12049113

申请日：2008-03-14

申请人： Celite Milbrandt ,  John Lane

发明人： Celite Milbrandt ,  John Lane

IPC分类号： H04H20/74

CPC分类号： H04B7/18517

摘要： Systems and method for providing digital data signals in conjunction with multiple satellite transponders are described. An uplink apparatus is configured to divide and recombine the digital data signal to generate a composite signal. The composite signal is then provided to a satellite and retransmitted by a plurality of satellite transponders to a content receiver. The content receiver is configured to recombine the plurality of transponder signals to regenerate the digital data signal.

摘要翻译： 描述了与多个卫星转发器一起提供数字数据信号的系统和方法。 上行链路装置被配置为对数字数据信号进行分频和复合以产生复合信号。 然后，复合信号被提供给卫星并由多个卫星转发器重传到内容接收器。 内容接收器被配置为重组多个应答器信号以再生数字数据信号。

公开(公告)号：US20070200082A1

公开(公告)日：2007-08-30

申请号：US11788427

申请日：2007-04-20

申请人： Mark Crockett ,  John Lane ,  Michael DeChellis ,  Chris Melcer ,  Erica Porras ,  Aneesh Khullar ,  Balarabe Mohammed

发明人： Mark Crockett ,  John Lane ,  Michael DeChellis ,  Chris Melcer ,  Erica Porras ,  Aneesh Khullar ,  Balarabe Mohammed

IPC分类号： F16K21/00

CPC分类号： F16K27/003 ,  C22C19/055 ,  C22C19/07 ,  C22C38/001 ,  C22C38/02 ,  C22C38/04 ,  C22C38/44 ,  C22C38/58 ,  F15C5/00 ,  F16K99/0001 ,  Y10T29/41 ,  Y10T29/49144 ,  Y10T29/49405 ,  Y10T29/49425 ,  Y10T29/49906

摘要： The disclosure pertains to a space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The present invention also pertains to an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

摘要翻译： 本公开涉及一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。 本发明还涉及一种集成流体流网络结构，除了包含流体流动通道的分层基板之外，还可以包括各种流体处理和监测部件。 分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

公开(公告)号：US07204155B2

公开(公告)日：2007-04-17

申请号：US11475805

申请日：2006-06-27

申请人： John Lane ,  Ralph H. M. Straube ,  Chris Melcer

发明人： John Lane ,  Ralph H. M. Straube ,  Chris Melcer

IPC分类号： G01F1/00

CPC分类号： H01J37/32449 ,  C23C16/45557 ,  C23C16/466 ,  H01J37/3244

摘要： A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.

摘要翻译： 提供了一种用于气体控制的方法和装置。 该装置可以用于控制输送到室的气体，控制室压力，控制衬底和衬底支撑件之间的背面气体的传送等。 在一个实施例中，用于控制气体控制的装置包括至少第一流量传感器，其具有控制阀，第一压力传感器和至少第二压力传感器。 第一流量传感器的入口适于联接到气体供应。 控制阀联接到流量传感器的出口。 第一压力传感器适于感测指示第一流量传感器上游的压力的度量。 第二压力传感器适于感测指示控制阀下游的压力的量度。

公开(公告)号：US20070051080A1

公开(公告)日：2007-03-08

申请号：US11542829

申请日：2006-10-03

申请人： Mark Crockett ,  John Lane ,  Michael DeChellis ,  Chris Melcer ,  Erica Porras ,  Aneesh Khullar ,  Balarabe Mohammed

发明人： Mark Crockett ,  John Lane ,  Michael DeChellis ,  Chris Melcer ,  Erica Porras ,  Aneesh Khullar ,  Balarabe Mohammed

IPC分类号： B01D50/00

CPC分类号： F16K27/003 ,  C22C19/055 ,  C22C19/07 ,  C22C38/001 ,  C22C38/02 ,  C22C38/04 ,  C22C38/44 ,  C22C38/58 ,  F15C5/00 ,  F16K99/0001 ,  Y10T29/41 ,  Y10T29/49144 ,  Y10T29/49405 ,  Y10T29/49425 ,  Y10T29/49906

摘要： A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

摘要翻译： 一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。 本发明涉及一种扩散结合的集成流体流动网络结构，其包括除含有流体流动通道的层状基底之外的在线过滤器，并且可以包括各种流体处理和监测部件。 由分层基板形成的集成流体输送系统是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

公开(公告)号：US20060072645A1

公开(公告)日：2006-04-06

申请号：US11248492

申请日：2005-10-12

申请人： David Quinn ,  Kenneth Burdick ,  Ray Stone ,  John Lane ,  William Cuipylo

发明人： David Quinn ,  Kenneth Burdick ,  Ray Stone ,  John Lane ,  William Cuipylo

IPC分类号： G01K7/00

CPC分类号： G01K7/42 ,  G01K15/005

摘要： A method in which thermal mass and manufacturing differences are compensated for in thermometry probes by storing characteristic data relating to individual probes into an EEPROM for each probe which is used by the temperature apparatus.

摘要翻译： 通过将与各个探针相关的特征数据存储到由温度装置使用的每个探针的EEPROM中，在温度测量探针中补偿热质量和制造差异的方法。

公开(公告)号：US06757641B1

公开(公告)日：2004-06-29

申请号：US10185830

申请日：2002-06-28

申请人： Christopher D. Immer ,  John Lane ,  Anthony J. Eckhoff ,  Jose M. Perotti

发明人： Christopher D. Immer ,  John Lane ,  Anthony J. Eckhoff ,  Jose M. Perotti

IPC分类号： G06F1500

CPC分类号： G01D3/08

摘要： A multi-sensor transducer and processing method allow insitu monitoring of the senor accuracy and transducer ‘health’. In one embodiment, the transducer has multiple sensors to provide corresponding output signals in response to a stimulus, such as pressure. A processor applies individual weight factors to reach of the output signals and provide a single transducer output that reduces the contribution from inaccurate sensors. The weight factors can be updated and stored. The processor can use the weight factors to provide a ‘health’ of the transducer based upon the number of accurate versus in-accurate sensors in the transducer.

摘要翻译： 多传感器传感器和处理方法可以实时监测传感器的精度和传感器的健康状况。 在一个实施例中，换能器具有多个传感器以响应于诸如压力的刺激来提供对应的输出信号。 处理器将单独的重量因子应用于输出信号的到达，并提供单个传感器输出，从而降低不准确传感器的贡献。 权重因子可以更新和存储。 处理器可以使用重量因子来提供换能器的“健康”，这取决于换能器中准确的与准确的传感器的数量。

公开(公告)号：US06340415B1

公开(公告)日：2002-01-22

申请号：US09002819

申请日：1998-01-05

申请人： Ivo J. Raaijmakers ,  Robert S. Busacca ,  John Lane

发明人： Ivo J. Raaijmakers ,  Robert S. Busacca ,  John Lane

IPC分类号： C23C1434

CPC分类号： H01J37/3423 ,  C23C14/3407 ,  F28F3/12 ,  H01J37/3497

摘要： Sputtering target lifetime is enhanced by providing a sputtering target assembly wherein a sputtering target is mounted to a substantially compliant cooling cover plate. The cooling cover plate is preferably fabricated from a plastic, a polymer, or a composite polymer and is provided with a plurality of grooves which form cooling fluid passages when the sputtering target is mounted to the cooling cover plate. These cooling fluid passages may be used to cool the target during sputtering. Because the cooling cover plate is substantially compliant, the sputtering target is free to bow in order to relieve any thermally induced strain produced within the sputtering target during sputtering. The lifetime of the sputtering target is thereby enhanced as both strain induced defect propagation/migration within the sputtering target, and the likelihood of sputtering target/cooling cover plate delamination are reduced.

摘要翻译： 通过提供溅射靶组件来增强溅射靶寿命，其中将溅射靶安装到基本顺从的冷却盖板上。 冷却盖板优选由塑料，聚合物或复合聚合物制成，并且当溅射靶安装到冷却盖板上时，设置有形成冷却流体通道的多个槽。 这些冷却流体通道可用于在溅射期间冷却靶。 由于冷却盖板基本上是顺从的，所以溅射靶是自由的，以便在溅射期间减轻在溅射靶内产生的任何热诱导应变。 由于溅射靶内的应变引起的缺陷传播/迁移以及溅射靶/冷却盖板分层的可能性都降低，溅射靶的寿命因此得到提高。