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公开(公告)号:US09385229B2
公开(公告)日:2016-07-05
申请号:US14495508
申请日:2014-09-24
申请人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/7824 , H01L29/0623 , H01L29/063 , H01L29/0634 , H01L29/0653 , H01L29/1095 , H01L29/4175 , H01L29/66659 , H01L29/66681 , H01L29/7835 , H01L29/78624
摘要: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a first region of semiconductor material having a first conductivity type and a first dopant concentration, a second region of semiconductor material having a second conductivity type overlying the first region, a drift region of semiconductor material having the first conductivity type overlying the second region, and a drain region of semiconductor material having the first conductivity type. The drift region and the drain region are electrically connected, with at least a portion of the drift region residing between the drain region and the second region, and at least a portion of the second region residing between that drift region and the first region. In one or more exemplary embodiments, the first region abuts an underlying insulating layer of dielectric material.
摘要翻译: 提供半导体器件结构和相关的制造方法。 示例性的半导体器件结构包括具有第一导电类型和第一掺杂剂浓度的第一半导体材料区域,具有覆盖第一区域的第二导电类型的第二半导体材料区域,具有第一导电类型的半导体材料的漂移区域 覆盖第二区域,以及具有第一导电类型的半导体材料的漏极区域。 漂移区域和漏极区域电连接,漂移区域的至少一部分位于漏极区域和第二区域之间,并且第二区域的至少一部分位于该漂移区域和第一区域之间。 在一个或多个示例性实施例中,第一区域邻接介电材料的下层绝缘层。
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公开(公告)号:US09165918B1
公开(公告)日:2015-10-20
申请号:US14272027
申请日:2014-05-07
申请人: Hongning Yang , Xin Lin , Pete Rodriguez , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Pete Rodriguez , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号: H01L29/66 , H01L27/02 , H01L29/78 , H01L29/08 , H01L29/10 , H01L27/088 , H01L21/8234 , H01L21/265
CPC分类号: H01L27/0248 , H01L21/26513 , H01L21/26586 , H01L21/823412 , H01L21/823418 , H01L27/0266 , H01L27/088 , H01L29/0653 , H01L29/0696 , H01L29/0865 , H01L29/0882 , H01L29/1045 , H01L29/1079 , H01L29/1095 , H01L29/66575 , H01L29/66659 , H01L29/66681 , H01L29/7816 , H01L29/7835
摘要: A device includes a semiconductor substrate, a first constituent transistor including a first plurality of transistor structures in the semiconductor substrate connected in parallel with one another, and a second constituent transistor including a second plurality of transistor structures in the semiconductor substrate connected in parallel with one another. The first and second constituent transistors are disposed laterally adjacent to one another and connected in parallel with one another. Each transistor structure of the first plurality of transistor structures includes a non-uniform channel such that the first constituent transistor has a higher threshold voltage level than the second constituent transistor.
摘要翻译: 一种器件包括半导体衬底,第一组成晶体管,其包括彼此并联连接的半导体衬底中的第一多个晶体管结构;以及第二组成晶体管,包括在半导体衬底中并联连接的第二多个晶体管结构, 另一个。 第一和第二组成晶体管彼此横向相邻设置并彼此并联连接。 第一多个晶体管结构的每个晶体管结构包括非均匀沟道,使得第一构成晶体管具有比第二构成晶体管更高的阈值电压电平。
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公开(公告)号:US09136323B2
公开(公告)日:2015-09-15
申请号:US14486104
申请日:2014-09-15
申请人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要: A method of fabricating a transistor includes forming a field isolation region in a substrate. After forming the field isolation region, dopant is implanted in a first region of a substrate for formation of a drift region. A drain region is formed in a second region of the substrate. The first and second regions laterally overlap to define a conduction path for the transistor. The first region does not extend laterally across the second region.
摘要翻译: 制造晶体管的方法包括在衬底中形成场隔离区域。 在形成场隔离区之后,将掺杂剂注入到用于形成漂移区的衬底的第一区域中。 漏极区形成在衬底的第二区域中。 第一和第二区域横向重叠以限定晶体管的导电路径。 第一区域不横向跨越第二区域延伸。
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公开(公告)号:US20150004768A1
公开(公告)日:2015-01-01
申请号:US14486104
申请日:2014-09-15
申请人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要: A method of fabricating a transistor includes forming a field isolation region in a substrate. After forming the field isolation region, dopant is implanted in a first region of a substrate for formation of a drift region. A drain region is formed in a second region of the substrate. The first and second regions laterally overlap to define a conduction path for the transistor. The first region does not extend laterally across the second region.
摘要翻译: 制造晶体管的方法包括在衬底中形成场隔离区域。 在形成场隔离区之后,将掺杂剂注入到用于形成漂移区的衬底的第一区域中。 漏极区形成在衬底的第二区域中。 第一和第二区域横向重叠以限定晶体管的导电路径。 第一区域不横向跨越第二区域延伸。
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公开(公告)号:US09306060B1
公开(公告)日:2016-04-05
申请号:US14548616
申请日:2014-11-20
申请人: Hongning Yang , Daniel J. Blomberg , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Daniel J. Blomberg , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/7823 , H01L21/26513 , H01L29/0623 , H01L29/0634 , H01L29/0646 , H01L29/0649 , H01L29/0653 , H01L29/0865 , H01L29/0878 , H01L29/0882 , H01L29/0886 , H01L29/1095 , H01L29/402 , H01L29/66689 , H01L29/7835 , H01L29/78624
摘要: Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a body region of semiconductor material having a first conductivity type, a source region of semiconductor material having a second conductivity type within the body region, a junction isolation region of semiconductor material having the second conductivity type, a drain region of semiconductor material having the second conductivity type, and first and second drift regions of semiconductor material having the second conductivity type. The first drift region resides laterally between the drain region and the junction isolation region, the junction isolation region resides laterally between the first drift region and the second drift region, and the second drift region resides laterally between the body region and the junction isolation region.
摘要翻译: 提供半导体器件结构和相关的制造方法。 示例性的半导体器件结构包括具有第一导电类型的半导体材料的主体区域,在体区内具有第二导电类型的半导体材料的源极区域,具有第二导电类型的半导体材料的结隔离区域,漏极区域 具有第二导电类型的半导体材料以及具有第二导电类型的半导体材料的第一和第二漂移区。 第一漂移区域横向地位于漏极区域和结隔离区域之间,结隔离区域横向位于第一漂移区域和第二漂移区域之间,并且第二漂移区域横向居住在体区域和结隔离区域之间。
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公开(公告)号:US09543379B2
公开(公告)日:2017-01-10
申请号:US14218330
申请日:2014-03-18
申请人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/063 , H01L21/76283 , H01L21/823418 , H01L21/823481 , H01L27/1203 , H01L29/0619 , H01L29/0649 , H01L29/0653 , H01L29/0688 , H01L29/0878 , H01L29/0886 , H01L29/1087 , H01L29/36 , H01L29/66659 , H01L29/66681 , H01L29/66689 , H01L29/7823 , H01L29/7824 , H01L29/7835
摘要: A device includes a semiconductor substrate, source and drain regions disposed in the semiconductor substrate and having a first conductivity type, a body region disposed in the semiconductor substrate, having a second conductivity type, and in which the source region is disposed, a drift region disposed in the semiconductor substrate, having the first conductivity type, and through which charge carriers drift during operation upon application of a bias voltage between the source and drain regions, a device isolation region disposed in the semiconductor substrate and laterally surrounding the body region and the drift region, and a breakdown protection region disposed between the device isolation region and the body region and having the first conductivity type.
摘要翻译: 一种器件包括半导体衬底,设置在半导体衬底中并具有第一导电类型的源极和漏极区域,设置在半导体衬底中的体区,具有第二导电类型,并且其中设置源极区,漂移区 设置在具有第一导电类型的半导体衬底中,并且在施加源极和漏极区域之间的偏置电压时,电荷载体在工作期间漂移,设置在半导体衬底中并横向围绕身体区域的器件隔离区域和 漂移区域和设置在器件隔离区域和体区之间并具有第一导电类型的击穿保护区域。
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公开(公告)号:US20130292764A1
公开(公告)日:2013-11-07
申请号:US13465761
申请日:2012-05-07
申请人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号: H01L29/78 , H01L21/336
CPC分类号: H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要: A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate, a channel region in the semiconductor substrate between the source and drain regions through which charge carriers flow during operation from the source region to the drain region, and a drift region in the semiconductor substrate, on which the drain region is disposed, and through which the charge carriers drift under an electric field arising from application of a bias voltage between the source and drain regions. A PN junction along the drift region includes a first section at the drain region and a second section not at the drain region. The drift region has a lateral profile that varies such that the first section of the PN junction is shallower than the second section of the PN junction.
摘要翻译: 一种器件包括半导体衬底,半导体衬底中的源极和漏极区域,在源极和漏极区域之间的半导体衬底中的沟道区域,电荷载体在从源极区域到漏极区域的工作期间流过该沟道区域,以及漂移区域 其上设置有漏极区的半导体衬底,并且电荷载流子在源极和漏极区域之间施加偏压产生的电场下漂移。 沿着漂移区域的PN结包括在漏极区域处的第一部分和不在漏极区域的第二部分。 漂移区域具有变化的横向轮廓,使得PN结的第一部分比PN结的第二部分浅。
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公开(公告)号:US20150270333A1
公开(公告)日:2015-09-24
申请号:US14218330
申请日:2014-03-18
申请人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/063 , H01L21/76283 , H01L21/823418 , H01L21/823481 , H01L27/1203 , H01L29/0619 , H01L29/0649 , H01L29/0653 , H01L29/0688 , H01L29/0878 , H01L29/0886 , H01L29/1087 , H01L29/36 , H01L29/66659 , H01L29/66681 , H01L29/66689 , H01L29/7823 , H01L29/7824 , H01L29/7835
摘要: A device includes a semiconductor substrate, source and drain regions disposed in the semiconductor substrate and having a first conductivity type, a body region disposed in the semiconductor substrate, having a second conductivity type, and in which the source region is disposed, a drift region disposed in the semiconductor substrate, having the first conductivity type, and through which charge carriers drift during operation upon application of a bias voltage between the source and drain regions, a device isolation region disposed in the semiconductor substrate and laterally surrounding the body region and the drift region, and a breakdown protection region disposed between the device isolation region and the body region and having the first conductivity type.
摘要翻译: 一种器件包括半导体衬底,设置在半导体衬底中并具有第一导电类型的源极和漏极区域,设置在半导体衬底中的体区,具有第二导电类型,并且其中设置源极区,漂移区 设置在具有第一导电类型的半导体衬底中,并且在施加源极和漏极区域之间的偏置电压时,电荷载体在工作期间漂移,设置在半导体衬底中并横向围绕身体区域的器件隔离区域和 漂移区域和设置在器件隔离区域和体区之间并具有第一导电类型的击穿保护区域。
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公开(公告)号:US09490322B2
公开(公告)日:2016-11-08
申请号:US13748076
申请日:2013-01-23
申请人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
CPC分类号: H01L29/66681 , H01L29/0634 , H01L29/0653 , H01L29/0692 , H01L29/0847 , H01L29/1045 , H01L29/1095 , H01L29/7835
摘要: A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate and spaced from one another along a first lateral dimension, and a drift region in the semiconductor substrate and through which charge carriers drift during operation upon application of a bias voltage between the source and drain regions. The drift region has a notched dopant profile in a second lateral dimension along an interface between the drift region and the drain region.
摘要翻译: 一种器件包括半导体衬底,半导体衬底中的源极和漏极区域以及沿着第一横向尺寸彼此间隔开的半导体衬底中的漂移区域,并且在施加偏置电压之前电荷载体在操作期间漂移 源极和漏极区域。 漂移区域沿着漂移区域和漏极区域之间的界面在第二横向维度上具有缺口掺杂剂分布。
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公开(公告)号:US20150325565A1
公开(公告)日:2015-11-12
申请号:US14272027
申请日:2014-05-07
申请人: Hongning Yang , Xin Lin , Pete Rodriguez , Zhihong Zhang , Jiang-Kai Zuo
发明人: Hongning Yang , Xin Lin , Pete Rodriguez , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号: H01L27/02 , H01L29/08 , H01L21/265 , H01L29/66 , H01L27/088 , H01L21/8234 , H01L29/78 , H01L29/10
CPC分类号: H01L27/0248 , H01L21/26513 , H01L21/26586 , H01L21/823412 , H01L21/823418 , H01L27/0266 , H01L27/088 , H01L29/0653 , H01L29/0696 , H01L29/0865 , H01L29/0882 , H01L29/1045 , H01L29/1079 , H01L29/1095 , H01L29/66575 , H01L29/66659 , H01L29/66681 , H01L29/7816 , H01L29/7835
摘要: A device includes a semiconductor substrate, a first constituent transistor including a first plurality of transistor structures in the semiconductor substrate connected in parallel with one another, and a second constituent transistor including a second plurality of transistor structures in the semiconductor substrate connected in parallel with one another. The first and second constituent transistors are disposed laterally adjacent to one another and connected in parallel with one another. Each transistor structure of the first plurality of transistor structures includes a non-uniform channel such that the first constituent transistor has a higher threshold voltage level than the second constituent transistor.
摘要翻译: 一种器件包括半导体衬底,第一组成晶体管,其包括彼此并联连接的半导体衬底中的第一多个晶体管结构;以及第二组成晶体管,包括在半导体衬底中并联连接的第二多个晶体管结构, 另一个。 第一和第二组成晶体管彼此横向相邻设置并彼此并联连接。 第一多个晶体管结构的每个晶体管结构包括非均匀沟道,使得第一构成晶体管具有比第二构成晶体管更高的阈值电压电平。
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