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公开(公告)号：US4715054A
公开(公告)日：1987-12-22
申请号：US795776
申请日：1985-11-07
申请人： Yasuo Kato , Kunio Harada , Shigeo Kubota , Yoshio Watanabe , Seiichi Murayama
发明人： Yasuo Kato , Kunio Harada , Shigeo Kubota , Yoshio Watanabe , Seiichi Murayama
摘要： A plasma X-ray source comprises inner and outer cylindrical electrodes disposed coaxially and with a certain distance with respect to each other, an electrical insulator disposed between end portions of the inner and outer cylindrical electrodes, and a discharge vessel disposed to envelop the inner and outer cylindrical electrodes. A pulse voltage is applied between the inner and outer cylindrical electrodes to produce plasma in the discharge vessel. An electrically conductive spherical shield is disposed to envelop a space where the plasma is pinched, and the spherical shield is maintained at a potential equal to that applied to the outer cylindrical electrode.
摘要翻译： 等离子体X射线源包括同轴并且相对于彼此具有一定距离的内部和外部圆柱形电极，设置在内部和外部圆柱形电极的端部之间的电绝缘体，以及放电容器，其设置成包围内部和外部 外圆柱形电极。 在内圆柱形电极和外圆柱形电极之间施加脉冲电压，以在放电容器中产生等离子体。 设置导电球形屏蔽以包围等离子体被夹持的空间，并且球形屏蔽保持在等于施加到外圆柱形电极的电位的电位。
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公开(公告)号：US4697121A
公开(公告)日：1987-09-29
申请号：US904398
申请日：1986-09-08
申请人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
发明人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
CPC分类号： H01J61/72 , H01J61/545
摘要： A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.
摘要翻译： 一种低压汞蒸汽放电灯，其中在外灯泡中设置有稀有气体和汞，该外灯泡中还包含多个弯曲的内管，每个具有一端的开口和另一端的电极。 在外灯泡的开口之间提供启动探针。 操作电路或起动器连接到电极。 此外，启动探针电路连接到起动探针，以在点火时对起动探针施加高电压。
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公开(公告)号：US4611148A
公开(公告)日：1986-09-09
申请号：US577611
申请日：1984-02-06
申请人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
发明人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
CPC分类号： H01J61/72 , H01J61/545
摘要： A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.
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公开(公告)号：US4841556A
公开(公告)日：1989-06-20
申请号：US12992
申请日：1987-02-10
申请人： Yasuo Kato , Isao Ochiai , Yoshio Watanabe , Seiichi Murayama
发明人： Yasuo Kato , Isao Ochiai , Yoshio Watanabe , Seiichi Murayama
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30 , H05G2/00
CPC分类号： H05G2/003
摘要： A plasma X-ray source in which a discharge tube containing a pair of coaxial cylindrical electrodes is filled with a gas, a high voltage pulse from a charged capacitor is applied between the cylindrical electrodes to convert the gas into a plasma, the plasma is focused on a position near the end of the inner one of the cylindrical electrodes to generate X-rays, and the X-rays thus generated are emitted to the outside of the discharge tube through a window provided thereon, is disclosed. In the above X-ray source, the high voltage pulse is applied between the cylindrical electrodes so that the inner cylindrical electrode is at a negative potential with respect to the outer cylindrical electrode.
摘要翻译： 一种等离子体X射线源，其中包含一对同轴圆柱形电极的放电管填充有气体，在圆柱形电极之间施加来自带电电容器的高电压脉冲，将气体转换成等离子体，等离子体聚焦 在靠近内部一个圆柱形电极的端部的位置处产生X射线，并且由此产生的X射线通过设置在其上的窗口发射到放电管的外部。 在上述X射线源中，在圆柱形电极之间施加高电压脉冲，使得内部圆柱形电极相对于外部圆柱形电极处于负电位。
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公开(公告)号：US4627086A
公开(公告)日：1986-12-02
申请号：US772692
申请日：1985-09-05
申请人： Yasuo Kato , Yoshio Watanabe , Seiichi Murayama
发明人： Yasuo Kato , Yoshio Watanabe , Seiichi Murayama
摘要： A plasma X-ray source is operable, like the plasma focus type source, to generate impulse discharge through a gas filled in a discharge tube. A relatively small amount of the gas is continuously supplied to and evacuated from the discharge tube in accordance with an occurrence frequency of discharge, without operating evacuation and filling of the gas at each cycle of discharge, under the regulation to make constant the pressure within the discharge tube, thereby eliminating the time for exchange of gas contaminated by discharge, reducing the amount of gas used, and improving reproducibility of discharge.
摘要翻译： 等离子体X射线源像等离子体聚焦型源一样可以通过填充在放电管中的气体产生脉冲放电。 根据排放的发生频率，相对少量的气体从放电管被连续地供给并排出，而在每次排放循环期间不进行排气和填充气体的操作，以使排气管内的压力恒定 放电管，从而消除了排放污染的气体的交换时间，减少了使用的气体量，提高了排放的再现性。
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公开(公告)号：US4587453A
公开(公告)日：1986-05-06
申请号：US516913
申请日：1983-07-25
申请人： Tetsuo Ono , Yoshio Watanabe , Hiromitsu Matsuno , Yasuo Kato , Seiichi Murayama , Shigeo Mikoshiba
发明人： Tetsuo Ono , Yoshio Watanabe , Hiromitsu Matsuno , Yasuo Kato , Seiichi Murayama , Shigeo Mikoshiba
摘要： A low-pressure mercury vapor discharge lamp comprising an envelope forming a gas-tight closed space and a pair of inner tubes provided in the closed space and having an end thereof sealed at the first end of the outer envelope, the other end thereof being opened into the closed space, and electrodes provided at the sealed end sides in the inner tubes. The temperature of the coldest spot of the envelope is in a range between 45.degree. C. and 65.degree. C. at an ambient temperature of 25.degree. C.
摘要翻译： 一种低压汞蒸汽放电灯，包括形成气密封闭空间的封套和设置在封闭空间中的一对内管，其一端在外封套的第一端密封，其另一端开口 并且设置在内管的密封端侧的电极。 在25℃的环境温度下，封套的最冷点的温度在45℃至65℃的范围内。
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7.发明授权Charged particle beam writing apparatus and charged particle beam writing method 有权带电粒子束写入装置和带电粒子束写入方法公开(公告)号：US09063440B2
公开(公告)日：2015-06-23
申请号：US13370835
申请日：2012-02-10
申请人： Yasuo Kato
发明人： Yasuo Kato
IPC分类号： G21K5/00 , G03F1/78 , H01J37/302 , H01J37/317 , B82Y10/00 , B82Y40/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , G03F1/78 , H01J37/3026 , H01J2237/31764 , H01J2237/31771 , H01J2237/31776 , H01J2237/31796
摘要： A charged particle beam writing apparatus includes a storage unit to store each pattern data of plural figure patterns arranged in each of plural small regions made by virtually dividing a writing region of a target workpiece to be written on which resist being coated. The charged particle beam writing apparatus further including an assignment unit to assign each pattern data of each figure pattern to be arranged in each of the plural small regions concerned, and a writing unit to write, for each of plural groups, each figure pattern in each of the plural small regions concerned by using a charged particle beam.
摘要翻译： 带电粒子束写入装置包括：存储单元，用于存储多个图形图案中的每个图案数据，所述多个图形图案布置在通过实际上划分要涂覆的抗蚀剂的目标工件的写入区域而制成的多个小区域中。 所述带电粒子束写入装置还包括分配单元，用于分配要布置在所述多个小区域中的每一个中的每个图形模式的每个图案数据;以及写入单元，用于为每个所述多个组中的每一个写入每个图形模式 的多个小区域使用带电粒子束。
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公开(公告)号：US20100062709A1
公开(公告)日：2010-03-11
申请号：US11883363
申请日：2006-01-25
申请人： Yasuo Kato
发明人： Yasuo Kato
CPC分类号： H04B13/005 , G01R29/0878 , H01Q1/2216 , H04B5/0018 , H04B5/0043 , H04B5/0087 , H04B5/02 , H04B17/23 , H04B17/318
摘要： Stable receiving action is achieved with a receiver of simpler configuration.When a human hand is held over the panel unit 201, the electric field in the vicinity of the human body is coupled to the sensor electrode 2122 of the coil sensor 212 from the receiving electrode 211 of the panel unit 201, and alternate current is generated at the sensor electrode 2122. This alternate current then induces a magnetic flux inside the central opening of the coil 2121 in proportion to the strength of the electric field in the vicinity of the human body. Depending on the changes in this magnetic flux, electric current passes through the coil 2121. The electric current passing through the coil 2121 is converted by the electric current detecting circuit 2124 of the coil sensor 212 to voltage signals and transmitted as received signals to the demodulator 22. As a result, the received signals corresponding to the electric field in the vicinity of the human body, namely the transmission signals applied by the transmitter 1 to the human body, are obtained.
摘要翻译： 采用简单配置的接收机实现稳定的接收动作。 当人的手被夹持在面板单元201上时，人体附近的电场从面板单元201的接收电极211耦合到线圈传感器212的传感器电极2122，并且产生交流电流 传感器电极2122.然后，该交流电流在线圈2121的中心开口内与人体附近的电场强度成比例地引起磁通。 取决于该磁通量的变化，电流通过线圈2121.通过线圈2121的电流被线圈传感器212的电流检测电路2124转换成电压信号并作为接收信号发送到解调器 结果，获得对应于人体附近的电场的接收信号，即由发射机1施加到人体的传输信号。
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公开(公告)号：US20090070001A1
公开(公告)日：2009-03-12
申请号：US12202474
申请日：2008-09-02
申请人： Shinsuke Takakura , Yasuo Kato , Masao Kano , Yuusaku Nishimura
发明人： Shinsuke Takakura , Yasuo Kato , Masao Kano , Yuusaku Nishimura
IPC分类号： F02D45/00
CPC分类号： F02D41/0032 , B60K6/48 , F02D2250/41 , F02N11/0829 , Y02T10/48 , Y02T10/6221
摘要： A fuel vapor treatment apparatus includes: a detection passage provided with a restrictor therein; a pump generating a gas-flow in the detection passage; and a differential pressure sensor detecting a pressure loss at the restrictor. A fuel vapor concentration is computed based on a pressure loss when air passes through the detection passage and a pressure loss when an air-fuel mixture passes through the detection passage. When the computed fuel vapor concentration reaches a specified value, an internal combustion engine is started and the fuel vapor treatment apparatus starts to supply the fuel vapor adsorbed by the canister to the internal combustion engine.
摘要翻译： 一种燃料蒸气处理设备，包括：在其中设置有限流器的检测通道; 在检测通道中产生气流的泵; 以及检测限流器的压力损失的差压传感器。 基于空气通过检测通道时的压力损失和空气 - 燃料混合物通过检测通道时的压力损失来计算燃料蒸气浓度。 当计算出的燃料蒸气浓度达到规定值时，起动内燃机，燃料蒸气处理装置开始向罐内供给由罐吸附的燃料蒸气。
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公开(公告)号：US07344246B2
公开(公告)日：2008-03-18
申请号：US10862462
申请日：2004-06-08
申请人： Toru Noda , Kazuhiko Onuma , Yasufumi Fukuma , Koji Nishio , Hidetaka Aeba , Yoshio Okazaki , Masaru Sato , Yasuo Kato
发明人： Toru Noda , Kazuhiko Onuma , Yasufumi Fukuma , Koji Nishio , Hidetaka Aeba , Yoshio Okazaki , Masaru Sato , Yasuo Kato
CPC分类号： A61B3/132
摘要： An observation apparatus is provided. An apex angle of a contact prism is inputted by operating an apex angle setting knob of a control panel. A fining angle of the contact prism is inputted by operating a fitting angle setting knob. A control unit determines the amount of correction for astigmatism of a left observation optical system and the amount of correction for astigmatism of a right observation optical system based on a recognized observation magnification and the inputted apex angle. An axial angle for the astigmatism of the left observation optical system and an axial angle for the astigmatism of the right observation optical system are determined based on the inputted fitting angle. Variable cross cylinder lens rotating drive units are controlled to rotate cylinder lenses of each of the right and left observation optical systems, thereby obtaining the determined axial angle and the determined amount of correction.
摘要翻译： 提供观察装置。 通过操作控制面板的顶角设置旋钮输入接触棱镜的顶角。 通过操作配合角度设置旋钮输入接触棱镜的澄清角度。 控制单元基于识别的观察倍率和输入的顶角来确定左观察光学系统的像散的校正量和右观察光学系统的散光的校正量。 基于输入的拟合角度来确定左观察光学系统的像散的轴向角度和右侧观察光学系统的像散的轴向角度。 控制可变十字圆柱透镜旋转驱动单元以旋转左右观察光学系统中的每一个的圆柱透镜，从而获得确定的轴向角度和确定的校正量。
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