METHODS OF MANUFACTURING A MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICE
    3.
    发明申请
    METHODS OF MANUFACTURING A MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICE 有权
    制造磁阻随机访问存储器件的方法

    公开(公告)号:US20150287911A1

    公开(公告)日:2015-10-08

    申请号:US14611717

    申请日:2015-02-02

    CPC classification number: H01L43/12 G11C11/161 H01L27/228

    Abstract: In a method of manufacturing a MRAM device, a lower electrode is formed on a substrate. A first magnetic layer, a tunnel barrier layer, and a second magnetic layer are sequentially formed on the lower electrode layer. An etching mask is formed on the second magnetic layer. An ion beam etching process in which a first ion beam and a second ion beam are simultaneously emitted onto the substrate is performed to form a MTJ structure including a first magnetic layer pattern, a tunnel layer pattern, and a second magnetic layer pattern from the first magnetic layer, the tunnel barrier layer, and the second magnetic layer, respectively, the MTJ structure has no by-products remaining after the ion beam etching process is performed.

    Abstract translation: 在制造MRAM器件的方法中,在基片上形成下电极。 第一磁性层,隧道势垒层和第二磁性层依次形成在下部电极层上。 在第二磁性层上形成蚀刻掩模。 执行其中第一离子束和第二离子束同时发射到衬底上的离子束蚀刻工艺,以形成包括第一磁性层图案,隧道层图案和第二磁性层图案的MTJ结构 磁性层,隧道势垒层和第二磁性层,在执行离子束蚀刻处理之后,MTJ结构没有剩余副产物。

    METHOD OF FORMING SEMICONDUCTOR DEVICE HAVING MAGNETIC TUNNEL JUNCTION AND RELATED DEVICE
    4.
    发明申请
    METHOD OF FORMING SEMICONDUCTOR DEVICE HAVING MAGNETIC TUNNEL JUNCTION AND RELATED DEVICE 审中-公开
    形成具有磁性隧道结的半导体器件的方法及相关器件

    公开(公告)号:US20140308759A1

    公开(公告)日:2014-10-16

    申请号:US14217917

    申请日:2014-03-18

    CPC classification number: H01L43/12 G11C11/161

    Abstract: A method of forming a semiconductor device includes forming a perpendicular magnetized magnetic device, annealing the perpendicular magnetized magnetic device, and applying a magnetic field to the perpendicular magnetized magnetic device. The semiconductor device may be a magnetoresistance data storage device. The magnetic field is applied in a direction that is substantially perpendicular to a substrate coupled to the perpendicular magnetized magnetic device.

    Abstract translation: 形成半导体器件的方法包括形成垂直磁化磁性器件,退火垂直磁化的磁性器件,并向垂直磁化的磁性器件施加磁场。 半导体器件可以是磁阻数据存储器件。 磁场沿基本上垂直于与垂直磁化磁性装置连接的衬底的方向施加。

    MAGNETIC DEVICE
    7.
    发明申请
    MAGNETIC DEVICE 有权
    磁性装置

    公开(公告)号:US20120292724A1

    公开(公告)日:2012-11-22

    申请号:US13475520

    申请日:2012-05-18

    CPC classification number: H01L43/08

    Abstract: A magnetic tunnel junction element is provided. The magnetic tunnel junction element has first magnetic layer and second magnetic layer formed adjacent, e.g., on lower and upper portions of an insulating layer, respectively and each having a perpendicular magnetic anisotropy, a magnetic field adjustment layer formed on the second magnetic layer and having a perpendicular magnetic anisotropy, and a bather layer formed between the magnetic field adjustment layer and the second magnetic layer. The second magnetic layer and the magnetic field adjustment layer are magnetically decoupled from each other.

    Abstract translation: 提供磁性隧道结元件。 磁性隧道结元件分别具有第一磁性层和第二磁性层,该第一磁性层和第二磁性层分别形成在例如绝缘层的下部和上部上并且各自具有垂直的磁各向异性,磁场调节层形成在第二磁性层上并具有 垂直磁各向异性,以及形成在磁场调整层和第二磁性层之间的沐浴层。 第二磁性层和磁场调节层彼此磁耦合。

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