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公开(公告)号：US4611148A
公开(公告)日：1986-09-09
申请号：US577611
申请日：1984-02-06
申请人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
发明人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
CPC分类号： H01J61/72 , H01J61/545
摘要： A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.
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公开(公告)号：US4697121A
公开(公告)日：1987-09-29
申请号：US904398
申请日：1986-09-08
申请人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
发明人： Yasuo Kato , Tetsuo Ono , Yoshio Watanabe , Seiichi Murayama , Shigeo Mikoshiba , Hiromitsu Matsuno
CPC分类号： H01J61/72 , H01J61/545
摘要： A low-pressure mercury vapor discharge lamp in which a rare gas and mercury are provided in an outer bulb, which in turn contains therein a plurality of bent inner tubes, each having an opening at an end and an electrode at the other end thereof. A starting probe is provided between the openings in the outer bulb. An operating circuit or starter is connected to the electrodes. Further, a starting probe circuit is connected to the starting probe to apply a high voltage to the starting probe at the time of ignition.
摘要翻译： 一种低压汞蒸汽放电灯，其中在外灯泡中设置有稀有气体和汞，该外灯泡中还包含多个弯曲的内管，每个具有一端的开口和另一端的电极。 在外灯泡的开口之间提供启动探针。 操作电路或起动器连接到电极。 此外，启动探针电路连接到起动探针，以在点火时对起动探针施加高电压。
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公开(公告)号：US4587453A
公开(公告)日：1986-05-06
申请号：US516913
申请日：1983-07-25
申请人： Tetsuo Ono , Yoshio Watanabe , Hiromitsu Matsuno , Yasuo Kato , Seiichi Murayama , Shigeo Mikoshiba
发明人： Tetsuo Ono , Yoshio Watanabe , Hiromitsu Matsuno , Yasuo Kato , Seiichi Murayama , Shigeo Mikoshiba
摘要： A low-pressure mercury vapor discharge lamp comprising an envelope forming a gas-tight closed space and a pair of inner tubes provided in the closed space and having an end thereof sealed at the first end of the outer envelope, the other end thereof being opened into the closed space, and electrodes provided at the sealed end sides in the inner tubes. The temperature of the coldest spot of the envelope is in a range between 45.degree. C. and 65.degree. C. at an ambient temperature of 25.degree. C.
摘要翻译： 一种低压汞蒸汽放电灯，包括形成气密封闭空间的封套和设置在封闭空间中的一对内管，其一端在外封套的第一端密封，其另一端开口 并且设置在内管的密封端侧的电极。 在25℃的环境温度下，封套的最冷点的温度在45℃至65℃的范围内。
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公开(公告)号：US4642512A
公开(公告)日：1987-02-10
申请号：US667135
申请日：1984-11-01
申请人： Hiromitsu Matsuno , Seiichi Murayama , Tetsuo Ono
发明人： Hiromitsu Matsuno , Seiichi Murayama , Tetsuo Ono
CPC分类号： H01J61/72
摘要： A low-pressure mercury vapor discharge lamp comprising a glass tube in which a metal oxide or phosphate layer and then a phosphor layer are formed on its inner surface, in which during operation of the lamp, the lowest temperature of the wall of the glass tube along its discharge path is kept at 80.degree. C. or above.
摘要翻译： 一种低压汞蒸汽放电灯，包括玻璃管，其中在其内表面上形成有金属氧化物或磷酸盐层，然后形成荧光体层，其中在灯的操作期间，玻璃管的壁的最低温度 沿其排放路径保持在80℃或更高。
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公开(公告)号：US5034655A
公开(公告)日：1991-07-23
申请号：US397856
申请日：1989-08-24
申请人： Seiichi Murayama , Hiromitsu Matsuno , Tetsuo Ono , Yasusuke Seki , Atsuo Koyama , Churyo Kodama , Tsuyoshi Kobayashi
发明人： Seiichi Murayama , Hiromitsu Matsuno , Tetsuo Ono , Yasusuke Seki , Atsuo Koyama , Churyo Kodama , Tsuyoshi Kobayashi
CPC分类号： H01J61/42 , H01J61/322
摘要： A fluorescent lamp has at least a pair of electrodes, at least two circular discharge tubes connected to said electrodes and enclosing rare gas and mercury therein, and a phosphor coating provided on an inside wall of each of said discharge tubes, the two circular discharge tubes being arranged coaxially circularly on one and the same plane, the diameter of each of the discharge tubes being selected to have a value within a range of from 5 mm to 25 mm both inclusive, the luminance on surface of each of the discharge tubes being selected to have a value within a range of from 2.times.10.sup.4 Cd/m.sup.2 to 6.times.10.sup.4 Cd/m.sup.2.
摘要翻译： 荧光灯具有至少一对电极，至少两个连接到所述电极的圆形放电管并且包围其中的稀有气体和汞，以及设置在每个所述放电管的内壁上的荧光体涂层，所述两个圆形放电管 在同一平面上圆周同轴地布置，每个放电管的直径被选择为具有在5mm至25mm的范围内的值，其中，每个放电管的表面上的亮度被选择 具有在2×10 4 Cd / m 2至6×10 4 Cd / m 2范围内的值。
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公开(公告)号：US4803401A
公开(公告)日：1989-02-07
申请号：US886238
申请日：1986-07-16
申请人： Hiromitsu Matsuno , Tetsuo Ono , Seiichi Murayama
发明人： Hiromitsu Matsuno , Tetsuo Ono , Seiichi Murayama
摘要： Disclosed is a compact fluorescent lamp which comprises an airtight outer bulb filled with a rare gas and mercury; inner tube means provided within the outer bulb, said means having opening to a space of the inside of the outer bulb, and a coating formed onto at least one of an inner surface of said outer bulb and an outer surface of said inner tube means, said coating being so transparent as substantially not to scater visible rays and which consists of at least one material of an oxide and a phosphate.A compact fluorescent lamp mostly in the electric bulb shape of the present invention has been remarkably improved in the so-called lumen output maintenance without lowering of the initial lumen output.
摘要翻译： 公开了一种紧凑型荧光灯，其包括填充有稀有气体和汞的气密外灯泡; 设置在外灯泡内的内管装置，所述装置具有通向外灯泡内部的空间的开口，以及形成在所述外灯泡的内表面和所述内管装置的外表面中的至少一个上的涂层， 所述涂层是如此透明的，基本上不能扫射可见光线并且由至少一种氧化物和磷酸盐材料组成。 本发明的电灯泡形状的紧凑型荧光灯在所谓的流明输出维护中得到显着改善，而不降低初始流明输出。
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公开(公告)号：US4879493A
公开(公告)日：1989-11-07
申请号：US126789
申请日：1987-11-30
IPC分类号： H01J61/067 , H01J61/16 , H01J61/72 , H01J61/76
CPC分类号： H01J61/72
摘要： Disclosed is a low-pressure discharge lamp comprising a discharge vessel defining an airtight space therein, at least one pair of electrodes disposed in the discharge vessel, and discharge gases enclosed in the discharge vessel, one of the electrodes which acts as an anode being located in a zone of negative glow.
摘要翻译： 公开了一种低压放电灯，包括在其中限定气密空间的放电室，设置在放电容器中的至少一对电极，以及包围在放电容器中的放电气体，位于阳极中的一个电极 在一个负面发光的区域。
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公开(公告)号：US4933602A
公开(公告)日：1990-06-12
申请号：US155507
申请日：1988-02-12
申请人： Tetsuo Ono , Kenji Sekine , Seiichi Murayama
发明人： Tetsuo Ono , Kenji Sekine , Seiichi Murayama
IPC分类号： H01J65/04
CPC分类号： H01J65/04
摘要： A light source apparatus for irradiating a large area with high intensity of light comprises a microwave cavity having a section of a flat shape and a plurality of electrodeless lamps disposed within the cavity in juxtaposition with one another in a flat array.
摘要翻译： 用于以高强度的光照射大面积的光源装置包括具有扁平形状的一部分的微波空腔和布置在空腔内的多个无电极灯，其以平面阵列彼此并置。
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公开(公告)号：US09305803B2
公开(公告)日：2016-04-05
申请号：US13185598
申请日：2011-07-19
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01L21/311 , H01L21/67 , H01J37/32 , H01L21/66 , H01L21/3065 , H01L21/762
CPC分类号： H01L21/67069 , H01J37/32146 , H01J37/32192 , H01J37/32935 , H01J2237/3348 , H01L21/3065 , H01L21/31116 , H01L21/76232 , H01L22/10
摘要： Provided are a plasma processing apparatus with a radio-frequency power supply supplying temporally modulated intermittent radio-frequency power which can be controlled with high precision in a wide repetition frequency band, and a plasma processing method using the plasma processing apparatus.A plasma processing apparatus includes: a vacuum vessel; a plasma generating section plasma in the vacuum vessel; a stage installed in the vacuum vessel and mounted with a sample; and a radio-frequency power supply applying temporally modulated intermittent radio-frequency power to the stage, wherein the radio-frequency power supply has two or more different frequency bands and temporally modulates the radio-frequency power by a repetition frequency which has the same range of analog signals used in each of the frequency band.
摘要翻译： 提供一种等离子体处理装置，其具有提供可在宽重复频带中高精度地控制的时间调制的间歇射频功率的射频电源，以及使用等离子体处理装置的等离子体处理方法。 一种等离子体处理装置，包括：真空容器; 真空容器中的等离子体产生部等离子体; 安装在真空容器中并安装有样品的阶段; 以及向所述载波台施加临时调制的间歇射频功率的射频电源，其中，所述射频电源具有两个以上的不同频带，并且通过具有相同范围的重复频率对所述射频功率进行时间调制 在每个频带中使用的模拟信号。
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公开(公告)号：US08580131B2
公开(公告)日：2013-11-12
申请号：US13363488
申请日：2012-02-01
CPC分类号： H01L21/31116
摘要： It is an object of the present invention to provide a plasma etching method that can improve a selection ratio of a film to be etched to a film different from the film to be etched than that in the related art. The present invention provides a plasma etching method for selectively etching a film to be etched with respect to another film different from the film to be etched, the plasma etching method including etching, using gas that can generate a deposited film containing components same as components of the another film different from the film to be etched, the film on which generation of the deposited film is suppressed.
摘要翻译： 本发明的目的是提供一种等离子体蚀刻方法，其可以提高与要蚀刻的膜相比不同于待蚀刻的膜的膜的选择比，而不是现有技术。 本发明提供了一种等离子体蚀刻方法，用于相对于不同于待蚀刻的膜的另一膜选择性地蚀刻待蚀刻的膜，该等离子体蚀刻方法包括蚀刻，使用可产生含有与 与被蚀刻的膜不同的另一膜，抑制了沉积膜的一代的膜。
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