Apparatus for forming a thin film
    2.
    发明授权
    Apparatus for forming a thin film 失效
    用于形成薄膜的装置

    公开(公告)号:US5112466A

    公开(公告)日:1992-05-12

    申请号:US597331

    申请日:1990-09-14

    IPC分类号: C23C14/32 H01J37/32 C23C16/50

    CPC分类号: H01J37/32422 C23C14/32

    摘要: An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a generation device for generating a material vapor, a counter electrode holding a substrate to be vapor-deposited, a first grid disposed between the generation device and the electrode for accelerating the vapor, and a filament for emitting thermions to ionize the vapor. The grid and counter electrode surfaces may be curved and parallel to each other, and a second grid for accelerating the vapor, having a potential which is negative with respect to the potential of the first grid, may be placed between the first grid and the electrode, in the vicinity of the electrode, and a device may be provided for moving the first grid with respect to the electrode on a predetermined track.

    Method of forming a thin film magnetic head
    4.
    发明授权
    Method of forming a thin film magnetic head 失效
    形成薄膜磁头的方法

    公开(公告)号:US5465475A

    公开(公告)日:1995-11-14

    申请号:US99103

    申请日:1993-07-29

    IPC分类号: G11B5/17 G11B5/31 G11B5/42

    摘要: A thin film magnetic head has a lower magnetic pole formed on a substrate; a coil arranged on the lower magnetic pole through an adhesive layer; an upper magnetic pole arranged on the coil; and a gap layer formed between the upper and lower magnetic poles. A method for forming the thin film magnetic head has a process for forming a lower magnetic pole on a first substrate; a process for forming a coil on a second substrate having a recessed portion; a process for polishing the first and/or second substrate such that a face of the lower magnetic pole on the first substrate and a face of the coil on the second substrate come in close contact with each other; a process for adhering the first and second substrates to each other such that the lower magnetic pole and the coil are adjacent to each other; a process for forming a gap layer on the lower magnetic pole; a process for polishing or etching a portion or all of the second substrate; and a process for forming an upper magnetic pole. In this magnetic head and the forming method, high performance can be obtained and cost of the thin film magnetic head can be reduced.

    摘要翻译: 薄膜磁头具有形成在基板上的下磁极; 通过粘合剂层布置在下磁极上的线圈; 布置在线圈上的上磁极; 以及形成在上下磁极之间的间隙层。 一种用于形成薄膜磁头的方法具有在第一基板上形成下磁极的工艺; 在具有凹部的第二基板上形成线圈的工序; 用于抛光第一和/或第二基板的方法,使得第一基板上的下磁极的表面和第二基板上的线圈的表面彼此紧密接触; 用于使第一和第二基板彼此粘合使得下磁极和线圈彼此相邻的工艺; 用于在下磁极上形成间隙层的工艺; 用于抛光或蚀刻所述第二基板的一部分或全部的工艺; 以及用于形成上磁极的工艺。 在这种磁头和成形方法中,可以获得高性能,并且可以降低薄膜磁头的成本。

    Thin film deposition system
    5.
    发明授权
    Thin film deposition system 失效
    薄膜沉积系统

    公开(公告)号:US5427668A

    公开(公告)日:1995-06-27

    申请号:US602109

    申请日:1990-10-22

    摘要: A thin film deposition system includes a vacuum or evacuated casing in which there is introduced an active gas or an inert gas or a mixture thereof. A filament emits thermions which impinge upon gas molecules to ionize them into positive ions. The ions bombard a target, from which particles are emitted toward a substrate. The particles emitted from the target are also ionized by the thermions. In the vicinity of a grid, more particles from the target are ionized by thermions which are vertically oscillated and ionized molecules of the gas. The ions are accelerated toward the substrate and bombard the substrate, thereby depositing a thin film thereon. The thin film deposition system may additionally have an evaporation source for supporting an evaporant which emit particles to be deposited on the substrate.

    摘要翻译: 薄膜沉积系统包括真空或抽真空的壳体,其中引入活性气体或惰性气体或其混合物。 灯丝发出撞击气体分子的热量,将它们电离成正离子。 离子轰击一个靶,从该粒子向基体发射。 从靶发射的颗粒也被热离子化。 在栅格附近,来自目标的更多颗粒被气体的垂直振荡和电离分子的热离子电离。 离子被加速朝向衬底并轰击衬底,从而在其上沉积薄膜。 薄膜沉积系统可以另外具有用于支撑发射要沉积在基底上的颗粒的蒸发器的蒸发源。

    Thin film forming apparatus
    6.
    发明授权
    Thin film forming apparatus 失效
    薄膜成型装置

    公开(公告)号:US4854265A

    公开(公告)日:1989-08-08

    申请号:US167850

    申请日:1988-02-10

    IPC分类号: C23C14/32

    CPC分类号: C23C14/32

    摘要: A thin film forming apparatus including a vacuum tank capable of introducing an active gas and/or an inert gas thereinto; a source of evaporable substance disposed in the tank; a counter electrode disposed opposite to the source of evaporable substance in the tank and holding a substrate on which a thin film is to be vapor-deposited; a filament disposed between the source of evaporable substance and the counter electrode for generating thermal electrons; a grid disposed between the filament and the source of evaporable substance, and allowing evaporated substance to pass therethrough; and power source means for putting the grid at a positive potential relative to the counter electrode. Electrons emitted from the filament form a plasma in the vicinity of the grid and ionize evaporable substance from the source of evaporable substance before being absorbed by the grid. The ionized evaporated substance then is accelerated toward the substrate for low-temperature deposition on the substrate. Therefore, even a material having low thermal resistance, such as plastics, can be used as the substrate.

    摘要翻译: PCT No.PCT / JP87 / 00398 Sec。 371日期1988年2月10日 102(e)日期1988年2月10日PCT Filted 1987年6月18日PCT公布。 第WO87 / 07916号公报 日本1987年12月30日。一种薄膜形成装置,包括能够将活性气体和/或惰性气体引入其中的真空槽; 设置在罐中的可蒸发物质的来源; 反电极,其与所述罐中的所述可蒸发物质源相对设置,并且保持要在其上蒸镀薄膜的基板; 设置在可蒸发物质源和用于产生热电子的对电极之间的细丝; 布置在细丝和可蒸发物质源之间并允许蒸发的物质通过的格栅; 以及用于将电网相对于对电极放置在正电位的电源装置。 从灯丝发射的电子在栅格附近形成等离子体,并在蒸发物质源被电网吸收之前将可蒸发物质离子化。 然后离子化的蒸发物质朝向衬底加速,以在衬底上进行低温沉积。 因此,即使是具有低耐热性的材料,例如塑料也可以用作衬底。

    Cooling system and cooling method
    8.
    发明授权
    Cooling system and cooling method 失效
    冷却系统和冷却方式

    公开(公告)号:US07036327B1

    公开(公告)日:2006-05-02

    申请号:US10182115

    申请日:2000-02-01

    申请人: Mikio Kinoshita

    发明人: Mikio Kinoshita

    IPC分类号: F25B15/00

    摘要: A cooling system comprising an evaporation cooling device for evaporating an aqueous solution, a water content providing device for allowing vapor evaporated from impurities-containing water to be absorbed into the aqueous solution, and a circulating device for circulating the aqueous solution between the water content providing device and the evaporation cooling device; and a cooling method characterized by comprising the steps of taking in impurities-containing water, cooling a high-temperature body by evaporating water content in an aqueous solution having a boiling point higher than that of the impurities-containing water, allowing vapor evaporated from the impurities containing water to be absorbed into the aqueous solution concentrated by the cooling step, feeding the aqueous solution diluted in the absorbing step to the cooling step, and discharging the impurities-containing water concentrated in the absorbing step. The aqueous solution circulates between the water content providing device and the aqueous solution desalination device, and no salts move between the aqueous solution and the impurities-containing water, thereby providing a cooling system free from scales.

    摘要翻译: 一种冷却系统,包括用于蒸发水溶液的蒸发冷却装置,用于允许从含杂质水中蒸发的蒸汽被吸收到水溶液中的含水量提供装置,以及用于使水溶液在含水量提供之间循环的循环装置 装置和蒸发冷却装置; 以及一种冷却方法,其特征在于包括以下步骤:摄取含杂质的水,通过蒸发沸点高于含杂质水的水溶液中的水分含量来冷却高温体,从而蒸发 含有被吸收到通过冷却步骤浓缩的水溶液中的水的杂质,将在吸收步骤中稀释的水溶液进料到冷却步骤,以及排出在吸收步骤中浓缩的含杂质水。 水溶液在水分提供装置和水溶液脱盐装置之间循环,在水溶液和含杂质水之间不会移动盐,从而提供无垢的冷却系统。

    Optical recording medium
    9.
    发明授权
    Optical recording medium 失效
    光记录介质

    公开(公告)号:US5948496A

    公开(公告)日:1999-09-07

    申请号:US824793

    申请日:1997-03-26

    摘要: An optical recording medium includes a substrate, a first protection layer formed on the substrate, a recording layer formed on the first protection layer, a second protection layer formed on the recording layer, and a reflection heat radiating layer formed on the second protection layer. The recording layer is of a phase-change type in which the recording layer is changed from an amorphous state to a crystal state by a temperature raising and cooling process by projecting a laser beam onto the recording layer. The recording layer has an interface portion interfaced with one of the first and second protection layers. The interface portion has a thermal conductivity lower than that of a remaining portion of the recording layer.

    摘要翻译: 光记录介质包括基板,形成在基板上的第一保护层,形成在第一保护层上的记录层,形成在记录层上的第二保护层,以及形成在第二保护层上的反射热辐射层。 记录层是通过将激光束投射到记录层上,通过升温和冷却过程将记录层从非晶状态转变为晶体状态的相变型。 记录层具有与第一和第二保护层中的一个接口的界面部分。 界面部分的热导率低于记录层的剩余部分的热导率。

    Thin film forming apparatus
    10.
    发明授权
    Thin film forming apparatus 失效
    薄膜成型装置

    公开(公告)号:US5133849A

    公开(公告)日:1992-07-28

    申请号:US448740

    申请日:1989-12-11

    IPC分类号: C23C14/00 C23C14/32 H01J37/32

    摘要: An apparatus for forming a thin film has a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced, and a source of evaporation from which a substance is evaporated. A counter electrode is disposed in the vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation. A grid is disposed between the source of evaporation and the counter electrode and having openings which allow the evaporated substance to pass therethrough. A filament for thermionic emission is disposed between the grid and the source of evaporation. A target is also disposed between the filament and the source of evaporation for emitting sputtered particles. A power source device establishes predetermined electric potential relationships between the grid, the filament, and the target.

    摘要翻译: 用于形成薄膜的装置具有引入活性气体,惰性气体或其混合物的真空容器和物质蒸发的蒸发源。 对置电极设置在真空容器中,用于保持用于在其上形成薄膜的基板以与蒸发源相对的方式。 在蒸发源和对电极之间设置有栅格,并且具有允许蒸发的物质通过的开口。 用于热电子发射的灯丝设置在电网和蒸发源之间。 在灯丝和蒸发源之间还设置靶,用于发射溅射的颗粒。 电源装置在电网,灯丝和目标之间建立预定的电位关系。