公开(公告)号：US11747796B2

公开(公告)日：2023-09-05

申请号：US17391381

申请日：2021-08-02

Applicant: XEROX CORPORATION

Inventor： Ion Matei ,  Jeng Ping Lu ,  Saigopal Nelaturi ,  Julie A. Bert ,  Lara S. Crawford ,  Armin R. Volkel ,  Eugene M. Chow

IPC: G05B19/418 ,  G05B17/02 ,  B01L3/00 ,  G06T7/194 ,  G06T7/73 ,  G06T7/155 ,  H04N7/18

CPC classification number: G05B19/41885 ,  B01L3/50273 ,  G05B17/02 ,  G06T7/155 ,  G06T7/194 ,  G06T7/74 ,  H04N7/183 ,  G05B2219/32359 ,  G06T2207/20021 ,  G06T2207/30164

Abstract: The system and method described allow for real-time control over positioning of a micro-object. A movement of at least one micro-object suspended in a medium can be induced by a generation of one or more forces by electrodes proximate to the micro-object. Prior to inducing the movement, a simulation is used to develop a model describing a parameter of an interaction between each of the electrodes and the micro-object. A function describing the forces generated by an electrode and an extent of the movement induced due to the forces is generated using the model. The function is used to design closed loop policy control scheme for moving the micro-object towards a desired position. The position of the micro-object is tracked and taken into account when generating voltage patterns in the scheme.

公开(公告)号：US11732362B2

公开(公告)日：2023-08-22

申请号：US16781813

申请日：2020-02-04

Applicant: Xerox Corporation ,  Palo Alto Research Center Incorporated

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: H01L23/00 ,  H01L21/67 ,  B81B3/00 ,  C23C16/50

CPC classification number: C23C16/50 ,  B81B3/0018 ,  H01L21/67271 ,  H01L21/67282 ,  H01L21/67294 ,  H01L24/75 ,  H01L24/95 ,  H01L2224/95001 ,  H01L2224/95101 ,  H01L2224/95115 ,  H01L2224/95144 ,  H01L2224/95145 ,  H01L2924/10253 ,  H01L2924/1434 ,  H01L2924/1461

Abstract: Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

公开(公告)号：US11893327B2

公开(公告)日：2024-02-06

申请号：US17121411

申请日：2020-12-14

Applicant: XEROX CORPORATION

Inventor： Ion Matei ,  Anne Plochowietz ,  Saigopal Nelaturi ,  Johan de Kleer ,  Jeng Ping Lu ,  Lara S. Crawford ,  Eugene M. Chow

IPC: G06F30/27 ,  G06F30/17 ,  G06N3/04 ,  G06F111/04

CPC classification number: G06F30/27 ,  G06F30/17 ,  G06N3/04 ,  G06F2111/04

Abstract: System and method that allow utilize machine learning algorithms to move a micro-object to a desired position are described. A sensor such as a high speed camera or capacitive sensing, tracks the locations of the objects. A dynamic potential energy landscape for manipulating objects is generated by controlling each of the electrodes in an array of electrodes. One or more computing devices are used to: estimate an initial position of a micro-object using the sensor; generate a continuous representation of a dynamic model for movement of the micro-object due to electrode potentials generated by at least some of the electrodes and use automatic differentiation and Gauss quadrature rules on the dynamic model to derive optimum potentials to be generated by the electrodes to move the micro-object to the desired position; and map the calculated optimized electrode potentials to the array to activate the electrodes.

公开(公告)号：US20200173026A1

公开(公告)日：2020-06-04

申请号：US16781813

申请日：2020-02-04

Applicant: Xerox Corporation ,  Palo Alto Research Center Incorporated

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: C23C16/50 ,  H01L23/00 ,  H01L21/67

Abstract: Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

公开(公告)号：US10604843B2

公开(公告)日：2020-03-31

申请号：US15591959

申请日：2017-05-10

Applicant: Xerox Corporation ,  Palo Alto Research Center Incorporated

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: C23C16/50 ,  H01L23/00 ,  H01L21/67

Abstract: Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

公开(公告)号：US12297538B2

公开(公告)日：2025-05-13

申请号：US18221302

申请日：2023-07-12

Applicant: Xerox Corporation

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: H01L21/67 ,  B05B5/00 ,  B05D1/00 ,  B81B3/00 ,  C23C16/50 ,  H01L23/00

Abstract: Disclosed herein are techniques for transferring particles in a pattern. In one implementation, a particle-transferring system includes a first substrate comprising a first surface configured to support a plurality of particles in a non-uniform pattern, and a particle transfer unit configured to remove the plurality of particles from the first surface in response to the plurality of particles being within a first gap. The system also includes a second substrate configured to remove the plurality of particles from the particle transfer unit and secure the plurality of particles to the second surface in response to the plurality of particles being within a second gap. The particle transfer unit is configured to transfer the plurality of particles and maintain the non-uniform pattern regardless of the positions of the plurality of particles, which are not predefined to fit features of the particle transfer unit.

公开(公告)号：US20230418273A1

公开(公告)日：2023-12-28

申请号：US18460175

申请日：2023-09-01

Applicant: XEROX CORPORATION

Inventor： Ion Matei ,  Jeng Ping Lu ,  Saigopal Nelaturi ,  Julie A. Bert ,  Lara S. Crawford ,  Armin R. Volkel ,  Eugene M. Chow

IPC: G05B19/418 ,  G05B17/02 ,  B01L3/00 ,  G06T7/194 ,  G06T7/73 ,  G06T7/155 ,  H04N7/18

CPC classification number: G05B19/41885 ,  G05B17/02 ,  B01L3/50273 ,  G06T7/194 ,  G06T2207/30164 ,  G06T7/155 ,  H04N7/183 ,  G05B2219/32359 ,  G06T2207/20021 ,  G06T7/74

Abstract: The system and method described allow for real-time control over positioning of a micro-object. A movement of at least one micro-object suspended in a medium can be induced by a generation of one or more forces by electrodes proximate to the micro-object. Prior to inducing the movement, a simulation is used to develop a model describing a parameter of an interaction between each of the electrodes and the micro-object. A function describing the forces generated by an electrode and an extent of the movement induced due to the forces is generated using the model. The function is used to design closed loop policy control scheme for moving the micro-object towards a desired position. The position of the micro-object is tracked and taken into account when generating voltage patterns in the scheme.

公开(公告)号：US20180327905A1

公开(公告)日：2018-11-15

申请号：US15591959

申请日：2017-05-10

Applicant: Xerox Corporation ,  Palo Alto Research Center Incorporated

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: C23C16/50

CPC classification number: H01L21/67271 ,  H01L21/67282 ,  H01L21/67294 ,  H01L24/75 ,  H01L24/81 ,  H01L24/95

Abstract: Disclosed herein are implementations of a particles-transferring system, particle transferring unit, and method of transferring particles in a pattern. In one implementation, a particles-transferring system includes a first substrate including a first surface to support particles in a pattern, particle transferring unit including an outer surface to be offset from the first surface by a first gap, and second substrate including a second surface to be offset from the outer surface by a second gap. The particle transferring unit removes the particles from the first surface in response to the particles being within the first gap, secures the particles in the pattern to the outer surface, and transports the particles in the pattern. The second substrate removes the particles in the pattern from the particle transferring unit in response to the particles being within the second gap. The particles are to be secured in the pattern to the second surface.

公开(公告)号：US11762348B2

公开(公告)日：2023-09-19

申请号：US17326902

申请日：2021-05-21

Applicant: XEROX CORPORATION

Inventor： Anne Plochowietz ,  Anand Ramakrishnan ,  Warren Jackson ,  Lara S. Crawford ,  Bradley Rupp ,  Sergey Butylkov ,  Jeng Ping Lu ,  Eugene M. Chow

IPC: G05B13/04 ,  G06N7/08 ,  G06N3/08 ,  G05B13/02

CPC classification number: G05B13/048 ,  G05B13/027 ,  G05B13/042 ,  G06N3/08 ,  G06N7/08

Abstract: Control loop latency can be accounted for in predicting positions of micro-objects being moved by using a hybrid model that includes both at least one physics-based model and machine-learning models. The models are combined using gradient boosting, with a model created during at least one of the stages being fitted based on residuals calculated during a previous stage based on comparison to training data. The loss function for each stage is selected based on the model being created. The hybrid model is evaluated with data extrapolated and interpolated from the training data to prevent overfitting and ensure the hybrid model has sufficient predictive ability. By including both physics-based and machine-learning models, the hybrid model can account for both deterministic and stochastic components involved in the movement of the micro-objects, thus increasing the accuracy and throughput of the micro-assembly.

公开(公告)号：US20240036534A1

公开(公告)日：2024-02-01

申请号：US18462332

申请日：2023-09-06

Applicant: XEROX CORPORATION

Inventor： Anne Plochowietz ,  Anand Ramakrishnan ,  Warren Jackson ,  Lara S. Crawford ,  Bradley Rupp ,  Sergey Butylkov ,  Jeng Ping Lu ,  Eugene M. Chow

IPC: G05B13/04 ,  G06N7/08 ,  G06N3/08 ,  G05B13/02

CPC classification number: G05B13/048 ,  G05B13/042 ,  G06N7/08 ,  G06N3/08 ,  G05B13/027

Abstract: Control loop latency can be accounted for in predicting positions of micro-objects being moved by using a hybrid model that includes both at least one physics-based model and machine-learning models. The models are combined using gradient boosting, with a model created during at least one of the stages being fitted based on residuals calculated during a previous stage based on comparison to training data. The loss function for each stage is selected based on the model being created. The hybrid model is evaluated with data extrapolated and interpolated from the training data to prevent overfitting and ensure the hybrid model has sufficient predictive ability. By including both physics-based and machine-learning models, the hybrid model can account for both deterministic and stochastic components involved in the movement of the micro-objects, thus increasing the accuracy and throughput of the micro-assembly.