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    Method FPR manufacturing a magnetic write head
    3.
    发明授权
    Method FPR manufacturing a magnetic write head 有权
    磁写头制造方法

    公开(公告)号：US07788796B2

    公开(公告)日：2010-09-07

    申请号：US11611824

    申请日：2006-12-15

    申请人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/6005 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions during a lapping operation used to define an air bearing surface. The lapping guide is photolithograhically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. The electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can be carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process.

    摘要翻译： 一种用于在用于限定空气轴承表面的研磨操作期间使用电研磨引导件来构造磁性写入头以小心地控制临界尺寸的方法。 研磨导轨在具有另一写头结构的普通光刻步骤中以光刻方式进行图案化，从而可以仔细地保持研磨引导件与写头结构的临界尺寸之间的特殊关系。 电研磨引导件可以以普通光刻步骤图案化为写极，使得可以相对于研磨导轨的位置仔细地控制扩张点的位置。 缝合的火炬结构也可以与电气研磨导轨一起构建，然后可以在该缝合的火炬结构上进一步构建自对准屏蔽，使得在研磨过程中，电气研磨引导件可以将喇叭口和屏蔽喉部两者紧密地一起控制 处理。

    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    5.
    发明授权
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号：US07576951B2

    公开(公告)日：2009-08-18

    申请号：US11411556

    申请日：2006-04-25

    申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

    摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    ELECTRICAL LAPPING GUIDE FOR FLARE POINT CONTROL AND TRAILING SHIELD THROAT HEIGHT IN A PERPENDICULAR MAGNETIC WRITE HEAD
    7.
    发明申请
    ELECTRICAL LAPPING GUIDE FOR FLARE POINT CONTROL AND TRAILING SHIELD THROAT HEIGHT IN A PERPENDICULAR MAGNETIC WRITE HEAD 有权
    用于磁头控制和导航屏蔽的电气导线指南在一个完整的磁性写头

    公开(公告)号：US20080144215A1

    公开(公告)日：2008-06-19

    申请号：US11611824

    申请日：2006-12-15

    申请人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Ming Jiang ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/147 ,  G11B5/23

    CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3173 ,  G11B5/6005 ,  Y10T29/49021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions dining a lapping operation used to define an air bearing surface. The lapping guide is photolithographically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. For example, the electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can he carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process. Similarly, the lapping guide can be formed in a common photolithographic step with a trailing shield, so that a critical dimension such as throat height of the trailing shield can be carefully controlled with respect to the electrical lapping guide.

    摘要翻译： 一种使用电研磨导向器构造磁性写入头的方法，以仔细控制关键尺寸，以用于界定空气轴承表面的研磨操作。 研磨导向器在具有另一写头结构的普通光刻步骤中光刻图案化，使得研磨引导件与写入头结构的关键尺寸之间的特殊关系可以被小心地保持。 例如，电研磨引导件可以以普通的光刻步骤图案化为写入极，使得可以相对于研磨导轨的位置仔细地控制闪光点的位置。 缝合的火炬结构也可以与电研磨导轨一起构建，然后可以在该缝合的火炬结构上进一步构建自对准的屏蔽，使得在研磨过程中这种电研磨引导件可以将喇叭口和屏蔽喉两者紧密地一起控制 处理。 类似地，研磨引导件可以在具有后挡板的普通光刻步骤中形成，使得可以相对于电研磨导轨小心地控制关键尺寸，例如后挡板的喉部高度。

    Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole
    8.
    发明授权
    Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole 有权
    制造具有环绕后挡板和凹后缘主极的垂直磁写头的方法

    公开(公告)号：US07506431B2

    公开(公告)日：2009-03-24

    申请号：US11744022

    申请日：2007-05-03

    申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

    摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A WRAP-AROUND TRAILING SHIELD AND A CONCAVE TRAILING EDGE MAIN POLE
    9.
    发明申请
    METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A WRAP-AROUND TRAILING SHIELD AND A CONCAVE TRAILING EDGE MAIN POLE 有权
    制造具有缠绕护栏和凹凸条纹边缘的普通磁性写头的方法

    公开(公告)号：US20080271308A1

    公开(公告)日：2008-11-06

    申请号：US11744022

    申请日：2007-05-03

    申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

    IPC分类号： G11B5/127 ,  C23C14/00

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

    摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

    Method of multi-angled bump processing for magnetic pole fabrication and systems thereof
    10.
    发明授权
    Method of multi-angled bump processing for magnetic pole fabrication and systems thereof 有权
    用于磁极制造的多角度凸块加工方法及其系统

    公开(公告)号：US08085497B2

    公开(公告)日：2011-12-27

    申请号：US12341834

    申请日：2008-12-22

    申请人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

    发明人： Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Sue Siyang Zhang ,  Yi Zheng

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/3163

    摘要： A system according to one embodiment includes a magnetic pole; a bump structure above the pole, the bump structure having a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the pole, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the pole, wherein the second angle is greater than the first angle; and a shield above the bump structure. A method according to one embodiment includes forming a bump layer above a magnetic pole; removing a portion of the bump layer for forming a step therein; and milling the bump layer for defining thereon a first surface oriented at a first angle between 1° and 89° from a plane of deposition of the bump layer, and a second surface oriented at a second angle between 1° and 89° from the plane of deposition of the bump layer, wherein the second angle is greater than the first angle.

    摘要翻译： 根据一个实施例的系统包括磁极; 所述凸起结构具有从所述极的沉积平面以1°至89°之间的第一角度定向的第一表面，并且所述第一表面以与所述极的沉积的平面成1°至89°之间的第二角度定向 所述极的沉积平面，其中所述第二角度大于所述第一角度; 和凸块结构之上的屏蔽。 根据一个实施例的方法包括在磁极上形成凸起层; 去除所述凸起层的一部分以在其中形成台阶; 并且研磨所述凸起层，以在其上限定从凸起层的沉积平面以1°至89°之间的第一角度定向的第一表面，以及从该平面以1°至89°之间的第二角度定向的第二表面 所述凸起层的沉积，其中所述第二角度大于所述第一角度。