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公开(公告)号：US5133849A
公开(公告)日：1992-07-28
申请号：US448740
申请日：1989-12-11
申请人： Mikio Kinoshita , Wasaburo Ohta , Tatsuya Sato , Masashi Nakazawa
发明人： Mikio Kinoshita , Wasaburo Ohta , Tatsuya Sato , Masashi Nakazawa
CPC分类号： H01J37/32422 , C23C14/0021 , C23C14/32
摘要： An apparatus for forming a thin film has a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced, and a source of evaporation from which a substance is evaporated. A counter electrode is disposed in the vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation. A grid is disposed between the source of evaporation and the counter electrode and having openings which allow the evaporated substance to pass therethrough. A filament for thermionic emission is disposed between the grid and the source of evaporation. A target is also disposed between the filament and the source of evaporation for emitting sputtered particles. A power source device establishes predetermined electric potential relationships between the grid, the filament, and the target.
摘要翻译： 用于形成薄膜的装置具有引入活性气体，惰性气体或其混合物的真空容器和物质蒸发的蒸发源。 对置电极设置在真空容器中，用于保持用于在其上形成薄膜的基板以与蒸发源相对的方式。 在蒸发源和对电极之间设置有栅格，并且具有允许蒸发的物质通过的开口。 用于热电子发射的灯丝设置在电网和蒸发源之间。 在灯丝和蒸发源之间还设置靶，用于发射溅射的颗粒。 电源装置在电网，灯丝和目标之间建立预定的电位关系。
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公开(公告)号：US5114559A
公开(公告)日：1992-05-19
申请号：US587998
申请日：1990-09-25
申请人： Wasaburo Ohta , Masashi Nakazawa , Mikio Kinoshita
发明人： Wasaburo Ohta , Masashi Nakazawa , Mikio Kinoshita
CPC分类号： H01J37/32422 , C23C14/32
摘要： A thin film deposition system includes an evacuated casing in which there is introduced an active gas or an inert gas or a mixture thereof. An evaporant carried by an evaporation source in the evacuated casing is evaporated and travels toward a substrate supported on the electrode. A filament for emitting thermions is disposed between the evaporation source and the electrode, and a grid for passing the evaporated material therethrough is disposed between the filament and the electrode. Power supplies are electrically connected to the evacuated casing, the evaporation source, the electrode, the filament, and the grid, for keeping the filament negative in potential with respect to the evacuated casing and the grid. Alternatively, the evacuated casing may not be connected to the power supplies so that the grid is kept positive with respect to the filament. The grid may be of a double-layer structure, with the gas inlet means connected to the grid.
摘要翻译： 薄膜沉积系统包括抽真空壳体，其中引入活性气体或惰性气体或其混合物。 由真空壳体中的蒸发源携带的蒸发器被蒸发并且朝着支撑在电极上的基板行进。 用于发射热量的灯丝设置在蒸发源和电极之间，并且用于使蒸发的材料通过的栅格设置在灯丝和电极之间。 电源电连接到抽真空的外壳，蒸发源，电极，灯丝和电网，用于将灯丝相对于抽真空的外壳和电网保持为负电位。 或者，抽真空的壳体可以不连接到电源，使得栅格相对于灯丝保持正。 栅格可以是双层结构，其中气体入口装置连接到栅格。
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公开(公告)号：US4982696A
公开(公告)日：1991-01-08
申请号：US294377
申请日：1989-01-06
申请人： Mikio Kinoshita , Wasaburo Ohta , Masashi Nakazawa
发明人： Mikio Kinoshita , Wasaburo Ohta , Masashi Nakazawa
IPC分类号： C23C14/32
CPC分类号： C23C14/32
摘要： An apparatus for forming thin film includes a vacuum container to which an active gas, an inert gas, or a mixture thereof is introduced, a source of evaporation for evaporating a substance being evaporated in the vacuum container, a counter electrode disposed in the vacuum container and holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation, a grid disposed between the source of evaporation and the counter electrode and having openings which allow the substance being evaporated to pass therethrough, a filament for thermionic emission disposed between the grid and the source of evaporation and a power source device for establishing a predetermined electric potential relationship between the grid, the counter electrode, and the filament.
摘要翻译： 一种用于形成薄膜的设备包括：真空容器，其中引入了活性气体，惰性气体或其混合物，用于蒸发真空容器中蒸发的物质的蒸发源，设置在真空容器中的对电极 并且以与蒸发源相对的方式保持用于在其上形成薄膜的基板，设置在蒸发源和对电极之间并具有允许物质被蒸发的开口通过的栅格， 布置在栅格和蒸发源之间的热离子发射的灯丝和用于在栅格，对电极和灯丝之间建立预定的电势关系的电源装置。
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公开(公告)号：US5112466A
公开(公告)日：1992-05-12
申请号：US597331
申请日：1990-09-14
CPC分类号： H01J37/32422 , C23C14/32
摘要： An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a generation device for generating a material vapor, a counter electrode holding a substrate to be vapor-deposited, a first grid disposed between the generation device and the electrode for accelerating the vapor, and a filament for emitting thermions to ionize the vapor. The grid and counter electrode surfaces may be curved and parallel to each other, and a second grid for accelerating the vapor, having a potential which is negative with respect to the potential of the first grid, may be placed between the first grid and the electrode, in the vicinity of the electrode, and a device may be provided for moving the first grid with respect to the electrode on a predetermined track.
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公开(公告)号：US5465475A
公开(公告)日：1995-11-14
申请号：US99103
申请日：1993-07-29
申请人： Mikio Kinoshita , Wasaburo Ohta
发明人： Mikio Kinoshita , Wasaburo Ohta
CPC分类号： G11B5/313 , G11B5/3163 , G11B5/17 , Y10T29/49048
摘要： A thin film magnetic head has a lower magnetic pole formed on a substrate; a coil arranged on the lower magnetic pole through an adhesive layer; an upper magnetic pole arranged on the coil; and a gap layer formed between the upper and lower magnetic poles. A method for forming the thin film magnetic head has a process for forming a lower magnetic pole on a first substrate; a process for forming a coil on a second substrate having a recessed portion; a process for polishing the first and/or second substrate such that a face of the lower magnetic pole on the first substrate and a face of the coil on the second substrate come in close contact with each other; a process for adhering the first and second substrates to each other such that the lower magnetic pole and the coil are adjacent to each other; a process for forming a gap layer on the lower magnetic pole; a process for polishing or etching a portion or all of the second substrate; and a process for forming an upper magnetic pole. In this magnetic head and the forming method, high performance can be obtained and cost of the thin film magnetic head can be reduced.
摘要翻译： 薄膜磁头具有形成在基板上的下磁极; 通过粘合剂层布置在下磁极上的线圈; 布置在线圈上的上磁极; 以及形成在上下磁极之间的间隙层。 一种用于形成薄膜磁头的方法具有在第一基板上形成下磁极的工艺; 在具有凹部的第二基板上形成线圈的工序; 用于抛光第一和/或第二基板的方法，使得第一基板上的下磁极的表面和第二基板上的线圈的表面彼此紧密接触; 用于使第一和第二基板彼此粘合使得下磁极和线圈彼此相邻的工艺; 用于在下磁极上形成间隙层的工艺; 用于抛光或蚀刻所述第二基板的一部分或全部的工艺; 以及用于形成上磁极的工艺。 在这种磁头和成形方法中，可以获得高性能，并且可以降低薄膜磁头的成本。
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公开(公告)号：US5427668A
公开(公告)日：1995-06-27
申请号：US602109
申请日：1990-10-22
申请人： Tatsuya Sato , Wasaburo Ohta , Mikio Kinoshita
发明人： Tatsuya Sato , Wasaburo Ohta , Mikio Kinoshita
CPC分类号： H01J37/32422 , C23C14/32 , C23C14/3478
摘要： A thin film deposition system includes a vacuum or evacuated casing in which there is introduced an active gas or an inert gas or a mixture thereof. A filament emits thermions which impinge upon gas molecules to ionize them into positive ions. The ions bombard a target, from which particles are emitted toward a substrate. The particles emitted from the target are also ionized by the thermions. In the vicinity of a grid, more particles from the target are ionized by thermions which are vertically oscillated and ionized molecules of the gas. The ions are accelerated toward the substrate and bombard the substrate, thereby depositing a thin film thereon. The thin film deposition system may additionally have an evaporation source for supporting an evaporant which emit particles to be deposited on the substrate.
摘要翻译： 薄膜沉积系统包括真空或抽真空的壳体，其中引入活性气体或惰性气体或其混合物。 灯丝发出撞击气体分子的热量，将它们电离成正离子。 离子轰击一个靶，从该粒子向基体发射。 从靶发射的颗粒也被热离子化。 在栅格附近，来自目标的更多颗粒被气体的垂直振荡和电离分子的热离子电离。 离子被加速朝向衬底并轰击衬底，从而在其上沉积薄膜。 薄膜沉积系统可以另外具有用于支撑发射要沉积在基底上的颗粒的蒸发器的蒸发源。
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公开(公告)号：US4854265A
公开(公告)日：1989-08-08
申请号：US167850
申请日：1988-02-10
申请人： Wasaburo Ohta , Tadao Katuragawa , Mikio Kinoshita
发明人： Wasaburo Ohta , Tadao Katuragawa , Mikio Kinoshita
IPC分类号： C23C14/32
CPC分类号： C23C14/32
摘要： A thin film forming apparatus including a vacuum tank capable of introducing an active gas and/or an inert gas thereinto; a source of evaporable substance disposed in the tank; a counter electrode disposed opposite to the source of evaporable substance in the tank and holding a substrate on which a thin film is to be vapor-deposited; a filament disposed between the source of evaporable substance and the counter electrode for generating thermal electrons; a grid disposed between the filament and the source of evaporable substance, and allowing evaporated substance to pass therethrough; and power source means for putting the grid at a positive potential relative to the counter electrode. Electrons emitted from the filament form a plasma in the vicinity of the grid and ionize evaporable substance from the source of evaporable substance before being absorbed by the grid. The ionized evaporated substance then is accelerated toward the substrate for low-temperature deposition on the substrate. Therefore, even a material having low thermal resistance, such as plastics, can be used as the substrate.
摘要翻译： PCT No.PCT / JP87 / 00398 Sec。 371日期1988年2月10日 102（e）日期1988年2月10日PCT Filted 1987年6月18日PCT公布。 第WO87 / 07916号公报 日本1987年12月30日。一种薄膜形成装置，包括能够将活性气体和/或惰性气体引入其中的真空槽; 设置在罐中的可蒸发物质的来源; 反电极，其与所述罐中的所述可蒸发物质源相对设置，并且保持要在其上蒸镀薄膜的基板; 设置在可蒸发物质源和用于产生热电子的对电极之间的细丝; 布置在细丝和可蒸发物质源之间并允许蒸发的物质通过的格栅; 以及用于将电网相对于对电极放置在正电位的电源装置。 从灯丝发射的电子在栅格附近形成等离子体，并在蒸发物质源被电网吸收之前将可蒸发物质离子化。 然后离子化的蒸发物质朝向衬底加速，以在衬底上进行低温沉积。 因此，即使是具有低耐热性的材料，例如塑料也可以用作衬底。
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公开(公告)号：US4876984A
公开(公告)日：1989-10-31
申请号：US204279
申请日：1988-06-09
申请人： Mikio Kinoshita , Wasaburo Ohta , Toru Miyabori
发明人： Mikio Kinoshita , Wasaburo Ohta , Toru Miyabori
CPC分类号： C23C14/0021 , C23C14/32
摘要： An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a source of evaporation for evaporating a substance, a counter electrode holding a substrate to be vapor-deposited, a grid disposed between the source and the electrode for accelerating the evaporated substance, and an electronic gun for emitting thermions, which are hit on the evaporated substances to ionize them.
摘要翻译： 一种用于形成薄膜的装置，其具有抽真空至高真空并接收气相沉积的真空容器，用于蒸发物质的蒸发源，保持待沉积基板的对电极，设置在源 以及用于加速蒸发的物质的电极和用于发射热量的电子枪，其被撞击在蒸发的物质上以使它们离子化。
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公开(公告)号：US4960072A
公开(公告)日：1990-10-02
申请号：US228451
申请日：1988-08-05
CPC分类号： H01J37/32422 , C23C14/32
摘要： An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a generation device for generating a material vapor, a counter electrode holding a substrate to be vapor-deposited, a first grid disposed between the generation device and the electrode for accelerating the vapor, and a filament for emitting thermions to ionize the vapor. The first grid and counter electrode surfaces may be curved and parallel to each other, and a second grid for accelerating the vapor, having a potential which is negative with respect to the potential of the first grid, may be placed between the first grid and the electrode, in the vicinity of the electrode, and a device may be provided for moving the first grid with respect to the electrode on a predetermined track.
摘要翻译： 一种用于形成薄膜的装置，其具有抽真空至高真空的真空容器并且接收用于气相沉积的气体，用于产生材料蒸气的产生装置，保持待气相沉积的基板的对电极， 用于加速蒸气的电极和用于发射热离子以使蒸气离子化的灯丝。 第一栅格和对电极表面可以是弯曲的并且彼此平行，并且用于加速蒸汽的第二栅极具有相对于第一栅极的电位为负的电位，可以放置在第一栅格和 电极附近，并且可以设置用于在预定轨道上相对于电极移动第一格栅的装置。
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公开(公告)号：US4216680A
公开(公告)日：1980-08-12
申请号：US935308
申请日：1978-08-21
CPC分类号： F16H63/10 , F16H3/08 , F16H37/043 , F16H59/02 , F16H63/3009 , Y10S74/90 , Y10T74/20159
摘要： A travel speed change apparatus for a farm vehicle in which a first speed change mechanism and a second speed change mechanism coact to change the travelling speed. The first and second speed change mechanisms are operable by manipulating a single hand lever movable in two different directions and not two independent levers. This single lever is adapted to actuate the first and second speed change mechanisms by moving in the same direction.
摘要翻译： 一种用于农用车辆的行驶速度改变装置，其中第一变速机构和第二变速机构共同改变行驶速度。 第一和第二变速机构通过操纵在两个不同方向上可移动的单手杆而不是两个独立的杠杆来操作。 该单个杆适于通过沿相同方向移动来致动第一和第二变速机构。
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