摘要:
A single crystal of magnesium fluoride having a large diameter and excellent optical properties such as internal transmittance and long term laser durability, and suited for use as optical elements for exposing apparatus. The single crystal of magnesium fluoride is of a cylindrical shape having a straight body portion of a diameter of not smaller than 10 cm, has an internal transmittance of at least 85%/cm at 120 nm and at least 98%/cm at 193 nm and has, desirably, an induced absorption of not larger than 0.0030 absorption/cm at 255 nm and, particularly desirably, not larger than 0.0010 absorption/cm. at 255 nm immediately after the irradiation with 2 million shorts of an ArF excimer laser of an energy density of 30 mJ/cm2 and 2000 Hz. The invention further provides an optical element for optical lithography comprising the single crystal and an optical member for vacuum ultraviolet ray transmission comprising the single crystal.
摘要翻译:具有大直径且具有优异的光学性质如内部透射率和长期激光耐久性的氟化镁的单晶,并且适合用作曝光装置的光学元件。 氟化镁的单晶是具有直径不小于10cm的直体部分的圆柱形状,在120nm处具有至少85%/ cm的内部透射率,在193nm具有至少98%/ cm 3的内部透射率 并且理想地,在255nm处,特别优选不大于0.0010吸收/ cm 3的吸收/ cm 3的诱导吸收。 在用200万短的能量密度为30mJ / cm 2和2000Hz的ArF准分子激光器照射后立即在255nm处。 本发明还提供了一种用于光学光刻的光学元件,其包括单晶和用于包括单晶的真空紫外线透射的光学构件。
摘要:
Disclosed is a method for producing a BaLiF3 single crystal by a melt growth method, wherein a raw material melt for said single crystal comprising BaF2, LiF and MgF2 in such amounts that the Ba/(Ba+Li+Mg) ratio by mol is in the range of 0.35 to 0.48 and the Mg/(Li+Mg) ratio by mol is in the range of 0.001 to 0.03. In the case where a BaLiF3 single crystal that is useful as a last lens of immersion exposure tools for producing a semiconductor is produced by a melt growth method using, as a raw material, a melt containing excess Li, the Li component is liable to be precipitated to make the resulting BaLiF3 single crystal opaque, and the light transmittance is deteriorated, but such problems can be solved by the present invention.
摘要翻译:公开了一种通过熔融生长法制备BaLiF 3 N 3单晶的方法,其中包含BaF 2 N,LiF和MgF 3的单晶的原料熔体, 2(Ba +(Ba + Li + Mg)的摩尔比在0.35〜0.48的范围内,Mg /(Li + Mg)的摩尔比在0.001〜0.03的范围内 。 在用作半导体制造用浸渍曝光工具的最后一个透镜的BaLiF 3 N 3单晶的熔融生长方法中,使用作为原料的含有过量的Li ,Li成分容易析出,使得BaLiF 3 N 3单晶不透明,透光率劣化,但是本发明可以解决上述问题。
摘要:
Provided are a culture method and a culture device for efficiently producing cells and/or cell tissue suitable for medication applications. A culture method of culturing cells adhered onto an electrode layer, the method including: a first step of adhering the cells onto the electrode layer and culturing the cells thereon, the electrode layer being coated with an oligopeptide including: a terminal amino acid; a cell adhesive sequence; and an alternating sequence to be bound to the one end side of the cell-adhesive sequence, the alternating sequence including a plurality of acidic amino acids and a plurality of basic amino acids, being alternately bound to each other one by one; and a second step of applying, to the electrode layer having the cells adhered thereonto, an electrical potential inducing reductive desorption of the oligopeptide, to thereby detach the cells from the electrode layer.
摘要:
A sheet post-processing apparatus includes a loading section for loading a sheet, and a punching device for punching the sheet loaded in the loading section at a punching position. A sheet bundle forming device is provided for forming a sheet bundle of the sheet punched by the punching device and a sheet not punched by the punching device. A binding device drives a staple into the sheet bundle at the punching position as a bound position to bind the sheet bundle.
摘要:
A stapler apparatus of the type using continuous belt-formed staples 200 includes a staple feed claw 25 for advancing the staples 200 sequentially to a stapling position 103, and a drive means 50 for driving the staples 200 drawn to the stapling position 103. A clincher means 40 bends the ends of the staples 200 driven into the sheets and pivots a staple feed pawl 25 interlocked to the staple bending operation of the clincher means 40 for sequentially feeding the staples 200 to the stapling position 103. This construction lightens the load on the drive means to staple sheet stacks, facilitates smooth driving operation of the drive means, and reduces the occurrences of trouble.
摘要:
A stapler apparatus includes right and left side frames each opposing the other, a reciprocally moving staple driving member arranged between the side frames, a cam member interlocked to the staple driving member to reciprocally move the staple driving member and a drive motor interlocked to the cam member. The drive motor, the cam member and the staple driving member are arranged in order between the left and right frames.
摘要:
A stapler is provided that does not waste any staples when a staple cartridge or sheet of staples is replaced. The stapler includes a sheet of staples, a mounting unit equipped with a cartridge for housing the sheet of staples and a driver mechanism that draws out the sheet of staples from the cartridge. The mounting unit has a reverse motion stopping mechanism that prevents the sheet of staples from moving back into the cartridge. The reverse motion stopping mechanism makes contact with the sheet of staples when the mounting unit is installed and the reverse motion stopping mechanism releases contact with the sheet of staples when the mounting unit is removed.
摘要:
A compact micro-manipulator with low energy consumption accurately and quickly positions a micro-material in a visual field of a microscope. A micro-manipulator operable to grip micro-material by bringing leading ends of the gripping fingers in close proximity includes an XY drive unit that drives a handling unit in X and Y directions, a drive unit that changes a positional direction of the handling unit in order to swing the gripping fingers around leading ends of the gripping fingers, and a Z drive unit that drives the handling unit in the Z direction.
摘要:
A compact micro-manipulator with low energy consumption accurately and quickly positions a micro-material in a visual field of a microscope. A micro-manipulator operable to grip micro-material by bringing leading ends of the gripping fingers in close proximity includes an XY drive unit that drives a handling unit in X and Y directions, a drive unit that changes a positional direction of the handling unit in order to swing the gripping fingers around leading ends of the gripping fingers, and a Z drive unit that drives the handling unit in the Z direction.
摘要:
A micro-manipulator has a handling mechanism for gripping micro-material with two gripping fingers. The handling mechanism has a fixed finger with an end effecter for touching the micro-material, a movable finger with an end effecter capable of rotating around a rocking shaft for touching the micro-material, and an actuator for rotating the movable finger. The actuator drive moves the movable finger so as to be capable of touching a leading end of the movable finger end effecter to a leading end of the fixed finger end effecter. The micro-manipulator can securely and quickly grip a micro-material in a microscope visual field.